US6042712A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for controlling plating over a face of a substrate
Assignee: FormFactor Inc
•
Filing: 1998-05-21
•
Granted: 2000-03-28
•
Expires: 2018-05-21
Abstract
Abstract According to one aspect of the invention, a plating system is provided which includes a tank for containing a plating solution, a substrate holder, and a temperature control device. The substrate holder is configured to support a substrate in position so that at least a first face of the substrate is exposed to the plating solution in the tank. The temperature control device provides selective control of temperature in various regions of the substrate during plating so as to control plating over the first face of the substrate.
Inventors
- 👤 Gaetan L. Mathieu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:37
CPC Classifications
B; B23; B23K; B23K20/00; B23K20/002; B23K20/004; C; C23; C23C; C23C18/00; C23C18/16; C23C18/1601; C23C18/1619; C23C18/1633; C23C18/1675; C23C18/1678; C23C18/168; C25; C25D; C25D17/00; C25D17/001; C25D21/00; C25D21/02; C25D7/00; C25D7/12; H; H05; H05K; H05K3/00; H05K3/22; H05K3/24; H05K3/30; H05K3/306; H05K3/308; H05K3/32; H05K3/325; H05K3/326; H05K3/34; H05K3/341; H05K3/3421; H05K3/3426; H05K3/40; H05K3/4007; H05K3/4015; H05K7/00; H05K7/02; H05K7/10; H05K7/1053; H05K7/1061; H05K7/1069; H10; H10P; H10P74/00; H10P74/23; H10W; H10W70/00; H10W70/099; H10W72/00; H10W72/071; H10W72/075; H10W72/20; H10W74/00; H10W74/01; H10W74/012; H10W74/10; H10W74/15; H10W90/00; H10W90/701; B23K2101/00; B23K2101/36; B23K2101/40; C25D21/12; C25D5/00; C25D5/08; C25D5/22; G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/06711; G01R3/00; G01R31/00; G01R31/28; G01R31/2851; G01R31/2884; H01; H01R; H01R12/00; H01R12/50; H01R12/51; H01R12/52; H05K1/00; H05K1/02; H05K1/14; H05K1/141; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0388; H05K2201/0397; H05K2201/06; H05K2201/068; H05K2201/10; H05K2201/10227; H05K2201/1031; H05K2201/10378; H05K2201/10613; H05K2201/10621; H05K2201/10719; H05K2201/10734; H05K2201/10742; H05K2201/1075; H05K2201/10878; H05K2201/10886; H05K2201/10909; H05K2201/10946; H05K3/10; H05K3/20; H05K3/4092; H10W70/60; H10W70/67; H10W70/68; H10W70/682; H10W72/01; H10W72/012; H10W72/01221; H10W72/01225; H10W72/015; H10W72/01551; H10W72/0711; H10W72/07141; H10W72/072; H10W72/07231; H10W72/07236; H10W72/07502; H10W72/07511; H10W72/07531; H10W72/07532; H10W72/07551; H10W72/07554; H10W72/50; H10W72/521; H10W72/522; H10W72/541; H10W72/547; H10W72/551; H10W72/552; H10W72/5522; H10W72/555; H10W72/851; H10W72/853; H10W72/856; H10W90/20; H10W90/22; H10W90/721; H10W90/722; H10W90/751; H10W90/754; Y; Y02; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 52
Claim 1
Independent Claim
87 words
A plating system which includes: a tank for containing a plating solution; a substrate holder configured to support a substrate in position so that at least a first face of the substrate is exposed to the plating solution in the tank; and a temperature control device coupled to provide temperature control over the substrate and to create a temperature gradient over the first face of the substrate so as to control plating over the substrate and plate substantially uniformly over a substantial portion of the first face.
Claim 2
Dependent Claim
87 words
A plating system which includes: a tank for containing a plating solution; a substrate holder configured to support a substrate in position so that at least a first face of the substrate is exposed to the plating solution in the tank; and a temperature control device coupled to provide temperature control over the substrate and to create a temperature gradient over the first face of the substrate so as to control plating over the substrate and plate substantially uniformly over a substantial portion of the first face.
Claim 3
Dependent Claim
26 words
The plating system of claim 1 wherein the temperature control device creates the temperature gradient over a second face of the substrate opposing the first face.
Claim 4
Dependent Claim
53 words
The plating system of claim 2 wherein the temperature control device includes at least first and second thermal bladders locatable on the second face, each bladder having an inlet opening for allowing a temperature control medium into the bladder and an outlet opening for allowing the temperature control medium out of the bladder.
Claim 5
Dependent Claim
23 words
The plating system of claim 3 which includes a device for circulating a heat transfer medium through at least one of the bladders.
Claim 6
Dependent Claim
24 words
The plating system of claim 4 which includes a heat exchanger for controlling a temperature of the heat transfer medium flowing through the bladder.
Claim 7
Dependent Claim
16 words
The plating system of claim 3 which includes an insulating member between two of the bladders.
Claim 8
Dependent Claim
46 words
The plating system of claim 1 which includes an inlet port for allowing plating solution into the tank, a nozzle directing flow of the plating solution onto the first face of the substrate, and an outlet port for allowing the plating solution out of the tank.
Claim 9
Dependent Claim
21 words
The plating system of claim 7 which includes a plurality of outlets for allowing the plating solution out of the tank.
Claim 10
Independent Claim
50 words
A method of plating on a substrate, the method including: exposing at least a first face of the substrate to a plating solution; and creating a temperature gradient over the substrate, the temperature gradient being created so as to plate substantially uniformly over a substantial portion of the first face.
Claim 11
Independent Claim
50 words
A method of plating on a substrate, the method including: exposing at least a first face of the substrate to a plating solution; and creating a temperature gradient over the substrate, the temperature gradient being created so as to plate substantially uniformly over a substantial portion of the first face.
Claim 12
Dependent Claim
21 words
The method of claim 9 wherein an area of a second face of the substrate opposing the first face is cooled.
Claim 13
Dependent Claim
21 words
The method of claim 9 wherein an area of a second face of the substrate opposing the first face is heated.
Claim 14
Dependent Claim
55 words
The method of claim 9 wherein a temperature of a first area of a second face of the substrate opposing the first face is maintained at approximately a first level, and a temperature of a second area of the second face is maintained at approximately a second level which is different to the first level.
Claim 15
Dependent Claim
17 words
The method of claim 12 wherein the first area is cooled and the second area is heated.
Claim 16
Dependent Claim
33 words
The method of claim 9 which includes directing flow of the plating solution onto a first region of the substrate from where the plating solution flows over a second region of the substrate.
Claim 17
Dependent Claim
20 words
The method of claim 14 wherein the plating solution flows faster over the first region than over the second region.
Claim 18
Dependent Claim
25 words
The method of claim 15 wherein the temperature gradient is created such that the first region is at a lower temperature than the second region.
Claim 19
Dependent Claim
48 words
The method of claim 9 wherein the temperature gradient is created by at least first and second thermal bladders, each bladder having an inlet opening through which a temperature control medium enters the bladder and an outlet opening through which the temperature control medium exits from the bladder.
Claim 20
Dependent Claim
15 words
The method of claim 17 which includes circulating the temperature control medium through the bladder.
Claim 21
Dependent Claim
15 words
The method of claim 18 which includes controlling the temperature of the temperature control medium.
Claim 22
Dependent Claim
18 words
The method of claim 18 wherein the plating solution is substantially the same as the temperature control medium.
Claim 23
Independent Claim
49 words
A method of rigidifying a plurality of elongate components, each elongate component having an end which is connected to a first face of a substrate, the method including the steps of: plating a layer on each elongate component; and creating a temperature differential between groups of the elongate components.
Claim 24
Independent Claim
49 words
A method of rigidifying a plurality of elongate components, each elongate component having an end which is connected to a first face of a substrate, the method including the steps of: plating a layer on each elongate component; and creating a temperature differential between groups of the elongate components.
Claim 25
Dependent Claim
19 words
The method of claim 21 wherein the temperature differential is created by creating a temperature gradient over the substrate.
Claim 26
Dependent Claim
26 words
The method of claim 22 wherein the temperature differential is created by heating an area on a second face of the substrate opposing the first face.
Claim 27
Dependent Claim
37 words
The method of claim 23 wherein heating of the second face of the substrate causes more plating on an elongate component near the first face of the substrate than distant from the first face of the substrate.
Claim 28
Dependent Claim
59 words
The method of claim 22 wherein the temperature gradient is created by maintaining a temperature of a first area on a second face of the substrate opposing the first face at approximately a first level, and maintaining a temperature of a second area on the second face at approximately a second level which is different to the first level.
Claim 29
Dependent Claim
17 words
The method of claim 25 wherein the first area is cooled and the second area is heated.
Claim 30
Dependent Claim
48 words
The method of claim 22 wherein the temperature gradient is created by at least first and second thermal bladders, each bladder having an inlet opening through which a temperature control medium enters the bladder and an outlet opening through which the temperature control medium exits from the bladder.
Claim 31
Dependent Claim
18 words
The method of claim 27 which includes the step of circulating the temperature control medium through the bladder.
Claim 32
Dependent Claim
18 words
The method of claim 28 which includes the step of controlling the temperature of the temperature control medium.
Claim 33
Dependent Claim
18 words
The method of claim 28 wherein the plating solution is substantially the same as the temperature control medium.
Claim 34
Dependent Claim
42 words
The method of claim 21 which includes the step of directing a plating solution onto a first region of the first face of the substrate, from where the plating solution flows over a second region of the first face of the substrate.
Claim 35
Dependent Claim
73 words
The method of claim 21 wherein the temperature differential is created by creating a temperature gradient over a second face of the substrate opposing the first face of the substrate, the temperature gradient being created such that a first area of the second face, opposing the first region of the first face, is at a lower temperature than a second area of the second face opposing the second region of the first face.
Claim 36
Dependent Claim
125 words
A plating system which includes: a tank for containing a plating solution; a substrate holder configured to support a substrate in position so that at least a first face of the substrate is exposed to the plating solution in the tank; and at least first and second thermal bladders locatable on a second face of the substrate opposing the first face, each bladder having an inlet opening for allowing a temperature control medium into the bladder and an outlet opening for allowing the temperature control medium out of the bladder, the bladders being capable of providing temperature control over the substrate and creating a temperature gradient over the second face of the substrate thereby creating a temperature gradient over the first face of the substrate.
Claim 37
Dependent Claim
125 words
A plating system which includes: a tank for containing a plating solution; a substrate holder configured to support a substrate in position so that at least a first face of the substrate is exposed to the plating solution in the tank; and at least first and second thermal bladders locatable on a second face of the substrate opposing the first face, each bladder having an inlet opening for allowing a temperature control medium into the bladder and an outlet opening for allowing the temperature control medium out of the bladder, the bladders being capable of providing temperature control over the substrate and creating a temperature gradient over the second face of the substrate thereby creating a temperature gradient over the first face of the substrate.
Claim 38
Independent Claim
68 words
A method of plating on a substrate, the method including: exposing at least a first face of the substrate to a plating solution; and creating a temperature gradient over the substrate with at least first and second thermal bladders, each bladder having an inlet opening through which a temperature control medium enters the bladder and an outlet opening through which the temperature control medium exits from the bladder.
Claim 39
Independent Claim
68 words
A method of plating on a substrate, the method including: exposing at least a first face of the substrate to a plating solution; and creating a temperature gradient over the substrate with at least first and second thermal bladders, each bladder having an inlet opening through which a temperature control medium enters the bladder and an outlet opening through which the temperature control medium exits from the bladder.
Claim 40
Independent Claim
49 words
A method of forming a plurality of elongate resilient components, each elongate resilient component having an end which is connected to a first face of a substrate, the method comprising: plating a layer on each elongate resilient component; and creating a temperature differential between groups of the elongate components.
Claim 41
Independent Claim
49 words
A method of forming a plurality of elongate resilient components, each elongate resilient component having an end which is connected to a first face of a substrate, the method comprising: plating a layer on each elongate resilient component; and creating a temperature differential between groups of the elongate components.
Claim 42
Dependent Claim
26 words
The method of claim 35 wherein the temperature differential is created by heating an area on a second face of the substrate opposing the first face.
Claim 43
Dependent Claim
26 words
The method of claim 36 wherein the temperature differential is created by heating an area on a second face of the substrate opposing the first face.
Claim 44
Dependent Claim
38 words
The method of claim 37 wherein heating of the second face of the substrate causes more plating on an elongate resilient component near the first face of the substrate than distant from the first face of the substrate.
Claim 45
Dependent Claim
59 words
The method of claim 36 wherein the temperature gradient is created by maintaining a temperature of a first area on a second face of the substrate opposing the first face at approximately a first level, and maintaining a temperature of a second area on the second face at approximately a second level which is different to the first level.
Claim 46
Dependent Claim
17 words
The method of claim 39 wherein the first area is cooled and the second area is heated.
Claim 47
Dependent Claim
48 words
The method of claim 36 wherein the temperature gradient is created by at least first and second thermal bladders, each bladder having an inlet opening through which a temperature control medium enters the bladder and an outlet opening through which the temperature control medium exits from the bladder.
Claim 48
Dependent Claim
15 words
The method of claim 41 which includes circulating the temperature control medium through the bladder.
Claim 49
Dependent Claim
15 words
The method of claim 42 which includes controlling the temperature of the temperature control medium.
Claim 50
Dependent Claim
18 words
The method of claim 42 wherein the plating solution is substantially the same as the temperature control medium.
Claim 51
Dependent Claim
39 words
The method of claim 35 which includes directing a plating solution onto a first region of the first face of the substrate, from where the plating solution flows over a second region of the first face of the substrate.
Claim 52
Dependent Claim
73 words
The method of claim 35 wherein the temperature differential is created by creating a temperature gradient over a second face of the substrate opposing the first face of the substrate, the temperature gradient being created such that a first area of the second face, opposing the first region of the first face, is at a lower temperature than a second area of the second face opposing the second region of the first face.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-03-28 | 2003-09-27 | 2004-03-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-03-28 | 2007-09-27 | 2008-03-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-03-28 | 2011-09-27 | 2012-03-28 | $7700.00 | Window Closed / Lapsed |