US5127362A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Liquid coating device
Assignee: Tokyo Electron Ltd
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Filing: 1990-05-21
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Granted: 1992-07-07
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Expires: 2010-05-21
Abstract
Abstract A liquid coating device for coating a solution on a substrate to form a film includes a chuck for rotatably supporting the substrate, a nozzle for supplying the solution on the substrate, a heater provided in the nozzle for changing a temperature of the solution, a sensor for measuring a temperature of an ambient atmosphere of the substrate, and a controller for controlling the heater according the measured temperature. Thus, a solution having a temperature corresponding to the temperature of the ambient atmosphere is supplied from the nozzle to the substrate.
Inventors
- 👤 Haruo Iwatsu
- 👤 Yasuhiro Sakamoto
- 👤 Junro Iwakiri
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 17:41
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/162; B; B05; B05B; B05B1/00; B05B1/24; B05B12/00; B05B12/08; B05B12/12; B05C; B05C11/00; B05C11/02; B05C11/08
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
84 words
A liquid coating device for coating a solution on a substrate to form a film, comprising: means for supporting a substrate; means for supplying a solution on said substrate; means for rotating the supporting means with said substrate thereon; means for measuring a temperature and a humidity of an ambient atmosphere surrounding said substrate; means for comparing the measured temperature and humidity with reference data and controlling said rotating means in accordance with comparison data derived from said comparing means and said reference data.
Claim 2
Dependent Claim
84 words
A liquid coating device for coating a solution on a substrate to form a film, comprising: means for supporting a substrate; means for supplying a solution on said substrate; means for rotating the supporting means with said substrate thereon; means for measuring a temperature and a humidity of an ambient atmosphere surrounding said substrate; means for comparing the measured temperature and humidity with reference data and controlling said rotating means in accordance with comparison data derived from said comparing means and said reference data.
Claim 3
Dependent Claim
85 words
A liquid coating device for coating a solution on a substrate to form a film, comprising: means for rotatably supporting a substrate; means for supplying a solution on said substrate; means for changing a temperature of said substrate; means for measuring a temperature and a humidity of an ambient atmosphere surrounding said substrate; and means for comparing the measured temperature and humidity with reference data and controlling said temperature changing means in accordance with comparison data derived from said comparing means and said reference data.
Claim 4
Dependent Claim
85 words
A liquid coating device for coating a solution on a substrate to form a film, comprising: means for rotatably supporting a substrate; means for supplying a solution on said substrate; means for changing a temperature of said substrate; means for measuring a temperature and a humidity of an ambient atmosphere surrounding said substrate; and means for comparing the measured temperature and humidity with reference data and controlling said temperature changing means in accordance with comparison data derived from said comparing means and said reference data.
Claim 5
Dependent Claim
87 words
A liquid coating device for coating a solution on a substrate to form a film, comprising: means for rotatably supporting a substrate; means for supplying a solution on said substrate; means for heating the solution to be supplied to said substrate; means for measuring a temperature and a humidity of an ambient atmosphere surrounding said substrate; and means for comparign the measured temperature and humidity with reference data and controlling said heating means in accordance with comparison data derived from said comparing means and said reference data.
Claim 6
Dependent Claim
87 words
A liquid coating device for coating a solution on a substrate to form a film, comprising: means for rotatably supporting a substrate; means for supplying a solution on said substrate; means for heating the solution to be supplied to said substrate; means for measuring a temperature and a humidity of an ambient atmosphere surrounding said substrate; and means for comparign the measured temperature and humidity with reference data and controlling said heating means in accordance with comparison data derived from said comparing means and said reference data.
Claim 7
Dependent Claim
144 words
A photosensitive resist coating device for applying a resist solution on a semiconductor wafer to form a film coating, comprising: means for supporting a semiconductor wafer; means for rotating the supporting means with the wafer; a cup for enclosing the supporting means and the wafer mounted thereon; means for supplying drops of a predetermined amount of resist solution and applying said drops so that each drop is attached onto said wafer when the wafer is rotated by the rotating means; means for continuously measuring a temperature and a humidity of an ambient atmosphere in the cup during the supply of drops, and outputting a measurement signal; and means for continuously comparing the measurement signal with reference data and controlling the temperature of the solution and the temperature of said wafer in accordance with comparison data derived from said measurement signal and said reference data.
Claim 8
Dependent Claim
144 words
A photosensitive resist coating device for applying a resist solution on a semiconductor wafer to form a film coating, comprising: means for supporting a semiconductor wafer; means for rotating the supporting means with the wafer; a cup for enclosing the supporting means and the wafer mounted thereon; means for supplying drops of a predetermined amount of resist solution and applying said drops so that each drop is attached onto said wafer when the wafer is rotated by the rotating means; means for continuously measuring a temperature and a humidity of an ambient atmosphere in the cup during the supply of drops, and outputting a measurement signal; and means for continuously comparing the measurement signal with reference data and controlling the temperature of the solution and the temperature of said wafer in accordance with comparison data derived from said measurement signal and said reference data.
Claim 9
Dependent Claim
104 words
A photosensitive resist coating device for applying a resist solution on a semiconductor wafer to form a film coating, comprising: means for rotatably supporting a semiconductor wafer; means for supplying a resist solution and applying said solution on said wafer; means for heating the resist solution to be supplied to said wafer; a cup for enclosing the wafer; means for measuring a temperature and a humidity of an ambient atmosphere in the cup; and means for comparing the measured temperature and humidity with reference data and controlling said heating means in accordance with comparison data derived from said comparing means and said reference data.
Claim 10
Dependent Claim
104 words
A photosensitive resist coating device for applying a resist solution on a semiconductor wafer to form a film coating, comprising: means for rotatably supporting a semiconductor wafer; means for supplying a resist solution and applying said solution on said wafer; means for heating the resist solution to be supplied to said wafer; a cup for enclosing the wafer; means for measuring a temperature and a humidity of an ambient atmosphere in the cup; and means for comparing the measured temperature and humidity with reference data and controlling said heating means in accordance with comparison data derived from said comparing means and said reference data.
Claim 11
Dependent Claim
143 words
A photosensitive resist coating device for applying a resist solution on a semiconductor wafer to form a film coating, comprising: means for supporting a semiconductor wafer; means for rotating the supporting means with the wafer; a cup for enclosing the supporting means and the wafer mounted thereon; means for supplying drops of a predetermined amount of the resist solution and applying said drops so that each drop is attached onto said wafer when the wafer is rotated by the rotating means; measuring means for continuously measuring a temperature and a humidity of an ambient atmosphere in the cup during the supply of drops, and outputting a measurement signal; and means for continuously comapring the measurement signal with reference data and controlling the rotation and the temperature of said wafer in accordance with comparison data derived from said measurement signal and said reference data.
Claim 12
Dependent Claim
143 words
A photosensitive resist coating device for applying a resist solution on a semiconductor wafer to form a film coating, comprising: means for supporting a semiconductor wafer; means for rotating the supporting means with the wafer; a cup for enclosing the supporting means and the wafer mounted thereon; means for supplying drops of a predetermined amount of the resist solution and applying said drops so that each drop is attached onto said wafer when the wafer is rotated by the rotating means; measuring means for continuously measuring a temperature and a humidity of an ambient atmosphere in the cup during the supply of drops, and outputting a measurement signal; and means for continuously comapring the measurement signal with reference data and controlling the rotation and the temperature of said wafer in accordance with comparison data derived from said measurement signal and said reference data.
Claim 13
Dependent Claim
145 words
A photosensitive resist coating device for applying a resist solution on a semiconductor wafer to form a film coating, comprising: means for supporting a semiconductor wafer; means for rotating the supporting means with the wafer; a cup for enclosing the supporting means and the wafer mounted thereon; means for supplying drops of a predetermined amount of the resist solution and applying said drops so that each drop is attached onto said wafer when the wafer is rotated by the rotating means; means for continuously measuring a temperature and a humidity of an ambient atmosphere in the cup during the supply of drops, and outputting a measurement signal; and means for continuously comparing the measurement signal with reference data and controlling the temperature of the solution and the rotation of said wafer in accordance with comparison data derived from said measurement signal and said reference data.
Claim 14
Dependent Claim
145 words
A photosensitive resist coating device for applying a resist solution on a semiconductor wafer to form a film coating, comprising: means for supporting a semiconductor wafer; means for rotating the supporting means with the wafer; a cup for enclosing the supporting means and the wafer mounted thereon; means for supplying drops of a predetermined amount of the resist solution and applying said drops so that each drop is attached onto said wafer when the wafer is rotated by the rotating means; means for continuously measuring a temperature and a humidity of an ambient atmosphere in the cup during the supply of drops, and outputting a measurement signal; and means for continuously comparing the measurement signal with reference data and controlling the temperature of the solution and the rotation of said wafer in accordance with comparison data derived from said measurement signal and said reference data.
Claim 15
Dependent Claim
85 words
A device according to claim 7, wherein said supplying means includes a nozzle through which the drops are injected onto the wafer, a vessel for storing the resist solution, means for supplying a given amount of resist solution contained in the vessel to the nozzle, and a suck back valve for sucking the resist solution back to the nozzle after a predetermined amount of resist solution is injected from the nozzle to prevent the injection of unwanted drops of the resist solution onto the wafer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-07-07 | 1996-01-06 | 1996-07-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-07-07 | 2000-01-06 | 2000-07-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-07-07 | 2004-01-06 | 2004-07-07 | $7700.00 | Window Closed / Lapsed |