Projection exposure apparatus and device manufacturing method

Claim 2

A projection exposure apparatus, comprising: an illumination optical system for illuminating a mask with light from a light source; a projection optical system for projecting an image of a pattern of the mask being illuminated, said projection optical system having a pupil plane; a holding member for holding a substrate for receiving the image of the pattern; a light detector for receiving light from the light source, passed through said projection optical system; stop means, disposed adjacent to at least one of the pupil plane and a plane optically conjugate with the pupil plane, having a variable aperture for selectively passing light, wherein said light detector performs light detection a plurality of times while the aperture of said stop means is changed; determining means for determining a light intensity distribution upon the pupil plane based on outputs of said light detector corresponding to the plural light detections; and adjusting means for adjusting the light intensity distribution on the pupil plane as desired by adjusting a position of the light source based on the determined light intensity distribution.

Claim 3

An apparatus according to claim 1, wherein the determined light intensity distribution is displayed, and said adjusting means adjusts the position of the light source based on the displayed light intensity.

Claim 4

In an arrangement having a projection exposure apparatus that includes an illumination optical system for illuminating a mask with light from a light source; a projection optical system for projecting an image of a pattern of the mask being illuminated, the projection optical system having a pupil plane; a holding member for holding a substrate for receiving the image of the pattern; a light detector for receiving light from the light source, passed through said projection optical system; stop means, disposed adjacent to at least one of the pupil plane and a plane optically conjugate with the pupil plane, having a variable aperture for selectively passing light, wherein the light detector performs light detection a plurality of times while the aperture of the stop means is changed; determining means for determining a light intensity distribution upon the pupil plane based on outputs of the light detector corresponding to the plural light detections; and adjusting means for adjusting the light intensity distribution on the pupil plane as desired by adjusting a position of the light source based on the determined light intensity distribution, a device manufacturing method comprising the step of: transferring an image of a device pattern onto a substrate by use of the projection exposure apparatus.

Claim 5

In an arrangement having a projection exposure apparatus that includes an illumination optical system for illuminating a mask with light from a light source; a projection optical system for projecting an image of a pattern of the mask being illuminated, the projection optical system having a pupil plane; a holding member for holding a substrate for receiving the image of the pattern; a light detector for receiving light from the light source, passed through said projection optical system; stop means, disposed adjacent to at least one of the pupil plane and a plane optically conjugate with the pupil plane, having a variable aperture for selectively passing light, wherein the light detector performs light detection a plurality of times while the aperture of the stop means is changed; determining means for determining a light intensity distribution upon the pupil plane based on outputs of the light detector corresponding to the plural light detections; and adjusting means for adjusting the light intensity distribution on the pupil plane as desired by adjusting a position of the light source based on the determined light intensity distribution, a device manufacturing method comprising the step of: transferring an image of a device pattern onto a substrate by use of the projection exposure apparatus.

Claim 6

In an arrangement having a projection exposure apparatus that includes an illumination optical system for illuminating a mask with light from a light source; a projection optical system for projecting an image of a pattern of the mask being illuminated, the projection optical system having a pupil plane; a holding member for holding a substrate for receiving the image of the pattern; a light detector for receiving light from the light source, passed through said projection optical system; stop means, disposed adjacent to at least one of the pupil plane and a plane optically conjugate with the pupil plane, having a variable aperture for selectively passing light, wherein the light detector performs light detection a plurality of times while the aperture of the stop means is changed; determining means for determining a light intensity distribution upon the pupil plane based on outputs of the light detector corresponding to the plural light detections; and adjusting means for adjusting the light intensity distribution on the pupil plane as desired by adjusting a position of the light source based on the determined light intensity distribution, a device manufacturing method comprising the step of: transferring an image of a device pattern onto a substrate by use of the projection exposure apparatus including displaying the light intensity distribution upon the pupil plane and adjusting the position of the light source based on the displayed light intensity.

Claim 7

In an arrangement having a projection exposure apparatus that includes an illumination optical system for illuminating a mask with light from a light source; a projection optical system for projecting an image of a pattern of the mask being illuminated, the projection optical system having a pupil plane; a holding member for holding a substrate for receiving the image of the pattern; a light detector for receiving light from the light source, passed through said projection optical system; stop means, disposed adjacent to at least one of the pupil plane and a plane optically conjugate with the pupil plane, having a variable aperture for selectively passing light, wherein the light detector performs light detection a plurality of times while the aperture of the stop means is changed; determining means for determining a light intensity distribution upon the pupil plane based on outputs of the light detector corresponding to the plural light detections; and adjusting means for adjusting the light intensity distribution on the pupil plane as desired by adjusting a position of the light source based on the determined light intensity distribution, a device manufacturing method comprising the step of: transferring an image of a device pattern onto a substrate by use of the projection exposure apparatus including displaying the light intensity distribution upon the pupil plane and adjusting the position of the light source based on the displayed light intensity.