US6040892A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multiple image reticle for forming layers
Assignee: Micron Technology Inc
•
Filing: 1997-08-19
•
Granted: 2000-03-21
•
Expires: 2017-08-19
Abstract
Abstract A multi-image reticle used to form integrated circuitry a two dimensional array of spaced images arranged in a matrix of controllably spaced rows and columns of images on a single reticle. No rotation of the reticle is required to expose various levels of circuitry on a semiconductor wafer. The wafer is held in a stepper device, which controllably positions the wafer under the desired image of the mask for exposure of a resist on the wafer. A movable aperture controls exposure through a selected image or mask pattern on the reticle. By controlling which image is used, and accurately positioning the wafer via the stepper, multiple images are accurately registered, leading to improvement in dimensions of circuitry and other structures formed on the wafer.
Inventors
- 👤 Christophe Pierrat
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 08:10
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/62; G03F7/00; G03F7/70; G03F7/70058; G03F7/70066; G03F1/50; G03F1/54; G03F1/58; G03F7/70425; G03F7/70433; G03F7/70466
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
67 words
A reticle for use in controllably exposing a wafer with desired patterns, comprising: a substrate; a plurality of spaced apart independent images of different patterns of a single integrated circuit die on the substrate, least some of the patterns rendering different processing levels of the single integrated circuit die, and all of the patterns being oriented in a single direction with respect to the integrated circuit die.
Claim 2
Dependent Claim
67 words
A reticle for use in controllably exposing a wafer with desired patterns, comprising: a substrate; a plurality of spaced apart independent images of different patterns of a single integrated circuit die on the substrate, least some of the patterns rendering different processing levels of the single integrated circuit die, and all of the patterns being oriented in a single direction with respect to the integrated circuit die.
Claim 3
Dependent Claim
20 words
The reticle of claim 1 wherein the plurality of spaced apart images comprises rectangular images arranged in rows and columns.
Claim 4
Dependent Claim
14 words
The reticle of claim 2 wherein the images are arranged in rows and columns.
Claim 5
Dependent Claim
21 words
The reticle of claim 2 wherein each image corresponds to a different level of circuitry to be formed on the wafer.
Claim 6
Dependent Claim
22 words
The reticle of claim 2 wherein at least two images correspond to one level of circuitry to be formed on the wafer.
Claim 7
Dependent Claim
12 words
The reticle of claim 1 further comprising at least one alignment pattern.
Claim 8
Dependent Claim
20 words
The reticle of claim 6 wherein a single alignment pattern pertains to all of the different patterns on the reticle.
Claim 9
Dependent Claim
11 words
The reticle of claim 6 comprising a plurality of alignment patterns.
Claim 10
Dependent Claim
89 words
A reticle for a photo lithographic system for causing multi-level images to be formed onto a substrate of a semiconductor wafer without rotation of either the images or the wafer, the reticle comprising: a plurality of distinct mask patterns positioned in separate areas on the reticle, all of the patterns representing a single integrated circuit die, all of the patterns having a single orientation with respect to the integrated circuit die, and at least some of the patterns rendering different processing levels of the same single integrated circuit die.
Claim 11
Dependent Claim
89 words
A reticle for a photo lithographic system for causing multi-level images to be formed onto a substrate of a semiconductor wafer without rotation of either the images or the wafer, the reticle comprising: a plurality of distinct mask patterns positioned in separate areas on the reticle, all of the patterns representing a single integrated circuit die, all of the patterns having a single orientation with respect to the integrated circuit die, and at least some of the patterns rendering different processing levels of the same single integrated circuit die.
Claim 12
Dependent Claim
21 words
The reticle of claim 9 wherein the plurality of spaced apart mask patterns comprise rectangular patterns arranged in rows and columns.
Claim 13
Dependent Claim
33 words
The reticle of claim 10 wherein the mask patterns are arranged in rows and columns having equal spacing between each mask pattern in each row and between each mask pattern in each column.
Claim 14
Dependent Claim
22 words
The reticle of claim 10 wherein each mask pattern corresponds to a different level of circuitry to be formed on the wafer.
Claim 15
Dependent Claim
23 words
The reticle of claim 10 wherein at least two mask patterns correspond to one level of circuitry to be formed on the wafer.
Claim 16
Dependent Claim
124 words
A multi-level reticle for a stepper apparatus for receiving radiation to project radiation via a focusing device onto a substrate for forming a plurality of images by moving at least one of the reticle and the wafer relative to each other without rotation therebetween, the reticle comprising a multiplicity of integrated circuit mask patterns positioned in separate areas on said reticle, at least some of the mask patterns being images of different processing levels of the same integrated circuit, and all of the mask patterns being oriented in a single direction such that different ones of the mask patterns can be exposed onto the same integrated circuit at the different processing levels thereof with only linear relative motion between the wafer and the reticle.
Claim 17
Dependent Claim
124 words
A multi-level reticle for a stepper apparatus for receiving radiation to project radiation via a focusing device onto a substrate for forming a plurality of images by moving at least one of the reticle and the wafer relative to each other without rotation therebetween, the reticle comprising a multiplicity of integrated circuit mask patterns positioned in separate areas on said reticle, at least some of the mask patterns being images of different processing levels of the same integrated circuit, and all of the mask patterns being oriented in a single direction such that different ones of the mask patterns can be exposed onto the same integrated circuit at the different processing levels thereof with only linear relative motion between the wafer and the reticle.
Claim 18
Dependent Claim
21 words
The reticle of claim 14 wherein the plurality of spaced apart mask patterns comprise rectangular patterns arranged in rows and columns.
Claim 19
Dependent Claim
38 words
The reticle of claim 14 wherein the mask patterns comprise nine mask patterns arranged in three rows and three columns having equal spacing between each mask pattern in each row and between each mask pattern in each column.
Claim 20
Dependent Claim
22 words
The reticle of claim 14 wherein each mask pattern corresponds to a different level of circuitry to be formed on the wafer.
Claim 21
Dependent Claim
23 words
The reticle of claim 14 wherein at least two mask patterns correspond to one level of circuitry to be formed on the wafer.
References Cited (Backward Citations)
US3716296A
Cited
US4620785A
Cited
JPS60221757A
Cited
US4803524A
Cited
US4748478A
Cited
US4869998A
Cited
GB2190215A
Cited
US4758863A
Cited
US4849313A
Cited
US5036209A
Cited
US5049925A
Cited
EP0518783A1
Cited
US5298761A
Cited
US5235626A
Cited
US5308741A
Cited
US5705299A
Cited
US5451479A
Cited
US5571641A
Cited
US5699260A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-03-21 | 2003-09-20 | 2004-03-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-03-21 | 2007-09-20 | 2008-03-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-03-21 | 2011-09-20 | 2012-03-21 | $7700.00 | Window Closed / Lapsed |