US4849313A
Expired / Lapsed
US
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Method for making a reticle mask
Assignee: Philips Semiconductors Inc
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Filing: 1988-04-28
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Granted: 1989-07-18
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Expires: 2008-04-28
Abstract
Abstract An apparatus and a method for making a reticle mask is disclosed. A reticle mask is made by the double pass method wherein scribe lines are first drawn on the reticle mask. Thereafter, a product die pattern is made in the reticle mask by a plurality of times. A plurality of alignment marks are associated with each product die pattern. The plurality of alignment marks are all written in the scribe line region. Thus, any deviation of the relative position of the product die pattern to the scribe line may be quantified.
Inventors
- 👤 David C. Chapman
- 👤 Wesley R. Erck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 08:41
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7073; G03F9/7084; G03F1/00; G03F1/38; G03F1/42; G03F1/50; G03F7/00; G03F7/70; G03F7/70425; G03F7/70433; H; H10; H10P; H10P76/00
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
280 words
A method of making a reticle mask having a plurality of spaced apart, product regions, each product region for use in the fabrication of integrated circuit devices and a plurality of border regions surrounding each product region, with a plurality of alignment marks in said border regions; said reticle mask having regions of one type of exposure and regions of another type of exposure, opposite to said one type of exposure, said method comprising the steps of: (a) exposing an unexposed mask to form a plurality of spaced apart product regions, of one type of exposure, and to form a plurality of first regions, said first regions congruent with and corresponding to said border regions, said first regions having areas of said another type of exposure, and a plurality of indicias of said one type of exposure, each of said indicias being positioned in a defined relationship with each of said product regions; then (b) exposing said mask to a product frame, said product frame having a product region, a plurality of first alignment marks outside of said product region positioned in said defined relationship with said product region, and a ring of said one type of exposure surrounding said product region and covering the rest of said product frame; said exposing step comprising: (i) positioning said product region of said product frame over one of said product regions of said mask and positioning said first alignment marks over said plurality of indicias of said mask; (ii) exposing said mask with said product frame; (iii) repeating the steps of (b)(1-2) by positioning another product frame over another product region, until all of said product regions and indicias have been exposed.
Claim 2
Independent Claim
280 words
A method of making a reticle mask having a plurality of spaced apart, product regions, each product region for use in the fabrication of integrated circuit devices and a plurality of border regions surrounding each product region, with a plurality of alignment marks in said border regions; said reticle mask having regions of one type of exposure and regions of another type of exposure, opposite to said one type of exposure, said method comprising the steps of: (a) exposing an unexposed mask to form a plurality of spaced apart product regions, of one type of exposure, and to form a plurality of first regions, said first regions congruent with and corresponding to said border regions, said first regions having areas of said another type of exposure, and a plurality of indicias of said one type of exposure, each of said indicias being positioned in a defined relationship with each of said product regions; then (b) exposing said mask to a product frame, said product frame having a product region, a plurality of first alignment marks outside of said product region positioned in said defined relationship with said product region, and a ring of said one type of exposure surrounding said product region and covering the rest of said product frame; said exposing step comprising: (i) positioning said product region of said product frame over one of said product regions of said mask and positioning said first alignment marks over said plurality of indicias of said mask; (ii) exposing said mask with said product frame; (iii) repeating the steps of (b)(1-2) by positioning another product frame over another product region, until all of said product regions and indicias have been exposed.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein said product region is substantially rectangularly shaped.
Claim 4
Dependent Claim
16 words
The method of claim 1 wherein each of said first alignment marks are substantially rectangularly shaped.
Claim 5
Dependent Claim
26 words
The method of claim 1 wherein a plurality of second alignment marks are formed in said first regions during the process of exposing an unexposed mask.
Claim 6
Dependent Claim
16 words
The method of claim 1 wherein said plurality of second alignment marks are substantially rectangularly shaped.
Claim 7
Dependent Claim
19 words
The method of claim 1 wherein said first alignment marks are positioned symmetrically about each of said product regions.
Claim 8
Dependent Claim
21 words
The method of claim 1 wherein said one type of exposure is opaque and said another type of exposure is transparent.
Claim 9
Dependent Claim
29 words
The method of claim 1 wherein said product regions are congruent to one another, and said positioning step of (b)(iii) comprises moving said product frame over another product region.
Claim 10
Independent Claim
274 words
A method of making a reticle mask having a plurality of spaced apart, product regions, each product region for use in the fabrication of integrated circuit devices and a plurality of border regions surrounding each product region, with a plurality of alignment marks in said border regions; said reticle mask having regions of one type of exposure and regions of another type of exposure, opposite to said one type of exposure, said method comprising the steps of: (a) exposing an unexposed mask to form a plurality of spaced apart product regions, of one type of exposure, and to form a plurality of first regions, said first regions congruent with and corresponding to said border regions, said first regions having areas of said another type of exposure, a plurality of indicias of said one type of exposure, and a ring of said one type of exposure surrounding each of said product regions, each of said indicias being positioned in a defined relationship with each of said product regions; then (b) exposing said mask to a product frame, said product frame having a product region, and a plurality of first alignment marks outside of said product region positioned in said defined relationship with said product region; said exposing step comprising: (i) positioning said product region of said product frame over one of said product regions of said mask and positioning said first alignment marks over said plurality of indicias of said mask; (ii) exposing said mask with said product frame; (iii) repeating the steps of (b)(1-2) by positioning another product frame to another product region, until all of said product regions and indicias have been exposed.
Claim 11
Independent Claim
274 words
A method of making a reticle mask having a plurality of spaced apart, product regions, each product region for use in the fabrication of integrated circuit devices and a plurality of border regions surrounding each product region, with a plurality of alignment marks in said border regions; said reticle mask having regions of one type of exposure and regions of another type of exposure, opposite to said one type of exposure, said method comprising the steps of: (a) exposing an unexposed mask to form a plurality of spaced apart product regions, of one type of exposure, and to form a plurality of first regions, said first regions congruent with and corresponding to said border regions, said first regions having areas of said another type of exposure, a plurality of indicias of said one type of exposure, and a ring of said one type of exposure surrounding each of said product regions, each of said indicias being positioned in a defined relationship with each of said product regions; then (b) exposing said mask to a product frame, said product frame having a product region, and a plurality of first alignment marks outside of said product region positioned in said defined relationship with said product region; said exposing step comprising: (i) positioning said product region of said product frame over one of said product regions of said mask and positioning said first alignment marks over said plurality of indicias of said mask; (ii) exposing said mask with said product frame; (iii) repeating the steps of (b)(1-2) by positioning another product frame to another product region, until all of said product regions and indicias have been exposed.
Claim 12
Dependent Claim
13 words
The method of claim 9 wherein said product region is substantially rectangularly shaped.
Claim 13
Dependent Claim
16 words
The method of claim 9 wherein each of said first alignment marks are substantially rectangularly shaped.
Claim 14
Dependent Claim
26 words
The method of claim 9 wherein a plurality of second alignment marks are formed in said first regions during the process of exposing an unexposed mask.
Claim 15
Dependent Claim
16 words
The method of claim 11 wherein said plurality of second alignment marks are substantially rectangularly shaped.
Claim 16
Dependent Claim
19 words
The method of claim 9 wherein said first alignment marks are positioned symmetrically about each of said product regions.
Claim 17
Dependent Claim
21 words
The method of claim 9 wherein said one type of exposure is opaque and said another type of exposure is transparent.
Claim 18
Dependent Claim
29 words
The method of claim 9 wherein said product regions are congruent to one another, and said positioning step of (b)(iii) comprises moving said product frame over another product region.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-17 | 1993-01-16 | 1993-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-17 | 1997-01-16 | 1997-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-17 | 2001-01-16 | 2001-07-18 | $7700.00 | Window Closed / Lapsed |