US5571641A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Diffraction mask for the fabrication of semiconductor devices
Assignee: SK Hynix Inc
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Filing: 1994-06-27
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Granted: 1996-11-05
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Expires: 2014-06-27
Abstract
Abstract A dummy mask used in the fabrication of semiconductor devices, capable of forming an ultra-fine pattern by diffracting incident light while controlling or cutting off light components vertically incident on a mask formed with a pattern, thereby increasing the depth of focus and improving the resolution. The dummy mask includes a transparent substrate provided at its upper surface with a diffracting pattern for primarily diffracting light from a light source incident on the dummy mask and at its lower surface with a controlling pattern for removing vertically incident light not diffracted by the diffraction patterns.
Inventors
- 👤 Sang M. Bae
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 08:24
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70216; G03F7/70283
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
217 words
A diffraction mask for substantially reducing an amount of light normal to a surface of a photomask from being incident on the photomask, the diffraction mask comprising: a transparent substrate having a thickness; a first pattern having a plurality of first regions uniformly spaced apart on a first surface of the transparent substrate to form a diffracting pattern for diffracting light incident on the diffraction mask, each of the first regions having a shape and a width; and a second pattern having a plurality of second regions uniformly spaced apart on a second surface of the transparent substrate opposing the first surface, each of the second regions having a shape and a size such that the second regions do not overlap the first regions along an axis normal to the surface of the photomask; wherein the first surface is spaced apart from the second surface in a direction of the axis normal to the surface of the photomask by a distance d determined according to the relationship: ##EQU2## where a represents a spacing distance between the first regions, p represents a sum of the width of the first regions and the spacing distance between the first regions and λ represents the wavelength of the incident light, a, p and λ being measured in consistent units of measurements.
Claim 2
Dependent Claim
217 words
A diffraction mask for substantially reducing an amount of light normal to a surface of a photomask from being incident on the photomask, the diffraction mask comprising: a transparent substrate having a thickness; a first pattern having a plurality of first regions uniformly spaced apart on a first surface of the transparent substrate to form a diffracting pattern for diffracting light incident on the diffraction mask, each of the first regions having a shape and a width; and a second pattern having a plurality of second regions uniformly spaced apart on a second surface of the transparent substrate opposing the first surface, each of the second regions having a shape and a size such that the second regions do not overlap the first regions along an axis normal to the surface of the photomask; wherein the first surface is spaced apart from the second surface in a direction of the axis normal to the surface of the photomask by a distance d determined according to the relationship: ##EQU2## where a represents a spacing distance between the first regions, p represents a sum of the width of the first regions and the spacing distance between the first regions and λ represents the wavelength of the incident light, a, p and λ being measured in consistent units of measurements.
Claim 3
Dependent Claim
38 words
A diffraction mask in accordance with claim 1, wherein each of the second regions has a width larger than 1/2 of the sum of the width of the first regions and the spacing distance between the first regions.
Claim 4
Dependent Claim
57 words
A diffraction mask in accordance with claim 1, wherein the transparent substrate comprises a pair of separate transparent substrate bodies, said pair of substrate bodies being adjacently arranged, and being respectively formed with the first pattern and the second pattern such that the first pattern and the second pattern are disposed on opposing surfaces of the substrate.
Claim 5
Dependent Claim
36 words
A diffraction mask in accordance with claim 1, wherein the transparent substrate comprises a single transparent substrate body having an upper surface formed with the first pattern and a lower surface formed with the second pattern.
Claim 6
Dependent Claim
20 words
A diffraction mask in accordance with claim 1, wherein the plurality of second regions is made of phase inversion material.
Claim 7
Dependent Claim
168 words
A diffraction mask for substantially reducing an amount of light normal to a surface of a photomask from being incident on the photomask, the diffraction mask comprising: a transparent substrate having a thickness; a first pattern having a plurality of first regions uniformly spaced apart on a first surface of the transparent substrate to form a diffracting pattern for diffracting light incident on the diffraction mask, each of the first regions having a shape and a width; and a second pattern having a plurality of second regions uniformly spaced apart on a second surface of the transparent substrate opposing the first surface, each of the second regions having a shape and a size, and each of said second structures having a size and position such that the second regions do not overlap the first regions along an axis normal to the surface of the photomask; wherein each of said second regions is made of material capable of transmitting the incident light at a rate of 8% to 10%.
Claim 8
Dependent Claim
168 words
A diffraction mask for substantially reducing an amount of light normal to a surface of a photomask from being incident on the photomask, the diffraction mask comprising: a transparent substrate having a thickness; a first pattern having a plurality of first regions uniformly spaced apart on a first surface of the transparent substrate to form a diffracting pattern for diffracting light incident on the diffraction mask, each of the first regions having a shape and a width; and a second pattern having a plurality of second regions uniformly spaced apart on a second surface of the transparent substrate opposing the first surface, each of the second regions having a shape and a size, and each of said second structures having a size and position such that the second regions do not overlap the first regions along an axis normal to the surface of the photomask; wherein each of said second regions is made of material capable of transmitting the incident light at a rate of 8% to 10%.
Claim 9
Dependent Claim
38 words
A diffraction mask in accordance with claim 6 wherein each of the second regions has a width larger than 1/2 of the sum of the width of the first regions and the spacing distance between the first regions.
Claim 10
Dependent Claim
20 words
A diffraction mask in accordance with claim 6, wherein the plurality of second regions is made of phase inversion material.
Claim 11
Dependent Claim
57 words
A diffraction mask in accordance with claim 6, wherein the transparent substrate comprises a pair of separate transparent substrate bodies, the pair of substrate bodies being adjacently arranged, and being respectively formed with the first pattern and the second pattern such that the first pattern and the second pattern are disposed on opposing surfaces of the substrate.
Claim 12
Dependent Claim
36 words
A diffraction mask in accordance with claim 6, wherein said transparent substrate comprises a single transparent substrate body having a first surface formed with the first pattern and a second surface formed with the second pattern.
Claim 13
Dependent Claim
119 words
A diffraction mask for substantially reducing an amount of light vertically incident on a photomask, comprising: a transparent structure having a thickness; a plurality of first regions arranged on a first surface of the transparent structure, the first regions being uniformly spaced apart from one another to form a diffracting pattern to diffract light incident on the first surface of the transparent substrate; and a plurality of second regions arranged on an opposing surface of the transparent structure, the second regions being uniformly spaced apart from one another to form a control pattern which substantially reduces an amount of light transmitted through the diffraction mask as a zero-order diffraction from the diffracting pattern from being incident on the photomask.
Claim 14
Dependent Claim
119 words
A diffraction mask for substantially reducing an amount of light vertically incident on a photomask, comprising: a transparent structure having a thickness; a plurality of first regions arranged on a first surface of the transparent structure, the first regions being uniformly spaced apart from one another to form a diffracting pattern to diffract light incident on the first surface of the transparent substrate; and a plurality of second regions arranged on an opposing surface of the transparent structure, the second regions being uniformly spaced apart from one another to form a control pattern which substantially reduces an amount of light transmitted through the diffraction mask as a zero-order diffraction from the diffracting pattern from being incident on the photomask.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-05 | 2000-05-06 | 2000-11-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-05 | 2004-05-06 | 2004-11-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-05 | 2008-05-06 | 2008-11-05 | $7700.00 | Window Closed / Lapsed |