Method of forming a metal gate for CMOS devices using a replacement gate process

Claim 1

A method for forming a metal gate using a replacement gate process with a selective tungsten deposition comprising the steps of: a. forming a dummy gate oxide layer on a substrate structure; b. forming a dummy gate electrode layer on said dummy gate oxide layer; said dummy gate electrode layer being composed of polysilicon; c. patterning said dummy gate electrode layer and said dummy gate oxide layer to form a dummy gate having sidewalls; d. implanting impurity ions into said substrate structure using said dummy gate as an implant mask; e. forming spacers on said sidewalls of said dummy gate; said spacers being composed of silicon dioxide or silicon oxynitride; f. implanting impurity ions into said substrate structure using said dummy gate and said spacers as an implant mask and performing a rapid thermal anneal to form source and drain regions; g. forming a selective tungsten layer on said dummy gate electrode and on said source and drain regions; h. forming a blanket dielectric layer over said dummy gate and said substrate structure; i. planarizing said blanket dielectric layer using a chemical mechanical polishing process and stopping on said tungsten layer; j. removing said tungsten layer overlying said dummy gate and said dummy gate; thereby forming a gate opening; k. forming a gate oxide layer on said substrate structure in said gate opening; l. forming a gate electrode layer over said gate oxide layer; said gate electrode layer being composed of a metal selected from the group comprising titanium, tungsten, or aluminum; and m. planarizing said gate electrode layer stopping on said blanket dielectric layer thereby forming a metal gate.

Claim 2

A method for forming a metal gate using a replacement gate process with a selective tungsten deposition comprising the steps of: a. forming a dummy gate oxide layer on a substrate structure; b. forming a dummy gate electrode layer on said dummy gate oxide layer; said dummy gate electrode layer being composed of polysilicon; c. patterning said dummy gate electrode layer and said dummy gate oxide layer to form a dummy gate having sidewalls; d. implanting impurity ions into said substrate structure using said dummy gate as an implant mask; e. forming spacers on said sidewalls of said dummy gate; said spacers being composed of silicon dioxide or silicon oxynitride; f. implanting impurity ions into said substrate structure using said dummy gate and said spacers as an implant mask and performing a rapid thermal anneal to form source and drain regions; g. forming a selective tungsten layer on said dummy gate electrode and on said source and drain regions; h. forming a blanket dielectric layer over said dummy gate and said substrate structure; i. planarizing said blanket dielectric layer using a chemical mechanical polishing process and stopping on said tungsten layer; j. removing said tungsten layer overlying said dummy gate and said dummy gate; thereby forming a gate opening; k. forming a gate oxide layer on said substrate structure in said gate opening; l. forming a gate electrode layer over said gate oxide layer; said gate electrode layer being composed of a metal selected from the group comprising titanium, tungsten, or aluminum; and m. planarizing said gate electrode layer stopping on said blanket dielectric layer thereby forming a metal gate.

Claim 10

A method for forming a metal gate using a replacement gate process with a selective tungsten deposition comprising the steps of: a. providing a substrate structure having isolation structures thereon; b. forming a dummy gate oxide layer on said substrate structure; c. forming a dummy gate electrode layer on said dummy gate oxide layer; said dummy gate electrode layer being composed of polysilicon; d. patterning said dummy gate electrode layer and said dummy gate oxide layer to form a dummy gate comprising a dummy gate oxide and a dummy gate electrode and having sidewalls; e. implanting As ions for lightly doped source and drain regions or highly doped source and drain extensions into said substrate structure at an energy of between about 1 KeV and 100 KeV and at a dose of between about 1E12 atm/cm 2 and 5E15 atm/cm 2 using said dummy gate as an implant mask; f. forming spacers on said sidewalls of said dummy gate; said spacers being composed of silicon dioxide or silicin oxynitride; g. implanting As ions into said substrate stricture at an energy of between about 10 KeV and 100 KeV and at a dose of between about 1E15 atm/cm 2 and 8E15 atm/cm 2 using said dummy gate and said spacers as an implant mask and performing a rapid thermal anneal to form source and drain regions; h. forming a selective tungsten layer on said dummy gate electrode and on said source and drain regions; i. forming a blanket dielectric layer over said dummy gate and said substrate structure; j. planarizing said blanket dielectric layer using a chemical mechanical polishing process using said tungsten layer for a chemical mechanical polishing stop layer; k. removing said tungsten layer overlying said dummy gate and said dummy gate electrode using a selective etch; thereby forming a gate opening; l. removing said dummy gate oxide in said gate opening; m. forming a gate oxide layer on said substrate structure in said gate opening; n. forming a gate electrode layer over said gate oxide layer; said gate electrode layer being composed of a metal selected from the group composed of titanium, tungsten, and aluminum; o. planarizing said gate electrode layer stopping on said blanket dielectric layer thereby forming a gate electrode; p. forming contacts at said source and drain regions by patterning said blanket dielectric layer to form contact openings and filling, said contact openings with conductive plugs; and q. forming a first metal layer over said inter level dielectric and said conductive plugs.

Claim 11

A method for forming a metal gate using a replacement gate process with a selective tungsten deposition comprising the steps of: a. providing a substrate structure having isolation structures thereon; b. forming a dummy gate oxide layer on said substrate structure; c. forming a dummy gate electrode layer on said dummy gate oxide layer; said dummy gate electrode layer being composed of polysilicon; d. patterning said dummy gate electrode layer and said dummy gate oxide layer to form a dummy gate comprising a dummy gate oxide and a dummy gate electrode and having sidewalls; e. implanting As ions for lightly doped source and drain regions or highly doped source and drain extensions into said substrate structure at an energy of between about 1 KeV and 100 KeV and at a dose of between about 1E12 atm/cm 2 and 5E15 atm/cm 2 using said dummy gate as an implant mask; f. forming spacers on said sidewalls of said dummy gate; said spacers being composed of silicon dioxide or silicin oxynitride; g. implanting As ions into said substrate stricture at an energy of between about 10 KeV and 100 KeV and at a dose of between about 1E15 atm/cm 2 and 8E15 atm/cm 2 using said dummy gate and said spacers as an implant mask and performing a rapid thermal anneal to form source and drain regions; h. forming a selective tungsten layer on said dummy gate electrode and on said source and drain regions; i. forming a blanket dielectric layer over said dummy gate and said substrate structure; j. planarizing said blanket dielectric layer using a chemical mechanical polishing process using said tungsten layer for a chemical mechanical polishing stop layer; k. removing said tungsten layer overlying said dummy gate and said dummy gate electrode using a selective etch; thereby forming a gate opening; l. removing said dummy gate oxide in said gate opening; m. forming a gate oxide layer on said substrate structure in said gate opening; n. forming a gate electrode layer over said gate oxide layer; said gate electrode layer being composed of a metal selected from the group composed of titanium, tungsten, and aluminum; o. planarizing said gate electrode layer stopping on said blanket dielectric layer thereby forming a gate electrode; p. forming contacts at said source and drain regions by patterning said blanket dielectric layer to form contact openings and filling, said contact openings with conductive plugs; and q. forming a first metal layer over said inter level dielectric and said conductive plugs.

Claim 19

A method for forming a metal gate using a replacement gate process, comprising the steps of: a. providing a substrate structure having isolation structures thereon; b. forming a dummy gate oxide layer on said substrate structure; c. forming a dummy gate electrode layer on said dummy gate oxide layer; said dummy gate electrode layer being composed of silicon nitride; d. patterning said dummy gate electrode layer and said dummy gate oxide layer to form a dummy gate comprising a dummy gate oxide and a dummy gate electrode and having sidewalls; e. implanting impurity ions into said substrate structure using said dummy gate as an implant mask; f. forming spacers on said sidewalls of said dummy gate; said spacers being composed of silicon dioxide or silicin oxynitride; g. implanting impurity ions into said substrate structure using said dummy gate and said spacers as an implant mask and performing a rapid thermal anneal to form source and drain regions; h. forming a blanket dielectric layer over said dummy gate and said substrate structure; i. planarizing said blanket dielectric layer using a chemical mechanical polishing process; j. removing said dummy gate electrode using a wet etch; thereby forming a gate opening; k. removing said dummy gate oxide in said gate opening; l. forming a gate oxide layer on said substrate structure in said gate opening; m. forming a gate electrode layer over said gate oxide layer; said gate electrode layer being composed of a metal selected from the group composed of titanium, tungsten, and aluminum; n. planarizing said gate electrode layer stopping on said blanket dielectric layer thereby forming a gate electrode; and o. forming an inter level dielectric layer over said gate electrode and said blanket dielectric layer.

Claim 20

A method for forming a metal gate using a replacement gate process, comprising the steps of: a. providing a substrate structure having isolation structures thereon; b. forming a dummy gate oxide layer on said substrate structure; c. forming a dummy gate electrode layer on said dummy gate oxide layer; said dummy gate electrode layer being composed of silicon nitride; d. patterning said dummy gate electrode layer and said dummy gate oxide layer to form a dummy gate comprising a dummy gate oxide and a dummy gate electrode and having sidewalls; e. implanting impurity ions into said substrate structure using said dummy gate as an implant mask; f. forming spacers on said sidewalls of said dummy gate; said spacers being composed of silicon dioxide or silicin oxynitride; g. implanting impurity ions into said substrate structure using said dummy gate and said spacers as an implant mask and performing a rapid thermal anneal to form source and drain regions; h. forming a blanket dielectric layer over said dummy gate and said substrate structure; i. planarizing said blanket dielectric layer using a chemical mechanical polishing process; j. removing said dummy gate electrode using a wet etch; thereby forming a gate opening; k. removing said dummy gate oxide in said gate opening; l. forming a gate oxide layer on said substrate structure in said gate opening; m. forming a gate electrode layer over said gate oxide layer; said gate electrode layer being composed of a metal selected from the group composed of titanium, tungsten, and aluminum; n. planarizing said gate electrode layer stopping on said blanket dielectric layer thereby forming a gate electrode; and o. forming an inter level dielectric layer over said gate electrode and said blanket dielectric layer.