US6030904A
Expired / Lapsed
US
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Stabilization of low-k carbon-based dielectrics
Assignee: International Business Machines Corp
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Filing: 1997-08-21
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Granted: 2000-02-29
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Expires: 2017-08-21
Abstract
Abstract A method for treating a film of carbon-based dielectric material such as diamond-like carbon to remove volatiles is described. The method incorporates the steps of providing a non-oxidizing ambient and heating the film above 350° C. Heating may be by rapid thermal annealing. The dielectric constant of the material may be lowered. A stabilized carbon-based material is provided with less than 0.5% thickness or weight change/hour at a selected temperature at or below 400° C. The invention overcomes the problem of dimensional instability during the incorporation of the material in integrated circuit chips as an intra and inter level dielectric.
Inventors
- 👤 Alfred Grill
- 👤 Christopher Vincent Jahnes
- 👤 Vishnubhai Vitthalbhai Patel
- 👤 Katherine Lynn Saenger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 07:11
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/65; H10P14/6516; H10P14/68; H10P14/683; H10P14/687; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; H10P14/6902; H10P95/00; H10P95/08; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/084
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
145 words
A method for stabilizing a film of carbon-based material comprising the steps of: selecting a film of carbon based material wherein said carbon based material is selected from the group consisting of amorphous hydrogenated carbon (a--C:H), diamond-like carbon (DLC), fluorinated diamond-like carbon (FDLC), DLC or FDLC containing one or more additives selected from the group consisting of oxygen, silicon, germanium, nitrogen, and all metallic elements, and layered combinations of said diamond-like materials; heating said film to a temperature above its deposition temperature in an ambient selected from the group consisting of a vacuum and a non-oxidizing gas ambient, said step of heating includes the step of heating by rapid thermal annealing to a temperature in the range from 350° C. to 600° C.; and continuing said step of heating for a time sufficient to dimensionally stabilize said film by removing volatiles from within said film.
Claim 2
Independent Claim
145 words
A method for stabilizing a film of carbon-based material comprising the steps of: selecting a film of carbon based material wherein said carbon based material is selected from the group consisting of amorphous hydrogenated carbon (a--C:H), diamond-like carbon (DLC), fluorinated diamond-like carbon (FDLC), DLC or FDLC containing one or more additives selected from the group consisting of oxygen, silicon, germanium, nitrogen, and all metallic elements, and layered combinations of said diamond-like materials; heating said film to a temperature above its deposition temperature in an ambient selected from the group consisting of a vacuum and a non-oxidizing gas ambient, said step of heating includes the step of heating by rapid thermal annealing to a temperature in the range from 350° C. to 600° C.; and continuing said step of heating for a time sufficient to dimensionally stabilize said film by removing volatiles from within said film.
Claim 3
Dependent Claim
24 words
The method of claim 1 wherein said non-oxidizing gas ambient is selected from the group consisting of nitrogen, argon, helium, hydrogen, and mixtures thereof.
Claim 4
Dependent Claim
27 words
The method of claim 1 wherein said step of continuing said step of heating for a time includes the step of heating for less than 10 minutes.
Claim 5
Dependent Claim
46 words
The method of claim 1 wherein said step of continuing said step of heating is sufficient to stabilize said film, said stabilized film being one wherein the thickness of said film will change by less than 0.5%/hour at a selected temperature at or below 400° C.
Claim 6
Dependent Claim
46 words
The method of claim 1 wherein said step of continuing said step of heating is sufficient to stabilize said film, said stabilized film being one wherein the weight of said film will change by less than 0.5%/hour at a selected temperature at or below 400° C.
Claim 7
Dependent Claim
22 words
The method of claim 1 further including the step of selecting a carbon based material having a dielectric constant less than 3.5.
Claim 8
Dependent Claim
51 words
The method of claim 1 further including the step of selecting a film having a first dielectric constant k 1 and further including the step of terminating said step of continuing said heating at times said film has a second dielectric constant k 2 which is less than k 1 .
Claim 9
Dependent Claim
29 words
The method of claim 1 wherein said step of heating by rapid thermal annealing includes raising the temperature at a rate in the range from 1 to 100° C./sec.
Claim 10
Dependent Claim
39 words
The method of claim 8 wherein said step of heating by rapid thermal annealing includes the step of placing said film in a single wafer tool in which the annealing process is performed on one wafer at a time.
Claim 11
Dependent Claim
41 words
The method of claim 8 wherein said step of heating by rapid thermal annealing includes the step of placing said film in a multiple wafer tool in which the annealing process is performed on two or more wafers at a time.
Claim 12
Independent Claim
148 words
A method of forming a pattern of conductive features embedded in a carbon-based dielectric layer, said method comprising the steps of: depositing a film of a carbon-based dielectric material on a substrate, wherein said carbon-based dielectric material is selected from the group consisting of amorphous hydrogenated carbon, diamond-like carbon (DLC), fluorinated diamond-like carbon (FDLC), DLC or FDLC containing one or more additives selected from the group consisting of oxygen, silicon, germanium, nitrogen, and all metallic elements, and layered combinations of said diamond-like materials; heating said film to a temperature above 350° C. in a vacuum or a non-oxidizing ambient, said step of heating includes the step of heating by rapid thermal annealing; and continuing said step of heating for a time sufficient to dimensionally stabilize said film by removing volatiles from within said film; patterning said film to form cavities; and filling said cavities with a conductive material.
Claim 13
Independent Claim
148 words
A method of forming a pattern of conductive features embedded in a carbon-based dielectric layer, said method comprising the steps of: depositing a film of a carbon-based dielectric material on a substrate, wherein said carbon-based dielectric material is selected from the group consisting of amorphous hydrogenated carbon, diamond-like carbon (DLC), fluorinated diamond-like carbon (FDLC), DLC or FDLC containing one or more additives selected from the group consisting of oxygen, silicon, germanium, nitrogen, and all metallic elements, and layered combinations of said diamond-like materials; heating said film to a temperature above 350° C. in a vacuum or a non-oxidizing ambient, said step of heating includes the step of heating by rapid thermal annealing; and continuing said step of heating for a time sufficient to dimensionally stabilize said film by removing volatiles from within said film; patterning said film to form cavities; and filling said cavities with a conductive material.
Claim 14
Independent Claim
147 words
A method of forming a pattern of conductive features embedded in a carbon-based dielectric layer, said method comprising the steps of: depositing a film of carbon-based dielectric material on a substrate, wherein said carbon-based dielectric material is selected from the group consisting of amorphous hydrogenated carbon, diamond-like carbon (DLC), fluorinated diamond-like carbon (FDLC), DLC or FDLC containing one or more additives selected from the group consisting of oxygen, silicon, germanium, nitrogen, and all metallic elements, and layered combinations of said diamond-like materials; patterning said film to form cavities; heating said film to a temperature above 350° C. in a vacuum or a non-oxidizing ambient, said step of heating includes the step of heating by rapid thermal annealing; and continuing said step of heating for a time sufficient to dimensionally stabilize said film by removing volatiles from within said film; and filling said cavities with a conductive material.
Claim 15
Independent Claim
147 words
A method of forming a pattern of conductive features embedded in a carbon-based dielectric layer, said method comprising the steps of: depositing a film of carbon-based dielectric material on a substrate, wherein said carbon-based dielectric material is selected from the group consisting of amorphous hydrogenated carbon, diamond-like carbon (DLC), fluorinated diamond-like carbon (FDLC), DLC or FDLC containing one or more additives selected from the group consisting of oxygen, silicon, germanium, nitrogen, and all metallic elements, and layered combinations of said diamond-like materials; patterning said film to form cavities; heating said film to a temperature above 350° C. in a vacuum or a non-oxidizing ambient, said step of heating includes the step of heating by rapid thermal annealing; and continuing said step of heating for a time sufficient to dimensionally stabilize said film by removing volatiles from within said film; and filling said cavities with a conductive material.
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