US6027659A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polishing pad conditioning surface having integral conditioning points
Assignee: Intel Corp
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Filing: 1997-12-03
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Granted: 2000-02-22
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Expires: 2017-12-03
Abstract
Abstract A pad conditioner having integral conditioning points. The pad conditioner includes a conditioning surface having a first integral conditioning point extending from the conditioning surface. For one embodiment the conditioning surface is formed of diamond and an array of integral conditioning points including the first integral conditioning point extends from the diamond surface.
Inventors
- 👤 Bruce H. Billett
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 14:38
CPC Classifications
B; B24; B24B; B24B53/00; B24B53/017; B24D; B24D18/00; B24D7/00; B24D7/06; B24D7/18
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
41 words
An apparatus for conditioning a pad, the apparatus comprising: a substrate comprising one of stainless steel or carbide; and a diamond conditioning surface disposed on the substrate, the conditioning surface having a first integral conditioning point extending from the conditioning surface.
Claim 2
Independent Claim
41 words
An apparatus for conditioning a pad, the apparatus comprising: a substrate comprising one of stainless steel or carbide; and a diamond conditioning surface disposed on the substrate, the conditioning surface having a first integral conditioning point extending from the conditioning surface.
Claim 3
Dependent Claim
53 words
A pad conditioning apparatus comprising: a substrate formed of one of stainless steel or carbide, the substrate being configured to be coupled to a pad conditioning block mount; and a diamond layer disposed on the substrate, the layer including an array of integral conditioning points extending from a first surface of the layer.
Claim 4
Dependent Claim
53 words
A pad conditioning apparatus comprising: a substrate formed of one of stainless steel or carbide, the substrate being configured to be coupled to a pad conditioning block mount; and a diamond layer disposed on the substrate, the layer including an array of integral conditioning points extending from a first surface of the layer.
Claim 5
Independent Claim
39 words
A method comprising: forming a diamond deposition layer including a conditioning surface using a carbon chemical vapor deposition process; and integrally forming an array of conditioning points extending from the conditioning surface of the layer by etching the layer.
Claim 6
Independent Claim
39 words
A method comprising: forming a diamond deposition layer including a conditioning surface using a carbon chemical vapor deposition process; and integrally forming an array of conditioning points extending from the conditioning surface of the layer by etching the layer.
Claim 7
Independent Claim
40 words
A method for forming a pad scoring apparatus comprising: forming a diamond deposition layer using a carbon deposition process; and integrally forming an array of conditioning points extending from the conditioning surface of the layer using a targeted deposition process.
Claim 8
Independent Claim
40 words
A method for forming a pad scoring apparatus comprising: forming a diamond deposition layer using a carbon deposition process; and integrally forming an array of conditioning points extending from the conditioning surface of the layer using a targeted deposition process.
Claim 9
Dependent Claim
36 words
A pad conditioning apparatus comprising: a conditioning block mount; and a scoring apparatus coupled to the conditioning block mount, the scoring apparatus including a conditioning surface having a first integral conditioning point extending from the surface.
Claim 10
Dependent Claim
36 words
A pad conditioning apparatus comprising: a conditioning block mount; and a scoring apparatus coupled to the conditioning block mount, the scoring apparatus including a conditioning surface having a first integral conditioning point extending from the surface.
Claim 11
Dependent Claim
13 words
The pad conditioning apparatus of claim 5 wherein the conditioning surface comprises diamond.
Claim 12
Dependent Claim
36 words
The pad conditioning apparatus of claim 3 wherein the scoring apparatus further includes an array of integral conditioning points extending from the conditioning surface, the array of integral conditioning points including the first integral conditioning point.
Claim 13
Dependent Claim
27 words
The pad conditioning apparatus of claim 5 wherein the scoring apparatus further includes a diamond block and the conditioning surface is one surface of the diamond block.
Claim 14
Dependent Claim
39 words
The pad conditioning apparatus of claim 5 further including a substrate formed of one of stainless steel or carbide, the conditioning surface comprising diamond and being disposed on the substrate, the substrate being coupled to the conditioning block mount.
Claim 15
Dependent Claim
31 words
The pad conditioning apparatus of claim 5 wherein the scoring apparatus further comprises multiple conditioning blocks and wherein the conditioning surface includes a conditioning surface on each of the conditioning blocks.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-02-21 | 2003-08-23 | 2004-02-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-02-21 | 2007-08-23 | 2008-02-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-02-21 | 2011-08-23 | 2012-02-22 | $7700.00 | Window Closed / Lapsed |