US5611943A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for conditioning of chemical-mechanical polishing pads
Assignee: Intel Corp
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Filing: 1995-09-29
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Granted: 1997-03-18
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Expires: 2015-09-29
Abstract
Abstract A method and apparatus for conditioning and/or rinsing a pad in a chemical-mechanical polisher. A scoring apparatus is rotated about its center directly over the polishing pad of the chemical-mechanical polisher. The scoring apparatus scores the pad surface while rotating above the pad. Consequently the pad is conditioned in a uniform and concentric fashion.
Inventors
- 👤 Kenneth C. Cadien
- 👤 Leopoldo D. Yau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 22:13
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/04; B24B37/042; B24B53/00; B24B53/017
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
33 words
Method for conditioning a pad comprising: providing said pad; rotating a scoring apparatus over said pad, wherein said scoring apparatus is rotated concentrically about the center of said pad; and scoring said pad.
Claim 2
Dependent Claim
33 words
Method for conditioning a pad comprising: providing said pad; rotating a scoring apparatus over said pad, wherein said scoring apparatus is rotated concentrically about the center of said pad; and scoring said pad.
Claim 3
Dependent Claim
54 words
The method as described in claim 1 wherein said step of scoring said pad further comprises: scoring said pad with a plurality of diamond points, wherein said diamond points are located on said scoring apparatus and said diamond points of said scoring apparatus are placed in contact with said pad during said rotating step.
Claim 4
Dependent Claim
51 words
The method as described in claim 1 wherein said step of scoring said pad further comprises: scoring said pad with a plurality of brushes, wherein said brushes are located on said scoring apparatus and said brushes of said scoring apparatus are placed in contact with said pad during said rotating step.
Claim 5
Dependent Claim
53 words
The method as described in claim 1 wherein said step of scoring said pad further comprises: scoring said pad with a plurality of high pressure spray nozzles, wherein said high pressure spray nozzles are located on said scoring apparatus and spray said pad with high pressure streams of water during said rotating step.
Claim 6
Dependent Claim
31 words
Method for conditioning a pad comprising: providing said pad; placing a high pressure spray bar over said pad; and spraying said pad with a plurality of high pressure streams of water.
Claim 7
Dependent Claim
31 words
Method for conditioning a pad comprising: providing said pad; placing a high pressure spray bar over said pad; and spraying said pad with a plurality of high pressure streams of water.
Claim 8
Dependent Claim
14 words
The method as described in claim 5 wherein said pad comprises a soft material.
Claim 9
Dependent Claim
21 words
The method as described in claim 5 wherein said bar is approximately the same length as the diameter of said pad.
Claim 10
Dependent Claim
19 words
The method as described in claim 5 wherein said bar is rotated concentrically about the center of said pad.
Claim 11
Dependent Claim
19 words
The method as described in claim 5 wherein said high pressure streams of water range from approximately 10-1000 psi.
Claim 12
Dependent Claim
39 words
Method for conditioning a pad comprising: providing said pad; rotating a scoring apparatus over said pad, wherein said scoring apparatus is a high pressure spray bar; and scoring said pad with a plurality of high pressure streams of water.
Claim 13
Dependent Claim
39 words
Method for conditioning a pad comprising: providing said pad; rotating a scoring apparatus over said pad, wherein said scoring apparatus is a high pressure spray bar; and scoring said pad with a plurality of high pressure streams of water.
Claim 14
Dependent Claim
14 words
The method as described in claim 10 wherein said pad comprises a soft material.
Claim 15
Dependent Claim
21 words
The method as described in claim 10 wherein said bar is approximately the same length as the diameter of said pad.
Claim 16
Dependent Claim
19 words
The method as described in claim 10 wherein said bar is rotated concentrically about the center of said pad.
Claim 17
Dependent Claim
19 words
The method as described in claim 10 wherein said high pressure streams of water range from approximately 10-1000 psi.
Claim 18
Dependent Claim
33 words
Method for removing debris from a pad comprising: providing said pad; rotating a high pressure spray bar over said pad; and rinsing said pad with a plurality of high pressure streams of water.
Claim 19
Dependent Claim
33 words
Method for removing debris from a pad comprising: providing said pad; rotating a high pressure spray bar over said pad; and rinsing said pad with a plurality of high pressure streams of water.
Claim 20
Dependent Claim
21 words
The method as described in claim 15 wherein said bar is approximately the same length as the diameter of said pad.
Claim 21
Dependent Claim
19 words
The method as described in claim 15 wherein said bar is rotated concentrically about the center of said pad.
Claim 22
Dependent Claim
19 words
The method as described in claim 15 wherein said high pressure streams of water range from approximately 0-40 psi.
Claim 23
Dependent Claim
79 words
Method for conditioning and rinsing a pad comprising: providing said pad; rotating a high pressure spray bar concentrically over said pad, wherein said high pressure spray bar is approximately the same length as the diameter of said pad; and spraying said pad with a plurality of high pressure streams of water, wherein said high pressure streams of water range from approximately 10-1000 psi, such that said pad is scored and rinsed simultaneously by said high pressure streams of water.
Claim 24
Dependent Claim
79 words
Method for conditioning and rinsing a pad comprising: providing said pad; rotating a high pressure spray bar concentrically over said pad, wherein said high pressure spray bar is approximately the same length as the diameter of said pad; and spraying said pad with a plurality of high pressure streams of water, wherein said high pressure streams of water range from approximately 10-1000 psi, such that said pad is scored and rinsed simultaneously by said high pressure streams of water.
Claim 25
Independent Claim
77 words
An apparatus for conditioning a pad comprising: a pivot arm, wherein said pivot arm is located to the side of said pad when not in operation and said pivot arm is extended over said pad when in operation; a bar, wherein said bar is coupled to an end of said pivot arm such that said bar rotates concentrically about the center of said bar; and a scoring apparatus, wherein said scoring apparatus is mounted on said bar.
Claim 26
Independent Claim
77 words
An apparatus for conditioning a pad comprising: a pivot arm, wherein said pivot arm is located to the side of said pad when not in operation and said pivot arm is extended over said pad when in operation; a bar, wherein said bar is coupled to an end of said pivot arm such that said bar rotates concentrically about the center of said bar; and a scoring apparatus, wherein said scoring apparatus is mounted on said bar.
Claim 27
Dependent Claim
21 words
The apparatus as described in claim 20 wherein said bar has a length approximately equal to the diameter of said pad.
Claim 28
Dependent Claim
42 words
The apparatus as described in claim 20 wherein said bar is coupled to an end of said pivot arm that extends over said pad such that said bar is centered over said pad and rotates concentrically about the center of said pad.
Claim 29
Dependent Claim
54 words
The apparatus as described in claim 20 wherein said scoring apparatus further comprises: a plurality of diamond points, wherein said diamond points are located along the length of said bar and said diamond points of said scoring apparatus are placed in contact with said pad when said pivot arm is extended over said pad.
Claim 30
Dependent Claim
51 words
The apparatus as described in claim 20 wherein said scoring apparatus further comprises: a plurality of brushes, wherein said brushes are located along the length of said bar and said brushes of said scoring apparatus are placed in contact with said pad when said pivot arm is extended over said pad.
Claim 31
Dependent Claim
53 words
The apparatus as described in claim 20 wherein said scoring apparatus further comprises: a plurality of high pressure spray nozzles, wherein said high pressure spray nozzles are located along the length of said bar and spray said pad with high pressure streams of water when said pivot arm is extended over said pad.
Claim 32
Independent Claim
92 words
An apparatus for conditioning and rinsing a pad comprising: a pivot arm, wherein said pivot arm is located to the side of said pad when not in operation and said pivot arm is extended over said pad when in operation; a bar, wherein said bar is coupled to an end of said pivot arm such that said bar rotates concentrically about the center of said bar; and a scoring apparatus, wherein said scoring apparatus is mounted on said bar and wherein said scoring apparatus comprises a plurality of high pressure spray nozzles.
Claim 33
Independent Claim
92 words
An apparatus for conditioning and rinsing a pad comprising: a pivot arm, wherein said pivot arm is located to the side of said pad when not in operation and said pivot arm is extended over said pad when in operation; a bar, wherein said bar is coupled to an end of said pivot arm such that said bar rotates concentrically about the center of said bar; and a scoring apparatus, wherein said scoring apparatus is mounted on said bar and wherein said scoring apparatus comprises a plurality of high pressure spray nozzles.
Claim 34
Dependent Claim
21 words
The apparatus as described in claim 26 wherein said bar has a length approximately equal to the diameter of said pad.
Claim 35
Dependent Claim
42 words
The apparatus as described in claim 26 wherein said bar is coupled to an end of said pivot arm that extends over said pad such that said bar is centered over said pad and rotates concentrically about the center of said pad.
Claim 36
Dependent Claim
21 words
The apparatus as described in claim 26 wherein said plurality of spray nozzles are mounted along the length of said bar.
Claim 37
Dependent Claim
22 words
The apparatus as described in claim 26 wherein said plurality of spray nozzles may each be independently set at varying spray pressures.
Claim 38
Independent Claim
139 words
An apparatus for conditioning and rinsing a pad comprising: a pivot arm, wherein said pivot arm is located to the side of said pad when not in operation and said pivot arm is extended over the center of said pad when in operation; a bar, wherein said bar is coupled to an end of said pivot arm such that said bar rotates concentrically about the center of said bar, wherein said bar has a length approximately equal to the diameter of said pad, and wherein said bar is coupled to an end of said pivot arm that extends over said pad such that said bar is centered over said pad and rotates concentrically about the center of said pad; and a plurality of spray nozzles, wherein said plurality of spray nozzles are mounted along the length of said bar.
Claim 39
Independent Claim
139 words
An apparatus for conditioning and rinsing a pad comprising: a pivot arm, wherein said pivot arm is located to the side of said pad when not in operation and said pivot arm is extended over the center of said pad when in operation; a bar, wherein said bar is coupled to an end of said pivot arm such that said bar rotates concentrically about the center of said bar, wherein said bar has a length approximately equal to the diameter of said pad, and wherein said bar is coupled to an end of said pivot arm that extends over said pad such that said bar is centered over said pad and rotates concentrically about the center of said pad; and a plurality of spray nozzles, wherein said plurality of spray nozzles are mounted along the length of said bar.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-03-17 | 2000-09-16 | 2001-03-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-17 | 2004-09-16 | 2005-03-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-17 | 2008-09-16 | 2009-03-18 | $7700.00 | Window Closed / Lapsed |