US6023328A
Expired / Lapsed
US
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Photomask inspection method and apparatus
Assignee: Micron Technology Inc
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Filing: 1998-02-23
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Granted: 2000-02-08
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Expires: 2018-02-23
Abstract
Abstract A method and apparatus for inspection of masks is disclosed herein. The method comprises exposing a wafer at a large magnification, while maintaining the same intensity profile obtain at standard exposure magnifications. The enlargened image exposed on a wafer is then examined for defects. The apparatus for inspecting masks includes an illumination system, an optical imaging system, and a detecting device. During inspection of the wafer, the enlarged image on the wafer is examined for defects. In evaluating potential defects, an exposed die is compared with another exposed die to determine the location of the defect on the mask. Alternatively, the examination of the image can occur with respect to a pattern of the image on a design database.
Inventors
- 👤 Christophe Pierrat
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 09:37
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/956; G01N21/95607
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
68 words
A method for uncovering defects on a photomask, the method comprising the acts of: aligning a mask with a test substrate having energy sensitive coating thereon, said mask having a pattern of at least one field thereon; and projecting radiation on the mask thereby forming an image of the field on the test substrate, said image on the test substrate formed larger than said field on said mask.
Claim 2
Independent Claim
68 words
A method for uncovering defects on a photomask, the method comprising the acts of: aligning a mask with a test substrate having energy sensitive coating thereon, said mask having a pattern of at least one field thereon; and projecting radiation on the mask thereby forming an image of the field on the test substrate, said image on the test substrate formed larger than said field on said mask.
Claim 3
Dependent Claim
28 words
The method of claim 1, wherein the step of projecting radiation on the mask comprises the step of magnifying the image by at least a factor of two.
Claim 4
Independent Claim
57 words
A method for uncovering defects on a photomask, the method comprising the acts of: aligning a mask with a wafer, said mask having a pattern of at least one field thereon; and projecting radiation on the mask thereby forming an image of the field on the wafer, said image being larger than said field on said mask.
Claim 5
Independent Claim
57 words
A method for uncovering defects on a photomask, the method comprising the acts of: aligning a mask with a wafer, said mask having a pattern of at least one field thereon; and projecting radiation on the mask thereby forming an image of the field on the wafer, said image being larger than said field on said mask.
Claim 6
Dependent Claim
32 words
The method of uncovering defects as recited in claim 3, wherein the act of projecting radiation on the mask includes forming said image on the wafer larger than a plurality of fields.
Claim 7
Dependent Claim
33 words
The method of uncovering defects as recited in claim 3, wherein the step of aligning the mask with the wafer includes the step of retaining the wafer in a stage and wafer hold.
Claim 8
Dependent Claim
20 words
The method of claim 3, wherein the wafer is first coated with a resist prior to exposure to the radiation.
Claim 9
Dependent Claim
15 words
The method of claim 5, wherein the resist is processed following each exposure to radiation.
Claim 10
Independent Claim
55 words
A method for uncovering defects on a photomask, the method comprising the acts of: providing a wafer; aligning a photomask with the wafer, said photomask having a pattern thereon; projecting radiation on the photomask thereby forming an image on the wafer, said image being larger than said field on said mask; and viewing the wafer.
Claim 11
Independent Claim
55 words
A method for uncovering defects on a photomask, the method comprising the acts of: providing a wafer; aligning a photomask with the wafer, said photomask having a pattern thereon; projecting radiation on the photomask thereby forming an image on the wafer, said image being larger than said field on said mask; and viewing the wafer.
Claim 12
Dependent Claim
25 words
The method as recited in claim 8, wherein the act of projecting radiation on the photomask comprises forming a plurality of images on the wafer.
Claim 13
Dependent Claim
40 words
The method as recited in claim 9, wherein the act of viewing the wafer includes the act of inspecting the wafer, wherein one of the plurality of images is compared with at least one other formed image on the wafer.
Claim 14
Dependent Claim
40 words
The method as recited in claim 8, wherein the act of viewing the wafer includes the act of inspecting the wafer, wherein at least one of the plurality of formed images is compared with a design image of a database.
Claim 15
Dependent Claim
56 words
The method as recited in claim 8, wherein the act of viewing includes the act of inspecting the wafer comprising the acts of: determining a location of a defect on the wafer for establishing a position of said defect; and determining a location of a mask defect using said position of said defect on the wafer.
Claim 16
Independent Claim
77 words
A method for uncovering defects on a photomask, the method comprising the acts of: providing a test wafer; aligning a photomask with the test wafer, said photomask having a pattern thereon; and projecting radiation from an exposure device on the photomask thereby forming a magnified image on the wafer, said image being larger than said field on said mask; and maintaining an intensity profile substantially similar to that of a conventionally produced wafer using an optical control.
Claim 17
Independent Claim
77 words
A method for uncovering defects on a photomask, the method comprising the acts of: providing a test wafer; aligning a photomask with the test wafer, said photomask having a pattern thereon; and projecting radiation from an exposure device on the photomask thereby forming a magnified image on the wafer, said image being larger than said field on said mask; and maintaining an intensity profile substantially similar to that of a conventionally produced wafer using an optical control.
Claim 18
Dependent Claim
31 words
The method as recited in claim 13, wherein the step of maintaining the intensity profile includes modifying the optical parameters before the step of projecting the radiation from the exposure device.
Claim 19
Dependent Claim
30 words
The method as recited in claim 13, wherein the step of maintaining the intensity profile includes modifying the optical parameters during the step of projecting radiation from the exposure device.
Claim 20
Dependent Claim
20 words
The method as recited in claim 13, wherein the act of modifying the optical parameters includes modifying a numerical aperture.
Claim 21
Independent Claim
117 words
A system for inspecting a mask, the system comprising: a retention member; a test substrate having an energy sensitive coating thereon, the test substrate being held by the retention member; an illumination source; a first lens having a modifiable aperture, the first lens disposed proximate to the illumination source; a second lens disposed between the first lens and the test substrate; an optical control operatively coupled with the first lens, the second lens, the aperture, and the illumination source; and a mask having a pattern thereon, the mask being disposed between the first lens and the second lens; where radiation from the illumination source passes through the mask to form an enlarged image on the test substrate.
Claim 22
Independent Claim
117 words
A system for inspecting a mask, the system comprising: a retention member; a test substrate having an energy sensitive coating thereon, the test substrate being held by the retention member; an illumination source; a first lens having a modifiable aperture, the first lens disposed proximate to the illumination source; a second lens disposed between the first lens and the test substrate; an optical control operatively coupled with the first lens, the second lens, the aperture, and the illumination source; and a mask having a pattern thereon, the mask being disposed between the first lens and the second lens; where radiation from the illumination source passes through the mask to form an enlarged image on the test substrate.
Claim 23
Dependent Claim
27 words
The system for inspecting a mask as recited in claim 17, wherein the first lens is a condenser lens, and the second lens is a projection lens.
Claim 24
Dependent Claim
21 words
The system for inspecting a mask as recited in claim 17, wherein the retention member comprises a stage and wafer hold.
Claim 25
Dependent Claim
18 words
The system for inspecting a mask as recited in claim 17, wherein the test substrate comprises a wafer.
References Cited (Backward Citations)
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