Patent US6021582A successfully refreshed from Google Patents.
US6021582A
Expired / Lapsed
US
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Temperature control of parylene dimer
Assignee: Novellus Systems Inc
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Filing: 1998-03-16
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Granted: 2000-02-08
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Expires: 2018-03-16
Abstract
Abstract An apparatus for vaporizing Parylene AF dimer powder includes a vaporizer having a housing, a cooling coil surrounding the housing and an isolation valve coupled to an outlet end of the housing. During use, the vaporizer and a valve and manifold assembly coupled to the vaporizer are heated by an oven. The Parylene AF dimer powder inside of the vaporizer is initially maintained below its sublimation temperature by flowing a cooling fluid through the cooling coil while the oven heats up. After the oven and valve and manifold assembly reach the operating temperature, the cooling fluid flow is decreased and correspondingly the vaporizer temperature increased thus producing Parylene AF4 dimer vapor.
Inventors
- 👤 James Wing
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:01
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/60; C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4481
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
57 words
An apparatus for producing a vapor from a source material comprising: a vaporizer comprising a first housing, said first housing having an outlet end; a cooling coil surrounding said first housing; an isolation valve coupled to said outlet end of said first housing; and a heater element adapted to heat both said vaporizer and said isolation valve.
Claim 2
Independent Claim
57 words
An apparatus for producing a vapor from a source material comprising: a vaporizer comprising a first housing, said first housing having an outlet end; a cooling coil surrounding said first housing; an isolation valve coupled to said outlet end of said first housing; and a heater element adapted to heat both said vaporizer and said isolation valve.
Claim 3
Dependent Claim
35 words
The apparatus of claim 1 further comprising: a second housing; and a divider between said first housing and said second housing, wherein said first housing; said second housing and said divider define said cooling coil.
Claim 4
Dependent Claim
19 words
The apparatus of claim 2 wherein said second housing comprises a cooling fluid inlet and a cooling fluid outlet.
Claim 5
Dependent Claim
20 words
The apparatus of claim 2 wherein said second housing is sealed at a top portion thereof to said first housing.
Claim 6
Dependent Claim
16 words
The apparatus of claim 1 further comprising a thermocouple to monitor the temperature of said vaporizer.
Claim 7
Dependent Claim
31 words
The apparatus of claim 1 further comprising a removable cover removably attached to said outlet end, said isolation valve being attached to said removable cover and thereby to said outlet end.
Claim 8
Dependent Claim
19 words
The apparatus of claim 1 further comprising a vapor conduit coupled to said isolation valve and said removable cover.
Claim 9
Dependent Claim
24 words
The apparatus of claim 7 wherein said isolation valve comprises an output port, said apparatus further comprising a blank to seal said output port.
Claim 10
Dependent Claim
23 words
The apparatus of claim 1 wherein said cooling coil comprises a tube in physical contact with an outer surface of said first housing.
Claim 11
Dependent Claim
31 words
The apparatus of claim 1 further comprising a mass flow controller coupled to said cooling coil, said mass flow controller for controlling a flow of cooling fluid through said cooling coil.
Claim 12
Dependent Claim
32 words
The apparatus of claim 1 further comprising at least one valve coupled to said cooling coil, said at least one valve for controlling a flow of cooling fluid through said cooling coil.
Claim 13
Dependent Claim
16 words
The apparatus of claim 1 wherein said vaporizer in coupled to a valve and manifold assembly.
Claim 14
Dependent Claim
21 words
The apparatus of claim 12 further comprising an oven, said vaporizer and said valve and manifold assembly being in said oven.
Claim 15
Dependent Claim
18 words
The apparatus of claim 1 further comprising a mass flow controller for controlling a flowrate of said vapor.
Claim 16
Dependent Claim
19 words
The apparatus of claim 1 further comprising a carrier gas unit for providing a carrier gas to said vaporizer.
Claim 17
Dependent Claim
20 words
The apparatus of claim 15 wherein said carrier gas unit comprises a carrier gas heater for heating said carrier gas.
Claim 18
Dependent Claim
23 words
The apparatus of claim 15 wherein said carrier gas unit comprises a mass flow controller for controlling a flowrate of said carrier gas.
Claim 19
Dependent Claim
27 words
The apparatus of claim 1 further comprising a vacuum valve for connection to a vacuum source and a purge valve for connection to an inert gas source.
Claim 20
Dependent Claim
19 words
The apparatus of claim 1 wherein said heater element comprises an oven surrounding said vaporizer and said isolation valve.
Claim 21
Dependent Claim
21 words
The apparatus of claim 19 wherein a valve and manifold assembly is contained within said oven and coupled to said vaporizer.
Claim 22
Dependent Claim
19 words
The apparatus of claim 20 further comprising a mass flow controller for controlling the flow rate of said vaporizer.
References Cited (Backward Citations)
US5538758A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-02-07 | 2003-08-09 | 2004-02-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-02-07 | 2007-08-09 | 2008-02-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-02-07 | 2011-08-09 | 2012-02-08 | $7700.00 | Window Closed / Lapsed |