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US6020233A
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Ferroelectric memory device guaranteeing electrical interconnection between lower capacitor electrode and contact plug and method for fabricating the same
Assignee: SK Hynix Inc
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Filing: 1998-06-30
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Granted: 2000-02-01
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Expires: 2018-06-30
Abstract
Abstract The present invention provides an improved ferroelectric capacitor used in a memory device by providing reliable electrical interconnection between a lower electrode of the capacitor and an active region of transistor, and to provide a method for fabricating the same. A semiconductor capacitor according to the present invention comprises: a first conducting film filling an opening which is formed in an interlayer insulating film, being in contact with an active region of a semiconductor; a stacked charge storage node including a second conducting film formed on the first conducting film and an interlayer insulating film, a first diffusion preventing film formed on the second conducting film, a lower electrode film formed on the first diffusion preventing film, and a ferroelectric film formed on the lower electrode film; and a conducting spacer film formed on sidewalls of the lower electrode film, the first diffusion preventing film and the second conducting film.
Inventors
- 👤 Jae Whan Kim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:39
CPC Classifications
H; H10; H10B; H10B53/00; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/682
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
134 words
A method for fabricating a capacitor in a semiconductor device comprising the steps of: forming an insulating film having an opening exposing an active region of a semiconductor substrate; forming a first conducting film for a contact plug filling the opening; forming a second conducting film, a first diffusion preventing film, a lower electrode film of the capacitor, a ferroelectric film and a second diffusion preventing film, in this order, on the insulating film and the first conducting film, so that a stacked charge storage node is formed; patterning the stacked charge storage node; forming a conducting spacer film electrically connecting the lower electrode film to the second conducting film on sidewalls of the stacked charge storage node, thereby forming a resulting structure; and forming a third diffusion preventing film on the resulting structure.
Claim 2
Independent Claim
134 words
A method for fabricating a capacitor in a semiconductor device comprising the steps of: forming an insulating film having an opening exposing an active region of a semiconductor substrate; forming a first conducting film for a contact plug filling the opening; forming a second conducting film, a first diffusion preventing film, a lower electrode film of the capacitor, a ferroelectric film and a second diffusion preventing film, in this order, on the insulating film and the first conducting film, so that a stacked charge storage node is formed; patterning the stacked charge storage node; forming a conducting spacer film electrically connecting the lower electrode film to the second conducting film on sidewalls of the stacked charge storage node, thereby forming a resulting structure; and forming a third diffusion preventing film on the resulting structure.
Claim 3
Dependent Claim
37 words
The method in accordance with claim 1, wherein the first diffusion preventing film, the second diffusion preventing film or the conducting spacer film is one of a conducting film, an oxygen-bearing conducting film, or a semiconductor film.
Claim 4
Dependent Claim
22 words
The method in accordance with claim 1, wherein the third diffusion preventing film is formed at a temperature of below 900° C.
Claim 5
Dependent Claim
23 words
The method in accordance with claim 1, wherein the first, second or third diffusion preventing film is formed by CVD or PVD method.
Claim 6
Dependent Claim
39 words
The method in accordance with claim 1, wherein the third diffusion preventing film blocks oxygen and is selected from a group consisting of oxide films and nitride films, wherein the film includes Si, Ti, Ta, Sr, Bi or Zr.
Claim 7
Dependent Claim
21 words
The method in accordance with claim 1, wherein the first conducting film and the second conducting film are the same materials.
Claim 8
Dependent Claim
43 words
The method in accordance with claim 1, wherein the first conducting film and the second conducting film have different material properties, the method further comprises a step of forming an adhesive conducting film between the first conducting film and the second conducting film.
Claim 9
Dependent Claim
19 words
The method in accordance with claim 1, wherein the conducting spacer film is formed by a self-aligned etching process.
Claim 10
Dependent Claim
22 words
The method in accordance with claim 1, wherein topology of the conducting spacer film is lower than that of the ferroelectric film.
Claim 11
Dependent Claim
57 words
The method in accordance with claim 1, wherein the first conducting film, the second conducting film or the conducting spacer film is selected from conducting oxide films, conducting nitride films, polysilicon, silicide, metal film including Al, Ti, Cu, W, Ta, Pt, Au, Pd, Rh, Ru, Ir, Re, La, Sr, Sc or Co, or their metal alloy films.
Claim 12
Dependent Claim
49 words
The method in accordance with claim 1, wherein the lower electrode film is selected from metal films including Pt, Au, Ag, Pd, Rh, Ru, Ir or Re or their metal alloy films, conducting oxide films, conducting nitride films, or silicide films including Ru, Ir, Re, La, Sc or Co.
Claim 13
Independent Claim
178 words
A method for fabricating a capacitor in a semiconductor device comprising the steps of: forming an insulating film having an opening exposing an active region of a semiconductor substrate; forming a first conducting film for a contact plug filling the opening; forming a second conducting film, a first diffusion preventing film, a lower electrode film of the capacitor, a ferroelectric film, an upper electrode film and an etching mask film, in this order, on the insulating film and the first conducting film; patterning the etching mask film, the upper electrode film and the ferroelectric film; forming an insulating spacer film on sidewalls of the etching mask film, the upper electrode film and the ferroelectric film; etching the lower electrode film, the first diffusion preventing film and the second conducting film, using the etching mask film and the insulating spacer film as a mask; forming a conducting spacer film electrically connecting the lower electrode film to the second conducting film on sidewalls thereof, thereby forming a resulting structure; and forming a second diffusion preventing film on the resulting structure.
Claim 14
Independent Claim
178 words
A method for fabricating a capacitor in a semiconductor device comprising the steps of: forming an insulating film having an opening exposing an active region of a semiconductor substrate; forming a first conducting film for a contact plug filling the opening; forming a second conducting film, a first diffusion preventing film, a lower electrode film of the capacitor, a ferroelectric film, an upper electrode film and an etching mask film, in this order, on the insulating film and the first conducting film; patterning the etching mask film, the upper electrode film and the ferroelectric film; forming an insulating spacer film on sidewalls of the etching mask film, the upper electrode film and the ferroelectric film; etching the lower electrode film, the first diffusion preventing film and the second conducting film, using the etching mask film and the insulating spacer film as a mask; forming a conducting spacer film electrically connecting the lower electrode film to the second conducting film on sidewalls thereof, thereby forming a resulting structure; and forming a second diffusion preventing film on the resulting structure.
Claim 15
Dependent Claim
39 words
The method in accordance with claim 12, wherein the second diffusion prevention film blocks oxygen and is selected from the group consisting of oxide films and nitride films, wherein the film includes Si, Ti, Ta, Sr, Bi or Zr.
Claim 16
Dependent Claim
21 words
The method in accordance with claim 13, wherein the second diffusion preventing film is formed by CVD, PVD or SOG method.
Claim 17
Dependent Claim
19 words
The method in accordance with claim 12, wherein the insulating spacer film is formed by a self-aligned etching process.
Claim 18
Dependent Claim
19 words
The method in accordance with claim 12, wherein the conducting spacer film is formed by a self-aligned etching process.
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