US6007733A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Hard masking method for forming oxygen containing plasma etchable layer
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1998-05-29
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Granted: 1999-12-28
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Expires: 2018-05-29
Abstract
Abstract A method for forming a patterned layer within a microelectronics fabrication. There is first provided a substrate employed within a microelectronics fabrication. There is then formed over the substrate an oxygen containing plasma etchable layer, where the oxygen containing plasma etchable layer is formed of a material which is also susceptible to etching within a fluorine containing plasma. There is then formed upon the oxygen containing plasma etchable layer a hard mask layer. There is then formed upon the hard mask layer a patterned photoresist layer. There is then etched through use of a first anisotropic plasma etch method the hard mask layer to form a patterned hard mask layer while simultaneously reaching the oxygen containing plasma etchable layer and while employing the patterned photoresist layer as a first etch mask layer. The first anisotropic plasma etch method employs an etchant gas composition appropriate for etching the hard mask material. There is then stripped from the patterned hard mask layer the patterned photoresist layer, where the patterned photoresist layer is stripped employing a stripping method which does not attack the oxygen containing plasma etchable layer. Finally, there is then etched through use of a second plasma etch method the oxygen containing plasma etchable layer to form a patterned oxygen containing plasma etchable layer while employing the patterned hard mask layer as a second etch mask layer, where the second plasma etch method is the fluorine containing plasma etch method. The method is particularly useful for forming patterned low dielectric constant dielectric layers within microelectronics fabrications.
Inventors
- 👤 Syun-Ming Jang
- 👤 Ming-Hsin Huang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 20:34
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/48; H10W20/01; H10W20/071; H10W20/081
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
215 words
A method for forming a patterned layer within a microelectronics fabrication comprising: providing a substrate employed within a microelectronics fabrication; forming over the substrate an oxygen containing plasma etchable layer, the oxygen containing plasma etchable layer being formed of a material which is also susceptible to etching within a fluorine containing plasma; forming upon the oxygen containing plasma etchable layer a hard mask layer; forming upon the hard mask layer a patterned photoresist layer; etching through use of a first anisotropic plasma etch method the hard mask layer to form a patterned hard mask layer while simultaneously reaching the oxygen containing plasma etchable layer and while employing the patterned photoresist layer as a first etch mask layer, the first anisotropic plasma etch method employing an etchant gas composition appropriate for etching the hard mask material; stripping from the patterned hard mask layer the patterned photoresist layer, the patterned photoresist layer being stripped employing a stripping method which does not attack the oxygen containing plasma etchable layer; etching through use of a second plasma etch method the oxygen containing plasma etchable layer to form a patterned oxygen containing plasma etchable layer while employing the patterned hard mask layer as a second etch mask layer, the second plasma etch method being the fluorine containing plasma etch method.
Claim 2
Independent Claim
215 words
A method for forming a patterned layer within a microelectronics fabrication comprising: providing a substrate employed within a microelectronics fabrication; forming over the substrate an oxygen containing plasma etchable layer, the oxygen containing plasma etchable layer being formed of a material which is also susceptible to etching within a fluorine containing plasma; forming upon the oxygen containing plasma etchable layer a hard mask layer; forming upon the hard mask layer a patterned photoresist layer; etching through use of a first anisotropic plasma etch method the hard mask layer to form a patterned hard mask layer while simultaneously reaching the oxygen containing plasma etchable layer and while employing the patterned photoresist layer as a first etch mask layer, the first anisotropic plasma etch method employing an etchant gas composition appropriate for etching the hard mask material; stripping from the patterned hard mask layer the patterned photoresist layer, the patterned photoresist layer being stripped employing a stripping method which does not attack the oxygen containing plasma etchable layer; etching through use of a second plasma etch method the oxygen containing plasma etchable layer to form a patterned oxygen containing plasma etchable layer while employing the patterned hard mask layer as a second etch mask layer, the second plasma etch method being the fluorine containing plasma etch method.
Claim 3
Dependent Claim
34 words
The method of claim 1 wherein the microelectronics fabrication is selected from the group consisting of integrated circuit microelectronics fabrications, solar cell microelectronics fabrications, ceramic substrate microelectronics fabrications and flat panel display microelectronics fabrications.
Claim 4
Dependent Claim
46 words
The method of claim 1 wherein the oxygen containing plasma etchable layer is formed from an oxygen containing plasma etchable material selected from the group consisting of oxygen containing plasma etchable conductor materials, oxygen containing plasma etchable semiconductor materials and oxygen containing plasma etchable dielectric materials.
Claim 5
Dependent Claim
33 words
The method of claim 1 wherein the hard mask layer is formed from a hard mask material selected from the group consisting of metals, metal alloys, metal oxides, metal nitrides and composites thereof.
Claim 6
Dependent Claim
15 words
The method of claim 1 wherein the stripping method is a wet chemical stripping method.
Claim 7
Dependent Claim
27 words
The method of claim 1 wherein the fluorine containing plasma etch method employs a fluorine containing etchant gas selected from the group consisting of perfluorocarbons and hydrofluorocarbons.
Claim 8
Dependent Claim
18 words
The method of claim 6 wherein the fluorine containing plasma etch method also employs a sputtering gas component.
Claim 9
Dependent Claim
21 words
A microelectronics fabrication having formed therein a patterned oxygen containing plasma etched layer in accord with the method of claim 1.
Claim 10
Independent Claim
222 words
A method for forming a patterned dielectric layer within a microelectronics fabrication comprising: providing a substrate employed within a microelectronics fabrication; forming over the substrate an oxygen containing plasma etchable dielectric layer, the oxygen containing plasma etchable dielectric layer being formed of a material which is also susceptible to etching within a fluorine containing plasma; forming upon the oxygen containing plasma etchable dielectric layer a hard mask layer; forming upon the hard mask layer a patterned photoresist layer; etching through use of a first anisotropic plasma etch method the hard mask layer to form a patterned hard mask layer while simultaneously reaching the oxygen containing plasma etchable layer and while employing the patterned photoresist layer as a first etch mask layer, the first anisotropic plasma etch method employing an etchant gas composition appropriate for etching the hard mask material; stripping from the patterned hard mask layer the patterned photoresist layer, the patterned photoresist layer being stripped employing a stripping method which does not attack the oxygen containing plasma etchable layer; etching through use of a second plasma etch method the oxygen containing plasma etchable dielectric layer to form a patterned oxygen containing plasma etched patterned dielectric layer while employing the patterned hard mask layer as a second etch mask layer, the second plasma etch method being the fluorine containing plasma etch method.
Claim 11
Independent Claim
222 words
A method for forming a patterned dielectric layer within a microelectronics fabrication comprising: providing a substrate employed within a microelectronics fabrication; forming over the substrate an oxygen containing plasma etchable dielectric layer, the oxygen containing plasma etchable dielectric layer being formed of a material which is also susceptible to etching within a fluorine containing plasma; forming upon the oxygen containing plasma etchable dielectric layer a hard mask layer; forming upon the hard mask layer a patterned photoresist layer; etching through use of a first anisotropic plasma etch method the hard mask layer to form a patterned hard mask layer while simultaneously reaching the oxygen containing plasma etchable layer and while employing the patterned photoresist layer as a first etch mask layer, the first anisotropic plasma etch method employing an etchant gas composition appropriate for etching the hard mask material; stripping from the patterned hard mask layer the patterned photoresist layer, the patterned photoresist layer being stripped employing a stripping method which does not attack the oxygen containing plasma etchable layer; etching through use of a second plasma etch method the oxygen containing plasma etchable dielectric layer to form a patterned oxygen containing plasma etched patterned dielectric layer while employing the patterned hard mask layer as a second etch mask layer, the second plasma etch method being the fluorine containing plasma etch method.
Claim 12
Dependent Claim
34 words
The method of claim 9 wherein the microelectronics fabrication is selected from the group consisting of integrated circuit microelectronics fabrications, solar cell microelectronics fabrications, ceramic substrate microelectronics fabrications and flat panel display microelectronics fabrications.
Claim 13
Dependent Claim
43 words
The method of claim 9 wherein the oxygen containing plasma etchable dielectric layer is formed from an oxygen containing plasma etchable dielectric material selected from the group consisting of organic polymer spin-on-polymer dielectric materials, amorphous carbon materials and silsesquioxane spin-on-glass (SOG) dielectric materials.
Claim 14
Dependent Claim
33 words
The method of claim 9 wherein the hard mask layer is formed from a hard mask material selected from the group consisting of metals, metal alloys, metal oxides, metal nitrides and composites thereof.
Claim 15
Dependent Claim
15 words
The method of claim 9 wherein the stripping method is a wet chemical stripping method.
Claim 16
Dependent Claim
27 words
The method of claim 9 wherein the fluorine containing plasma etch method employs a fluorine containing etchant gas selected from the group consisting of perfluorocarbons and hydrofluorocarbons.
Claim 17
Dependent Claim
18 words
The method of claim 14 wherein the fluorine containing plasma etch method also employs a sputtering gas component.
Claim 18
Dependent Claim
22 words
A microelectronics fabrication having formed therein a patterned oxygen containing plasma etched dielectric layer in accord with the method of claim 9.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-12-27 | 2003-06-28 | 2003-12-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-12-27 | 2007-06-28 | 2007-12-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-12-27 | 2011-06-28 | 2011-12-28 | $7700.00 | Window Closed / Lapsed |