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US5972235A
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Plasma etching using polycarbonate mask and low pressure-high density plasma
Assignee: Canon Inc
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Filing: 1997-02-28
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Granted: 1999-10-26
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Expires: 2017-02-28
Abstract
Abstract Provided is a method of etching an etch layer using a polycarbonate layer as a mask. The method includes placing an etch structure in a reaction chamber, the etch structure including an etch layer underlying a polycarbonate layer, the polycarbonate layer having apertures. The etch layer is then etched using a low pressure-high density plasma generate at a pressure in the range of approximately 1 to 30 millitorr where the ionized particle concentration is at least 10 11 ions/cm 3 and where the ionized particle concentration is substantially equal throughout the volume of the reaction chamber. To increase the etch rate, the etch structure can be heated or biased. To decrease the etch rate, an inert gas can be added to the process gas mixture used to form the plasma.
Inventors
- 👤 Kristin Brigham
- 👤 Chungdee Pong
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 20:01
CPC Classifications
H; H05; H05B; H05B33/00; H05B33/10; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025; H10; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/28; H10P50/282; H10P50/283; H10P50/71; H10P50/73; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/334
Claims Analysis
Total Claims: 49
Claim 1
Independent Claim
106 words
An etching method comprising the steps of: placing an etch structure in a reaction chamber, the etch structure including an etch layer and a polycarbonate layer through which apertures extend, the etch layer underlying the polycarbonate layer; biasing the etch structure; and etching the etch layer through the apertures with a low pressure-high density plasma, the step of biasing being initiated before the step of etching, wherein the low pressure-high density plasma is generated at a pressure in the range of approximately 1 to 30 millitorr and wherein the low pressure-high density plasma has an ionized particle concentration of at least 10 11 ions/cm 3 .
Claim 2
Dependent Claim
106 words
An etching method comprising the steps of: placing an etch structure in a reaction chamber, the etch structure including an etch layer and a polycarbonate layer through which apertures extend, the etch layer underlying the polycarbonate layer; biasing the etch structure; and etching the etch layer through the apertures with a low pressure-high density plasma, the step of biasing being initiated before the step of etching, wherein the low pressure-high density plasma is generated at a pressure in the range of approximately 1 to 30 millitorr and wherein the low pressure-high density plasma has an ionized particle concentration of at least 10 11 ions/cm 3 .
Claim 3
Dependent Claim
18 words
The method of claim 1 wherein the pressure is in the range of approximately 1 to 20 millitorr.
Claim 4
Dependent Claim
17 words
The method of claim 1 wherein the ionized particle concentration is substantially equal throughout the reaction chamber.
Claim 5
Dependent Claim
32 words
The method of claim 1 wherein the etch structure further includes (a) an electrically insulating layer underlying the etch layer and (b) an electrically non-insulating (ENI) layer underlying the electrically insulating layer.
Claim 6
Dependent Claim
38 words
The method of claim 1 wherein the apertures are formed by causing charged particles to pass through the polycarbonate layer to form a multiplicity of charged-particle tracks therethrough, the polycarbonate layer thereafter being etched along the charged-particle tracks.
Claim 7
Dependent Claim
11 words
The method of claim 1 wherein the etch layer comprises chromium.
Claim 8
Dependent Claim
44 words
The method of claim 6 further including the step of generating the low pressure-high density plasma by ionizing a gas mixture which includes a first gas that provides a source of chlorine-containing ions and a second gas that provides a source of oxygen-containing ions.
Claim 9
Dependent Claim
30 words
The method of claim 7 wherein the volumetric flow ratio of the first gas to the second gas is greater than four to one and less than forty to one.
Claim 10
Dependent Claim
29 words
The method of claim 7 wherein the first gas is selected from the group consisting of chlorine, hydrogen chloride and boron trichloride and wherein the second gas is oxygen.
Claim 11
Dependent Claim
11 words
The method of claim 1 wherein the etch layer comprises aluminum.
Claim 12
Dependent Claim
57 words
The method of claim 10 further including the step of generating the low pressure-high density plasma by ionizing a gas mixture which includes a combination of a first gas that provides a source of chlorine-containing ions, a second gas that provides a source of oxygen-containing ions and a third gas that provides a source of bromine-containing ions.
Claim 13
Dependent Claim
44 words
The method of claim 11 wherein the first gas is selected from the group consisting of chlorine, hydrogen chloride and boron trichloride, wherein the second gas is oxygen and wherein the third gas is selected from the group consisting of bromine and hydrogen bromide.
Claim 14
Dependent Claim
11 words
The method of claim 1 wherein the etch layer comprises molybdenum.
Claim 15
Dependent Claim
67 words
The method of claim 13 further including the step of generating the low pressure-high density plasma by ionizing a gas mixture which includes a combination of a first gas that provides a source of fluorine-containing ions, a second gas that provides a source of nitrogen-containing ions, a third gas that provides a source of hydrogen-containing ions and a fourth gas that provides a source of oxygen-containing ions.
Claim 16
Dependent Claim
60 words
The method of claim 14 wherein the first gas is selected from the group consisting of carbon tetrafluoride, trifluoromethane, hexafluoroethane, octafluoropropane and sulfur hexafluoride, wherein the second gas is selected from the group consisting of nitrogen and ammonia, wherein the third gas is selected from the group consisting of trifluoromethane and hydrogen chloride and wherein the fourth gas is oxygen.
Claim 17
Dependent Claim
11 words
The method of claim 1 wherein the etch layer comprises tantalum.
Claim 18
Dependent Claim
47 words
The method of claim 16 further including the step of generating the low pressure-high density plasma by ionizing a gas mixture which includes a combination of a first gas that provides a source of fluorine-containing ions and a second gas that provides a source of chlorine-containing ions.
Claim 19
Dependent Claim
42 words
The method of claim 17 wherein the first gas is selected from the group consisting of carbon tetrafluoride, trifluoromethane, hexafluoroethane, octafluoropropane and sulfur hexafluoride and wherein the second gas is selected from the group consisting of chlorine, hydrogen chloride and boron trichloride.
Claim 20
Dependent Claim
14 words
The method of claim 1 wherein the etch layer is an electrically insulating material.
Claim 21
Dependent Claim
23 words
The method of claim 19 wherein the electrically insulating material is selected from the group consisting of silicon nitride, silicon oxide, and glass.
Claim 22
Dependent Claim
32 words
The method of claim 20 further including the step of generating the low pressure-high density plasma by ionizing a gas mixture which includes a gas that provides a source of fluorine-containing ions.
Claim 23
Dependent Claim
23 words
The method of claim 21 wherein the gas is selected from the group consisting of carbon tetrafluoride, trifluoromethane, hexafluoroethane, octafluoropropane and sulfur hexafluoride.
Claim 24
Dependent Claim
26 words
The method of claim 1 further including the step of generating the low pressure-high density plasma by ionizing a gas mixture which includes an inert gas.
Claim 25
Dependent Claim
11 words
The method of claim 23 wherein the inert gas is argon.
Claim 26
Dependent Claim
24 words
The method of claim 1 wherein, during etching step, the etch layer has an etch selectivity of nearly 100% relative to the polycarbonate layer.
Claim 27
Dependent Claim
14 words
The method of claim 1 further including the step of heating the etch structure.
Claim 28
Dependent Claim
47 words
The method of claim 26 wherein the step of heating entails heating the etch structure to a temperature in a temperature range having a lower boundary of approximately 20° C. and an upper boundary of approximately 5° C. below the glass transition temperature of the polycarbonate layer.
Claim 29
Dependent Claim
21 words
The method of claim 27 wherein the glass transition temperature is in the range of approximately 120° C. to 170° C.
Claim 30
Dependent Claim
28 words
The method of claim 27 wherein the step of heating entails heating the etch structure to a temperature in the range of approximately 20° C. to 40° C.
Claim 31
Dependent Claim
18 words
The method of claim 29 wherein each of the apertures has a diameter of less than 0.30 μm.
Claim 32
Dependent Claim
17 words
The method of claim 1 wherein the reaction chamber is part of an inductively coupled plasma apparatus.
Claim 33
Dependent Claim
24 words
The method of claim 31 wherein the low pressure-high density plasma is generated by coupling radio frequency (RF) power to a remote induction coil.
Claim 34
Dependent Claim
19 words
The method of claim 32 wherein the RF power is in the range of approximately 200 to 800 watts.
Claim 35
Dependent Claim
17 words
The method of claim 1 wherein the reaction chamber is part of an electron cyclotron resonance apparatus.
Claim 36
Dependent Claim
16 words
The method of claim 1 wherein the reaction chamber is part of a helicon wave apparatus.
Claim 37
Dependent Claim
14 words
The method of claim 1 further including the step of baking the etch structure.
Claim 38
Dependent Claim
24 words
The method of claim 36 wherein the step of baking is initiated before the step of placing the etch structure in the reaction chamber.
Claim 39
Dependent Claim
15 words
The method of claim 36 wherein the step of baking is performed at subatmospheric pressure.
Claim 40
Dependent Claim
108 words
An etching method comprising the steps of: placing an etch structure in a reaction chamber, the etch structure including an etch layer and a polycarbonate layer through which apertures extend, the etch layer underlying the polycarbonate layer; plasma precleaning the etch structure; and etching the etch layer through the apertures with a low pressure-high density plasma, the step of plasma precleaning being initiated before the step of etching, wherein the low pressure-high density plasma is generated at a pressure in the range of approximately 1 to 30 millitorr and wherein the low pressure-high density plasma has an ionized particle concentration of at least 10 11 ions/cm 3 .
Claim 41
Dependent Claim
108 words
An etching method comprising the steps of: placing an etch structure in a reaction chamber, the etch structure including an etch layer and a polycarbonate layer through which apertures extend, the etch layer underlying the polycarbonate layer; plasma precleaning the etch structure; and etching the etch layer through the apertures with a low pressure-high density plasma, the step of plasma precleaning being initiated before the step of etching, wherein the low pressure-high density plasma is generated at a pressure in the range of approximately 1 to 30 millitorr and wherein the low pressure-high density plasma has an ionized particle concentration of at least 10 11 ions/cm 3 .
Claim 42
Dependent Claim
25 words
The method of claim 39 wherein the step of plasma precleaning is initiated before the step of placing the etch structure in the reaction chamber.
Claim 43
Dependent Claim
19 words
The method of claim 39 wherein the step of plasma precleaning includes the step of ionizing an oxidizing gas.
Claim 44
Dependent Claim
103 words
The method of claim 1 wherein the etch layer is a first electrically non-insulating (ENI) layer, the etch structure further comprising an electrically insulating layer underling the first ENI layer and a second ENI layer underlying the electrically insulating layer, wherein the step of etching creates openings in the first ENI layer corresponding to the apertures in the polycarbonate layer, the method further comprising the steps of: etching the electrically insulating layer using the first ENI layer as a mask to form corresponding dielectric open spaces; and forming electron-emissive elements in the dielectric open spaces, the electron-emissive elements contacting the second ENI layer.
Claim 45
Dependent Claim
119 words
An etching method comprising the steps of: placing an etch structure in a reaction chamber, the etch structure including an etch layer and a polycarbonate layer through which apertures extend, the etch layer underlying the polycarbonate layer; heating the etch structure; biasing the etch structure; plasma precleaning the etch structure; and etching the etch layer through the apertures with a low pressure-high density plasma, the steps of heating, biasing and plasma precleaning being initiated before the step of etching, wherein the low pressure-high density plasma is generated at a pressure in the range of approximately 1 to 30 millitorr and wherein the low pressure-high density plasma has an ionized particle concentration of at least 10 11 ions/cm 3 .
Claim 46
Dependent Claim
119 words
An etching method comprising the steps of: placing an etch structure in a reaction chamber, the etch structure including an etch layer and a polycarbonate layer through which apertures extend, the etch layer underlying the polycarbonate layer; heating the etch structure; biasing the etch structure; plasma precleaning the etch structure; and etching the etch layer through the apertures with a low pressure-high density plasma, the steps of heating, biasing and plasma precleaning being initiated before the step of etching, wherein the low pressure-high density plasma is generated at a pressure in the range of approximately 1 to 30 millitorr and wherein the low pressure-high density plasma has an ionized particle concentration of at least 10 11 ions/cm 3 .
Claim 47
Dependent Claim
32 words
The method of claim 43 further including the step of baking the etch structure, the step of baking being initiated before the step of placing the etch structure in the reaction chamber.
Claim 48
Dependent Claim
110 words
An etching method comprising the steps of: placing an etch structure in a reaction chamber, the etch structure including an etch layer and a polycarbonate layer through which apertures extend, the etch layer underlying the polycarbonate layer, wherein the etch layer comprises an electrically non-insulating material selected from the group consisting of chromium, aluminum, molybdenum, and tantalum; and etching the etch layer through the apertures with a low pressure-high density plasma, wherein the low pressure-high density plasma is generated at a pressure in the range of approximately 1 to 30 millitorr and wherein the low pressure-high density plasma has an ionized particle concentration of at least 10.sup. ions/cm 3 .
Claim 49
Dependent Claim
110 words
An etching method comprising the steps of: placing an etch structure in a reaction chamber, the etch structure including an etch layer and a polycarbonate layer through which apertures extend, the etch layer underlying the polycarbonate layer, wherein the etch layer comprises an electrically non-insulating material selected from the group consisting of chromium, aluminum, molybdenum, and tantalum; and etching the etch layer through the apertures with a low pressure-high density plasma, wherein the low pressure-high density plasma is generated at a pressure in the range of approximately 1 to 30 millitorr and wherein the low pressure-high density plasma has an ionized particle concentration of at least 10.sup. ions/cm 3 .
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-10-25 | 2003-04-26 | 2003-10-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-10-25 | 2007-04-26 | 2007-10-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-10-25 | 2011-04-26 | 2011-10-26 | $7700.00 | Window Closed / Lapsed |