US4731155A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for forming a lithographic mask
Assignee: General Electric Co
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Filing: 1987-04-15
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Granted: 1988-03-15
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Expires: 2007-04-15
Abstract
Abstract A process is provided for forming a patterned layer of a polymeric material on a substrate for the lithographic processing thereof. A layer of polymeric material is formed on the substrate, embossed to form a pattern of peaks and valleys and dry etched to remove the residual polymeric material in the valleys, thereby exposing a portion of the substrate surface.
Inventors
- 👤 Louis S. Napoli
- 👤 John P. Russell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 14:24
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B82; B82Y; B82Y10/00; B82Y40/00
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
57 words
A process of forming a patterned layer on a substrate for the lithographic processing of the substrate comprising: providing a layer of an embossable polymeric material on the substrate; embossing a surface relief pattern in said layer; and dry etching said patterned layer to remove the thin portion thereof, thus exposing a corresponding portion of the substrate.
Claim 2
Dependent Claim
57 words
A process of forming a patterned layer on a substrate for the lithographic processing of the substrate comprising: providing a layer of an embossable polymeric material on the substrate; embossing a surface relief pattern in said layer; and dry etching said patterned layer to remove the thin portion thereof, thus exposing a corresponding portion of the substrate.
Claim 3
Dependent Claim
16 words
A process in accordance with claim 1, wherein the embossable polymeric material is a thermoplastic resin.
Claim 4
Dependent Claim
40 words
A process in accordance with claim 2, wherein the thermoplastic resin is selected from the group consisting of homopolymers of vinyl chloride, styrene, esters of acrylic acid or methacrylic acid, copolymers thereof, copolymers thereof with other monomers, polyimides and polycarbonates.
Claim 5
Dependent Claim
13 words
A process in accordance with claim 3, wherein the resin is poly(vinyl chloride).
Claim 6
Dependent Claim
12 words
A process in accordance with claim 3, wherein the resin is poly(methylmethacrylate).
Claim 7
Dependent Claim
26 words
A process in accordance with claim 1, wherein the polymeric layer is embossed with a master comprised of nickel, an alloy thereof, or chromium plated nickel.
Claim 8
Dependent Claim
16 words
A process in accordance with claim 6, wherein the master is coated with a release agent.
Claim 9
Dependent Claim
16 words
A process in accordance with claim 7, wherein the release agent is a layer of poly(tetrafluoroethylene).
Claim 10
Dependent Claim
25 words
A process in accordance with claim 1, wherein the thin portion of the surface relief pattern of the polymeric layer is removed by plasma etching.
Claim 11
Dependent Claim
18 words
A process in accordance with claim 9, wherein said portion is removed by etching in an oxygen-containing plasma.
Claim 12
Dependent Claim
15 words
A process in accordance with claim 10, wherein the oxygen-containing plasma is an oxygen plasma.
Claim 13
Dependent Claim
23 words
A process in accordance with claim 1, wherein the substrate has two major surfaces and the patterned layer is formed on both surfaces.
Claim 14
Dependent Claim
17 words
A process in accordance with claim 12, wherein the patterned layer is formed on both surfaces simultaneously.
Claim 15
Dependent Claim
23 words
A process in accordance with claim 1, additionally including the step of baking the patterned layer after removal of the thin portion thereof.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-03-15 | 1991-09-14 | 1992-03-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-15 | 1995-09-14 | 1996-03-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-15 | 1999-09-14 | 2000-03-15 | $7700.00 | Window Closed / Lapsed |