US5972114A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Film deposition apparatus with anti-adhesion film and chamber cooling means
Assignee: Tokyo Electron Ltd
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Filing: 1996-03-05
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Granted: 1999-10-26
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Expires: 2016-03-05
Abstract
Abstract An anti-adhesion film, which is difficult for the deposited film to adhere thereto, is formed on the inner surface of a process chamber. A process gas is supplied from a gas supply unit to that position in the process chamber which is opposed to a table, whereupon a metal film or metallic compound film is deposited on the surface of the object. In the film deposition process, the anti-adhesion film serves considerably to reduce the build-up of the metal film deposited on the inner surface of the process chamber, especially that surface of the gas supply unit which is opposed to the table. Although at least a maintenance operation such as wet cleaning is necessary, therefore, the frequency of such operation can be lowered substantially, so that the operating efficiency of the apparatus can be improved.
Inventors
- 👤 Tomihiro Yonenaga
- 👤 Mitsuhiro Tachibana
- 👤 Sumi Tanaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:18
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45565; C23C16/4401; C23C16/4404; C23C16/45572; C23C16/48; C23C16/481
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
122 words
A film deposition apparatus for depositing a metal film or metallic compound film on a surface of an object to be processed, comprising: a chamber structure, defining a process chamber for depositing the film on the object, and including a table for carrying thereon the object in said process chamber; a gas supply unit for supplying a process gas to that position in said process chamber which is opposed to said table, thereby depositing the metal film or metallic compound film on the surface of the object; and an anti-adhesion film, formed on a surface in said process chamber, and making it difficult for the deposited film to adhere thereon, wherein said anti-adhesion film is one of SiO 2 , and LiF.
Claim 2
Dependent Claim
122 words
A film deposition apparatus for depositing a metal film or metallic compound film on a surface of an object to be processed, comprising: a chamber structure, defining a process chamber for depositing the film on the object, and including a table for carrying thereon the object in said process chamber; a gas supply unit for supplying a process gas to that position in said process chamber which is opposed to said table, thereby depositing the metal film or metallic compound film on the surface of the object; and an anti-adhesion film, formed on a surface in said process chamber, and making it difficult for the deposited film to adhere thereon, wherein said anti-adhesion film is one of SiO 2 , and LiF.
Claim 3
Dependent Claim
31 words
The film deposition apparatus according to claim 1, wherein said gas supply unit has said surface having said anti-adhesion film, said surface with said anti-adhesion film being opposed to said table.
Claim 4
Dependent Claim
19 words
The film deposition apparatus according to claim 1, wherein said structure includes a compartment wall defining the process chamber.
Claim 5
Dependent Claim
20 words
The film deposition apparatus according to claim 1, wherein said metal film or metallic compound film contains tungsten or titanium.
Claim 6
Dependent Claim
37 words
A film deposition apparatus according to claim 1, further comprising cooling means for cooling the inner wall of said chamber structure, said cooling means comprising a coolant passage formed in the side wall of said chamber structure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-10-25 | 2003-04-26 | 2003-10-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-10-25 | 2007-04-26 | 2007-10-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-10-25 | 2011-04-26 | 2011-10-26 | $7700.00 | Window Closed / Lapsed |