US5963329A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for measuring the profile of small repeating lines
Assignee: Nanometrics Inc
•
Filing: 1997-10-31
•
Granted: 1999-10-05
•
Expires: 2017-10-31
Abstract
Abstract A method for nondestructively determining the line profile or topographical cross-section of repeating lines on a substrate is provided, including line thickness, line width, and the shape of the line edge. A substrate having a repeating structure, such as a grating, is illuminated with broad-band radiation. Diffracted radiation is collected, measured, and recorded as a function of wavelength to provide an intensity versus wavelength curve. An initial model of the line profile of the grating, a model of the broad band radiation shined on the grating, and a model of the interaction of the radiation with the model grating is provided to a data processing machine. The machine uses Maxwell's equations to calculate a model diffracted intensity versus wavelength curve, and the measured intensity curve is then compared with this modeled intensity versus wavelength curve. The line profile in the model is then adjusted and the model intensity curve recalculated to improve agreement between the measured and calculated intensity curves. The model is repeatedly adjusted and the intensity recalculated until the best agreement between the two intensity versus wavelength curves is achieved, thereby providing the line profile. The method similarly provides composition profiles, such as doping depth profiles and optical coating profiles by taking advantage of the relationship between index of refraction and composition.
Inventors
- 👤 Edward W. Conrad
- 👤 David P. Paul
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 12:44
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70491; G03F7/705; G01; G01B; G01B11/00; G01B11/02; G01B11/14; G01B11/24; G03F7/70605; G03F7/70616; G03F7/70625
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
117 words
A method of determining a profile, comprising the steps of: (a) providing a substrate having a repeating structure comprising a plurality of lines, said lines having substantially identical profiles; (b) illuminating said repeating structure with radiation wherein said radiation diacts, said diffracted radiation having an intensity; (c) measuring said intensity; (d) providing a model structure on a data processing machine, said model structure comprising a repeating structure on said substrate, said model structure comprising a model profile, wherein said model profile comprises an edge having more than one X position; (e) mathematically predicting a predicted diffracted radiation intensity when said model structure is illuminated with said radiation; and (f) comparing said predicted intensity with said measured intensity.
Claim 2
Independent Claim
117 words
A method of determining a profile, comprising the steps of: (a) providing a substrate having a repeating structure comprising a plurality of lines, said lines having substantially identical profiles; (b) illuminating said repeating structure with radiation wherein said radiation diacts, said diffracted radiation having an intensity; (c) measuring said intensity; (d) providing a model structure on a data processing machine, said model structure comprising a repeating structure on said substrate, said model structure comprising a model profile, wherein said model profile comprises an edge having more than one X position; (e) mathematically predicting a predicted diffracted radiation intensity when said model structure is illuminated with said radiation; and (f) comparing said predicted intensity with said measured intensity.
Claim 3
Dependent Claim
31 words
A method as recited in claim 1, further comprising the step of adjusting said model structure and repeating said steps (e) and (f) to improve agreement in said comparing step (f).
Claim 4
Dependent Claim
19 words
A method as recited in claim 1, wherein said model structure is one of a library of model structures.
Claim 5
Dependent Claim
15 words
A method as recited in claim 1, wherein said profile comprises a line edge profile.
Claim 6
Dependent Claim
16 words
A method as recited in claim 1, wherein said profile comprises a composition versus depth profile.
Claim 7
Dependent Claim
17 words
A method as recited in claim 5, wherein composition varies with depth according to a doping profile.
Claim 8
Dependent Claim
20 words
A method as recited in claim 5, wherein composition varies with depth according to layering of films on a substrate.
Claim 9
Dependent Claim
36 words
A method as recited in claim 1, wherein said lines comprise a film on said substrate, said film having a film thickness and a film index of refraction, said substrate having a substrate index of refraction.
Claim 10
Dependent Claim
17 words
A method as recited in claim 1, wherein said plurality of lines comprises at least 5 lines.
Claim 11
Dependent Claim
17 words
A method as recited in claim 1, wherein said diffracted radiation of said step (b) is reflected.
Claim 12
Dependent Claim
12 words
A method as recited in claim 1, wherein said radiation is light.
Claim 13
Dependent Claim
20 words
A method as recited in claim 11, wherein in said illuminating step (b) said light has a range of wavelengths.
Claim 14
Dependent Claim
19 words
A method as recited in claim 12, wherein said wavelength range comprises about 450 nm to about 750 nm.
Claim 15
Dependent Claim
19 words
A method as recited in claim 12, wherein said wavelength range comprises about 1 um to about 40 um.
Claim 16
Dependent Claim
34 words
A method as recited in claim 1, wherein said radiation diffracts with an intensity as a function of wavelength and, wherein, in said measuring step (c), measuring said intensity as a function of wavelength.
Claim 17
Dependent Claim
31 words
A method as recited in claim 1, wherein in said predicting step (e), mathematically predicting the intensity of radiation that would be reflected from the model as a function of wavelength.
Claim 18
Dependent Claim
24 words
A method as recited in claim 1, wherein in said illuminating step (b), illuminating said substrate at a range of incident angles near normal.
Claim 19
Dependent Claim
24 words
A method as recited in claim 17, wherein said range of incident angles is equal to or less than about 5 degrees from normal.
Claim 20
Dependent Claim
26 words
A method as recited in claim 18, wherein said illuminating step illuminates said substrate through a lens having a numerical aperture of less than about 1.
Claim 21
Dependent Claim
19 words
A method as recited in claim 1, wherein said diffracted light is measured at a fixed range of angles.
Claim 22
Dependent Claim
19 words
A method as recited in claim 20, wherein said range is equal to or less than about 5 degrees.
Claim 23
Dependent Claim
61 words
A method as recited in claim 21, wherein light incident on said lines is reflected and diffracted by said plurality of lines into a plurality of orders including a zeroth order, further wherein, said range being set to limit measured light to said zeroth order, light in other orders being diffracted at an angle larger than said fixed range of angles.
Claim 24
Dependent Claim
51 words
A method as recited in claim 22, wherein said model further comprises a range of incident angles, an incident light wavelength range, a range of reflected angles, a film index of refraction, and a substrate index of refraction, and wherein said line profile includes line width, edge shape, and film thickness.
Claim 25
Dependent Claim
47 words
A method as recited in claim 23, wherein said mathematical predicting step (d) comprises using the range of incident angles, the range of incident wavelengths, the range of reflected angles, and Maxwell's equations to predict the amount of light that would be reflected from the model profile.
Claim 26
Dependent Claim
28 words
A method as recited in claim 24, wherein said lines comprise one of photoresist lines, metal lines, insulator lines, multiple composite stacks, planarized embedded profiles, and phase-shift masks.
Claim 27
Dependent Claim
58 words
A method as recited in claim 24, further comprising the step of adjusting said model structure and repeating said steps (e) and (f) to improve agreement in said comparing step (f) until said predicted intensity and said measured intensity agree within a convergence limit, wherein, after said convergence is achieved said model line profile describes said line profile.
Claim 28
Independent Claim
143 words
A method of determining the profile of a repeating structure comprising the steps of: (a) providing a substrate having a plurality of lines having substantially identical line profiles and spacings; (b) illuminating said lines with radiation having a range of wavelengths, wherein said radiation reflects with an intensity as a function of wavelength; (c) measuring the intensity of radiation reflected from said lines as a function of wavelength; (d) providing a model of the line profile and line spacing, wherein said model of the line profile comprises an edge having more than one X position; (e) mathematically predicting the intensity of radiation that would be reflected from the model as a function of wavelength; and (f) comparing the predicted intensity with the measured intensity; and (g) adjusting the model and repeating steps (e) and (f) to improve agreement in said comparing step (f).
Claim 29
Independent Claim
143 words
A method of determining the profile of a repeating structure comprising the steps of: (a) providing a substrate having a plurality of lines having substantially identical line profiles and spacings; (b) illuminating said lines with radiation having a range of wavelengths, wherein said radiation reflects with an intensity as a function of wavelength; (c) measuring the intensity of radiation reflected from said lines as a function of wavelength; (d) providing a model of the line profile and line spacing, wherein said model of the line profile comprises an edge having more than one X position; (e) mathematically predicting the intensity of radiation that would be reflected from the model as a function of wavelength; and (f) comparing the predicted intensity with the measured intensity; and (g) adjusting the model and repeating steps (e) and (f) to improve agreement in said comparing step (f).
Claim 30
Independent Claim
227 words
An apparatus for determining the profile of a line on a substrate, the apparatus comprising: a radiation source for illuminating the substrate with radiation, said substrate comprising a repeating structure, said repeating structure comprising a plurality of lines and spaces between said lines, said lines having substantially the same line profile, said spaces being substantially identical, the illuminating of the repeating structure for obtaining diffraction of said radiation, wherein said diffracted radiation has an intensity; a polarizer for selecting a single polarization of light of incident or diffracted light; a detector for measuring said intensity; a data processing machine comprising a computer model structure, said model structure comprising a model repeating structure on a model substrate, said repeating structure comprising a plurality of model lines and model spaces between said model lines, said model lines having substantially the same model line profile, each said model line comprising an edge having more than one X position, said model spaces being substantially identical, said data processing machine for mathematically predicting a predicted diffracted radiation intensity when said model structure is illuminated with said radiation source; said data processing machine further comprising means for comparing said predicted intensity with said measured intensity; and said data processing machine further comprising means for adjusting said model structure and for repeating said predicting and comparing steps to improve agreement in said comparing step.
Claim 31
Independent Claim
227 words
An apparatus for determining the profile of a line on a substrate, the apparatus comprising: a radiation source for illuminating the substrate with radiation, said substrate comprising a repeating structure, said repeating structure comprising a plurality of lines and spaces between said lines, said lines having substantially the same line profile, said spaces being substantially identical, the illuminating of the repeating structure for obtaining diffraction of said radiation, wherein said diffracted radiation has an intensity; a polarizer for selecting a single polarization of light of incident or diffracted light; a detector for measuring said intensity; a data processing machine comprising a computer model structure, said model structure comprising a model repeating structure on a model substrate, said repeating structure comprising a plurality of model lines and model spaces between said model lines, said model lines having substantially the same model line profile, each said model line comprising an edge having more than one X position, said model spaces being substantially identical, said data processing machine for mathematically predicting a predicted diffracted radiation intensity when said model structure is illuminated with said radiation source; said data processing machine further comprising means for comparing said predicted intensity with said measured intensity; and said data processing machine further comprising means for adjusting said model structure and for repeating said predicting and comparing steps to improve agreement in said comparing step.
References Cited (Backward Citations)
US4141780A
Cited
US4408884A
Cited
JPS59225038A
Cited
US4593368A
Cited
US4748335A
Cited
US4707610A
Cited
US5042949A
Cited
SU1747877A1
Cited
US5349440A
Cited
US5164790A
Cited
EP0601580A1
Cited
US5363171A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-10-04 | 2003-04-05 | 2003-10-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-10-04 | 2007-04-05 | 2007-10-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-10-04 | 2011-04-05 | 2011-10-05 | $7700.00 | Window Closed / Lapsed |