Abstract Metrology method and apparatus (10) for determining a characteristic of an object's surface. The apparatus includes a multiple wavelength source (12) having an optical output. The source is comprised of a multimode laser diode (18) for simultaneously providing a plurality of wavelengths from which a synthetic wavelength is derived for metrology purposes. The apparatus further includes a beamsplitter (30), preferably a polarizing beam splitter, coupled to the optical output for providing a reference beam (32) and a measurement beam (34), the measurement beam impinging on the surface and the reference beam being phase modulated. The apparatus also includes optical elements and devices for detecting a phase difference between the reference beam and a reflected measurement beam for determining the characteristic of the surface. A diffraction grating (60) is blazed for a nominal characteristic output of the laser diode, such as 785 nanometers, and spatially resolves the various wavelengths of the returned laser light. The resolved wavelengths are provided as two beams by a lens system (62) and are detected by a pair of photodetectors (64, 66). A data processor ( 68) coupled to an output of the photodetectors determines an interferometric phase at the two wavelengths and the surface characteristic.
Synthetic wavelength optical metrology apparatus for determining a characteristic of a surface, said apparatus comprising: a multimode laser diode operable to emit a source beam including a range of stable wavelengths; means for receiving the source beam to provide a phase modulated reference beam and a measurement beam, the measurement beam being focused to impinge on the surface; means for combining the reference beam with the measurement beam reflected by the surface; means for detecting, simultaneously at a plurality of wavelengths, a phase difference between the reference beam and the reflected measurement beam for determining a characteristic of the surface; and means for translating the surface with respect to the measurement beam such that a profile of the surface is determined.
Claim 2
Dependent Claim
121 words
Synthetic wavelength optical metrology apparatus for determining a characteristic of a surface, said apparatus comprising: a multimode laser diode operable to emit a source beam including a range of stable wavelengths; means for receiving the source beam to provide a phase modulated reference beam and a measurement beam, the measurement beam being focused to impinge on the surface; means for combining the reference beam with the measurement beam reflected by the surface; means for detecting, simultaneously at a plurality of wavelengths, a phase difference between the reference beam and the reflected measurement beam for determining a characteristic of the surface; and means for translating the surface with respect to the measurement beam such that a profile of the surface is determined.
Claim 3
Dependent Claim
55 words
Apparatus as set forth in claim 1 wherein the detecting means includes a single mode optical fiber for spatially filtering the combined reference beam and the reflected measurement beam and for directing the combined beams to a diffraction grating means for separating the combined beams into a plurality of beams each having an associated wavelength.
Claim 4
Dependent Claim
64 words
Apparatus as set forth in claim 2 and further including: a plurality of photodetectors individual ones of which being disposed for receiving one of the plurality of beams for measuring a beam intensity thereof; and means, coupled to an output of each of the plurality of photodetectors, for processing the output thereof to determine a displacement of the surface relative to a reference point.
Claim 5
Dependent Claim
35 words
Apparatus as set forth in claim 1 wherein the providing means includes a polarizing beam splitter disposed for receiving the source beam and for orthogonally polarizing the reference beam with respect to the measurement beam.
Claim 6
Dependent Claim
24 words
Apparatus as set forth in claim 1 further including a single mode optical fiber disposed for coupling the source beam to the providing means.