US5153669A
Expired / Lapsed
US
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Three wavelength optical measurement apparatus and method
Assignee: Raytheon Co
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Filing: 1991-03-27
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Granted: 1992-10-06
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Expires: 2011-03-27
Abstract
Abstract Optical metrology method and apparatus wherein three optical wavelengths are generated and separated into a reference beam (RB) and an object beam (OB) having substantially equal optical path lengths. After reflecting from a surface being measured OB is combined with RB and provided to sensors which measure the intensity associated with each of the wavelengths. Any difference between the intensities is indicative of a difference in the optical path lengths of OB and RB and is a function of the polarization state of each of the three returned wavelengths. Differences in optical path length are shown to be indicative of a displacement of the object being measured. Preferably, two multimode laser diodes (12,14) are provided for generating the three optical wavelengths. Two synthetic wavelengths are derived from the three optical wavelengths and are employed to improve the precision of measurement while retaining a large dynamic range made possible by the use of a large synthetic wavelength.
Inventors
- 👤 P. J. DeGroot
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 07:03
CPC Classifications
G; G01; G01B; G01B9/00; G01B9/02; G01B9/02015; G01B9/02027; G01B9/02001; G01B9/02007; G01B9/02055; G01B9/02075; G01B9/02078; G01D; G01D5/00; G01D5/26; G01D5/266; G01B2290/00; G01B2290/30; G01B2290/70
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
140 words
Optical metrology apparatus comprising: optical source means including a plurality of laser means, at least one of which is a multi-mode laser diode means, the optical source means having an output beam that simultaneously includes at least three discrete optical wavelengths; means, coupled to an output of the optical source means, for separating the output beam into a reference beam and into a measurement beam, the measurement beam being directed to a surface of interest; means for combining into a combined beam the reference beam and a portion of the measurement beam that reflects from the surface of interest; and means, responsive to a relative interferometric phase at each of the three optical wavelengths within the combined beam, for detecting a difference between an optical path length of the reference beam and an optical path length of the measurement beam.
Claim 2
Dependent Claim
140 words
Optical metrology apparatus comprising: optical source means including a plurality of laser means, at least one of which is a multi-mode laser diode means, the optical source means having an output beam that simultaneously includes at least three discrete optical wavelengths; means, coupled to an output of the optical source means, for separating the output beam into a reference beam and into a measurement beam, the measurement beam being directed to a surface of interest; means for combining into a combined beam the reference beam and a portion of the measurement beam that reflects from the surface of interest; and means, responsive to a relative interferometric phase at each of the three optical wavelengths within the combined beam, for detecting a difference between an optical path length of the reference beam and an optical path length of the measurement beam.
Claim 3
Dependent Claim
22 words
Apparatus as set forth in claim 1 and further including an optical fiber for conveying the output beam and the combined beam.
Claim 4
Dependent Claim
17 words
Apparatus as set forth in claim 2 wherein the optical fiber is a single mode optical fiber.
Claim 5
Dependent Claim
35 words
Apparatus as set forth in claim 1 wherein the detecting means includes diffraction grating means for separating the combined beam into a plurality of beams each of which corresponds to one of the three wavelengths.
Claim 6
Dependent Claim
34 words
Apparatus as set forth in claim 4 and further comprising a plurality of photodetectors individual ones of which are disposed for receiving one of the plurality of beams for measuring a beam intensity thereof.
Claim 7
Dependent Claim
36 words
Apparatus as set forth in claim 5 and further including means, coupled to an output of each of the plurality of detectors, for processing the output thereof to determine a displacement of the surface of interest.
Claim 8
Dependent Claim
34 words
Apparatus as set forth in claim 1 wherein the optical source means includes a first multi-mode laser diode means providing at least two wavelengths and a second laser diode means providing a third wavelength.
Claim 9
Dependent Claim
19 words
Apparatus as set forth in claim 7 wherein each of the laser diode means is a multi-mode laser diode.
Claim 10
Dependent Claim
40 words
Apparatus as set forth in claim 1 wherein the separating means includes a polarizing beam splitter means disposed for receiving the optical output of the source means and for orthogonally polarizing the reference beam with respect to the measurement beam.
Claim 11
Dependent Claim
23 words
Apparatus as set forth in claim 1 wherein the separating means includes means for focussing the measurement beam upon the surface of interest.
Claim 12
Dependent Claim
29 words
Apparatus as set forth in claim 1 wherein the detecting means includes means for deriving a first synthetic wavelength and a second synthetic wavelength from the three optical wavelengths.
Claim 13
Dependent Claim
23 words
Apparatus as set forth in claim 1 and further including means for phase modulating the reference beam with respect to the measurement beam.
Claim 14
Independent Claim
128 words
A method for performing optical metrology, comprising the steps of: operating a plurality of laser means, at least one of which is a multimode laser diode means, for generating an optical output having a plurality of optical wavelengths; modifying the optical output to provide a phase modulated reference beam and a measurement beam having a fixed polarization relationship one to another, the measurement beam being directed to and reflecting from a surface of interest; combining the phase modulated reference beam and the reflected measurement beam into a combined beam; and responsive to a relative interferometric phase at each of the three optical wavelengths within the combined beam, detecting a difference between an optical path length of the reference beam and an optical path length of the measurement beam.
Claim 15
Independent Claim
128 words
A method for performing optical metrology, comprising the steps of: operating a plurality of laser means, at least one of which is a multimode laser diode means, for generating an optical output having a plurality of optical wavelengths; modifying the optical output to provide a phase modulated reference beam and a measurement beam having a fixed polarization relationship one to another, the measurement beam being directed to and reflecting from a surface of interest; combining the phase modulated reference beam and the reflected measurement beam into a combined beam; and responsive to a relative interferometric phase at each of the three optical wavelengths within the combined beam, detecting a difference between an optical path length of the reference beam and an optical path length of the measurement beam.
Claim 16
Dependent Claim
22 words
A method as set forth in claim 13 wherein the step of modifying includes a step of phase modulating the reference beam.
Claim 17
Dependent Claim
33 words
A method as set forth in claim 13 wherein the step of detecting includes a step of deriving a first synthetic wavelength and a second synthetic wavelength from the plurality of optical wavelengths.
Claim 18
Dependent Claim
25 words
A method as set forth in claim 13 wherein the step of operating includes a step of simultaneously operating at least two multi-mode laser diodes.
Claim 19
Dependent Claim
24 words
A method as set forth in claim 13 and including a step of translating the surface of interest with respect to the measurement beam.
Claim 20
Independent Claim
147 words
A method of performing optical metrology to determine an absolute distance (L), comprising the steps of: operating at least one multi-mode laser diode means while generating a plurality of optical wavelengths (λ) such that λ 1 <λ 2 <λ 3 , and deriving two corresponding synthetic wavelengths Λ 12 >Λ 13 therefrom; for L<Λ 12 /4, determining a first synthetic fringe order (M 12 ) in accordance with M.sub.12 =f(M.sub.12)=f(m.sub.1)-f(m.sub.2), where m 1 is the optical fringe order of λ 1 and m 2 is the optical fringe order of λ 2 ; employing M 12 in determining M 13 in accordance with M.sub.13 =f(M.sub.13)+I((M.sub.12 Λ.sub.12 /Λ.sub.13)-f(M.sub.13)), where the function I(a) yields an integer nearest to a value of the argument (a); determining the optical fringe order m 1 in accordance with m.sub.1 =f(m.sub.1)+I((M.sub.13 Λ.sub.13 /λ.sub.1)-f(m.sub.1)); and determining the absolute distance L in accordance with L=(M.sub.ij Λ.sub.ij)/2.
Claim 21
Independent Claim
147 words
A method of performing optical metrology to determine an absolute distance (L), comprising the steps of: operating at least one multi-mode laser diode means while generating a plurality of optical wavelengths (λ) such that λ 1 <λ 2 <λ 3 , and deriving two corresponding synthetic wavelengths Λ 12 >Λ 13 therefrom; for L<Λ 12 /4, determining a first synthetic fringe order (M 12 ) in accordance with M.sub.12 =f(M.sub.12)=f(m.sub.1)-f(m.sub.2), where m 1 is the optical fringe order of λ 1 and m 2 is the optical fringe order of λ 2 ; employing M 12 in determining M 13 in accordance with M.sub.13 =f(M.sub.13)+I((M.sub.12 Λ.sub.12 /Λ.sub.13)-f(M.sub.13)), where the function I(a) yields an integer nearest to a value of the argument (a); determining the optical fringe order m 1 in accordance with m.sub.1 =f(m.sub.1)+I((M.sub.13 Λ.sub.13 /λ.sub.1)-f(m.sub.1)); and determining the absolute distance L in accordance with L=(M.sub.ij Λ.sub.ij)/2.
References Cited (Backward Citations)
US4886362A
Cited
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