Patent US5960270A successfully refreshed from Google Patents.
US5960270A
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Method for forming an MOS transistor having a metallic gate electrode that is formed after the formation of self-aligned source and drain regions
Assignee: NXP USA Inc
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Filing: 1997-08-11
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Granted: 1999-09-28
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Expires: 2017-08-11
Abstract
Abstract A method for forming a metal gate MOS transistor begins by forming source and drain electrodes (26, 28, and/or 118) within a substrate (12 or 102). These source and drain regions (26, 28, and 118) are self-aligned to a lithographically-patterned feature (24 or 108). After formation of the source and drain regions, the features (24 and 108 are processed to fill these features with a metallic gate layer (28a or 128a). This metal layer (28a or 128a) is then chemically mechanically polished (CMPed) to form a metallic plug region (28b or 128b) within the features (24 or 108). The plug region (28b or 128b) is formed in either an inlaid or dual inlaid manner wherein this metallic plug region (28b or 128b) is self-aligned to the previously formed source and drain regions and preferably functions as a metal MOS gate region.
Inventors
- 👤 Veena Misra
- 👤 Suresh Venkatesan
- 👤 Christopher C. Hobbs
- 👤 Brad Smith
- 👤 Jeffrey S. Cope
- 👤 Earnest B. Wilson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:04
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0225; H10D30/027; H10D30/0273; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01324; H10D64/018; H10D64/20; H10D64/27; H10D64/311; H10D64/411; H10D64/511; H10D64/517; H10D64/518; H10P; H10P32/00; H10P32/10; H10P32/14; H10P32/1408; H10P32/1414; H10P32/17; H10P32/171; H10D30/0217; H10D30/0227; H10D30/60; H10D30/601; H10D64/017; H10D64/60; H10D64/66; H10D64/665; H10D64/666; H10D64/667; H10D64/668; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/084
Claims Analysis
Total Claims: 49
Claim 1
Independent Claim
121 words
A method for forming a semiconductor structure, the method comprising the steps of: providing a semiconductor substrate; forming a feature over the semiconductor substrate wherein the feature is made of a semiconductive material; forming doped regions within the semiconductor substrate using the feature as a self alignment feature, the doped regions forming both a source region and a drain region for the semiconductor structure; and removing the feature to create an opening that contains no semiconductor material and filling the opening created by the removal of the feature with a metal material after the doped regions have been formed, the metal material forming a metal gate electrode of the semiconductor structure that is self-aligned to the source region and drain region.
Claim 2
Independent Claim
121 words
A method for forming a semiconductor structure, the method comprising the steps of: providing a semiconductor substrate; forming a feature over the semiconductor substrate wherein the feature is made of a semiconductive material; forming doped regions within the semiconductor substrate using the feature as a self alignment feature, the doped regions forming both a source region and a drain region for the semiconductor structure; and removing the feature to create an opening that contains no semiconductor material and filling the opening created by the removal of the feature with a metal material after the doped regions have been formed, the metal material forming a metal gate electrode of the semiconductor structure that is self-aligned to the source region and drain region.
Claim 3
Dependent Claim
19 words
The method of claim 1 further comprising: siliciding source and drain regions within the substrate before removing the feature.
Claim 4
Dependent Claim
34 words
The method of claim 1, wherein the method of forming a feature includes the substeps of: forming a sidewall spacer around the spacer wherein the metal gate electrode is formed laterally adjacent the spacer.
Claim 5
Dependent Claim
68 words
The method of claim 1, wherein: the step of forming a feature includes the substep of: forming a temporary gate structure as the feature through which source region and drain region self-alignment is obtained; and the step of filling the feature includes the substeps of: forming a dielectric layer adjacent to the temporary gate structure; removing the temporary gate structure; and filling the feature with the metal material.
Claim 6
Dependent Claim
82 words
The method of claim 1 wherein the step of forming doped regions comprises: forming a temporary gate region; ion implanting dopant atoms to form the source and drain regions wherein the source and drain regions are self-aligned to the temporary gate region; removing the temporary gate region to form a void region; and filling the void region with the metal material to form the metal gate electrode wherein the metal gate electrode is substantially similar in dimensions to the temporary gate region.
Claim 7
Independent Claim
112 words
A method of forming a semiconductor structure, wherein the method comprises the steps of: providing a semiconductor substrate; forming a dopant-containing region over the semiconductor substrate, the dopant-containing region containing dopant atoms; forming a dielectric layer over the dopant-containing region; forming an opening through the dielectric layer and the dopant-containing region to expose a portion of the semiconductor substrate; forming at least one doped region in the semiconductor substrate by thermally driving the dopant atoms from the dopant-containing region into the semiconductor substrate, the at least one doped region being self-aligned to at least one edge of the opening; and filling the opening with a metal to form a metal gate region.
Claim 8
Independent Claim
112 words
A method of forming a semiconductor structure, wherein the method comprises the steps of: providing a semiconductor substrate; forming a dopant-containing region over the semiconductor substrate, the dopant-containing region containing dopant atoms; forming a dielectric layer over the dopant-containing region; forming an opening through the dielectric layer and the dopant-containing region to expose a portion of the semiconductor substrate; forming at least one doped region in the semiconductor substrate by thermally driving the dopant atoms from the dopant-containing region into the semiconductor substrate, the at least one doped region being self-aligned to at least one edge of the opening; and filling the opening with a metal to form a metal gate region.
Claim 9
Dependent Claim
63 words
The method of claim 6, wherein the step of forming a doped region further comprises: forming a drain region and a source region as the at least one doped region; and the step of filling the opening further comprises: filling the opening with a metal to form a metal gate electrode which controls current conduction between the source region and the drain region.
Claim 10
Dependent Claim
38 words
The method of claim 6, wherein the step of forming the dopant-containing region further composes: forming the dopant-containing region from one of a group of a cobalt silicide region, a nickel silicide region, or a titanium silicide region.
Claim 11
Dependent Claim
31 words
The method of claim 6 further comprising the step of: forming a spacer along a vertical portion of the opening prior to the step of filling the opening with the metal.
Claim 12
Dependent Claim
21 words
The method of claim 6 further comprising the step of: forming a well implant region by ion implanting through the opening.
Claim 13
Dependent Claim
23 words
The method of claim 6 further comprising the step of: forming a threshold adjust region by ion implanting dopant atoms through the opening.
Claim 14
Dependent Claim
22 words
The method of claim 6 further comprising the step of: forming a well implant prior to the step of forming the opening.
Claim 15
Dependent Claim
50 words
The method of claim 6, wherein the step of forming a dopant-containing region further composes the step of: forming a dopant-containing region including a dopant by driving the dopant from the dopant-containing region using thermal diffusion where the dopant is selected from a group consisting of: arsenic, boron and phosphorous.
Claim 16
Dependent Claim
41 words
The method of claim 6, wherein the step of forming a dopant-containing region further composes the step of: forming a dopant-containing region by thermal diffusing both arsenic and phosphorus from the dopant-containing region to form a lightly doped drain (LDD) structure.
Claim 17
Dependent Claim
23 words
The method of claim 6 further comprising the step of: forming a gate dielectric region over the semiconductor substrate exposed by the opening.
Claim 18
Dependent Claim
38 words
The method of claim 6, wherein the step of forming a dielectric region further comprises: forming a high-k dielectric region as the dielectric layer, wherein the high-k dielectric region has a dielectric constant of greater than approximately 5.0.
Claim 19
Dependent Claim
37 words
The method of claim 16, wherein the step of forming a dielectric region further comprises: forming the high-k dielectric region using a material selected from a group consisting of: TiO 2 or Ta 2 O 5 .
Claim 20
Dependent Claim
27 words
The method of claim 6 further comprising the step of: forming a sacrificial oxide after the step of forming an opening and before forming a gate oxide.
Claim 21
Dependent Claim
40 words
The method of claim 6, wherein the step of filling the opening further comprises: filling the opening with a metal to form a dual inlaid structure wherein dual inlaid structure includes the metal gate region and a metallic interconnect portion.
Claim 22
Dependent Claim
40 words
The method of claim 6, wherein the step of filling the opening further comprises: filling the opening by depositing a metal material and polishing the metal material using one of a chemical mechanical polishing process and an etch back process.
Claim 23
Dependent Claim
29 words
The method of claim 6, wherein the step of forming a dielectric layer further comprises: forming the dielectric layer as a composite layer comprising silicon nitride and an oxide.
Claim 24
Dependent Claim
33 words
The method of claim 6, wherein the step of forming an opening further comprises: etching the dielectric layer by using a plasma etch and etching the dopant-containing region by using a wet etch.
Claim 25
Dependent Claim
64 words
The method of claim 6, wherein the step of forming a dopant-containing region further comprises: using the opening to segment the dopant-containing region into a plurality of segmented regions; and doping, by ion implantation, a first set of the plurality of segmented regions with an N-type dopant atom and doping a second set of the plurality of segmented region with a P-type dopant atom.
Claim 26
Dependent Claim
45 words
The method of claim 6, wherein the step of forming a dopant-containing region further comprises: using the opening to segment the dopant-containing region into a source region and a drain region wherein the source and drain regions are segmented from one another by the opening.
Claim 27
Independent Claim
137 words
A method of forming a semiconductor structure, wherein the method comprises the steps of: providing a semiconductor substrate; forming a temporary feature having a first side and a second side over the semiconductor substrate; forming a first doped region in the semiconductor substrate directly adjacent to the first side of the temporary feature and a second doped region in the semiconductor substrate directly adjacent to the second side of the temporary feature; forming a dielectric layer over the semiconductor substrate; planarizing a top surface of the dielectric layer to expose a top portion of the temporary feature while leaving bottom-most regions of the dielectric layer on the surface of the semiconductor structure; removing the temporary feature to form an opening in the dielectric layer; and filling the opening with a metal to create a metal gate electrode.
Claim 28
Independent Claim
137 words
A method of forming a semiconductor structure, wherein the method comprises the steps of: providing a semiconductor substrate; forming a temporary feature having a first side and a second side over the semiconductor substrate; forming a first doped region in the semiconductor substrate directly adjacent to the first side of the temporary feature and a second doped region in the semiconductor substrate directly adjacent to the second side of the temporary feature; forming a dielectric layer over the semiconductor substrate; planarizing a top surface of the dielectric layer to expose a top portion of the temporary feature while leaving bottom-most regions of the dielectric layer on the surface of the semiconductor structure; removing the temporary feature to form an opening in the dielectric layer; and filling the opening with a metal to create a metal gate electrode.
Claim 29
Dependent Claim
35 words
The method of claim 25, wherein the step of planarizing further comprises: planarizing the top surface by polishing the top surface by using one of a chemical mechanical polishing process or an etch back process.
Claim 30
Dependent Claim
31 words
The method of claim 25, wherein the step of removing the temporary feature further comprises: removing the temporary feature by one of a wet etch process and a dry etch process.
Claim 31
Dependent Claim
32 words
The method of claim 25, wherein the step of forming a temporary feature further comprises: forming the temporary feature wherein the temporary feature includes one of a polysilicon and an amorphous silicon.
Claim 32
Dependent Claim
34 words
The method of claim 25, wherein the step of forming a first doped region further comprises: forming the first doped region and the second doped region by ion implantation in a self aligned manner.
Claim 33
Dependent Claim
22 words
The method of claim 25, further comprising the step of: forming a sidewall spacer on a vertical portion of the temporary feature.
Claim 34
Dependent Claim
34 words
The method of claim 25, wherein the step of filling the opening further comprises: filling the opening with a metal to form a metal gate and an interconnect region in a dual inlaid structure.
Claim 35
Independent Claim
74 words
A method of forming a semiconductor structure, wherein the method comprises the method of: providing a semiconductor substrate; forming a self-alignment feature over a portion the semiconductor substrate; implanting a first region of the semiconductor substrate with a dopant; and forming a metal gate, whereby no polysilicon region is directly adjacent a gate dielectric region, following the step of implanting, wherein the metal gate is formed substantially over the portion of the semiconductor substrate.
Claim 36
Independent Claim
74 words
A method of forming a semiconductor structure, wherein the method comprises the method of: providing a semiconductor substrate; forming a self-alignment feature over a portion the semiconductor substrate; implanting a first region of the semiconductor substrate with a dopant; and forming a metal gate, whereby no polysilicon region is directly adjacent a gate dielectric region, following the step of implanting, wherein the metal gate is formed substantially over the portion of the semiconductor substrate.
Claim 37
Independent Claim
145 words
A method for forming a semiconductor structure, the method comprising the steps of: forming a first dielectric layer; forming an etch stop layer over the first dielectric layer; forming a second dielectric layer over the first dielectric layer; etching a dual inlaid structure into the first and second dielectric layers wherein the first dielectric layer contains an opening defining a first portion of the dual inlaid structure and the second dielectric layer contains an opening defining a second portion of the dual inlaid structure wherein the opening in the second dielectric layer has a width dimension greater than a width dimension of the opening in the first dielectric layer; and forming a metallic electrical device electrode within the first portion of the dual inlaid structure and a metallic interconnect coupled to the metallic electrical device electrode within the second portion of the dual inlaid structure.
Claim 38
Independent Claim
145 words
A method for forming a semiconductor structure, the method comprising the steps of: forming a first dielectric layer; forming an etch stop layer over the first dielectric layer; forming a second dielectric layer over the first dielectric layer; etching a dual inlaid structure into the first and second dielectric layers wherein the first dielectric layer contains an opening defining a first portion of the dual inlaid structure and the second dielectric layer contains an opening defining a second portion of the dual inlaid structure wherein the opening in the second dielectric layer has a width dimension greater than a width dimension of the opening in the first dielectric layer; and forming a metallic electrical device electrode within the first portion of the dual inlaid structure and a metallic interconnect coupled to the metallic electrical device electrode within the second portion of the dual inlaid structure.
Claim 39
Dependent Claim
45 words
The method of claim 33, wherein the step of forming a metallic electrical device electrode includes forming the metallic electrode from selected from a group consisting of: tungsten (W), titanium nitride (TiN), molybdenum (Mo), tungsten silicide (WSi 2 ), and nickel silicide (NiSi 2 ).
Claim 40
Dependent Claim
33 words
The method of claim 33, wherein the step of forming a metallic electrical device electrode includes forming the metallic electrical device electrode overlying a gate oxide for a metal oxide semiconductor (MOS) transistor.
Claim 41
Dependent Claim
25 words
The method of claim 33, wherein the step of forming a metallic electrical device electrode includes the metallic electrical device electrode being a capacitor electrode.
Claim 42
Dependent Claim
35 words
The method of claim 33, wherein the step of forming a metallic electrical device electrode includes forming both the metallic electrical device electrode and the metallic interconnect by CMP after a single metal stack formation.
Claim 43
Independent Claim
168 words
A method for forming a semiconductor structure, the method comprising the steps of: providing a semiconductor substrate containing dielectric isolation regions; forming a feature region over the semiconductor substrate; forming doped regions within the semiconductor substrate using the feature region as a self alignment feature, the doped regions forming both a source region and a drain region for the semiconductor structure in a self-aligned manner to the feature region; forming a gate dielectric layer within the feature region; at least partially filling the feature region with a first metallic layer which overlies the gate dielectric layer; polishing the first metallic layer to form a first metallic plug region within the feature region; forming interconnect openings on top of the dielectric isolation regions within the semiconductor substrate; forming a second metallic layer within the interconnect openings and any remaining portion of the feature region; and polishing the second metallic layer to form a second metallic plug regions in the interconnect openings and any remaining portion of the feature region.
Claim 44
Independent Claim
168 words
A method for forming a semiconductor structure, the method comprising the steps of: providing a semiconductor substrate containing dielectric isolation regions; forming a feature region over the semiconductor substrate; forming doped regions within the semiconductor substrate using the feature region as a self alignment feature, the doped regions forming both a source region and a drain region for the semiconductor structure in a self-aligned manner to the feature region; forming a gate dielectric layer within the feature region; at least partially filling the feature region with a first metallic layer which overlies the gate dielectric layer; polishing the first metallic layer to form a first metallic plug region within the feature region; forming interconnect openings on top of the dielectric isolation regions within the semiconductor substrate; forming a second metallic layer within the interconnect openings and any remaining portion of the feature region; and polishing the second metallic layer to form a second metallic plug regions in the interconnect openings and any remaining portion of the feature region.
Claim 45
Dependent Claim
36 words
The method of claim 33 wherein a gate dielectric region for an MOS transistor is formed within the opening in the first dielectric layer after formation of the openings in the first and second dielectric layers.
Claim 46
Dependent Claim
24 words
The method of claim 33 wherein source and drain silicide regions and a second etch stop layer are formed under the first dielectric layer.
Claim 47
Dependent Claim
23 words
The method of claim 33 wherein sidewall spacers are formed within inner circumferences of the openings in the first and second dielectric layers.
Claim 48
Dependent Claim
16 words
The method of claim 1 wherein a gate dielectric region is formed after removing the feature.
Claim 49
Dependent Claim
17 words
The method of claim 1 wherein a channel region ion implantation is performed after removing the feature.
References Cited (Backward Citations)
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