US5434093A
Expired / Lapsed
US
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Inverted spacer transistor
Assignee: Intel Corp
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Filing: 1994-08-10
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Granted: 1995-07-18
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Expires: 2014-08-10
Abstract
Abstract A method for forming narrow length transistors by forming a trench in a first layer over a semiconductor substrate. Spacers are then formed within the trench and a gate dielectric is formed between the spacers at the bottom of the trench on the semiconductor substrate. The trench is then filled with a gate electrode material which is chemically-mechanically polished back to isolate the gate electrode material within the trench, and the first layer is removed leaving the gate dielectric, gate electrode and spacers behind.
Inventors
- 👤 Robert S. Chau
- 👤 Chan-Hong Chern
- 👤 Shahriar S. Ahmed
- 👤 Robert F. Hainsey
- 👤 Robert J. Stoner
- 👤 Todd E. Wilke
- 👤 Leopoldo D. Yau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 17:19
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/10; H10D62/13; H10D62/149; H10D62/151; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0225; H10D30/027; H10D30/0275; H10D62/17; H10D62/213; H10D62/221; H10D62/235; H10D64/00; H10D64/01; H10D64/018; H10D64/20; H10D64/23; H10D64/251; H10D64/258; H10D64/259; H10D64/27; H10D64/311; H10D64/411; H10D64/511; H10D64/517; H10D64/518; H10D30/0217
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
135 words
A process for forming a transistor on a semiconductor substrate, said process comprising the steps of: a) forming a first layer over said semiconductor substrate; b) etching a trench in said first layer; c) forming two spacers over said semiconductor substrate within said trench, each of said spacers being adjacent to a laterally opposing wall within said trench; d) forming a gate dielectric over said semiconductor substrate between said spacers within said trench; and e) forming a gate electrode over said gate dielectric between said spacers within said trench by depositing a gate electrode material to fill said trench, then etching back said gate electrode material until substantially planar with said first layer; f) removing said first layer; and g) forming source/drain regions of said transistor, said source/drain regions being substantially aligned to said spacers.
Claim 2
Dependent Claim
135 words
A process for forming a transistor on a semiconductor substrate, said process comprising the steps of: a) forming a first layer over said semiconductor substrate; b) etching a trench in said first layer; c) forming two spacers over said semiconductor substrate within said trench, each of said spacers being adjacent to a laterally opposing wall within said trench; d) forming a gate dielectric over said semiconductor substrate between said spacers within said trench; and e) forming a gate electrode over said gate dielectric between said spacers within said trench by depositing a gate electrode material to fill said trench, then etching back said gate electrode material until substantially planar with said first layer; f) removing said first layer; and g) forming source/drain regions of said transistor, said source/drain regions being substantially aligned to said spacers.
Claim 3
Dependent Claim
27 words
The process of claim 1 further comprising the step of forming a self-aligned punchthrough stopper by implanting dopants into said semiconductor substrate substantially aligned to said spacers.
Claim 4
Dependent Claim
24 words
The process of claim 1 further comprising the step of forming a silicide layer at the surface of said source/drain regions of said transistor.
Claim 5
Dependent Claim
32 words
The process of claim 1 further comprising the step of forming tip regions in said semiconductor substrate beneath at least a portion of said spacers by a process comprising an angled implant.
Claim 6
Dependent Claim
33 words
The process of claim 1 further comprising the step of forming tip regions in said semiconductor substrate beneath at least a portion of said spacers by a process comprising diffusion from doped spacers.
Claim 7
Dependent Claim
55 words
The process of claim 1 further comprising the step of forming tip regions in said semiconductor substrate beneath at least a portion of said spacers by a process comprising forming a doped layer near the surface of said semiconductor substrate within said trench, and etching the doped layer from said semiconductor substrate between said spacers.
Claim 8
Dependent Claim
23 words
The process of claim 1 wherein said etching back of said gate electrode material is accomplished by a technique comprising chemical mechanical polishing.
Claim 9
Dependent Claim
12 words
The process of claim 1 wherein said gate electrode material comprises polysilicon.
Claim 10
Dependent Claim
12 words
The process of claim 8 wherein said gate electrode material comprises polysilicon.
Claim 11
Dependent Claim
25 words
The process of claim 1 wherein said first layer is selected from the group consisting essentially of nitride, oxide, BSG, PSG, and any combination thereof.
Claim 12
Dependent Claim
21 words
The process of claim 10 wherein said first layer is deposited to a thickness in the range of approximately 0.05-1.0 μm.
Claim 13
Dependent Claim
20 words
The process of claim 1 wherein said trench is etched to a width in the range of approximately 0.1-1.0 μm.
Claim 14
Dependent Claim
49 words
The process of claim 1 wherein said spacers are formed by a process including a substantially conformal deposition within said trench of a spacer material selected from the group consisting of nitride, oxide, BSG, PSG, and any combination thereof, and a subsequent, substantially anisotropic etch of said spacer material.
Claim 15
Dependent Claim
26 words
The process of claim 13 wherein said substantially conformal deposition of said spacer material is deposited to a thickness in the range of approximately 0.05-0.5 μm.
Claim 16
Dependent Claim
21 words
The process of claim 1 wherein said gate dielectric comprises oxide formed to a thickness in the range of approximately 10-100Å.
Claim 17
Dependent Claim
47 words
The process of claim 1 wherein said step of removing said first layer involves anisotropically etching said first layer in a self-aligned process using a dry etch chemistry having an etch selectivity of said first layer which is higher than its selectivity to said gate electrode material.
Claim 18
Dependent Claim
152 words
A process for forming a transistor on a semiconductor substrate, said process comprising the steps of: a) forming a first layer over said semiconductor substrate; b) etching a trench in said first layer; c) forming two spacers over said semiconductor substrate within said trench, said spacers being formed by a process including a substantially conformal deposition within said trench of a dielectric spacer material, and a subsequent, substantially anisotropic etch of said spacer material; d) forming a gate oxide over said semiconductor substrate between said spacers within said trench; e) forming a gate electrode over said gate oxide between said spacers within said trench by depositing polysilicon to fill said trench, then etching back said polysilicon until substantially planar with said first layer by using a chemical mechanical polishing technique; and f) removing said first layer and forming source/drain regions of said transistor, said source/drain regions being substantially aligned to said spacers.
Claim 19
Dependent Claim
152 words
A process for forming a transistor on a semiconductor substrate, said process comprising the steps of: a) forming a first layer over said semiconductor substrate; b) etching a trench in said first layer; c) forming two spacers over said semiconductor substrate within said trench, said spacers being formed by a process including a substantially conformal deposition within said trench of a dielectric spacer material, and a subsequent, substantially anisotropic etch of said spacer material; d) forming a gate oxide over said semiconductor substrate between said spacers within said trench; e) forming a gate electrode over said gate oxide between said spacers within said trench by depositing polysilicon to fill said trench, then etching back said polysilicon until substantially planar with said first layer by using a chemical mechanical polishing technique; and f) removing said first layer and forming source/drain regions of said transistor, said source/drain regions being substantially aligned to said spacers.
Claim 20
Dependent Claim
20 words
The process of claim 17 further comprising the step of performing a salicidation of exposed silicon regions of said transistor.
Claim 21
Dependent Claim
27 words
The process of claim 18 further comprising the step of forming a self-aligned punchthrough stopper by implanting dopants into said semiconductor substrate substantially aligned to said spacers.
Claim 22
Dependent Claim
32 words
The process of claim 18 further comprising the step of forming tip regions in said semiconductor substrate beneath at least a portion of said spacers by a process comprising an angled implant.
Claim 23
Dependent Claim
33 words
The process of claim 18 further comprising the step of forming tip regions in said semiconductor substrate beneath at least a portion of said spacers by a process comprising diffusion from doped spacers.
Claim 24
Dependent Claim
55 words
The process of claim 18 further comprising the step of forming tip regions in said semiconductor substrate beneath at least a portion of said spacers by a process comprising forming a doped layer near the surface of said semiconductor substrate within said trench, and etching the doped layer from said semiconductor substrate between said spacers.
Claim 25
Dependent Claim
55 words
The process of claim 18 further comprising the step of forming tip regions in said semiconductor substrate beneath at least a portion of said spacers by a process comprising removing said spacers and implanting dopant material directly into at least a portion of the region of said semiconductor substrate from which said spacers were removed.
Claim 26
Dependent Claim
51 words
The process of claim 18 further comprising the step of forming tip regions in said semiconductor substrate beneath at least a portion of said spacers by a process comprising forming a doped layer near the surface of said semiconductor substrate within said trench, and counterdoping said doped layer between said spacers.
Claim 27
Dependent Claim
26 words
The process of claim 18 wherein said source/drain regions are formed by a method comprising selectively growing epitaxial source/drain regions to create a raised source/drain transistor.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-07-17 | 1999-01-16 | 1999-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-07-17 | 2003-01-16 | 2003-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-07-17 | 2007-01-16 | 2007-07-18 | $7700.00 | Window Closed / Lapsed |