Patent US5958636A successfully refreshed from Google Patents.
US5958636A
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Pattern drawing method using charged particle beams
Assignee: NEC Electronics Corp
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Filing: 1997-11-10
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Granted: 1999-09-28
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Expires: 2017-11-10
Abstract
Abstract Each of two pattern scheduled areas to be formed a pattern is divided into two areas of an outer edge section and a central section surrounded by the outer edge section. Further, the outer edge section which is in contact with a space area is divided into outline portions from both end portion of the outer edge section, with a 5 mu m distance. An outline portion is formed at a portion of the outer edge section sandwiched by the outline portions. An outline portion is formed at a position of the outer edge section orthogonal with these outline portions. Next, a suitable exposure level to each of the divided outline portions is controlled by a controlling unit based on the intensity of electron beams. In the outer edge section in contact with the space area, the exposure levels of the electron beams at the outline portion which is far away from the outline portion positioned at the center of the outer edge section along the outer edge section are set higher than that of the outline portion which is nearer to the specified outline portion so that the energy irradiation levels of the electron beams become higher at the outline portion which is far away from the center outline portion along the outer edge section.
Inventors
- 👤 Takao Tamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:40
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/302; H01J37/3023; H01J37/3026; H10; H10D; H10D64/00; H10D64/01; H10D64/011; G; G03; G03F; G03F1/00; G03F1/26; G03F1/68; G03F1/76; G03F1/78; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175; H01J2237/31761; H01J2237/31764; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
96 words
A pattern drawing method using charged particle beams comprising the steps of: dividing an area which is to be formed with a pattern, into a central section and an outer edge section surrounding said central section, said outer edge section being further divided into a plurality of outline portions; and irradiating with charged particle beams each of said outline portions, one outline portion of said outer edge section being irradiated with an energy level higher than a dose that irradiates another outline portion which is nearer to a specified outline portion of said outer edge section.
Claim 2
Dependent Claim
96 words
A pattern drawing method using charged particle beams comprising the steps of: dividing an area which is to be formed with a pattern, into a central section and an outer edge section surrounding said central section, said outer edge section being further divided into a plurality of outline portions; and irradiating with charged particle beams each of said outline portions, one outline portion of said outer edge section being irradiated with an energy level higher than a dose that irradiates another outline portion which is nearer to a specified outline portion of said outer edge section.
Claim 3
Dependent Claim
41 words
A pattern drawing method using charged particle beams according to claim 1, wherein said area to be formed with a pattern has at least one side, and said specified outline portion is substantially at a center outline portion of said side.
Claim 4
Dependent Claim
52 words
A pattern drawing method using charged particle beams according to claim 1, wherein the step of irradiating with said charged particle beams includes a further step of irradiating said one outline portion with a dose higher than a dose of said another outline portion which is nearer to said specified outline portion.
Claim 5
Dependent Claim
54 words
A pattern drawing method using charged particle beams according to claim 1, wherein the step of dividing said area to be formed with a pattern sets on area size of each of said outline portions, said one outline portion being larger than said another outline portion which is nearer to said specified outline portion.
Claim 6
Dependent Claim
82 words
A pattern drawing method using charged particle beams according to claim 1, wherein said one outline portion is irradiated with a dose higher than a dose of said another outline portion which is nearer to said specified outline portion, and the step of dividing said area to be formed with a pattern sets an area size of each of said outline portions, said one outline portion is set larger than said another outline portion which is nearer to said specified outline portion.
Claim 7
Dependent Claim
20 words
A pattern drawing method using charged particle beams according to claim 1, wherein said charged particle beams are electron beams.
Claim 8
Dependent Claim
120 words
A pattern drawing method using charged particle beams comprising the steps of: dividing each of two areas, which are to be formed each with a respective pattern, into a central section and an outer edge section surrounding said central section, said outer edge section being further divided into a plurality of outline portions; calculating a distance to be between said two areas; and irradiating with charged particle beams each of said outline portions, in each said area, one said outline portion of said outer edge section being irradiated with a dose higher than a dose that irradiates another outline portion which is nearer to a specified outline portion, when said distance is equal to or less than a predetermined value.
Claim 9
Dependent Claim
120 words
A pattern drawing method using charged particle beams comprising the steps of: dividing each of two areas, which are to be formed each with a respective pattern, into a central section and an outer edge section surrounding said central section, said outer edge section being further divided into a plurality of outline portions; calculating a distance to be between said two areas; and irradiating with charged particle beams each of said outline portions, in each said area, one said outline portion of said outer edge section being irradiated with a dose higher than a dose that irradiates another outline portion which is nearer to a specified outline portion, when said distance is equal to or less than a predetermined value.
Claim 10
Dependent Claim
50 words
A pattern drawing method using charged particle beams according to claim 7, wherein at least one said area to be formed with a pattern has at least one side, and said specified outline portion of said at least one area is positioned substantially at a center portion of said side.
Claim 11
Dependent Claim
24 words
A pattern drawing method using charged particle beams according to claim 7, wherein said specified outline portions of each said area face each other.
Claim 12
Dependent Claim
43 words
A pattern drawing method using charged particle beams according to claim 7, wherein in each said area said one outline portion is irradiated with a dose higher than a dose of said another outline portion which is nearer to said specified outline portion.
Claim 13
Dependent Claim
58 words
A pattern drawing method using charged particle beams according to claim 7, wherein the step of dividing said areas to be formed with a pattern sets an area size of each of said outline portions, in each said area said one outline portion being larger than said another outline portion which is nearer to said specified outline portion.
Claim 14
Dependent Claim
92 words
A pattern drawing method using charged particle beams according to claim 7, wherein in each said area said one outline portion is irradiated with a dose higher than a dose of said another outline portion which is nearer to said specified outline portion, and the step of dividing said areas, each to be formed with a respective pattern, sets an area size of each of said outline portions, in each said area said one outline portion is set larger than said another outline portion which is nearer to said specified outline portion.
Claim 15
Dependent Claim
20 words
A pattern drawing method using charged particle beams according to claim 7, wherein said charged particle beams are electron beams.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-09-27 | 2003-03-29 | 2003-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-27 | 2007-03-29 | 2007-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-09-27 | 2011-03-29 | 2011-09-28 | $7700.00 | Window Closed / Lapsed |