US5956598A
Expired / Lapsed
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Method for fabricating a shallow-trench isolation structure with a rounded corner in integrated circuit
Assignee: United Microelectronics Corp
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Filing: 1998-10-01
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Granted: 1999-09-21
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Expires: 2018-10-01
Abstract
Abstract A semiconductor fabrication method is provided for fabricating a shallow-trench isolation (STI) structure with a rounded corner in integrated circuits through a rapid thermal process (RTP). In the fabrication of the STI structure, a sharp corner is often undesirably formed. This sharp corner , if not eliminated, causes the occurrence of a leakage current when the resultant IC device is in operation that significantly degrades the performance of the resultant IC device. To eliminate this sharp corner , an RTP is performed at a temperature of above 1,100° C., which temperature is higher than the glass transition temperature of the substrate, for about 1 to 2 minutes. The result is that the surface of the substrate is oxidized into an sacrificial oxide layer and the sharp corner is deformed into a rounded shape with a larger convex radius of curvature. This allows the problems arising from the existence of the sharp corner to be substantially eliminated. Compared to the prior art, this method not only is more simplified in process, but also allows a considerable saving in thermal budget, which makes this method more cost-effective to implement than the prior art.
Inventors
- 👤 Kuo-Tai Huang
- 👤 Gwo-Shii Yang
- 👤 Tri-Rung Yew
- 👤 Water Lur
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 09:32
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/014; H10W10/10; H10W10/17
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
217 words
A method for fabricating an STI structure with a rounded corner in an integrated circuit, comprising the steps of: preparing a semiconductor substrate; forming a pad oxide layer over the substrate; forming a mask layer over the pad oxide layer; forming a trench in the substrate by etching away selected portions of the mask layer, the pad oxide layer, and the substrate; performing a pre-liner cleaning process on the exposed surfaces of the substrate in the trench, during which a small edge part of the pad oxide layer near the top rim of the trench is also etched away, resulting in the formation of an undesired sharp corner at the top rim of the trench; forming a liner oxide layer on the exposed surfaces of the substrate in the trench; forming an oxide layer in the entire trench to form the desired STI structure; removing the mask layer; removing the pad oxide layer, through which a groove is formed in the top surface of the liner oxide layer adjacent to the sharp corner; and performing an RTP at a temperature of above 1,100° C. for a period of from 1 to 2 minutes so as to form a sacrificial oxide layer over the exposed surfaces of the substrate and deform the sharp corner into a rounded shape.
Claim 2
Independent Claim
217 words
A method for fabricating an STI structure with a rounded corner in an integrated circuit, comprising the steps of: preparing a semiconductor substrate; forming a pad oxide layer over the substrate; forming a mask layer over the pad oxide layer; forming a trench in the substrate by etching away selected portions of the mask layer, the pad oxide layer, and the substrate; performing a pre-liner cleaning process on the exposed surfaces of the substrate in the trench, during which a small edge part of the pad oxide layer near the top rim of the trench is also etched away, resulting in the formation of an undesired sharp corner at the top rim of the trench; forming a liner oxide layer on the exposed surfaces of the substrate in the trench; forming an oxide layer in the entire trench to form the desired STI structure; removing the mask layer; removing the pad oxide layer, through which a groove is formed in the top surface of the liner oxide layer adjacent to the sharp corner; and performing an RTP at a temperature of above 1,100° C. for a period of from 1 to 2 minutes so as to form a sacrificial oxide layer over the exposed surfaces of the substrate and deform the sharp corner into a rounded shape.
Claim 3
Dependent Claim
14 words
The method of claim 1, wherein the mask layer is formed from silicon nitride.
Claim 4
Dependent Claim
84 words
The method of claim 1, wherein the step of forming the trench includes the sub-steps of: forming a photoresist layer over the mask layer; removing a selected part of the photoresist layer at a predefined location where the trench is to be formed; and performing an anisotropic dry-etching process to etch away the unmasked portions of the mask layer, the pad oxide layer, and the substrate until a predetermined depth in the substrate is reached, with the resulting void portion serving as the trench.
Claim 5
Dependent Claim
32 words
The method of claim 1, wherein the pre-liner cleaning process is performed with RCA-A and a 10:1 solution of deionized water and hydrofluoric acid (HF) for a continuous period of 60 seconds.
Claim 6
Dependent Claim
28 words
The method of claim 1, wherein the liner oxide layer is formed by subjecting the substrate to a thermal oxidation process under a temperature of about 850-950° C.
Claim 7
Dependent Claim
19 words
The method of claim 1, wherein the oxide layer in the STI structure is formed through a CVD process.
Claim 8
Dependent Claim
18 words
The method of claim 1, wherein the oxide layer in the STI structure is formed from silicon dioxide.
Claim 9
Dependent Claim
21 words
The method of claim 1, wherein the step of removing the pad oxide layer is carried out through a wet-etching process.
Claim 10
Dependent Claim
19 words
The method of claim 1, wherein the sacrificial oxide layer is formed to a thickness of between 70-200 Å.
Claim 11
Dependent Claim
23 words
The method of claim 1, wherein the RTP is performed by exposing the substrate to a gaseous mixture of oxygen and nitrous oxide.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-09-20 | 2003-03-22 | 2003-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-20 | 2007-03-22 | 2007-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-09-20 | 2011-03-22 | 2011-09-21 | $7700.00 | Window Closed / Lapsed |