US5955178A
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Electro-conductive oxides and electrodes using the same
Assignee: Hoya Corp
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Filing: 1997-04-02
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Granted: 1999-09-21
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Expires: 2017-04-02
Abstract
Abstract Electro-conductive oxides showing excellent electro-conductivity, electrodes using the electro-conductive oxide and methods for manufacturing the same are described. The electro-conductive oxides are represented by the general formula: M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d. The above electro-conductive oxides show not only excellent electro-conductivity but also excellent transparency all over the visible region and therefore they are particularly useful as, for example, electrodes for liquid crystal displays, EL displays and solar cells, which require light transmission.
Inventors
- 👤 Masahiro Orita
- 👤 Hiroyuki Sakai
- 👤 Megumi Takeuchi
- 👤 Hiroaki Tanji
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 12:35
CPC Classifications
H; H01; H01B; H01B1/00; H01B1/06; H01B1/08; C; C01; C01G; C01G15/00; C01G15/006; H05; H05B; H05B33/00; H05B33/12; H05B33/26; H05B33/28; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1343; G02F1/13439; Y; Y10; Y10S; Y10S428/00; Y10S428/917; Y10S428/918; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926; Y10T428/29; Y10T428/31504; Y10T428/31678; Y10T428/31681
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
371 words
An electrode comprising a transparent substrate and an electro-conductive layer provided on at least a part of at least one surface of the substrate, wherein the electro-conductive layer exhibits 76% or more of transmission, normalized to 2000 angstrom thickness as to the light of 400 nm, and comprises an electro-conductive oxide selected from the group consisting of: i) M(1) x M(2) y In 2 O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range in which the electro-conductive oxide exhibits 70 S/cm or more of electro-conductivity; ii ) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, in which a part of at least one of M(1), M(2) and In is replaced with one or more other elements, the elements replacing M(1) are of di- or higher valence and the elements replacing M(2) and In are of tri- or higher valence, and wherein the oxygen deficit amount (d) and the amount of the replacing elements are selected so that the electro-conductive oxide exhibits 70 S/cm or more of electro-conductivity; and iii) M(1) x M(2) y In z O.sub.(x+3y,/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, wherein said electro-conductive oxide is implanted with cations, and wherein the oxide deficit amount (d) and the amount of implanted cations are selected so that the electro-conductive oxide exhibits 70 S/cm or more of electro-conductivity.
Claim 2
Dependent Claim
371 words
An electrode comprising a transparent substrate and an electro-conductive layer provided on at least a part of at least one surface of the substrate, wherein the electro-conductive layer exhibits 76% or more of transmission, normalized to 2000 angstrom thickness as to the light of 400 nm, and comprises an electro-conductive oxide selected from the group consisting of: i) M(1) x M(2) y In 2 O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range in which the electro-conductive oxide exhibits 70 S/cm or more of electro-conductivity; ii ) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, in which a part of at least one of M(1), M(2) and In is replaced with one or more other elements, the elements replacing M(1) are of di- or higher valence and the elements replacing M(2) and In are of tri- or higher valence, and wherein the oxygen deficit amount (d) and the amount of the replacing elements are selected so that the electro-conductive oxide exhibits 70 S/cm or more of electro-conductivity; and iii) M(1) x M(2) y In z O.sub.(x+3y,/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, wherein said electro-conductive oxide is implanted with cations, and wherein the oxide deficit amount (d) and the amount of implanted cations are selected so that the electro-conductive oxide exhibits 70 S/cm or more of electro-conductivity.
Claim 3
Dependent Claim
366 words
An electrode comprising a transparent substrate and an electro-conductive layer provided on at least a part of at least one surface of the substrate, wherein the electro-conductive layer exhibits 385 nm or less of absorption edge wavelength in the shorter wavelength region and comprises an electro-conductive oxide selected from the group consisting of: i) M(1) x M(2) y In 2 O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range in which the electro-conductive oxide exhibits 73 S/cm or more of electro-conductivity; ii) M(1) x M(2) y In 2 O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, in which a part of at least one of M(1), M(2) and In is replaced with one or more other elements, the elements replacing M(1) are of di- or higher valence and the elements replacing M(2) and In are of tri- or higher valence and wherein the oxygen deficit amount (d) and the amount of the replacing elements are selected so that the electro-conductive oxide exhibits 73 S/cm or more of electro-conductivity; and iii) M(1) x M(2) y In 2 O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, wherein said electro-conductive oxide is implanted with cations, and wherein the oxide deficit amount (d) and the amount of implanted cations are selected so that the electro-conductive oxide exhibits 73 S/cm or more of electro-conductivity.
Claim 4
Dependent Claim
366 words
An electrode comprising a transparent substrate and an electro-conductive layer provided on at least a part of at least one surface of the substrate, wherein the electro-conductive layer exhibits 385 nm or less of absorption edge wavelength in the shorter wavelength region and comprises an electro-conductive oxide selected from the group consisting of: i) M(1) x M(2) y In 2 O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range in which the electro-conductive oxide exhibits 73 S/cm or more of electro-conductivity; ii) M(1) x M(2) y In 2 O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, in which a part of at least one of M(1), M(2) and In is replaced with one or more other elements, the elements replacing M(1) are of di- or higher valence and the elements replacing M(2) and In are of tri- or higher valence and wherein the oxygen deficit amount (d) and the amount of the replacing elements are selected so that the electro-conductive oxide exhibits 73 S/cm or more of electro-conductivity; and iii) M(1) x M(2) y In 2 O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, wherein said electro-conductive oxide is implanted with cations, and wherein the oxide deficit amount (d) and the amount of implanted cations are selected so that the electro-conductive oxide exhibits 73 S/cm or more of electro-conductivity.
Claim 5
Dependent Claim
366 words
An electrode comprising a transparent substrate and an electro-conductive layer provided on at least a part of at least one surface of the substrate, wherein the electro-conductive layer exhibits 450 nm or less of absorption edge wavelength in the shorter wavelength region and comprises an electro-conductive oxide selected from the group consisting of: i) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range in which the electro-conductive oxide exhibits 1280 S/cm or more of electro-conductivity; ii) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, in which a part of at least one of M(1), M(2) and In is replaced with one or more other elements, the elements replacing M(1) are of di- or higher valence and the elements replacing M(2) and In are of tri- or higher valence and wherein the oxygen deficit amount (d) and the amount of the replacing elements are selected so that the electro-conductive oxide exhibits 1280 S/cm or more of electro-conductivity; and iii) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, wherein said electro-conductive oxide is implanted with cations, and wherein the oxide deficit amount (d) and the amount of implanted cations are selected so that the electro-conductive oxide exhibits 1280 S/cm or more of electro-conductivity.
Claim 6
Dependent Claim
366 words
An electrode comprising a transparent substrate and an electro-conductive layer provided on at least a part of at least one surface of the substrate, wherein the electro-conductive layer exhibits 450 nm or less of absorption edge wavelength in the shorter wavelength region and comprises an electro-conductive oxide selected from the group consisting of: i) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range in which the electro-conductive oxide exhibits 1280 S/cm or more of electro-conductivity; ii) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, in which a part of at least one of M(1), M(2) and In is replaced with one or more other elements, the elements replacing M(1) are of di- or higher valence and the elements replacing M(2) and In are of tri- or higher valence and wherein the oxygen deficit amount (d) and the amount of the replacing elements are selected so that the electro-conductive oxide exhibits 1280 S/cm or more of electro-conductivity; and iii) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, wherein said electro-conductive oxide is implanted with cations, and wherein the oxide deficit amount (d) and the amount of implanted cations are selected so that the electro-conductive oxide exhibits 1280 S/cm or more of electro-conductivity.
Claim 7
Dependent Claim
366 words
An electrode comprising a transparent substrate and an electro-conductive layer provided on at least a part of at least one surface of the substrate, wherein the electro-conductive layer exhibits 400 nm or less of absorption edge wavelength in the shorter wavelength region and comprises an electro-conductive oxide selected from the group consisting of: i) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range in which the electro-conductive oxide exhibits 240 S/cm or more of electro-conductivity; ii) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, in which a part of at least one of M(1), M(2) and In is replaced with one or more other elements, the elements replacing M(1) are of di- or higher valence and the elements replacing M(2) and In are of tri- or higher valence and wherein the oxygen deficit amount (d) and the amount of the replacing elements are selected so that the electro-conductive oxide exhibits 240 S/cm or more of electro-conductivity; and iii) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, wherein said electro-conductive oxide is implanted with cations, and wherein the oxide deficit amount (d) and the amount of implanted cations are selected so that the electro-conductive oxide exhibits 240 S/cm or more of electro-conductivity.
Claim 8
Dependent Claim
366 words
An electrode comprising a transparent substrate and an electro-conductive layer provided on at least a part of at least one surface of the substrate, wherein the electro-conductive layer exhibits 400 nm or less of absorption edge wavelength in the shorter wavelength region and comprises an electro-conductive oxide selected from the group consisting of: i) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1 and the oxygen deficit amount (d) is within a range in which the electro-conductive oxide exhibits 240 S/cm or more of electro-conductivity; ii) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, in which a part of at least one of M(1), M(2) and In is replaced with one or more other elements, the elements replacing M(1) are of di- or higher valence and the elements replacing M(2) and In are of tri- or higher valence and wherein the oxygen deficit amount (d) and the amount of the replacing elements are selected so that the electro-conductive oxide exhibits 240 S/cm or more of electro-conductivity; and iii) M(1) x M(2) y In z O.sub.(x+3y/2+3z/2)-d wherein M(1) is at least one element selected from the group consisting of magnesium and zinc, M(2) is at least one element selected from the group consisting of aluminum and gallium, the ratio (x:y) is within a range of 0.2 to 1.8:1, the ratio (z:y) is within a range of 0.4 to 1.4:1, wherein said electro-conductive oxide is implanted with cations, and wherein the oxide deficit amount (d) and the amount of implanted cations are selected so that the electro-conductive oxide exhibits 240 S/cm or more of electro-conductivity.
References Cited (Backward Citations)
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