Patent US5948219A successfully refreshed from Google Patents.
US5948219A
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Apparatus for selectively exposing a semiconductor topography to an electric field
Assignee: GlobalFoundries Inc
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Filing: 1997-05-07
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Granted: 1999-09-07
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Expires: 2017-05-07
Abstract
Abstract A lithographic apparatus and method are presented which use an electric field to form features from a desired material upon an upper topography of a semiconductor substrate. A layer of an electric field resist material is formed over a layer of the desired material upon the upper topography of the semiconductor substrate. The electric field resist layer is then patterned by exposure to an electric field via the apparatus. The apparatus includes a plate and a voltage source. In one embodiment, the plate is electrically conductive and a lower surface of the plate has one or more raised portions with recessed portions existing between adjacent raised portions. The lower surface of the conductive plate is positioned above and in close proximity to the exposed surface of the electric field resist layer. The voltage source applies an electrical voltage between the electrically conductive plate and the semiconductor substrate, creating the electric field. The strength of the electric field between raised portions of the conductive plate and the semiconductor substrate is great enough to: (i) cause polymerized molecules within the electric field resist layer to break apart (positive resist layer), or (ii) cause unpolymerized molecules within the electric field resist layer to polymerize (negative resist layer). Following the exposing step, the unpolymerized electric field resist material is removed, followed by a portion of the layer of the desired material not covered by the remaining polymerized portion of the electric field material and the remaining polymerized portion of the electric field material.
Inventors
- 👤 Don R. Rohner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 10:41
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B82; B82Y; B82Y10/00; B82Y40/00
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
91 words
An apparatus for selectively exposing a semiconductor topography to an electric field, comprising: an electrically conductive plate having opposed upper and lower surfaces, wherein the lower surface includes a plurality of raised portions interposed among a plurality of recessed portions; and a voltage source adapted to produce an electrical voltage between the electrically conductive plate and the semiconductor topography adapted for being brought proximate the plurality of raised and recessed portions such that the electric field is formed between the conductive plate and the semiconductor topography, when the topography is present.
Claim 2
Independent Claim
91 words
An apparatus for selectively exposing a semiconductor topography to an electric field, comprising: an electrically conductive plate having opposed upper and lower surfaces, wherein the lower surface includes a plurality of raised portions interposed among a plurality of recessed portions; and a voltage source adapted to produce an electrical voltage between the electrically conductive plate and the semiconductor topography adapted for being brought proximate the plurality of raised and recessed portions such that the electric field is formed between the conductive plate and the semiconductor topography, when the topography is present.
Claim 3
Dependent Claim
29 words
The apparatus as recited in claim 1, wherein the lower surface of the conductive plate is adapted to be positioned above and in close proximity to the semiconductor topography.
Claim 4
Dependent Claim
14 words
The apparatus as recited in claim 1, wherein the electrically conductive plate comprises aluminum.
Claim 5
Dependent Claim
20 words
The apparatus as recited in claim 1, wherein the voltage source is adapted to produce an alternating current (a.c.) voltage.
Claim 6
Dependent Claim
20 words
The apparatus as recited in claim 1, wherein the voltage source is adapted to produce a direct current (d.c.) voltage.
Claim 7
Independent Claim
136 words
An apparatus for selectively exposing a semiconductor topography to an electric field, comprising: a first electrically conductive plate having opposed upper and lower surfaces, wherein the lower surface includes a plurality of raised portions interposed among a plurality of recessed portions; a second electrically conductive plate having opposed upper and lower surfaces, wherein the upper surface is adapted to electrically couple with the semiconductor topography adapted to be placed upon the second electrically conductive plate; a voltage source adapted to produce an electrical voltage between the first electrically conductive plate and the second electrically conductive plate; and wherein the semiconductor topography is adapted to be positioned proximate the plurality of raised and recessed portions of the first electrically conductive plate such that an electric field is formed between the first conductive plate and the semiconductor topography.
Claim 8
Independent Claim
136 words
An apparatus for selectively exposing a semiconductor topography to an electric field, comprising: a first electrically conductive plate having opposed upper and lower surfaces, wherein the lower surface includes a plurality of raised portions interposed among a plurality of recessed portions; a second electrically conductive plate having opposed upper and lower surfaces, wherein the upper surface is adapted to electrically couple with the semiconductor topography adapted to be placed upon the second electrically conductive plate; a voltage source adapted to produce an electrical voltage between the first electrically conductive plate and the second electrically conductive plate; and wherein the semiconductor topography is adapted to be positioned proximate the plurality of raised and recessed portions of the first electrically conductive plate such that an electric field is formed between the first conductive plate and the semiconductor topography.
Claim 9
Dependent Claim
31 words
The apparatus as recited in claim 6, wherein the lower surface of the conductive plate is adapted to be positioned above and in close proximity to the semiconductor topography when present.
Claim 10
Dependent Claim
14 words
The apparatus as recited in claim 6, wherein the electrically conductive plate comprises aluminum.
Claim 11
Dependent Claim
20 words
The apparatus as recited in claim 6, wherein the voltage source is adapted to produce a direct current (d.c.) voltage.
Claim 12
Dependent Claim
20 words
The apparatus as recited in claim 6, wherein the voltage source is adapted to produce an alternating current (a.c.) voltage.
Claim 13
Independent Claim
116 words
An apparatus for exposing a layer of a material formed upon a surface of a semiconductor substrate to an electric field, comprising: a plate having opposed upper and lower surfaces and comprising a plurality of electrically conductive structures arranged upon the lower surface; and a voltage source for applying an electrical voltage between a portion of the plurality of the electrically conductive structures and the semiconductor substrate; and wherein the semiconductor substrate is adapted to be positioned proximate the plurality of electrically conductive structures such that: (i) an electric field is formed between the portion of the plurality of electrically conductive structures and the semiconductor substrate, and (ii) the layer is exposed to the electric field.
Claim 14
Independent Claim
116 words
An apparatus for exposing a layer of a material formed upon a surface of a semiconductor substrate to an electric field, comprising: a plate having opposed upper and lower surfaces and comprising a plurality of electrically conductive structures arranged upon the lower surface; and a voltage source for applying an electrical voltage between a portion of the plurality of the electrically conductive structures and the semiconductor substrate; and wherein the semiconductor substrate is adapted to be positioned proximate the plurality of electrically conductive structures such that: (i) an electric field is formed between the portion of the plurality of electrically conductive structures and the semiconductor substrate, and (ii) the layer is exposed to the electric field.
Claim 15
Dependent Claim
39 words
The apparatus as recited in claim 11, wherein the lower surface of the plate is positioned above and in close proximity to the surface of the semiconductor substrate when the semiconductor substrate is positioned proximate the electrically conductive structures.
Claim 16
Dependent Claim
24 words
The apparatus as recited in claim 11, wherein the plurality of electrically conductive structures are electrically isolated from the plate and from each other.
Claim 17
Dependent Claim
29 words
The apparatus as recited in claim 13, wherein each of the plurality of electrically conductive structures are adapted to be operably coupled to a terminal of the voltage source.
Claim 18
Dependent Claim
47 words
The apparatus as recited in claim 11, wherein the voltage source comprises two terminals, and wherein the semiconductor substrate is adapted to be coupled to one terminal, and wherein each of the portion of the plurality of electrically conductive structures is operably coupled to the other terminal.
Claim 19
Dependent Claim
20 words
The apparatus as recited in claim 11, wherein the voltage source is adapted to produce a direct current (d.c.) voltage.
Claim 20
Dependent Claim
20 words
The apparatus as recited in claim 11, wherein the voltage source is adapted to produce an alternating current (a.c.) voltage.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-09-06 | 2003-03-08 | 2003-09-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-06 | 2007-03-08 | 2007-09-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-09-06 | 2011-03-08 | 2011-09-07 | $7700.00 | Window Closed / Lapsed |