US5217586A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrochemical tool for uniform metal removal during electropolishing
Assignee: International Business Machines Corp
•
Filing: 1992-01-09
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Granted: 1993-06-08
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Expires: 2012-01-09
Abstract
Abstract The present invention relates to an electropolishing tool for the removal of metal from a workpiece, said electropolishing tool comprising a container means for retaining an electrolytic solution, a cathode assembly in the shape of a pyramid the height of which is adjustable, a power supply means including a negative terminal and a positive terminal with said negative terminal being electrically connectable to said cathode assembly, a plate means for holding the workpiece and for forming an electrical connection to the workpiece, said plate means connected to the positive terminal of said power supply means, and an enclosure means placed over the workpiece leaving only the surface of the workpiece which is to be polished exposed to the electrolytic solution such that when the workpiece is secured to said plate means and said cathode assembly is connected to the negative terminal of said power supply means and is placed over the said enclosure means directly facing the workpiece enclosed therein, that portion of the workpiece exposed to the electrolytic solution undergoes electropolishing.
Inventors
- 👤 Madhav Datta
- 👤 Lubomyr T. Romankiw
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:17
CPC Classifications
C; C25; C25F; C25F7/00
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
193 words
An electropolishing tool for the removal of metal from a workpiece, said electropolishing tool comprising: a container means for retaining an electrolytic solution; a cathode assembly positionable within said container means, said cathode assembly being in the form of a pyramid shape the height of which is adjustable; a power supply means including a negative terminal and a positive terminal, said negative terminal being electrically connectable to said cathode assembly; a plate means for holding the workpiece and for forming an electrical connection to the workpiece, said plate means connected to the positive terminal of said power supply means; and an enclosure means positioned within said container means, said enclosure means adapted to enclose said workpiece and to contain a portion of electrolyte solution to be placed in said container means such that only the surface of the workpiece to be polished will be exposed to electrolytic solution when said solution is placed in said container means and said electrolytic solution when contained in said enclosure means remains stationary during operation of said tool, and such that said cathode assembly is positioned to directly face the workpiece when enclosed in said enclosure means.
Claim 2
Dependent Claim
193 words
An electropolishing tool for the removal of metal from a workpiece, said electropolishing tool comprising: a container means for retaining an electrolytic solution; a cathode assembly positionable within said container means, said cathode assembly being in the form of a pyramid shape the height of which is adjustable; a power supply means including a negative terminal and a positive terminal, said negative terminal being electrically connectable to said cathode assembly; a plate means for holding the workpiece and for forming an electrical connection to the workpiece, said plate means connected to the positive terminal of said power supply means; and an enclosure means positioned within said container means, said enclosure means adapted to enclose said workpiece and to contain a portion of electrolyte solution to be placed in said container means such that only the surface of the workpiece to be polished will be exposed to electrolytic solution when said solution is placed in said container means and said electrolytic solution when contained in said enclosure means remains stationary during operation of said tool, and such that said cathode assembly is positioned to directly face the workpiece when enclosed in said enclosure means.
Claim 3
Dependent Claim
34 words
The electropolishing tool according to claim 1 wherein said cathode assembly consists of rings or plates that are fixed one above the other to form a pyramid shape the height of which is adjustable.
Claim 4
Dependent Claim
17 words
The electropolishing tool according to claim 2 wherein the rings or plates are made of stainless steel.
Claim 5
Dependent Claim
16 words
The electropolishing tool according to claim 2 wherein the rings or plates are made of nickel.
Claim 6
Dependent Claim
23 words
The electropolishing tool according to claim 2 wherein the cathode assembly consists of two to six rings, of uniform thickness and decreasing diameter.
Claim 7
Dependent Claim
19 words
The electropolishing tool according to claim 1 wherein said cathode assembly is in the form of a circular cone.
Claim 8
Dependent Claim
17 words
The electropolishing tool of claim 6 wherein said circular cone cathode assembly is made of stainless steel.
Claim 9
Dependent Claim
16 words
The electropolishing tool of claim 6 wherein said circular cone cathode assembly is made of nickel.
Claim 10
Dependent Claim
21 words
The electropolishing tool of claim 1 wherein said container means, said plate means and said enclosures means are made of PVC.
Claim 11
Dependent Claim
14 words
The electropolishing tool of claim 1 wherein said container means is made of glass.
Claim 12
Independent Claim
133 words
A method for electropolishing a workpiece comprising the steps of: mounting a workpiece on a plate means in a container filled with an electrolytic solution; positioning a cathode assembly over and facing towards the workpiece, the cathode assembly being in the shape of a pyramid, the height of which is adjustable; making the sample and said cathode assembly respectively an anode and cathode in an electrical circuit; positioning an enclosure means within said container means such that only the surface of the workpiece which is to be polished is exposed to the electrolytic solution, said electrolytic solution contained in said enclosure means remaining stationary during the electropolishing method; and continuously conducting an electric current through the electrical circuit under conditions effective to electropolish the surface of the workpiece exposed to the electrolytic solution.
Claim 13
Independent Claim
133 words
A method for electropolishing a workpiece comprising the steps of: mounting a workpiece on a plate means in a container filled with an electrolytic solution; positioning a cathode assembly over and facing towards the workpiece, the cathode assembly being in the shape of a pyramid, the height of which is adjustable; making the sample and said cathode assembly respectively an anode and cathode in an electrical circuit; positioning an enclosure means within said container means such that only the surface of the workpiece which is to be polished is exposed to the electrolytic solution, said electrolytic solution contained in said enclosure means remaining stationary during the electropolishing method; and continuously conducting an electric current through the electrical circuit under conditions effective to electropolish the surface of the workpiece exposed to the electrolytic solution.
Claim 14
Dependent Claim
13 words
A method according to claim 11 wherein the electrolytic solution comprises phosphoric acid.
Claim 15
Dependent Claim
16 words
A method according to claim 12 wherein the phosphoric acid electrolytic solution is 85% phosphoric acid.
Claim 16
Dependent Claim
20 words
A method according to claim 11 wherein the current density ranges from about 40 to about 320 mA/cm 2 .
Claim 17
Dependent Claim
20 words
A method according to claim 11 wherein the current density ranges from about 40 to about 80 mA/cm 2 .
Claim 18
Dependent Claim
27 words
A method according to claim 11 wherein the cathode assembly consists of rings or plates that are fixed one above the other to form a pyramid shape.
Claim 19
Dependent Claim
24 words
A method according to claim 16 wherein the cathode assembly consists of two to six rings or plates of uniform thickness and decreasing diameter.
Claim 20
Dependent Claim
18 words
A method according to claim 11 wherein the cathode assembly is in the form of a circular cone.
Claim 21
Dependent Claim
14 words
A method according to claim 11 wherein the workpiece is a thin film module.
Claim 22
Dependent Claim
15 words
A method according to claim 11 wherein the workpiece is a double layer metallurgy structure.
References Cited (Backward Citations)
US2868705A
Cited
US3240685A
Cited
US3325384A
Cited
US3713998A
Cited
US4127459A
Cited
US4303482A
Cited
US4247377A
Cited
US4548685A
Cited
US4882019A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-07 | 1996-12-07 | 1997-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-07 | 2000-12-07 | 2001-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-07 | 2004-12-07 | 2005-06-08 | $7700.00 | Window Closed / Lapsed |