Patent US5942787A successfully refreshed from Google Patents.
US5942787A
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US
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Small gate electrode MOSFET
Assignee: Advanced Micro Devices Inc
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Filing: 1996-11-18
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Granted: 1999-08-24
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Expires: 2016-11-18
Abstract
Abstract A method of lithographically fabricating small line width features in a device in accordance with a desired pattern, the small line width features being smaller than that capable of a lithographic process alone, is disclosed. A first layer of material is provided upon a substrate, the first layer including that in which the small line width features are to be made. A lithographically patterned layer is then provided upon the first layer in accordance with a second pattern defined in conjunction with the desired pattern. The patterned layer includes a second material selected to be compatible with the material of the first layer. A conformal layer is then deposited upon the patterned layer, the conformal layer including a third material selected to be compatible in conjunction with the first material and with the second material. Sidewall spacers are formed in the conformal layer proximate side edges of the patterned layer, the sidewall spacers having a desired line width dimension of the small features to be fabricated. The patterned layer is thereafter selectively removed. The first layer is then directionally etched with a selective etch, using the sidewall spacers to prevent the etching of the first layer in accordance with the desired pattern.
Inventors
- 👤 Mark I. Gardner
- 👤 Robert Paiz
- 👤 Thomas E. Spikes, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 23:43
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01326; H10D64/01328; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0135; H10D84/02; H10D84/03; H10D84/038; H10P; H10P76/00; H10P76/40; H10P76/408; H10P76/4085; H10P76/4088; Y; Y10; Y10S; Y10S438/00; Y10S438/926; Y10S438/942; Y10S438/947
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
247 words
A structure having small line width features lithographically fabricated in accordance with a desired pattern and having small line width feature sizes smaller than that capable of a lithographic process alone, said structure fabricated by a method comprising the steps of: providing a first layer of material upon a substrate, the first layer including that in which the small line width features are to be made; providing a lithographically patterned layer upon the first layer in accordance with a second pattern defined in conjunction with the desired pattern, the patterned layer including a second material selected to be compatible with the material of the first layer; depositing a conformal layer upon the patterned layer, the conformal layer including a third material selected to be compatible in conjunction with the first material and with the second material; forming sidewall spacers in the conformal layer proximate side edges of the patterned layer, the sidewall spacers having a desired line width dimension of the small features to be fabricated; selectively removing the patterned layer; and directionally etching the first layer with a selective etch and using the sidewall spacers to prevent the etching of the first layer in accordance with the desired pattern such that two separate gate electrodes are formed, one from each sidewall spacer, and such that the spacing between each of the so formed gate electrodes is less than 0.1 μm and wherein the remaining material forms gate electrodes each having dimension of less than 0.1 μm.
Claim 2
Dependent Claim
247 words
A structure having small line width features lithographically fabricated in accordance with a desired pattern and having small line width feature sizes smaller than that capable of a lithographic process alone, said structure fabricated by a method comprising the steps of: providing a first layer of material upon a substrate, the first layer including that in which the small line width features are to be made; providing a lithographically patterned layer upon the first layer in accordance with a second pattern defined in conjunction with the desired pattern, the patterned layer including a second material selected to be compatible with the material of the first layer; depositing a conformal layer upon the patterned layer, the conformal layer including a third material selected to be compatible in conjunction with the first material and with the second material; forming sidewall spacers in the conformal layer proximate side edges of the patterned layer, the sidewall spacers having a desired line width dimension of the small features to be fabricated; selectively removing the patterned layer; and directionally etching the first layer with a selective etch and using the sidewall spacers to prevent the etching of the first layer in accordance with the desired pattern such that two separate gate electrodes are formed, one from each sidewall spacer, and such that the spacing between each of the so formed gate electrodes is less than 0.1 μm and wherein the remaining material forms gate electrodes each having dimension of less than 0.1 μm.
Claim 3
Dependent Claim
47 words
The structure of claim 1 includes a high performance metal-oxide-semiconductor field-effect-transistor (MOSFET) having a small line width feature size gate electrode, wherein the lithographic process is i-line lithography and the desired line width dimension of the gate electrode is in the range of 0.05 to 0.1 μm.
Claim 4
Dependent Claim
45 words
The structure of claim 1 includes a signal line layer having small line width feature size metal signal lines, wherein the lithographic process is i-line lithography and the desired line width dimension of the signal lines is in the range of 0.05 to 0.1 μm.
Claim 5
Dependent Claim
173 words
A high performance metal-oxide-semiconductor field-effect transistor (MOSFET) device including a lithographically fabricated small gate electrode, the small gate electrode having a line width dimension less than that achievable by a lithographic process alone, said MOSFET being produced by the method comprising the steps of: providing a polysilicon layer upon a gate oxide layer; providing a lithographically patterned photo resist layer upon said polysilicon layer, the patterned layer including sidewalls; depositing a conformal layer of oxide upon the patterned layer; forming sidewall spacers in the blanket oxide layer proximate the sidewalls in the patterned layer, the sidewall spacers having a desired width dimension; removing the patterned layer; etching the polysilicon layer using the sidewall spacers as a secondary pattern such that two separate gate electrodes are formed, one from each sidewall spacer and such that the spacing between each of the so formed gate electrodes is less than 0.1 μm, wherein the remaining polysilicon includes two small gate electrodes and wherein the small gate electrodes will have a dimension of less than 0.1 μm.
Claim 6
Dependent Claim
173 words
A high performance metal-oxide-semiconductor field-effect transistor (MOSFET) device including a lithographically fabricated small gate electrode, the small gate electrode having a line width dimension less than that achievable by a lithographic process alone, said MOSFET being produced by the method comprising the steps of: providing a polysilicon layer upon a gate oxide layer; providing a lithographically patterned photo resist layer upon said polysilicon layer, the patterned layer including sidewalls; depositing a conformal layer of oxide upon the patterned layer; forming sidewall spacers in the blanket oxide layer proximate the sidewalls in the patterned layer, the sidewall spacers having a desired width dimension; removing the patterned layer; etching the polysilicon layer using the sidewall spacers as a secondary pattern such that two separate gate electrodes are formed, one from each sidewall spacer and such that the spacing between each of the so formed gate electrodes is less than 0.1 μm, wherein the remaining polysilicon includes two small gate electrodes and wherein the small gate electrodes will have a dimension of less than 0.1 μm.
Claim 7
Dependent Claim
29 words
The MOSFET device of claim 4, wherein the lithographic process is i-line lithography and the desired line width feature size is in the range of 0.05 to 0.1 μm.
Claim 8
Dependent Claim
241 words
An integrated circuit having small line width features lithographically fabricated in accordance with a desired pattern and further having small line width feature sizes smaller than that capable of a lithographic process alone, said integrated circuit having been fabricated according to a method comprising the steps of: providing a first layer of material upon a substrate, the first layer including that in which the small line width features are to be made; providing a lithographically patterned layer upon the first layer in accordance with a second pattern defined in conjunction with the desired pattern, the patterned layer including a second material selected to be compatible with the material of the first layer; depositing a conformal layer upon the patterned layer, the conformal layer including a third material selected to be compatible in conjunction with the first material and with the second material; forming sidewall spacers in the conformal layer proximate side edges of the patterned layer, the sidewall spacers having a desired line width dimension of the small features to be fabricated; selectively removing the patterned layer; and directionally etching the first layer with a selective etch and using the sidewall spacers to prevent the etching of the first layer in accordance with the desired pattern such that the spacing between each of the so formed gate electrodes is less than 0.1 μm and wherein the remaining material forms gate electrodes each having a lateral dimension of less than 0.1 μm.
Claim 9
Dependent Claim
241 words
An integrated circuit having small line width features lithographically fabricated in accordance with a desired pattern and further having small line width feature sizes smaller than that capable of a lithographic process alone, said integrated circuit having been fabricated according to a method comprising the steps of: providing a first layer of material upon a substrate, the first layer including that in which the small line width features are to be made; providing a lithographically patterned layer upon the first layer in accordance with a second pattern defined in conjunction with the desired pattern, the patterned layer including a second material selected to be compatible with the material of the first layer; depositing a conformal layer upon the patterned layer, the conformal layer including a third material selected to be compatible in conjunction with the first material and with the second material; forming sidewall spacers in the conformal layer proximate side edges of the patterned layer, the sidewall spacers having a desired line width dimension of the small features to be fabricated; selectively removing the patterned layer; and directionally etching the first layer with a selective etch and using the sidewall spacers to prevent the etching of the first layer in accordance with the desired pattern such that the spacing between each of the so formed gate electrodes is less than 0.1 μm and wherein the remaining material forms gate electrodes each having a lateral dimension of less than 0.1 μm.
Claim 10
Dependent Claim
242 words
A module having conductive signal lines including small line width features lithographically fabricated in accordance with a desired pattern and having small line width feature sizes smaller than that capable of a lithographic process alone, said module having been fabricated according to a method comprising the steps of: providing a first layer of material upon a substrate, the first layer including that in which the small line width features arc to be made; providing a lithographically patterned layer upon the first layer in accordance with a second pattern defined in conjunction with the desired pattern, the patterned layer including a second material selected to be compatible with the material of the first layer; depositing a conformal layer upon the patterned layer, the conformal layer including a third material selected to be compatible in conjunction with the first material and with the second material; forming sidewall spacers in the conformal layer proximate side edges of the patterned layer, the sidewall spacers having a desired line width dimension of the small features to be fabricated; selectively removing the patterned layer; and directionally etching the first layer with a selective etch and using the sidewall spacers to prevent the etching of the first layer in accordance with the desired pattern such that the spacing between each of the so formed gate electrodes is less than 0.1 μm and wherein the remaining material forms gate electrodes each having a lateral dimension of less than 0.1 μm.
Claim 11
Dependent Claim
242 words
A module having conductive signal lines including small line width features lithographically fabricated in accordance with a desired pattern and having small line width feature sizes smaller than that capable of a lithographic process alone, said module having been fabricated according to a method comprising the steps of: providing a first layer of material upon a substrate, the first layer including that in which the small line width features arc to be made; providing a lithographically patterned layer upon the first layer in accordance with a second pattern defined in conjunction with the desired pattern, the patterned layer including a second material selected to be compatible with the material of the first layer; depositing a conformal layer upon the patterned layer, the conformal layer including a third material selected to be compatible in conjunction with the first material and with the second material; forming sidewall spacers in the conformal layer proximate side edges of the patterned layer, the sidewall spacers having a desired line width dimension of the small features to be fabricated; selectively removing the patterned layer; and directionally etching the first layer with a selective etch and using the sidewall spacers to prevent the etching of the first layer in accordance with the desired pattern such that the spacing between each of the so formed gate electrodes is less than 0.1 μm and wherein the remaining material forms gate electrodes each having a lateral dimension of less than 0.1 μm.
References Cited (Backward Citations)
US5665203A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-08-23 | 2003-02-22 | 2003-08-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-08-23 | 2007-02-22 | 2007-08-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-08-23 | 2011-02-22 | 2011-08-24 | $7700.00 | Window Closed / Lapsed |