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US5933712A
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Attachment method for stacked integrated circuit (IC) chips
Assignee: University of California
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Filing: 1998-03-19
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Granted: 1999-08-03
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Expires: 2018-03-19
Abstract
Abstract An attachment method for stacked integrated circuit (IC) chips. The method involves connecting stacked chips, such as DRAM memory chips, to each other and/or to a circuit board. Pads on the individual chips are rerouted to form pads on the side of the chip, after which the chips are stacked on top of each other whereby desired interconnections to other chips or a circuit board can be accomplished via the side-located pads. The pads on the side of a chip are connected to metal lines on a flexible plastic tape (flex) by anisotropically conductive adhesive (ACA). Metal lines on the flex are likewise connected to other pads on chips and/or to pads on a circuit board. In the case of a stack of DRAM chips, pads to corresponding address lines on the various chips may be connected to the same metal line on the flex to form an address bus. This method has the advantage of reducing the number of connections required to be made to the circuit board due to bussing; the flex can accommodate dimensional variation in the alignment of chips in the stack; bonding of the ACA is accomplished at low temperature and is otherwise simpler and less expensive than solder bonding; chips can be bonded to the ACA all at once if the sides of the chips are substantially coplanar, as in the case for stacks of identical chips, such as DRAM.
Inventors
- 👤 Anthony F. Bernhardt
- 👤 Vincent Malba
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:50
CPC Classifications
H; H10; H10W; H10W90/00; H10W70/00; H10W70/60; H10W70/611; H10W70/67; H10W70/688; H10W72/00; H10W72/071; H10W72/072; H10W72/07251; H10W72/20; H10W72/60; H10W72/834; H10W90/701; H10W90/721; H10W90/724
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
79 words
A method for interconnecting a plurality of pads of integrated circuit chips to a single pad of a circuit board, comprising: aligning a plurality of integrated circuit chips such that pads thereon are aligned, providing a flexible tape having at least one metal line thereon, bonding the flexible tape to the aligned pads of the chips using an anisotropically conducting adhesive, and bonding the flexible tape to the single pad of the circuit board using an anisotropically conducting adhesive.
Claim 2
Independent Claim
79 words
A method for interconnecting a plurality of pads of integrated circuit chips to a single pad of a circuit board, comprising: aligning a plurality of integrated circuit chips such that pads thereon are aligned, providing a flexible tape having at least one metal line thereon, bonding the flexible tape to the aligned pads of the chips using an anisotropically conducting adhesive, and bonding the flexible tape to the single pad of the circuit board using an anisotropically conducting adhesive.
Claim 3
Dependent Claim
27 words
The method of claim 1, additionally including rerouting the pads of the chips to form pads on the sidewalls of the chips prior to aligning the chips.
Claim 4
Dependent Claim
20 words
The method of claim 1, wherein the bonding is carried out at a temperature of less than about 150° C.
Claim 5
Dependent Claim
28 words
The method of claim 1, wherein the bonding is carried out at a pressure of 50 to 110 psi for a time period of 10 to 60 seconds.
Claim 6
Dependent Claim
20 words
The method of claim 1, additionally including providing the flexible tape with a plurality of electrically interconnected metal lines thereon.
Claim 7
Dependent Claim
55 words
The method of claim 5, wherein the bonding of the flexible tape to the chip pads is carried out using at least one of the plurality of metal lines, and wherein the bonding of the flexible tape to the pad of the circuit boards is carried out using another of the plurality of metal lines.
Claim 8
Dependent Claim
32 words
The method of claim 1, wherein the bonding is carried out using a plurality of flexible tapes for bonding of different pads on the chips to additional pads on the circuit board.
Claim 9
Dependent Claim
20 words
The method of claim 2, wherein rerouting the pads of the chips is carried out using direct write laser lithography.
Claim 10
Dependent Claim
76 words
The method of claim 8, wherein the direct write laser lithography is carried out by: passivation of at least the sidewalls of the chip, forming a seed layer on the chip, depositing a resist on the seed layer, developing areas of the resist using laser energy, depositing at least one metal layer on the developed areas of the resist to form metal interconnects and side-located pads, stripping the remaining resist, and removing the exposed seed layer.
Claim 11
Dependent Claim
38 words
The method of claim 9, wherein passivation of at least the sidewalls of the chip is carried out by a process selected from the group consisting of a vapor deposited polyimide coating and a PECVD silicon oxide coating.
Claim 12
Dependent Claim
14 words
The method of claim 9, wherein the seed layer is of a multilayer type.
Claim 13
Dependent Claim
20 words
The method of claim 9, wherein depositing a resist is carried out by electroplating positive EDPR on the seed layer.
Claim 14
Dependent Claim
25 words
The method of claim 9, wherein developing areas of the resists is carried out by exposing the resist with a computer controlled laser patterning apparatus.
Claim 15
Dependent Claim
27 words
The method of claim 13, wherein the laser patterning is carried out using an argon-ion laser operating in the multiline UV range from 338 to 364 nm.
Claim 16
Dependent Claim
32 words
The method of claim 9, wherein depositing of the at least one metal layer is carried out by depositing a layer of copper, a layer of nickel, and a layer of gold.
Claim 17
Dependent Claim
26 words
The method of claim 1, wherein bonding the flexible tap to the aligned pads of the chips is carried by simultaneous bonding to each aligned pad.
Claim 18
Independent Claim
52 words
A method for fabrication of a DRAM cube, comprising: rerouting pads on the DRAM die to a sidewall thereof, aligning the die to align selected rerouted pads, bonding the aligned pads to a flexible tape using an anisotropically conducting adhesive, and bonding the flexible tape to a pad on a circuit board.
Claim 19
Independent Claim
52 words
A method for fabrication of a DRAM cube, comprising: rerouting pads on the DRAM die to a sidewall thereof, aligning the die to align selected rerouted pads, bonding the aligned pads to a flexible tape using an anisotropically conducting adhesive, and bonding the flexible tape to a pad on a circuit board.
Claim 20
Dependent Claim
20 words
The method of claim 17, wherein rerouting pads on the DRAM die is carried out using direct write laser lithography.
Claim 21
Dependent Claim
21 words
The method of claim 17, wherein bonding the aligned pads to the flexible tape is carried out using a diaphragm bonder.
Claim 22
Dependent Claim
22 words
The method of claim 17, wherein bonding the flexible tape to the circuit board is carried out using a hot-bar thermode bonder.
Claim 23
Dependent Claim
32 words
The method of claim 17, additionally including folding the section of the flexible tape bonded to the aligned DRAM die pads over the section of the flexible tape to the circuit board.
Claim 24
Dependent Claim
16 words
The method of claim 17, wherein bonding each of the aligned pads is carried out simultaneously.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-08-02 | 2003-02-01 | 2003-08-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-08-02 | 2007-02-01 | 2007-08-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-08-02 | 2011-02-01 | 2011-08-03 | $7700.00 | Window Closed / Lapsed |