US5932491A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reduction of contact size utilizing formation of spacer material over resist pattern
Assignee: Micron Technology Inc
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Filing: 1997-02-06
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Granted: 1999-08-03
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Expires: 2017-02-06
Abstract
Abstract A method for forming a sidewall aligned contact structure without a hardmask layer. A semiconductor region is provided having an active area at an upper surface. An insulating layer is formed having an upper surface over the active area. Using a photo-patterned organic mask, a gross contact opening is etched in the insulating layer over the active area. The gross contact opening extends downward from the upper surface and partially through the insulating layer. A conformal layer of material is deposited at low temperature over the patterned mask as well as sidewalls and a bottom surface of the gross contact opening The conformal layer comprises a material that is differentially etchable with respect to the photomask and preferably etches similarly to the insulating layer. A portion of the insulating layer at the base of the gross contact opening is exposed. A contact opining is formed in the exposed portion of the insulating layer using the remaining conformal layer as a mask.
Inventors
- 👤 Phillip G. Wald
- 👤 Mark Fischer
- 👤 William A. Stanton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 20:37
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/074; H10W20/076; H10W20/081; H10W20/084
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
160 words
A method for forming a contact comprising: providing a semiconductor surface having an active area thereon and an insulating layer having an upper surface formed on the active area; defining a contact window over the insulating layer and aligned over the active area with an organic mask; etching a first cavity through the contact window partially through the insulating layer; depositing a thin film over the mask while leaving the mask substantially intact; anistropically etching the thin film to form spacers on edges of the first cavity to expose a portion of the insulating layer at the base of the first cavity and at least a portion of the mask; etching the insulating layer exposed at the base of the first cavity using the exposed mask and spacers as a second mask to form a contact opening through which a portion of the active area under the first cavity is exposed; and filling the contact opening with a conductive material.
Claim 2
Independent Claim
160 words
A method for forming a contact comprising: providing a semiconductor surface having an active area thereon and an insulating layer having an upper surface formed on the active area; defining a contact window over the insulating layer and aligned over the active area with an organic mask; etching a first cavity through the contact window partially through the insulating layer; depositing a thin film over the mask while leaving the mask substantially intact; anistropically etching the thin film to form spacers on edges of the first cavity to expose a portion of the insulating layer at the base of the first cavity and at least a portion of the mask; etching the insulating layer exposed at the base of the first cavity using the exposed mask and spacers as a second mask to form a contact opening through which a portion of the active area under the first cavity is exposed; and filling the contact opening with a conductive material.
Claim 3
Dependent Claim
19 words
The method of claim 1 wherein depositing a conformal thin film comprises depositing an oxide at approximately 250° C.
Claim 4
Dependent Claim
44 words
The method of claim 2 wherein defining a contact window further comprises: applying a selected thickness of photoresist to the insulating layer, such that the photoresist is substantially removed from the insulating layer at substantially the same time that the contact opening is completed.
Claim 5
Dependent Claim
79 words
The method of claim 1 further comprising: applying a selected thickness of photoresist to insulating layer, such that the photoresist is substantially removed from the insulating layer before the active area is exposed, and etching the insulating layer at the base of the first cavity further comprises simultaneously etching the insulating layer at the top of the first cavity such that an upper portion of the cavity has a larger aspect ratio than a lower portion of the cavity.
Claim 6
Independent Claim
146 words
A method for forming an contact opening to an active area comprising: covering the active area with a first layer; forming a photomask over the first layer; patterning the photomask to expose a first window at an upper surface of the first layer, the first window located over the active area; forming a first cavity in the first layer using the photomask as a mask, the first cavity extending only partially through the first layer; covering the photomask and partially filling the first cavity with a second layer; removing portions of the second layer to expose a second window at the upper surface of the first layer in the cavity and over the active area, the second window being smaller than the first window; and forming a second cavity in the first layer extending from the first cavity to the active area through the second window.
Claim 7
Independent Claim
146 words
A method for forming an contact opening to an active area comprising: covering the active area with a first layer; forming a photomask over the first layer; patterning the photomask to expose a first window at an upper surface of the first layer, the first window located over the active area; forming a first cavity in the first layer using the photomask as a mask, the first cavity extending only partially through the first layer; covering the photomask and partially filling the first cavity with a second layer; removing portions of the second layer to expose a second window at the upper surface of the first layer in the cavity and over the active area, the second window being smaller than the first window; and forming a second cavity in the first layer extending from the first cavity to the active area through the second window.
Claim 8
Dependent Claim
23 words
The method of claim 5 wherein the first layer comprises materials having similar etch characteristics during the step of forming a second cavity.
Claim 9
Dependent Claim
38 words
The method of claim 5 wherein the first and second layer comprise silicon oxide and the method further comprises the steps of: substantially removing the photomask during the process of forming a second cavity in the first layer.
Claim 10
Dependent Claim
84 words
A contact structure comprising: a semiconductor surface having an active area; a dielectric layer over the active area, the dielectric layer having a first cavity extending from an upper surface of the dielectric layer partially through the dielectric layer; a patterned photoresist layer on the upper surface of the dielectric layer and defining a gross contact window, the gross contact window being aligned with the first cavity; and spacers formed on sidewalls of the gross contact window to define a smaller final contact window.
Claim 11
Dependent Claim
84 words
A contact structure comprising: a semiconductor surface having an active area; a dielectric layer over the active area, the dielectric layer having a first cavity extending from an upper surface of the dielectric layer partially through the dielectric layer; a patterned photoresist layer on the upper surface of the dielectric layer and defining a gross contact window, the gross contact window being aligned with the first cavity; and spacers formed on sidewalls of the gross contact window to define a smaller final contact window.
Claim 12
Dependent Claim
30 words
The structure of claim 8 further comprising a second cavity aligned with the final contact opening and extending from a base of the first cavity entirely through the dielectric layer.
Claim 13
Dependent Claim
15 words
The structure of claim 8 wherein the spacers extend along sidewalls of the first cavity.
Claim 14
Dependent Claim
22 words
The structure of claim 9 further comprising contact material disposed within at least the second cavity in contact with the active area.
Claim 15
Dependent Claim
23 words
The structure of claim 9 wherein an upper portion of the first cavity is wider than a lower portion of the first cavity.
Claim 16
Dependent Claim
31 words
The structure of claim 9 wherein the spacer extends from a base of the first cavity upward along a sidewall of the first cavity to a position below the patterned photoresist.
Claim 17
Independent Claim
88 words
A method for forming a contact opening in a layer of material comprising: forming a first opening having a first width extending from an upper surface of the layer of material only partially through the layer of material; forming a mask comprising a photo polymer covering the upper surface and non-polymer spacers covering sidewalls of the first opening; and forming using the mask a second opening having a second width narrower than the first width, the second opening extending downward from a bottom surface of the gross opening.
Claim 18
Independent Claim
88 words
A method for forming a contact opening in a layer of material comprising: forming a first opening having a first width extending from an upper surface of the layer of material only partially through the layer of material; forming a mask comprising a photo polymer covering the upper surface and non-polymer spacers covering sidewalls of the first opening; and forming using the mask a second opening having a second width narrower than the first width, the second opening extending downward from a bottom surface of the gross opening.
Claim 19
Dependent Claim
80 words
The method of claim 14 wherein the step of forming the mask comprises: applying the photo polymer to the upper surface of the layer of material before forming the first opening; forming a non-polymer layer in contact with and covering the photo polymer as well as sidewalls and bottom surface of the first opening after forming the first opening; and removing a portion of the non-polymer layer in contact with the photo polymer and bottom surface of the first opening.
Claim 20
Dependent Claim
21 words
The method of claim 15 wherein forming the non-polymer layer comprises reactive chemical vapor deposition at a temperature below 200 C.
Claim 21
Dependent Claim
21 words
The method of claim 14 wherein forming the second opening further comprises simultaneously removing at least a portion of the mask.
Claim 22
Dependent Claim
27 words
The method of claim 14 further comprising filling the first and second openings with a conductive material while at least a portion of the mask remains intact.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-08-02 | 2003-02-01 | 2003-08-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-08-02 | 2007-02-01 | 2007-08-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-08-02 | 2011-02-01 | 2011-08-03 | $7700.00 | Window Closed / Lapsed |