US5719089A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for etching polymer-assisted reduced small contacts for ultra large scale integration semiconductor devices
Assignee: Vanguard International Semiconductor Corp
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Filing: 1996-06-21
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Granted: 1998-02-17
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Expires: 2016-06-21
Abstract
Abstract A method for fabricating small contact openings in the polysilicon/metal 1 dielectric (PMD) layer on semiconductor substrates using polymer sidewall spacers was achieved. This extends the current photoresist resolution limits while simplifying the manufacturing process. The method involves depositing a polysilicon layer on the PMD layer and using a photoresist mask having openings over device contact areas in the substrate. The polysilicon layer is then patterned to form openings with vertical sidewalls to the PMD insulating layer. The contact openings are then anisotropically plasma etched in a gas mixture that simultaneously forms polymer sidewall spacers on the sidewalls in the openings in the polysilicon layer. These sidewall spacers further reduce the contact opening size. The remaining photoresist layer and polymer sidewall spacers are simultaneously removed to complete the narrow contact openings. This method eliminates the need to use an additional deposition and etch-back step to form the sidewalls. A metal layer is then deposited and patterned to form the metal contacts and first level of interconnections.
Inventors
- 👤 Meng-Jaw Cherng
- 👤 Pei-Wen Li
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:27
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/089; H10P; H10P50/00; H10P50/20; H10P50/24; H10P50/242; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/947
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
197 words
A method for fabricating electrical contact openings on semiconductor substrates for integrated circuits, comprising the steps of: providing a semiconductor substrate having device contact areas in and on the surface of said substrate; depositing an insulating layer on said substrate; depositing a polysilicon layer on said insulating layer; forming a photoresist layer on said polysilicon layer; forming openings in said photoresist layer to said polysilicon layer over said device contact areas on said substrate; using a first anisotropic plasma etch to etch said polysilicon layer to said insulating layer in said photoresist openings, and thereby forming openings having vertical sidewalls in said polysilicon layer; performing a second anisotropic plasma etch to etch said insulating layer exposed in said polysilicon openings using an etchant gas mixture that concurrently deposits a polymer layer forming polymer sidewall spacers on said polysilicon layer sidewalls, thereby forming contact openings in said insulating layer to said substrate surface having reduced sizes, said contact openings being less in size than said openings in said photoresist layer; removing concurrently said polymer sidewall spacers and remaining portions of said photoresist layer by plasma ashing in oxygen, and thereby completing said electrical contact openings on said substrate.
Claim 2
Independent Claim
197 words
A method for fabricating electrical contact openings on semiconductor substrates for integrated circuits, comprising the steps of: providing a semiconductor substrate having device contact areas in and on the surface of said substrate; depositing an insulating layer on said substrate; depositing a polysilicon layer on said insulating layer; forming a photoresist layer on said polysilicon layer; forming openings in said photoresist layer to said polysilicon layer over said device contact areas on said substrate; using a first anisotropic plasma etch to etch said polysilicon layer to said insulating layer in said photoresist openings, and thereby forming openings having vertical sidewalls in said polysilicon layer; performing a second anisotropic plasma etch to etch said insulating layer exposed in said polysilicon openings using an etchant gas mixture that concurrently deposits a polymer layer forming polymer sidewall spacers on said polysilicon layer sidewalls, thereby forming contact openings in said insulating layer to said substrate surface having reduced sizes, said contact openings being less in size than said openings in said photoresist layer; removing concurrently said polymer sidewall spacers and remaining portions of said photoresist layer by plasma ashing in oxygen, and thereby completing said electrical contact openings on said substrate.
Claim 3
Dependent Claim
25 words
The method of claim 1, wherein said insulating layer is composed of borophosphosilicate glass (BPSG) having a thickness of between about 2000 and 15000 Angstroms.
Claim 4
Dependent Claim
27 words
The method of claim 2, wherein said insulating layer is leveled by annealing at a temperature of 800° to 900° C. for about 15 to 30 minutes.
Claim 5
Dependent Claim
19 words
The method of claim 1, wherein said polysilicon layer has a thickness of between about 1000 and 4000 Angstroms.
Claim 6
Dependent Claim
19 words
The method of claim 1, wherein said photoresist layer has a thickness of between about 8000 and 10000 Angstroms.
Claim 7
Dependent Claim
32 words
The method of claim 1, wherein said second anisotropic plasma etch gas mixture is composed of argon (Ar), trifluoromethane (CHF 3 ), carbon tetrafluoride (CF 4 ) and nitrogen (N 2 ).
Claim 8
Dependent Claim
74 words
The method of claim 6, wherein said argon (Ar) has a flow rate of between about 450 and 550 standard cubic centimeters per minute (sccm), said trifluoromethane (CHF 3 ) has a flow rate of between about 20.0 and 50.0 sccm, said carbon tetrafluoride (CF 4 ) has a flow rate of between 20.0 and 50.0 sccm, and said nitrogen (N 2 ) has a flow rate of between about 0 and 10.0 sccm.
Claim 9
Dependent Claim
28 words
The method of claim 6, wherein said second anisotropic plasma etching is performed in a plasma etcher in the pressure range of between about 100 and 500 milliTorr.
Claim 10
Independent Claim
219 words
A method for fabricating electrical contact openings on semiconductor substrates for integrated circuits, comprising the steps of: providing a semiconductor substrate having device contact areas in and on the surface of said substrate; depositing an insulating layer on said substrate; depositing a polysilicon layer on said insulating layer; forming a photoresist layer on said polysilicon layer; forming openings in said photoresist layer to said polysilicon layer over said device contact areas on said substrate; using a first anisotropic plasma etch to etch said polysilicon layer to said insulating layer in said photoresist openings, and thereby forming openings having vertical sidewalls in said polysilicon layer; performing a second anisotropic plasma etch to etch said insulating layer exposed in said polysilicon openings using an etchant gas mixture that concurrently deposits a polymer layer forming polymer sidewall spacers on said polysilicon layer sidewalls, thereby forming contact openings in said insulating layer to said substrate surface having reduced sizes, said contact openings being less in size than said openings in said photoresist layer; said etchant gas mixture composed of argon (Ar), trifluoromethane (CHF 3 ), carbon tetrafluoride (CF 4 ) and nitrogen (N 2 ); removing concurrently said polymer sidewall spacers and remaining portions of said photoresist layer by plasma ashing in oxygen, and thereby completing said electrical contact openings on said substrate.
Claim 11
Independent Claim
219 words
A method for fabricating electrical contact openings on semiconductor substrates for integrated circuits, comprising the steps of: providing a semiconductor substrate having device contact areas in and on the surface of said substrate; depositing an insulating layer on said substrate; depositing a polysilicon layer on said insulating layer; forming a photoresist layer on said polysilicon layer; forming openings in said photoresist layer to said polysilicon layer over said device contact areas on said substrate; using a first anisotropic plasma etch to etch said polysilicon layer to said insulating layer in said photoresist openings, and thereby forming openings having vertical sidewalls in said polysilicon layer; performing a second anisotropic plasma etch to etch said insulating layer exposed in said polysilicon openings using an etchant gas mixture that concurrently deposits a polymer layer forming polymer sidewall spacers on said polysilicon layer sidewalls, thereby forming contact openings in said insulating layer to said substrate surface having reduced sizes, said contact openings being less in size than said openings in said photoresist layer; said etchant gas mixture composed of argon (Ar), trifluoromethane (CHF 3 ), carbon tetrafluoride (CF 4 ) and nitrogen (N 2 ); removing concurrently said polymer sidewall spacers and remaining portions of said photoresist layer by plasma ashing in oxygen, and thereby completing said electrical contact openings on said substrate.
Claim 12
Dependent Claim
25 words
The method of claim 9, wherein said insulating layer is composed of borophosphosilicate glass (BPSG) having a thickness of between about 2000 and 15000 Angstroms.
Claim 13
Dependent Claim
27 words
The method of claim 9, wherein said insulating layer is leveled by annealing at a temperature of 800° to 900° C. for about 15 to 30 minutes.
Claim 14
Dependent Claim
19 words
The method of claim 9, wherein said polysilicon layer has a thickness of between about 1000 and 4000 Angstroms.
Claim 15
Dependent Claim
19 words
The method of claim 9, wherein said photoresist layer has a thickness of between about 8000 and 10000 Angstroms.
Claim 16
Dependent Claim
75 words
The method of claim 9, wherein said argon (Ar) has a flow rate of between about 450 and 550 standard cubic centimeters per minute (sccm), said trifluoromethane (CHF 3 ) has a flow rate of between about 20.0 and 50.0 sccm, said carbon tetrafluoride (CF 4 ) has a flow rate of between about 20.0 and 50.0 sccm, and said nitrogen (N 2 ) has a flow rate of between about 0 and 10.0 sccm.
Claim 17
Dependent Claim
28 words
The method of claim 9, wherein said second anisotropic plasma etching is performed in a plasma etcher in the pressure range of between about 500 and 1500 milliTorr.
Claim 18
Independent Claim
242 words
A method for fabricating electrical contacts and metal interconnections on semiconductor substrates for integrated circuits, comprising the steps of: providing a semiconductor substrate having device contact areas in and on the surface of said substrate; depositing an insulating layer on said substrate; depositing a polysilicon layer on said insulating layer; forming a photoresist layer on said polysilicon layer; forming openings in said photoresist layer to said polysilicon layer over said device contact areas on said substrate; using a first anisotropic plasma etch to etch said polysilicon layer to said insulating layer in said photoresist openings, and thereby forming openings having vertical sidewalls in said polysilicon layer; performing a second anisotropic plasma etch to etch said insulating layer exposed in said polysilicon openings using an etchant gas mixture that concurrently deposits a polymer layer forming polymer sidewall spacers on said polysilicon layer sidewalls, thereby forming contact openings in said insulating layer to said substrate surface having reduced sizes, said contact openings being less in size than said openings in said photoresist layer; removing concurrently said polymer sidewall spacers and remaining portions of said photoresist layer by plasma ashing in oxygen; depositing a conformal barrier metal layer in said contact openings and elsewhere on said polysilicon layer; depositing a conducting metal layer on said barrier metal layer; patterning said conducting metal layer, said barrier metal layer and said polysilicon layer, and thereby completing said electrical contacts and said metal interconnections on said semiconductor substrate.
Claim 19
Independent Claim
242 words
A method for fabricating electrical contacts and metal interconnections on semiconductor substrates for integrated circuits, comprising the steps of: providing a semiconductor substrate having device contact areas in and on the surface of said substrate; depositing an insulating layer on said substrate; depositing a polysilicon layer on said insulating layer; forming a photoresist layer on said polysilicon layer; forming openings in said photoresist layer to said polysilicon layer over said device contact areas on said substrate; using a first anisotropic plasma etch to etch said polysilicon layer to said insulating layer in said photoresist openings, and thereby forming openings having vertical sidewalls in said polysilicon layer; performing a second anisotropic plasma etch to etch said insulating layer exposed in said polysilicon openings using an etchant gas mixture that concurrently deposits a polymer layer forming polymer sidewall spacers on said polysilicon layer sidewalls, thereby forming contact openings in said insulating layer to said substrate surface having reduced sizes, said contact openings being less in size than said openings in said photoresist layer; removing concurrently said polymer sidewall spacers and remaining portions of said photoresist layer by plasma ashing in oxygen; depositing a conformal barrier metal layer in said contact openings and elsewhere on said polysilicon layer; depositing a conducting metal layer on said barrier metal layer; patterning said conducting metal layer, said barrier metal layer and said polysilicon layer, and thereby completing said electrical contacts and said metal interconnections on said semiconductor substrate.
Claim 20
Dependent Claim
25 words
The method of claim 16, wherein said insulating layer is composed of borophosphosilicate glass (BPSG) having a thickness of between about 2000 and 15000 Angstroms.
Claim 21
Dependent Claim
27 words
The method of claim 17, wherein said insulating layer is leveled by annealing at a temperature of 800° to 900° C. for about 15 to 30 minutes.
Claim 22
Dependent Claim
19 words
The method of claim 16, wherein said polysilicon layer has a thickness of between about 500 and 4000 Angstroms.
Claim 23
Dependent Claim
19 words
The method of claim 16, wherein said photoresist layer has a thickness of between about 7000 and 16000 Angstroms.
Claim 24
Dependent Claim
32 words
The method of claim 16, wherein said second anisotropic plasma etch gas mixture is composed of argon (Ar), trifluoromethane (CHF 3 ), carbon tetrafluoride (CF 4 ) and nitrogen (N 2 ).
Claim 25
Dependent Claim
74 words
The method of claim 21, wherein said argon (Ar) has a flow rate of between about 450 and 550 standard cubic centimeters per minute (sccm), said trifluoromethane (CHF 3 ) has a flow rate of between about 20.0 and 50.0 sccm, said carbon tetrafluoride (CF 4 ) has a flow rate of between 20.0 and 50.0 sccm, and said nitrogen (N 2 ) has a flow rate of between about 0 and 10.0 sccm.
Claim 26
Dependent Claim
28 words
The method of claim 21, wherein said second anisotropic plasma etching is performed in a plasma etcher in the pressure range of between about 500 and 1500 milliTorr.
Claim 27
Dependent Claim
14 words
The method of claim 16, wherein said barrier metal layer is a refractory metal.
Claim 28
Dependent Claim
14 words
The method of claim 16, wherein said conducting metal layer is aluminum/copper (AlCu) alloy.
References Cited (Backward Citations)
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