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Method of stacking electronic components

Assignee: FormFactor Inc
•
Filing: 1996-10-21
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Granted: 1999-07-27
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Expires: 2016-10-21
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Abstract

Abstract A method of stacking electronic components is disclosed. A first electronic component having a first interconnection substrate with a first set of contact pads on at least one surface thereof is provided. At least a first semiconductor device with resilient contact structures mounted thereto is provided. The first semiconductor device is positioned relative to the first electronic component with the resilient contact structures extending therefrom and electrically contacting the first set of contact pads of the first interconnection substrate.

Inventors

  • 👤 Igor Y. Khandros
  • 👤 Gaetan L. Mathieu

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 09:13
CPC Classifications
H; H05; H05K; H05K7/00; H05K7/02; H05K7/10; H05K7/1053; H05K7/1061; H05K7/1069; G; G01; G01R; G01R1/00; G01R1/02; G01R1/04; G01R1/0408; G01R1/0433; G01R1/0441; G01R1/0466; G01R1/0483; G01R1/06; G01R1/067; G01R1/06711; G01R1/06716; G01R1/073; G01R1/07307; G01R1/07314; G01R1/07342; G01R1/07357; G01R31/00; G01R31/28; G01R31/2851; G01R31/2884; H05K3/00; H05K3/30; H05K3/306; H05K3/308; H05K3/32; H05K3/325; H05K3/326; H05K3/34; H05K3/341; H05K3/3421; H05K3/3426; H05K3/40; H05K3/4007; H05K3/4015; H10; H10P; H10P72/00; H10P72/04; H10P72/0444; H10P72/0448; H10P74/00; H10P74/23; H10W; H10W70/00; H10W70/099; H10W70/60; H10W70/62; H10W70/63; H10W70/635; H10W72/00; H10W72/20; H10W74/00; H10W74/01; H10W74/012; H10W74/10; H10W74/15; H10W90/00; H10W90/701; B; B23; B23K; B23K2101/00; B23K2101/36; B23K2101/40; G01R1/06755; G01R1/06761; G01R3/00; G01R31/2886; H01; H01R; H01R12/00; H01R12/50; H01R12/51; H01R12/52; H05K1/00; H05K1/02; H05K1/14; H05K1/141; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0388; H05K2201/0397; H05K2201/06; H05K2201/068; H05K2201/10; H05K2201/10227; H05K2201/1031; H05K2201/10318; H05K2201/10378; H05K2201/10613; H05K2201/10621; H05K2201/10719; H05K2201/10734; H05K2201/10742; H05K2201/1075; H05K2201/10757; H05K2201/10878; H05K2201/10886; H05K2201/10909; H05K2201/10946; H05K3/36; H05K3/368; H05K3/4092; H10W70/67; H10W70/68; H10W70/682; H10W70/685; H10W72/01; H10W72/012; H10W72/01221; H10W72/01225; H10W72/015; H10W72/01551; H10W72/071; H10W72/0711; H10W72/07141; H10W72/072; H10W72/07231; H10W72/07236; H10W72/075; H10W72/07511; H10W72/07531; H10W72/07532; H10W72/07533; H10W72/07551; H10W72/07554; H10W72/221; H10W72/222; H10W72/251; H10W72/252; H10W72/255; H10W72/29; H10W72/50; H10W72/521; H10W72/522; H10W72/541; H10W72/547; H10W72/551; H10W72/552; H10W72/5522; H10W72/5524; H10W72/5525; H10W72/851; H10W72/853; H10W72/856; H10W72/90; H10W72/941; H10W72/944; H10W72/9445; Y; Y02; Y02P; Y02P70/00; Y02P70/50; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/4913; Y10T29/49144; Y10T29/49147; Y10T29/49149; Y10T29/49155; Y10T29/49162; Y10T29/49169; Y10T29/49204; Y10T29/49208; Y10T29/49217; Y10T29/49224

Claims Analysis

Total Claims: 20
Claim 1
Independent Claim 180 words
A method of stacking electronic components, comprising: providing a first electronic component having a first interconnection substrate with a first set of contact pads on at least a first surface thereof, and at least a first semiconductor device with resilient contact structures mounted thereto, extending therefrom and electrically contacting the first set of contact pads of the first interconnection substrate; providing a second electronic component having a second interconnection substrate with a second set of contact pads on at least one surface thereof, and at least a second semiconductor device with resilient contact structures mounted to, extending therefrom and electrically contacting the second set of contact pads of the second interconnection substrate; providing a one of the first interconnection substrate and the second interconnection substrate with a third set of contact pads on a surface thereof; and providing an other of the first interconnection substrate and the second interconnection substrate with resilient contact structures mounted to, extending therefrom and electrically contacting the third set of contact pads of the one of the first interconnection substrate and the second interconnection substrate.
Claim 2
Independent Claim 180 words
A method of stacking electronic components, comprising: providing a first electronic component having a first interconnection substrate with a first set of contact pads on at least a first surface thereof, and at least a first semiconductor device with resilient contact structures mounted thereto, extending therefrom and electrically contacting the first set of contact pads of the first interconnection substrate; providing a second electronic component having a second interconnection substrate with a second set of contact pads on at least one surface thereof, and at least a second semiconductor device with resilient contact structures mounted to, extending therefrom and electrically contacting the second set of contact pads of the second interconnection substrate; providing a one of the first interconnection substrate and the second interconnection substrate with a third set of contact pads on a surface thereof; and providing an other of the first interconnection substrate and the second interconnection substrate with resilient contact structures mounted to, extending therefrom and electrically contacting the third set of contact pads of the one of the first interconnection substrate and the second interconnection substrate.
Claim 3
Dependent Claim 62 words
The method, according to claim 1, wherein the first electronic component has a fourth set of contact pads on a second surface, opposing the first surface, of the first interconnection substrate, the method further comprising: providing a third semiconductor device with resilient contact structures mounted to, extending therefrom and electrically contacting the fourth set of contact pads of the first interconnection substrate.
Claim 4
Dependent Claim 21 words
The method, according to claim 1, wherein: the second interconnection substrate is perpendicular to a plane of the first interconnection substrate.
Claim 5
Dependent Claim 35 words
The method, according to claim 1, wherein the resilient contact structures are formed by: mounting a respective elongate flexible core element to a respective contact pad; and forming a conductive shell over the core element.
Claim 6
Dependent Claim 53 words
The method, according to claim 4, wherein: the core element is formed of a material selected from the group consisting of: (a) gold, aluminum and copper with small amounts of beryllium, cadmium, silicon and magnesium, and (b) metals of the platinum group, and (c) lead, tin, indium and alloys of the individual materials.
Claim 7
Dependent Claim 24 words
The method, according to claim 4, wherein: the elongate flexible core element has a diameter in the range of from 0.25 to 10 mils.
Claim 8
Dependent Claim 25 words
The method, according to claim 4, wherein: the elongate flexible core element has a length in the range of from 10 mils to 500 mils.
Claim 9
Dependent Claim 56 words
The method, according to claim 4, wherein: the shell is formed as a multilayer shell; and at least one layer of the shell is formed of a material which is selected for its ability to provide mechanical properties selected from the group consisting of spring properties, resiliency yield strength and compliance for the resilient contact structures.
Claim 10
Dependent Claim 33 words
The method, according to claim 8, wherein: at least one layer of the shell is formed of a material which has a yield strength of at least thirty thousand pounds per square inch.
Claim 11
Dependent Claim 43 words
The method, according to claim 4, wherein: the shell is formed as a multilayer shell; and at least one layer of the shell is formed of a material selected from the group consisting of nickel, iron, cobalt and alloys of the individual materials.
Claim 12
Dependent Claim 59 words
The method, according to claim 4, wherein: the shell is formed as a multilayer shell; and at least one layer of the shell is formed of a material selected from the group consisting of copper, nickel, cobalt, tin, boron, phosphorous, chromium, tungsten, molybdenum, bismuth, indium, cesium, antimony, gold, silver, rhodium, palladium, platinum, ruthenium, and alloys of the individual materials.
Claim 13
Dependent Claim 53 words
The method, according to claim 4, wherein: the shell is formed as a multilayer shell; and at least one layer of the shell is formed of a material selected from the group consisting of nickel, cobalt, iron, phosphorous, boron, copper, tungsten, molybdenum, rhodium, chromium, ruthenium, lead, tin and alloys of the individual materials.
Claim 14
Dependent Claim 51 words
The method, according to claim 4, wherein: the shell is formed as a multilayer shell; and at least one layer of the shell is formed of a material selected from the group consisting of gold, silver, metals of the platinum group, alloys of metals of the platinum group and solder alloys.
Claim 15
Dependent Claim 22 words
The method, according to claim 4, wherein: the shell has a thickness in the range of from 0.20 mils to 20 mils.
Claim 16
Dependent Claim 39 words
The method, according to claim 4, wherein: the shell is formed as a multilayer shell; and an inner layer of the shell is in the form of a coating selected from the group consisting of nickel and its alloys.
Claim 17
Dependent Claim 34 words
The method according to claim 4, wherein: the shell is formed as a multilayer shell; and an inner layer of the shell has a thickness in the range of from 1 to 3 mils.
Claim 18
Dependent Claim 23 words
The method, according to claim 4, wherein: the elongate flexible core element is mounted to the terminal by bonding, thereby forming a bond.
Claim 19
Dependent Claim 24 words
The method, according to claim 17, wherein: the shell is formed onto the core element by the use of a conventional aqueous plating technique.
Claim 20
Dependent Claim 41 words
The method, according to claim 17, wherein: the shell is formed onto the core element by a process selected from the group consisting of physical vapor deposition, chemical vapor deposition decomposition processes using gaseous, liquid or solid precursors evaporating and sputtering.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2002-07-26 2003-01-25 2003-07-27 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2006-07-26 2007-01-25 2007-07-27 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2010-07-26 2011-01-25 2011-07-27 $7700.00 Window Closed / Lapsed

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