US5915199A
Expired / Lapsed
US
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Method for manufacturing a CMOS self-aligned strapped interconnection
Assignee: Sharp Corp
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Filing: 1998-06-04
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Granted: 1999-06-22
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Expires: 2018-06-04
Abstract
Abstract An CMOS interconnection method that permits small source/drain surface areas has been provided. The interconnection is applicable to both strap and via type connections. The surface areas of the small source/drain regions are extended into neighboring field oxide regions by forming a silicide film from the source/drain regions to the field oxide. Interconnections on the same metal level, or to another metal level are made by contact to the silicide covered field oxide. The source/drain regions need only be large enough to accept the silicide film. Transistors with small source/drain regions have smaller drain leakage currents and less parasitic capacitance. A CMOS transistor interconnection apparatus has also been provided.
Inventors
- 👤 Sheng Teng Hsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 01:29
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/80; H10D84/82; H10D84/83; H10D84/85; H10P; H10P14/00; H10P14/40; H10P14/412; H10P14/414; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0112; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0165; H10D84/017; H10D84/0172; H10D84/0174; H10D84/0186; H10D84/02; H10D84/03; H10D84/038; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/0698
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
204 words
A method for forming interconnections from at least a first transistor with source/drain regions, through surrounding field oxide regions, using gate electrode second sidewall structures, the method comprises the steps of: a) forming a gate electrode, with an underlying gate oxide layer and first oxide sidewalls, overlying portions of the source/drain regions; b) depositing a semiconductor film overlying the transistor, including the source/drain regions, the gate electrode, the first oxide sidewalls, and the surrounding field oxide regions; c) depositing a layer of insulator overlying the first semiconductor film; d) anisotropically etching the insulator deposited in Step c) to remove the insulator on the source/drain regions, gate electrode, and surrounding field oxide region, but not from the gate electrode sidewalls, whereby second sidewalls are formed; e) depositing a refractory metal layer overlying the semiconductor film, covering the source/drain regions and selected adjoining areas of field oxide; and f) annealing the semiconductor film deposited in Step b) and the refractory metal deposited in Step e) to form a silicide film overlying the source/drain regions and the selected adjoining areas of field oxide, whereby an electrical interconnection is made to the source/drain regions from the surrounding field oxide region to minimize the size of the source/drain regions.
Claim 2
Independent Claim
204 words
A method for forming interconnections from at least a first transistor with source/drain regions, through surrounding field oxide regions, using gate electrode second sidewall structures, the method comprises the steps of: a) forming a gate electrode, with an underlying gate oxide layer and first oxide sidewalls, overlying portions of the source/drain regions; b) depositing a semiconductor film overlying the transistor, including the source/drain regions, the gate electrode, the first oxide sidewalls, and the surrounding field oxide regions; c) depositing a layer of insulator overlying the first semiconductor film; d) anisotropically etching the insulator deposited in Step c) to remove the insulator on the source/drain regions, gate electrode, and surrounding field oxide region, but not from the gate electrode sidewalls, whereby second sidewalls are formed; e) depositing a refractory metal layer overlying the semiconductor film, covering the source/drain regions and selected adjoining areas of field oxide; and f) annealing the semiconductor film deposited in Step b) and the refractory metal deposited in Step e) to form a silicide film overlying the source/drain regions and the selected adjoining areas of field oxide, whereby an electrical interconnection is made to the source/drain regions from the surrounding field oxide region to minimize the size of the source/drain regions.
Claim 3
Dependent Claim
61 words
A method as in claim 1 in which Step e) includes depositing a refractory metal layer overlying the gate electrode and second sidewalls; in which Step f) includes annealing the transistor to form a silicide film overlying the transistor in the regions where the first semiconductor film was exposed in Step d) including the gate electrode, but not the second sidewalls.
Claim 4
Dependent Claim
35 words
A method as in claim 2 including a further step, following Step f), of: g) removing unreacted refractory metal overlying the second sidewalls, the second sidewalls themselves, and semiconductor film overlying the first oxide sidewalls.
Claim 5
Dependent Claim
89 words
A method as in claim 3 including the further steps, following Step g), of: h) depositing a dielectric interlevel with a top surface overlying the transistor; i) etching the dielectric interlevel to form contact holes from the dielectric interlevel top surface to the silicide film overlying the selected areas of field oxide; and j) depositing metal in the contact holes to form electrical interconnects from the surface of the dielectric interlevel to the source/drain regions, whereby an interconnect is made without regard to the size of the source/drain regions.
Claim 6
Dependent Claim
28 words
A method as in claim 1 in which Step b) includes the semiconductor film being selected from the group consisting of polysilicon and Si x Ge 1-x .
Claim 7
Dependent Claim
23 words
A method as in claim 5 in which (x), of Si x Ge 1-x , is in the range between 0.5 and 0.9.
Claim 8
Dependent Claim
26 words
A method as in claim 1 wherein the transistor is selected from the group consisting of bulk silicon, silicon on insulator (SOI), and raised source/drain transistors.
Claim 9
Dependent Claim
27 words
A method as in claim 1 in which Step b) includes depositing a semiconductor film having a thickness in the range between 50 and 200 nanometers (nm).
Claim 10
Dependent Claim
23 words
A method as in claim 3 in which Step c) includes depositing an insulator selected from the group consisting of oxide and nitride.
Claim 11
Dependent Claim
51 words
A method as in claim 9 in which Step c) includes depositing an oxide insulator, and in which Step d) includes using a buffered hydrofluoride (BHF) etch to remove the second gate electrode oxide sidewalls, and NH 3 OH:H 2 O 2 :H 2 O solution to remove the semiconductor film.
Claim 12
Dependent Claim
49 words
A method as in claim 9 in which Step c) includes depositing a nitride insulator, and in which Step g) includes using phosphoric acid to remove the second gate electrode oxide sidewalls, and NH 3 OH:H 2 O 2 :H 2 O solution to remove the first semiconductor film.
Claim 13
Dependent Claim
26 words
A method as in claim 1 in which Step e) includes a refractory metal selected from the group consisting of Ti, Co, W, Pt, and Ni.
Claim 14
Dependent Claim
26 words
A method as in claim 1 in which Step f) includes forming a silicide layer having a thickness in the range between 40 and 200 nm.
Claim 15
Dependent Claim
28 words
A method as in claim 1 in which Step f) includes forming a silicide layer having a resistivity in the range between 2 and 10 ohms per square.
Claim 16
Dependent Claim
53 words
A method as in claim 1 in which Step f) includes two annealing sub-steps, in which the first Sub-step includes annealing at a temperature in the range between 450 and 650 degrees C., and in which the second Sub-step includes annealing at a temperature in the range between 700 and 900 degrees C.
Claim 17
Dependent Claim
70 words
A method as in claim 2 in which the first sidewalls, the second sidewalls of Step d), and the intervening semiconductor film deposited in Step b) have a combined sidewall thickness, and including a further step, following Step d) of: d 1 ) doping and annealing the source/drain regions to form active source/drain regions with source/drain widths approximately twice as wide as the combined sidewall thickness overlying the source/drain regions.
Claim 18
Independent Claim
213 words
A method for forming a strap interconnection from at least a second transistor with a first electrode to a first transistor with a second electrode across a field oxide region, using gate electrode second sidewall structures, the method comprises the steps of: a) forming gate electrodes, with underlying gate oxide layers, first oxide sidewalls, and source/drain electrodes; b) depositing a semiconductor film overlying the transistors, including the first and second electrodes, the first oxide sidewalls, and surrounding field oxide regions; c) depositing a laver of insulator overlying the semiconductor film; d) anisotropically etching the insulator deposited in Step c) to remove the insulator on the electrodes, and surrounding field oxide region, but not from the gate electrode sidewalls, whereby the second sidewalls are formed; e) depositing a refractory metal layer overlying the semiconductor film, covering the first and second electrodes and selected areas of intervening field oxide; and f) annealing the semiconductor film deposited in Step b) and the refractory metal deposited in Step e) to form a silicide film overlying the first electrode of the second transistor, the second electrode of the first transistor, and the selected areas of intervening field oxide, whereby an electrical interconnection is made to from the first transistor to the second transistor across the intervening field oxide.
Claim 19
Independent Claim
213 words
A method for forming a strap interconnection from at least a second transistor with a first electrode to a first transistor with a second electrode across a field oxide region, using gate electrode second sidewall structures, the method comprises the steps of: a) forming gate electrodes, with underlying gate oxide layers, first oxide sidewalls, and source/drain electrodes; b) depositing a semiconductor film overlying the transistors, including the first and second electrodes, the first oxide sidewalls, and surrounding field oxide regions; c) depositing a laver of insulator overlying the semiconductor film; d) anisotropically etching the insulator deposited in Step c) to remove the insulator on the electrodes, and surrounding field oxide region, but not from the gate electrode sidewalls, whereby the second sidewalls are formed; e) depositing a refractory metal layer overlying the semiconductor film, covering the first and second electrodes and selected areas of intervening field oxide; and f) annealing the semiconductor film deposited in Step b) and the refractory metal deposited in Step e) to form a silicide film overlying the first electrode of the second transistor, the second electrode of the first transistor, and the selected areas of intervening field oxide, whereby an electrical interconnection is made to from the first transistor to the second transistor across the intervening field oxide.
Claim 20
Dependent Claim
24 words
The method as in claim 17 wherein the first and second electrodes are selected from the group consisting of gate, source, and drain electrodes.
Claim 21
Independent Claim
317 words
A method for forming interconnections from at least a first transistor with source/drain regions, through surrounding field oxide regions, using gate electrode second sidewall structures, the method comprises the steps of: a) forming a gate electrode, with an underlying gate oxide layer and first oxide sidewalls, overlying portions of the source/drain regions; b) depositing a semiconductor film overlying the transistor, including the source/drain regions, the gate electrode, the first oxide sidewalls, and the surrounding field oxide regions; c) depositing a layer of insulator overlying the first semiconductor film; d) anisotropically etching the insulator deposited in Step c) to remove the insulator on the source/drain regions, gate electrode, and surrounding field oxide region, but not from the gate electrode sidewalls, whereby second sidewalls are formed; e) depositing a refractory metal layer overlying the semiconductor film, covering the source/drain regions, selected adjoining areas of field oxide, and overlying the gate electrode and second sidewalls; f) annealing the semiconductor film deposited in Step b) and the refractory metal deposited in Step e) to form a silicide film overlying the source/drain regions, the selected adjoining areas of field oxide, and overlying the transistor in the regions where the first semiconductor film was exposed in Step d) including the gate electrode, but not the second sidewalls; g) removing unreacted refractory metal overlying the second sidewalls, the second sidewalls themselves, and semiconductor film overlying the first oxide sidewalls; h) depositing a dielectric interlevel with a top surface overlying the transistor; i) etching the dielectric interlevel to form contact holes from the dielectric interlevel top surface to the silicide film overlying the selected areas of field oxide; and j) depositing metal in the contact holes to form electrical interconnects from the surface of the dielectric interlevel to the source/drain regions, whereby an electrical interconnection is made to the source/drain regions from the surrounding field oxide region to minimize the size of the source/drain regions.
Claim 22
Independent Claim
317 words
A method for forming interconnections from at least a first transistor with source/drain regions, through surrounding field oxide regions, using gate electrode second sidewall structures, the method comprises the steps of: a) forming a gate electrode, with an underlying gate oxide layer and first oxide sidewalls, overlying portions of the source/drain regions; b) depositing a semiconductor film overlying the transistor, including the source/drain regions, the gate electrode, the first oxide sidewalls, and the surrounding field oxide regions; c) depositing a layer of insulator overlying the first semiconductor film; d) anisotropically etching the insulator deposited in Step c) to remove the insulator on the source/drain regions, gate electrode, and surrounding field oxide region, but not from the gate electrode sidewalls, whereby second sidewalls are formed; e) depositing a refractory metal layer overlying the semiconductor film, covering the source/drain regions, selected adjoining areas of field oxide, and overlying the gate electrode and second sidewalls; f) annealing the semiconductor film deposited in Step b) and the refractory metal deposited in Step e) to form a silicide film overlying the source/drain regions, the selected adjoining areas of field oxide, and overlying the transistor in the regions where the first semiconductor film was exposed in Step d) including the gate electrode, but not the second sidewalls; g) removing unreacted refractory metal overlying the second sidewalls, the second sidewalls themselves, and semiconductor film overlying the first oxide sidewalls; h) depositing a dielectric interlevel with a top surface overlying the transistor; i) etching the dielectric interlevel to form contact holes from the dielectric interlevel top surface to the silicide film overlying the selected areas of field oxide; and j) depositing metal in the contact holes to form electrical interconnects from the surface of the dielectric interlevel to the source/drain regions, whereby an electrical interconnection is made to the source/drain regions from the surrounding field oxide region to minimize the size of the source/drain regions.
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