US5910339A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fabrication of atomic step-free surfaces
Assignee: Cornell Research Foundation Inc
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Filing: 1996-08-22
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Granted: 1999-06-08
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Expires: 2016-08-22
Abstract
Abstract Fabrication of atomic step-free regions on a substrate surface is achieved by first forming a two-dimensional pattern on the substrate. The pattern is preferably a grating comprising an array of troughs or mesas which are separated from one another by a plurality of ridges or trenches. Any atomic steps on the flat top surfaces of the troughs or mesas are moved into barrier regions formed by the ridge or trench sidewalls during a high temperature annealing or deposition step, thereby leaving the flat surfaces of the troughs and mesas free of atomic steps. Structures having step-free regions large enough to accommodate micron sized devices having nanometer sized features are thereby formed.
Inventors
- 👤 Jack M. Blakely
- 👤 So Tanaka
- 👤 Christopher C. Umbach
- 👤 Rudolf M. Tromp
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:01
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/90; H10P50/00
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
137 words
A method for forming atomic step-free regions on a wafer surface comprising the steps of: a) providing a wafer having a top surface; b) forming a two-dimensional grating on said surface comprising a plurality of flat surfaced troughs and a plurality of upstanding ridges disposed on said surface in the shape of a two-dimensional grating pattern, each of said troughs being surrounded by a corresponding plurality of said ridges, and being separated from each adjacent one of said troughs by a corresponding one of said ridges, each of said ridges having at least a first sidewall which acts as a barrier region; c) removing an oxide layer on each of said troughs; and d) moving atomic steps on said flat surfaced troughs into said barrier regions of said ridges by annealing said top surface of said wafer.
Claim 2
Independent Claim
137 words
A method for forming atomic step-free regions on a wafer surface comprising the steps of: a) providing a wafer having a top surface; b) forming a two-dimensional grating on said surface comprising a plurality of flat surfaced troughs and a plurality of upstanding ridges disposed on said surface in the shape of a two-dimensional grating pattern, each of said troughs being surrounded by a corresponding plurality of said ridges, and being separated from each adjacent one of said troughs by a corresponding one of said ridges, each of said ridges having at least a first sidewall which acts as a barrier region; c) removing an oxide layer on each of said troughs; and d) moving atomic steps on said flat surfaced troughs into said barrier regions of said ridges by annealing said top surface of said wafer.
Claim 3
Dependent Claim
20 words
The method of claim 1, wherein said step of providing a wafer comprises providing a wafer formed of Si (001).
Claim 4
Dependent Claim
18 words
The method of claim 2, wherein said annealing is carried out at a temperature of approximately 1000-1150° C.
Claim 5
Dependent Claim
26 words
The method of claim 2, further comprising the step of depositing silicon on said wafer surface after removing said oxide layer, and before annealing said surface.
Claim 6
Dependent Claim
23 words
The method of claim 1, wherein said step of removing said oxide layer is carried out by subjecting said wafer to thermal flashing.
Claim 7
Dependent Claim
21 words
The method of claim 5, wherein said thermal flashing is carried out using electron bombardment on a backside of said wafer.
Claim 8
Dependent Claim
17 words
The method of claim 1, wherein each of said ridges has a width of approximately 1 μm.
Claim 9
Dependent Claim
17 words
The method of claim 7, wherein each of said ridges has a height of approximately 0.5 μm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-06-07 | 2002-12-07 | 2003-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-06-07 | 2006-12-07 | 2007-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-06-07 | 2010-12-07 | 2011-06-08 | $7700.00 | Window Closed / Lapsed |