Patent US4220284A successfully refreshed from Google Patents.
Patent US5909637A successfully refreshed from Google Patents.
US5909637A
Expired / Lapsed
US
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Copper adhesion to a diffusion barrier surface and method for same
Assignee: Sharp Corp
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Filing: 1996-09-20
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Granted: 1999-06-01
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Expires: 2016-09-20
Abstract
Abstract A method has been provided for improving the adhesion of Cu to a diffusion barrier material, such as TiN, in an integrated circuit substrate. The diffusion barrier material is exposed to either a reactive gas species, or a plasma containing a reactive gas. By removing contaminants on the surface of the diffusion barrier, and forming weak molecular bonds between the diffusion barrier surface and the reactive gas, the diffusion barrier surface is protected and prepared for Cu adhesion. Cu, breaking the bonds between the reactive gas and diffusion barrier surface, readily bonds to the diffusion material for improved adhesion between surfaces. The diffusion barrier surface, prepared with the reactive gas, allows the IC to be stored, delaying the Cu deposition to more convenient times in the IC fabrication process. An Cu conductor interface adhered to the diffusion barrier of an integrated circuit is also provided.
Inventors
- 👤 Lawrence J. Charneski
- 👤 Tue Nguyen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:53
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/033; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/43; H10W20/047; H10W20/048; H10W20/056; H10P14/418; H10P14/432
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
169 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, wherein the selected regions of the IC also include silicon, the method comprising the steps of: a) exposing each selected Cu-receiving surface to a reactive gas species generated from a direct plasma source having a RF power level of less than approximately 500 watts, whereby the relatively low energy level of the plasma ions minimizes the disruption of silicon crystalline structures; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 2
Independent Claim
169 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, wherein the selected regions of the IC also include silicon, the method comprising the steps of: a) exposing each selected Cu-receiving surface to a reactive gas species generated from a direct plasma source having a RF power level of less than approximately 500 watts, whereby the relatively low energy level of the plasma ions minimizes the disruption of silicon crystalline structures; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 3
Independent Claim
189 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) exposing each selected Cu-receiving surface to a reactive gas species selected from the group consisting of O 2 , H 2 , N 2 , Ar, He, Ne, Kr, Xe, and volatile C compounds selected from the group consisting of CO, CH 4 , C 2 H 6 , C 2 F 6 , C 3 F 8 , C 4 F 8 , CHF 3 , CH 3 F, and CF 4 ; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 4
Independent Claim
189 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) exposing each selected Cu-receiving surface to a reactive gas species selected from the group consisting of O 2 , H 2 , N 2 , Ar, He, Ne, Kr, Xe, and volatile C compounds selected from the group consisting of CO, CH 4 , C 2 H 6 , C 2 F 6 , C 3 F 8 , C 4 F 8 , CHF 3 , CH 3 F, and CF 4 ; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 5
Independent Claim
172 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) exposing each selected Cu-receiving surface to a H 2 and N 2 reactive gas species plasma generated from a plasma source, with the percentage of H 2 being generally in the range of 5 to 10% of the total volume, whereby the safety of the process step is enhanced with the use of a non-explosive gas mixture; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 6
Independent Claim
172 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) exposing each selected Cu-receiving surface to a H 2 and N 2 reactive gas species plasma generated from a plasma source, with the percentage of H 2 being generally in the range of 5 to 10% of the total volume, whereby the safety of the process step is enhanced with the use of a non-explosive gas mixture; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 7
Independent Claim
169 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, wherein selected regions of the IC also include silicon, the method comprising the steps of: a) exposing each selected Cu-receiving surface to an ionized reactive gas species generated from a direct plasma source having a RF power level of less than approximately 500 watts, whereby the relatively low energy level of the plasma ions minimizes the disruption of silicon crystalline structures; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 8
Independent Claim
169 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, wherein selected regions of the IC also include silicon, the method comprising the steps of: a) exposing each selected Cu-receiving surface to an ionized reactive gas species generated from a direct plasma source having a RF power level of less than approximately 500 watts, whereby the relatively low energy level of the plasma ions minimizes the disruption of silicon crystalline structures; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 9
Independent Claim
190 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) exposing each selected Cu-receiving surface to an ionized reactive gas species selected from the group consisting of O 2 , H 2 , N 2 , Ar, He, Ne, Kr, Xe, and volatile C compounds selected from the group consisting of CO, CH 4 , C 2 H 6 , C 2 F 6 , C 3 F 8 , C 4 F 8 , CHF 3 , CH 3 F, and CF 4 ; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 10
Independent Claim
190 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) exposing each selected Cu-receiving surface to an ionized reactive gas species selected from the group consisting of O 2 , H 2 , N 2 , Ar, He, Ne, Kr, Xe, and volatile C compounds selected from the group consisting of CO, CH 4 , C 2 H 6 , C 2 F 6 , C 3 F 8 , C 4 F 8 , CHF 3 , CH 3 F, and CF 4 ; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 11
Independent Claim
168 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) exposing each selected Cu-receiving surface to an ionized H 2 and N 2 reactive gas species plasma, with the percentage of H 2 being generally in the range of 5 to 10% of the total volume, whereby the safety of the process step is enhanced with the use of a non-explosive gas mixture; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 12
Independent Claim
168 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) exposing each selected Cu-receiving surface to an ionized H 2 and N 2 reactive gas species plasma, with the percentage of H 2 being generally in the range of 5 to 10% of the total volume, whereby the safety of the process step is enhanced with the use of a non-explosive gas mixture; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 13
Dependent Claim
53 words
A method as in claim 1 in which the diffusion barrier material is selected from the group consisting of TiN, TiON, TiSiN, TaSiN, TaN, TiW, TiWN, Mo, and WN, whereby Cu is adhered to a Cu-receiving surface which permits electrical communication between the Cu and regions of the IC underlying the Cu-receiving surface.
Claim 14
Independent Claim
144 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material selected from the group consisting of BN, Si 3 N 4 , and SiBN, the diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) exposing each selected Cu-receiving surface to a reactive gas species; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu is adhered to an electrically insulating Cu-receiving surface.
Claim 15
Independent Claim
144 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material selected from the group consisting of BN, Si 3 N 4 , and SiBN, the diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) exposing each selected Cu-receiving surface to a reactive gas species; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu is adhered to an electrically insulating Cu-receiving surface.
Claim 16
Independent Claim
144 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) at a substrate temperature of less than approximately 200° C. to protect the silicon crystalline structures of the IC, exposing each selected Cu-receiving surface to a reactive gas species; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 17
Independent Claim
144 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) at a substrate temperature of less than approximately 200° C. to protect the silicon crystalline structures of the IC, exposing each selected Cu-receiving surface to a reactive gas species; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 18
Independent Claim
151 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) exposing each selected Cu-receiving surface to a reactive gas species; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; b 1 ) terminating step a) generally within a time interval of less than 60 seconds, whereby the silicon crystalline structures of the IC are protected; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 19
Independent Claim
151 words
A method of applying Cu to selected integrated circuit (IC) surfaces, the selected Cu-receiving surfaces being predominately on diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) exposing each selected Cu-receiving surface to a reactive gas species; b) permitting the reactive gas species to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; b 1 ) terminating step a) generally within a time interval of less than 60 seconds, whereby the silicon crystalline structures of the IC are protected; and c) depositing CVD Cu on the Cu-receiving surface exposed in step a), whereby Cu adhesion to the diffusion barrier is improved.
Claim 20
Dependent Claim
37 words
A method as in claim 1 in which step a) includes generating the reactive gas species from a downstream plasma source, whereby high energy ions are removed from the plasma flow to minimize damage to the IC.
Claim 21
Independent Claim
188 words
A method of applying Cu to selected IC surfaces, the selected Cu-receiving surfaces being predominately on a TiN diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) using a direct plasma source having a RF power level of less than approximately 500 watts to generate a H 2 plasma; b) exposing each selected Cu-receiving surface to the predominately H 2 plasma generated in step a), with step b) being performed at a substrate temperature of less than approximately 200°; c) permitting the reactive gas species of the H 2 plasma to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; d) terminating step b) generally within a time interval of less than 60 seconds; and e) depositing CVD Cu on the Cu-receiving surface exposed in step b), whereby bonding between the Cu and the TiN surface is improved.
Claim 22
Independent Claim
188 words
A method of applying Cu to selected IC surfaces, the selected Cu-receiving surfaces being predominately on a TiN diffusion barrier material applied to selected regions of the IC, the method comprising the steps of: a) using a direct plasma source having a RF power level of less than approximately 500 watts to generate a H 2 plasma; b) exposing each selected Cu-receiving surface to the predominately H 2 plasma generated in step a), with step b) being performed at a substrate temperature of less than approximately 200°; c) permitting the reactive gas species of the H 2 plasma to interact with molecules of the Cu-receiving surface, whereby higher energy molecular bonds are replaced with lower energy bonds between the reactive gas species and the exposed Cu-receiving surface, changing the surface characteristics of the exposed Cu-receiving surface to promote the formation of bonds between the Cu-receiving surface and subsequently deposited Cu; d) terminating step b) generally within a time interval of less than 60 seconds; and e) depositing CVD Cu on the Cu-receiving surface exposed in step b), whereby bonding between the Cu and the TiN surface is improved.
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