Patent US5909635A successfully refreshed from Google Patents.
US5909635A
Expired / Lapsed
US
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Cladding of an interconnect for improved electromigration performance
Assignee: Micron Technology Inc
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Filing: 1996-06-28
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Granted: 1999-06-01
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Expires: 2016-06-28
Abstract
Abstract According to one embodiment, a method for encapsulating a conductive structure having a first layer, a second layer and a third layer, with a cladding layer, for improved electromigration performance is described. The method comprises the following steps: forming a fourth layer over the conductive structure and reacting at least a portion of the first layer, the third layer and the fourth layer with a portion of the second layer to form a cladding layer that encapsulates an unreacted portion of the second layer. In one embodiment of the present invention, the cladding layer is TiAl 3 .
Inventors
- 👤 Thomas Marieb
- 👤 Donald Gardner
- 👤 Quat Vu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 11:42
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10W20/032; H10W20/038; H10W20/039; H10W20/047; H10W20/049; H10W20/063; H10W20/40; H10W20/41; H10W20/425
Claims Analysis
Total Claims: 44
Claim 1
Independent Claim
84 words
A method for encapsulating an interconnect for improved electromigration performance, said method comprising: a) forming a first conductive layer; b) forming a second conductive layer that is disposed over said first conductive layer; c) etching said first and said second conductive layers to form a conductive structure; and d) forming a cladding layer over said conductive structure, wherein said cladding layer serves as a mechanical constraint to said conductive structure and e) reacting said cladding layer with at least one of the conductive layers.
Claim 2
Independent Claim
84 words
A method for encapsulating an interconnect for improved electromigration performance, said method comprising: a) forming a first conductive layer; b) forming a second conductive layer that is disposed over said first conductive layer; c) etching said first and said second conductive layers to form a conductive structure; and d) forming a cladding layer over said conductive structure, wherein said cladding layer serves as a mechanical constraint to said conductive structure and e) reacting said cladding layer with at least one of the conductive layers.
Claim 3
Dependent Claim
20 words
The method of claim 1, wherein said first conductive layer is selected from a group consisting of titanium and tantalum.
Claim 4
Dependent Claim
27 words
The method of claim 2, wherein said second conductive layer is selected from a group consisting of aluminum and an aluminum alloy comprised of aluminum with copper.
Claim 5
Dependent Claim
22 words
The method of claim 3, wherein said cladding layer is selected from a group consisting of titanium nitride, tungsten and titanium tungsten.
Claim 6
Dependent Claim
26 words
The method of claim 1, further including the following step: etching said cladding layer so that cladding layer surrounds only the sidewalls of said conductive structure.
Claim 7
Independent Claim
68 words
A method for encapsulating a conductive structure having a first layer, a second layer and a third layer, said method comprising: a) forming a cladding layer over said conductive structure; b) etching said cladding layer to remove a top surface of said cladding layer and leaving said cladding to support two sidewalls of said conductive structure; and c) reacting said cladding layer with at least the second layer.
Claim 8
Independent Claim
68 words
A method for encapsulating a conductive structure having a first layer, a second layer and a third layer, said method comprising: a) forming a cladding layer over said conductive structure; b) etching said cladding layer to remove a top surface of said cladding layer and leaving said cladding to support two sidewalls of said conductive structure; and c) reacting said cladding layer with at least the second layer.
Claim 9
Dependent Claim
22 words
The method of claim 6, wherein said first and said third layers are selected from a group consisting of titanium and tantalum.
Claim 10
Dependent Claim
25 words
The method of claim 7, wherein said second layer is selected from a group consisting of aluminum and an aluminum alloy of aluminum with copper.
Claim 11
Dependent Claim
22 words
The method of claim 8, wherein said cladding layer is selected from a group consisting of titanium nitride, tungsten and titanium tungsten.
Claim 12
Independent Claim
89 words
A method of encapsulating a conductive structure having a first layer, a second layer over said first layer, and a third layer over said second layer, said method comprising: a) forming a fourth layer over said conductive structure, wherein said fourth layer touches two opposing sidewalls of said second layer; and b) reacting at least a portion of said first layer, said third layer and said fourth layer with a portion of said second layer to form a cladding layer that encapsulates an unreacted portion of said second layer.
Claim 13
Independent Claim
89 words
A method of encapsulating a conductive structure having a first layer, a second layer over said first layer, and a third layer over said second layer, said method comprising: a) forming a fourth layer over said conductive structure, wherein said fourth layer touches two opposing sidewalls of said second layer; and b) reacting at least a portion of said first layer, said third layer and said fourth layer with a portion of said second layer to form a cladding layer that encapsulates an unreacted portion of said second layer.
Claim 14
Dependent Claim
13 words
The method of claim 10, wherein said reacting step also includes applying heat.
Claim 15
Independent Claim
195 words
A method for encapsulating an interconnect for improved electromigration performance, comprising: a) forming a first conductive layer of a first material; b) forming a second conductive layer of a second material that is disposed over said first conductive layer, wherein said first material and said second material react to form a third material; c) forming a third conductive layer of said first material that is disposed over said second conductive layer; d) forming a fourth conductive layer comprised of a fourth material that does not react with said second material, wherein said fourth conductive layer is disposed over said third conductive layer; e) etching said first conductive layer, said second conductive layer, said third conductive layer and said fourth conductive layer to form a conductive structure; f) forming a fifth conductive layer that is disposed over said conductive structure, wherein said fifth conductive layer comprises a fifth material that reacts with said second material; and g) forming a cladding layer that encapsulates four sides of an unreacted portion of said second conductive layer, which is formed by reacting said first conductive layer, said third conductive layer and said fifth conductive layer with said second layer.
Claim 16
Independent Claim
195 words
A method for encapsulating an interconnect for improved electromigration performance, comprising: a) forming a first conductive layer of a first material; b) forming a second conductive layer of a second material that is disposed over said first conductive layer, wherein said first material and said second material react to form a third material; c) forming a third conductive layer of said first material that is disposed over said second conductive layer; d) forming a fourth conductive layer comprised of a fourth material that does not react with said second material, wherein said fourth conductive layer is disposed over said third conductive layer; e) etching said first conductive layer, said second conductive layer, said third conductive layer and said fourth conductive layer to form a conductive structure; f) forming a fifth conductive layer that is disposed over said conductive structure, wherein said fifth conductive layer comprises a fifth material that reacts with said second material; and g) forming a cladding layer that encapsulates four sides of an unreacted portion of said second conductive layer, which is formed by reacting said first conductive layer, said third conductive layer and said fifth conductive layer with said second layer.
Claim 17
Dependent Claim
17 words
The method of claim 12, wherein said step of forming a cladding layer also includes applying heat.
Claim 18
Dependent Claim
19 words
The method of claim 12, further comprising the step of etching any unreacted portions of said fifth conductive layer.
Claim 19
Dependent Claim
14 words
The method of claim 12, wherein said first and fifth materials each comprise titanium.
Claim 20
Dependent Claim
17 words
The method of claim 12, wherein said first material is titanium and said fifth material is tantalum.
Claim 21
Dependent Claim
17 words
The method of claim 12, wherein said first material is tantalum and said fifth material is titanium.
Claim 22
Dependent Claim
13 words
The method of claim 12, wherein said first and fifth materials are tantalum.
Claim 23
Dependent Claim
22 words
The method of claim 15, wherein said second conductive layer is an aluminum alloy and said fourth conductive layer is titanium nitride.
Claim 24
Dependent Claim
22 words
The method of claim 16, wherein said second conductive layer is an aluminum alloy and said fourth conductive layer is titanium nitride.
Claim 25
Dependent Claim
22 words
The method of claim 17, wherein said second conductive layer is an aluminum alloy and said fourth conductive layer is titanium nitride.
Claim 26
Dependent Claim
22 words
The method of claim 19, wherein said second conductive layer is an aluminum alloy and said fourth conductive layer is titanium nitride.
Claim 27
Dependent Claim
20 words
The method of claim 19, wherein said cladding layer is an intermetallic that is more rigid than SiO 2 .
Claim 28
Dependent Claim
25 words
The method of claim 19, wherein said cladding layer is an intermetallic that is more rigid than a passivation layer being used around said interconnect.
Claim 29
Dependent Claim
13 words
The method of claim 19, wherein said cladding layer is TiAl 3 .
Claim 30
Dependent Claim
13 words
The method of claim 19, wherein said aluminum alloy is aluminum with copper.
Claim 31
Dependent Claim
15 words
The method of claim 19, wherein said aluminum alloy is aluminum with copper and silicon.
Claim 32
Independent Claim
160 words
A method for encapsulating an interconnect for improved electromigration lifetime, comprising: a) forming a conductive barrier layer; b) forming a first conductive layer that is disposed over said conductive barrier layer; c) forming a second conductive layer that is disposed over said first conductive layer; d) etching said second conductive layer, said first conductive layer and said conductive barrier layer to form an interconnect; e) forming a third conductive layer over said interconnect so that said third conductive layer is covering two sidewalls of said first conductive layer and said conductive barrier layer; and f) forming a cladding layer by reacting said first conductive layer with said conductive barrier layer, said second conductive layer and said third conductive layer so that a portion of said first conductive layer, said conductive barrier layer, said second conductive layer and said third conductive layer are converted into said cladding layer, wherein said cladding layer encapsulates an unreacted portion of said first conductive layer.
Claim 33
Independent Claim
160 words
A method for encapsulating an interconnect for improved electromigration lifetime, comprising: a) forming a conductive barrier layer; b) forming a first conductive layer that is disposed over said conductive barrier layer; c) forming a second conductive layer that is disposed over said first conductive layer; d) etching said second conductive layer, said first conductive layer and said conductive barrier layer to form an interconnect; e) forming a third conductive layer over said interconnect so that said third conductive layer is covering two sidewalls of said first conductive layer and said conductive barrier layer; and f) forming a cladding layer by reacting said first conductive layer with said conductive barrier layer, said second conductive layer and said third conductive layer so that a portion of said first conductive layer, said conductive barrier layer, said second conductive layer and said third conductive layer are converted into said cladding layer, wherein said cladding layer encapsulates an unreacted portion of said first conductive layer.
Claim 34
Dependent Claim
17 words
The method as in claim 28, wherein said step of forming a cladding layer includes applying heat.
Claim 35
Dependent Claim
20 words
The method as in claim 28, further comprising the step of etching any unreacted portions of said third conductive layer.
Claim 36
Dependent Claim
26 words
The method as in claim 28, wherein said conductive barrier layer is selected from a group consisting of titanium, tantalum, titanium nitride, titanium tungsten and tungsten.
Claim 37
Dependent Claim
15 words
The method as in claim 31, wherein said first conductive layer is an aluminum alloy.
Claim 38
Dependent Claim
13 words
The method of claim 32, wherein said aluminum alloy is aluminum with copper.
Claim 39
Dependent Claim
26 words
The method as in claim 32, wherein said second conductive layer is selected from a group consisting of titanium, tantalum, titanium nitride, titanium tungsten and tungsten.
Claim 40
Dependent Claim
26 words
The method as in claim 34, wherein said third conductive layer is selected from a group consisting of titanium, tantalum, titanium nitride, titanium tungsten and tungsten.
Claim 41
Dependent Claim
14 words
The method as in claim 35, wherein said cladding layer is TiAl 3 .
Claim 42
Dependent Claim
25 words
The method as in claim 28, wherein said conductive barrier layer, said second conductive layer and said third conductive layer are each composed of tantalum.
Claim 43
Independent Claim
73 words
A method of encapsulating a conductive structure having a first layer, a second layer selected from the group consisting of aluminum and an aluminum alloy of aluminum with copper, and a third layer, said method comprising: a) forming a cladding layer over said conductive structure; and b) etching said cladding layer to remove a top surface of said cladding layer and leaving said cladding layer to support two sidewalls of said conductive structure.
Claim 44
Independent Claim
73 words
A method of encapsulating a conductive structure having a first layer, a second layer selected from the group consisting of aluminum and an aluminum alloy of aluminum with copper, and a third layer, said method comprising: a) forming a cladding layer over said conductive structure; and b) etching said cladding layer to remove a top surface of said cladding layer and leaving said cladding layer to support two sidewalls of said conductive structure.
References Cited (Backward Citations)
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