Method for manufacturing aluminum wired layer for interconnecting device to device in a semiconductor device

Claim 1

A method for manufacturing an aluminum wired layer for interconnecting device to device comprising a plurality of aluminum wired layers formed on an insulating layer of a semiconductor device, to prevent the formation of hillock on the surface of each aluminum wired layer during heat treatment, and to prevent electromigration phenomenon in each aluminum wired layer when the semiconductor device is in operation, wherein the improvement of the aluminum wired layer comprises: depositing an aluminum layer on the insulating layer; etching the aluminum layer deposited on the surface of the insulating layer by a mask patterning process to form a plurality of aluminum wired layers on the insulating layer with each aluminum wired layer being spaced apart relative to each other on the insulating layer exposed by the formation of the plurality of aluminum wired layers formed by the mask patterning process, and with each aluminum wired layer having a top and side walls; depositing a titanium layer on the entire surface of the structure including each aluminum wired layer and the exposed portion of the insulating layer; heating the titanium layer thereby reacting the titanium of the titanium layer positioned on each aluminum wired layer with the aluminum of each aluminum wired layer, to provide a first Al-Ti compound metal layer on the top and side walls of each aluminum wired layer; and selectively removing the titanium layer remaining on the exposed portion of the insulating layer by etching the remaining titanium layer in an etchant of NH 4 OH/H 2 O 2 /H 2 O having a temperature of about 18°-40° C.

Claim 2

A method for manufacturing an aluminum wired layer for interconnecting device to device comprising a plurality of aluminum wired layers formed on an insulating layer of a semiconductor device, to prevent the formation of hillock on the surface of each aluminum wired layer during heat treatment, and to prevent electromigration phenomenon in each aluminum wired layer when the semiconductor device is in operation, wherein the improvement of the aluminum wired layer comprises: depositing an aluminum layer on the insulating layer; etching the aluminum layer deposited on the surface of the insulating layer by a mask patterning process to form a plurality of aluminum wired layers on the insulating layer with each aluminum wired layer being spaced apart relative to each other on the insulating layer exposed by the formation of the plurality of aluminum wired layers formed by the mask patterning process, and with each aluminum wired layer having a top and side walls; depositing a titanium layer on the entire surface of the structure including each aluminum wired layer and the exposed portion of the insulating layer; heating the titanium layer thereby reacting the titanium of the titanium layer positioned on each aluminum wired layer with the aluminum of each aluminum wired layer, to provide a first Al-Ti compound metal layer on the top and side walls of each aluminum wired layer; and selectively removing the titanium layer remaining on the exposed portion of the insulating layer by etching the remaining titanium layer in an etchant of NH 4 OH/H 2 O 2 /H 2 O having a temperature of about 18°-40° C.

Claim 5

A method for manufacturing an aluminum wired layer for interconnecting device to device comprising a plurality of aluminum wired layers formed on an insulating layer of a semiconductor device, to prevent the formation of hillock on the surface of each aluminum wired layer during heat treatment, and to prevent electromigration phenomenon in each aluminum wired layer when the semiconductor device is in operation, wherein the improvement of the aluminum wired layer comprises: sequentially depositing a first titanium layer and an aluminum layer on the insulating layer; etching the aluminum layer and the first titanium layer deposited on the surface of the insulating layer by a mask patterning process to form a plurality of aluminum wired layers on the insulating layer, with each aluminum wired layer being spaced apart relative to each other on the insulating layer exposed by the formation of the plurality of aluminum wired layers by the mask patterning process, and with each aluminum wired layer having a top, a bottom and side walls; depositing a second titanium layer on the entire surface of the structure including each aluminum wired layer, and on the exposed portion of the insulating layer; heating the first and second titanium layers thereby reaching the titanium of the first and second titanium layers positioned on each aluminum wired layer and at the bottom thereof with the aluminum of each aluminum wired layer, to provide a first Al-Ti compound metal layer on the top and side walls of each aluminum wired layer, and to provide a second Al-Ti compound metal layer at the bottom thereof; and selectively removing the second titanium layer remaining on the exposed portion of the insulating layer by etching the remaining second titanium layer in an etchant of NH 4 OH/H 2 O 2 /H 2 O having a temperature of about 18°-40° C.

Claim 6

A method for manufacturing an aluminum wired layer for interconnecting device to device comprising a plurality of aluminum wired layers formed on an insulating layer of a semiconductor device, to prevent the formation of hillock on the surface of each aluminum wired layer during heat treatment, and to prevent electromigration phenomenon in each aluminum wired layer when the semiconductor device is in operation, wherein the improvement of the aluminum wired layer comprises: sequentially depositing a first titanium layer and an aluminum layer on the insulating layer; etching the aluminum layer and the first titanium layer deposited on the surface of the insulating layer by a mask patterning process to form a plurality of aluminum wired layers on the insulating layer, with each aluminum wired layer being spaced apart relative to each other on the insulating layer exposed by the formation of the plurality of aluminum wired layers by the mask patterning process, and with each aluminum wired layer having a top, a bottom and side walls; depositing a second titanium layer on the entire surface of the structure including each aluminum wired layer, and on the exposed portion of the insulating layer; heating the first and second titanium layers thereby reaching the titanium of the first and second titanium layers positioned on each aluminum wired layer and at the bottom thereof with the aluminum of each aluminum wired layer, to provide a first Al-Ti compound metal layer on the top and side walls of each aluminum wired layer, and to provide a second Al-Ti compound metal layer at the bottom thereof; and selectively removing the second titanium layer remaining on the exposed portion of the insulating layer by etching the remaining second titanium layer in an etchant of NH 4 OH/H 2 O 2 /H 2 O having a temperature of about 18°-40° C.

Claim 9

A method for manufacturing an aluminum wired layer for interconnecting device to device, comprising a plurality of aluminum wired layers formed on a silicon substrate of a semiconductor device, to prevent the formation of a pit occurring at a junction between said silicon substrate and each aluminum wired layer during the treatment, and to prevent electromigration phenomenon in each aluminum wired layer when the semiconductor device is in operation, wherein the improvement of aluminum wired layer comprises: sequentially depositing a metal layer and an aluminum layer on the silicon substrate; etching the aluminum layer and the metal layer deposited on the surface of the silicon substrate by a mask patterning process to form a plurality of aluminum wired layers, with each aluminum wired layer being positioned on a metal barrier layer and spaced apart relative to each other on the silicon substrate exposed by the formation of the plurality aluminum wired layers by the mask patterning process, and with each aluminum wired layer having atop, a bottom and side walls; depositing a titanium layer on the entire surface of the structure including on each aluminum wired layer and on the exposed portion of the silicon substrate; heating the titanium layer thereby reacting the titanium on the titanium layer positioned on each aluminum wired layer with the aluminum of each aluminum wired layer to provide a first Al-Ti compound metal layer on the top and side walls; and selectively removing the remaining titanium layer on the exposed portion of the silicon substrate by etching the remaining titanium layer in an etchant of NH 4 OH/H 2 O 2 /H 2 O having a temperature of about 18°-40° C.

Claim 10

A method for manufacturing an aluminum wired layer for interconnecting device to device, comprising a plurality of aluminum wired layers formed on a silicon substrate of a semiconductor device, to prevent the formation of a pit occurring at a junction between said silicon substrate and each aluminum wired layer during the treatment, and to prevent electromigration phenomenon in each aluminum wired layer when the semiconductor device is in operation, wherein the improvement of aluminum wired layer comprises: sequentially depositing a metal layer and an aluminum layer on the silicon substrate; etching the aluminum layer and the metal layer deposited on the surface of the silicon substrate by a mask patterning process to form a plurality of aluminum wired layers, with each aluminum wired layer being positioned on a metal barrier layer and spaced apart relative to each other on the silicon substrate exposed by the formation of the plurality aluminum wired layers by the mask patterning process, and with each aluminum wired layer having atop, a bottom and side walls; depositing a titanium layer on the entire surface of the structure including on each aluminum wired layer and on the exposed portion of the silicon substrate; heating the titanium layer thereby reacting the titanium on the titanium layer positioned on each aluminum wired layer with the aluminum of each aluminum wired layer to provide a first Al-Ti compound metal layer on the top and side walls; and selectively removing the remaining titanium layer on the exposed portion of the silicon substrate by etching the remaining titanium layer in an etchant of NH 4 OH/H 2 O 2 /H 2 O having a temperature of about 18°-40° C.

Claim 13

A method for manufacturing an aluminum wired layer for interconnecting device to device, comprising a plurality of aluminum wired layers formed on a silicon substrate of a semiconductor device to prevent the formation of a pit occurring at a junction between the silicon substrate and each aluminum wired layer during heat treatment and to prevent electromigration phenomenon in each aluminum wired layer when the semiconductor device is in operation, wherein the improvement of the aluminum wired layer comprises: sequentially depositing a metal layer, a first titanium layer and an aluminum layer on the silicon substrate; etching the aluminum layer, the first titanium layer and the metal layer deposited on the surface of the silicon substrate by a mask patterning process to form a plurality of aluminum wired layers on the silicon substrate, with each aluminum wired layer being positioned on a metal barrier layer and spaced apart relative to each other on the silicon substrate exposed by the formation of the plurality of aluminum wired layers by the mask patterning process, and with each aluminum wired layer having a top, a bottom and side walls; depositing a second titanium layer on the entire surface of the structure including on each aluminum wired layer and on the exposed portion of the silicon substrate; heating the first and second titanium layers thereby reacting the titanium of the first and second titanium layers positioned on each aluminum wired layer and at the bottom thereof with the aluminum of each aluminum wired layer, to provide a first Al-Ti compound metal layer on the top, side walls and a second Al-Ti compound metal layer on the bottom of each aluminum wired layer; and selectively removing the second titanium layer remaining on the exposed portion of the silicon substrate by etching the remaining second titanium layer in an etchant of NH 4 OH/H 2 O 2 /H 2 O having a temperature of about 18°-40° C.

Claim 14

A method for manufacturing an aluminum wired layer for interconnecting device to device, comprising a plurality of aluminum wired layers formed on a silicon substrate of a semiconductor device to prevent the formation of a pit occurring at a junction between the silicon substrate and each aluminum wired layer during heat treatment and to prevent electromigration phenomenon in each aluminum wired layer when the semiconductor device is in operation, wherein the improvement of the aluminum wired layer comprises: sequentially depositing a metal layer, a first titanium layer and an aluminum layer on the silicon substrate; etching the aluminum layer, the first titanium layer and the metal layer deposited on the surface of the silicon substrate by a mask patterning process to form a plurality of aluminum wired layers on the silicon substrate, with each aluminum wired layer being positioned on a metal barrier layer and spaced apart relative to each other on the silicon substrate exposed by the formation of the plurality of aluminum wired layers by the mask patterning process, and with each aluminum wired layer having a top, a bottom and side walls; depositing a second titanium layer on the entire surface of the structure including on each aluminum wired layer and on the exposed portion of the silicon substrate; heating the first and second titanium layers thereby reacting the titanium of the first and second titanium layers positioned on each aluminum wired layer and at the bottom thereof with the aluminum of each aluminum wired layer, to provide a first Al-Ti compound metal layer on the top, side walls and a second Al-Ti compound metal layer on the bottom of each aluminum wired layer; and selectively removing the second titanium layer remaining on the exposed portion of the silicon substrate by etching the remaining second titanium layer in an etchant of NH 4 OH/H 2 O 2 /H 2 O having a temperature of about 18°-40° C.