Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
120 words
An electrical connector useful for electrically connecting an electrostatic chuck to a power supply, the connector being capable of sustained operation at elevated temperatures, the connector comprising: a conductive core electrically engaging the electrostatic chuck, the conductive core electrically connected to the power supply, the conductive core including a conductive contact button attached to a spring which is further attached to a solid conductive center contact; a dielectric insulator which surrounds at least a portion of said solid conductive center contact; and a conductive clip comprising two spaced-apart walls which circumscribes said dielectric insulator, wherein said conductive center contact and insulator each comprise materials capable of sustained operation at temperatures exceeding about 175° C. with substantially no degradation in performance.
Claim 2
Dependent Claim
120 words
An electrical connector useful for electrically connecting an electrostatic chuck to a power supply, the connector being capable of sustained operation at elevated temperatures, the connector comprising: a conductive core electrically engaging the electrostatic chuck, the conductive core electrically connected to the power supply, the conductive core including a conductive contact button attached to a spring which is further attached to a solid conductive center contact; a dielectric insulator which surrounds at least a portion of said solid conductive center contact; and a conductive clip comprising two spaced-apart walls which circumscribes said dielectric insulator, wherein said conductive center contact and insulator each comprise materials capable of sustained operation at temperatures exceeding about 175° C. with substantially no degradation in performance.
Claim 3
Dependent Claim
20 words
The electrical connector of claim 1, wherein the materials of construction permit sustained operation at temperatures greater than 200° C.
Claim 4
Dependent Claim
20 words
The electrical connector of claim 2, wherein the materials of construction permit sustained operation at temperatures greater than 400° C.
Claim 5
Dependent Claim
119 words
An electrical connector useful for power transmission in an electrostatic chuck, said electrical connector comprising: a coplanar feed through connection, wherein a conductive layer is overlaid upon the surface of a dielectric layer having an opening therethrough, to create an electrode of said electrostatic chuck, wherein said electrode consists of a conductive contact which extends from said conductive layer, and wherein a surface of said conductive contact is in electrical contact with a surface of an underlying solid center contact which is circumscribed within an electrically insulating layer, which is further circumscribed within a support platen of said electrostatic chuck, and wherein said solid center contact comprises a different material than said conductive contact extending from said conductive layer.
Claim 6
Dependent Claim
119 words
An electrical connector useful for power transmission in an electrostatic chuck, said electrical connector comprising: a coplanar feed through connection, wherein a conductive layer is overlaid upon the surface of a dielectric layer having an opening therethrough, to create an electrode of said electrostatic chuck, wherein said electrode consists of a conductive contact which extends from said conductive layer, and wherein a surface of said conductive contact is in electrical contact with a surface of an underlying solid center contact which is circumscribed within an electrically insulating layer, which is further circumscribed within a support platen of said electrostatic chuck, and wherein said solid center contact comprises a different material than said conductive contact extending from said conductive layer.
Claim 7
Dependent Claim
22 words
The electrical connector of claim 4, wherein said solid center contact has a coefficient of thermal expansion compatible with said support platen.
Claim 8
Dependent Claim
17 words
The electrical connector of claim 5, wherein said solid center contact comprises a nickel and chromium alloy.
Claim 9
Dependent Claim
12 words
The electrical connector of claim 6, wherein said alloy is Inconel® 750.
Claim 10
Dependent Claim
22 words
The electrical connector of claim 4, wherein said insulating layer comprises a material which bonds said center contact to said support platen.
Claim 11
Dependent Claim
14 words
The electrical connector of claim 8, wherein said insulating layer is a glass ceramic.
Claim 12
Dependent Claim
30 words
The electrical connector of claim 9, wherein said glass ceramic has a coefficient of thermal expansion within about 10% of the coefficient of thermal expansion of said solid center contact.
Claim 13
Dependent Claim
17 words
The electrical connector of claim 10, wherein said solid center contact comprises a nickel and chromium alloy.
Claim 14
Dependent Claim
12 words
The electrical connector of claim 11, wherein said alloy is Inconel® 750.