US5515167A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Transparent optical chuck incorporating optical monitoring
Assignee: ADE Corp
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Filing: 1994-09-13
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Granted: 1996-05-07
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Expires: 2014-09-13
Abstract
Abstract A transparent chuck is used to force a semiconductor wafer to take a prescribed shape. Any gap which is formed between the chuck and the wafer can be imaged through the transparent chuck. An interferometer is used to illuminate the gap with a narrow band illumination to create interference fringes in the gap. The fringes can be electronically imaged to create a digital input to a computer. Merit functions corresponding to the total volume of fringes in the gap or to the summation of nearest neighbor slopes of such fringes provide a measure of the thickness of such gap.
Inventors
- 👤 Anthony Ledger
- 👤 Michael Power
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 23:04
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/72; H10P72/74; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; G03F7/70783; H10P72/06; H10P72/0604; H10P72/78; H10P74/00; H10P74/20; H10P74/203
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
84 words
A chuck for supporting a semiconductor wafer during wafer fabrication comprising: a substrate transparent to narrow band illumination having an optically polished surface of a desired shape for supporting said wafer; a system for securing said wafer over said polished surface so that said wafer substantially conforms thereto with a possibility that a gap may be formed between said potential surface and said wafer; means for illuminating said gap through said substrate with said narrow band illumination to form interference fringes in said gap.
Claim 2
Dependent Claim
84 words
A chuck for supporting a semiconductor wafer during wafer fabrication comprising: a substrate transparent to narrow band illumination having an optically polished surface of a desired shape for supporting said wafer; a system for securing said wafer over said polished surface so that said wafer substantially conforms thereto with a possibility that a gap may be formed between said potential surface and said wafer; means for illuminating said gap through said substrate with said narrow band illumination to form interference fringes in said gap.
Claim 3
Dependent Claim
20 words
A chuck has in claim 1 wherein said substrate is formed of glass and said optically polished surface is flat.
Claim 4
Dependent Claim
23 words
A chuck as in claim 1 wherein said securing system comprises a system for applying a vacuum to said wafer through said substrate.
Claim 5
Dependent Claim
30 words
A chuck as in claim 1 wherein said securing system comprises a system for applying an electrostatic force on said wafer to force it into engagement over said polished surface.
Claim 6
Dependent Claim
86 words
A chuck as in claim 4 wherein said system for applying said electrostatic force comprises: 1) a monopole electrode on said polished surface of said substrate; 2) an insulating layer over said monopole electrode for spacing said electrode from said wafer by a desired amount; 3) said wafer and said monopole electrode being adapted to have a potential drop of sufficient magnitude created between them to provide said electrostatic force; and 4) said monopole electrode and said insulating layer being transparent to said means for illuminating.
Claim 7
Dependent Claim
71 words
A chuck as in claim 5 wherein: 1) said insulating layer comprises a high dielectric breakdown transparent membrane less than about 15 microns thick; 2) said monopole electrode comprises a transparent electrically conductive film electrode coated on one side of said membrane; and 3) said membrane is secured to said substrate so that said film is arranged therebetween; whereby a reduced voltage is required to conform the wafer to the substrate.
Claim 8
Dependent Claim
28 words
A chuck as in claim 6 wherein said membrane is formed from a material selected from the group consisting of: boron nitride, fused silica, aluminum oxide and silicon.
Claim 9
Dependent Claim
35 words
A chuck as in claim 6 wherein said electrode is formed from a metal grid having grid openings of greater than about 400 microns and grid lines of from about 30 to about 50 microns.
Claim 10
Dependent Claim
92 words
A chuck as in claim 4 wherein said system for applying said electrostatic force comprises: 1) a multipole electrode on said polished surface of said substrate, said multipole electrode comprising alternating electrode members of opposing polarity; 2) an insulating layer over said multipole electrode for spacing said electrode from said wafer by a desired amount; 3) said electrode members being adapted to have a potential drop of sufficient magnitude created between them to create said electrostatic force; 4) said multipole electrode and said insulating layer being transparent to said means for illuminating.
Claim 11
Dependent Claim
71 words
A chuck as in claim 9 wherein: 1) said insulating layer comprises a high dielectric breakdown transparent membrane less than about 15 microns thick; 2) said multipole electrode comprises transparent electrically conductive film electrodes coated on one side of said membrane; and 3) said membrane is secured to said substrate so that said film electrodes are arranged therebetween; whereby a reduced voltage is required to conform the wafer to the substrate.
Claim 12
Dependent Claim
28 words
A chuck as in claim 10 wherein said membrane is formed from a material selected from the group consisting of: boron nitride, fused silica, aluminum oxide and silicon.
Claim 13
Dependent Claim
35 words
A chuck as in claim 10 wherein said electrodes are formed from a metal grid having grid openings of greater than about 400 microns and grid lines of from about 30 to about 50 microns.
Claim 14
Independent Claim
112 words
An apparatus for monitoring a residual gap between a semiconductor wafer and a chuck for supporting said semiconductor wafer comprising: a transparent chuck having a surface of a desired shape for supporting said wafer; a wafer supported over said chuck surface such that a first surface of said wafer opposes said chuck surface; said residual gap being defined between said first surface of said wafer and said chuck surface; a narrow band illumination source arranged to illuminate said gap through said transparent chuck, said illumination being selected to form interference fringes in said gap indicative of the thickness of said gap; and a camera for creating an image of said interference fringes.
Claim 15
Independent Claim
112 words
An apparatus for monitoring a residual gap between a semiconductor wafer and a chuck for supporting said semiconductor wafer comprising: a transparent chuck having a surface of a desired shape for supporting said wafer; a wafer supported over said chuck surface such that a first surface of said wafer opposes said chuck surface; said residual gap being defined between said first surface of said wafer and said chuck surface; a narrow band illumination source arranged to illuminate said gap through said transparent chuck, said illumination being selected to form interference fringes in said gap indicative of the thickness of said gap; and a camera for creating an image of said interference fringes.
Claim 16
Dependent Claim
58 words
An apparatus as in claim 13 wherein said camera is an electronic camera including a charged coupled device imaging system providing a digital output corresponding to said fringes in said gap and wherein said apparatus further includes a computer for receiving said output, said computer being adapted to calculate a merit function proportional to the total fringe volume.
Claim 17
Dependent Claim
63 words
An apparatus as in claim 13 wherein said camera is an electronic camera including a charged coupled device imaging system providing a digital output corresponding to said fringes in said gap and wherein said apparatus further includes a computer for receiving said output, said computer being adapted to calculate a merit function proportional to a summation of nearest neighbor slopes of said fringes.
Claim 18
Dependent Claim
46 words
An apparatus as in claim 13 wherein said illumination source is part of a Fizeau interferometer system further comprising a beam splitter arranged between said chuck and said camera and wherein said illumination source is arranged to illuminate said gap by reflection off said beam splitter.
Claim 19
Dependent Claim
108 words
A process for determining if a gap exists between a semiconductor wafer and a chuck supporting said wafer for processing comprising: providing a transparent chuck having a surface of a desired shape for supporting said wafer; supporting a wafer over said chuck surface such that a first surface of said wafer opposes said chuck surface, said gap being defined between said first surface of said wafer and said chuck surface; illuminating said gap through said transparent chuck with a narrow band illumination, said illumination being selected to form interference fringes in said gap indicative of the thickness of said gap; and creating an image of said interference fringes.
Claim 20
Dependent Claim
108 words
A process for determining if a gap exists between a semiconductor wafer and a chuck supporting said wafer for processing comprising: providing a transparent chuck having a surface of a desired shape for supporting said wafer; supporting a wafer over said chuck surface such that a first surface of said wafer opposes said chuck surface, said gap being defined between said first surface of said wafer and said chuck surface; illuminating said gap through said transparent chuck with a narrow band illumination, said illumination being selected to form interference fringes in said gap indicative of the thickness of said gap; and creating an image of said interference fringes.
Claim 21
Dependent Claim
45 words
A process as in claim 17 wherein said step of creating said image of said fringes comprises providing a digital image output corresponding to said fringes in said gap and wherein said process further comprises calculating a merit function proportional to the total fringe volume.
Claim 22
Dependent Claim
56 words
A process as in claim 18 wherein said merit function is calculated in accordance with the following formula: ##EQU3## where K is the total number of points in the image, U(x,y) is the illumination intensity R(x,y) is the spatial reflectance and R theory is the computed reflectance for the case where the gap 18 is zero.
Claim 23
Dependent Claim
50 words
A process as in claim 17 wherein said step of creating said image of said fringes comprises providing a digital image output corresponding to said fringes in said gap and wherein said process further comprises calculating a merit function proportional to a summation of nearest neighbor slopes of said fringes.
Claim 24
Dependent Claim
41 words
A process as in claim 10 wherein said merit function is calculated in accordance with the following formula: ##EQU4## where K is the total number of points in the image, U(x,y) is the illumination intensity and R(x,y) is the spatial reflectance.
Claim 25
Dependent Claim
124 words
A process for making a transparent chuck for supporting a semiconductor wafer during wafer fabrication comprising: 1) providing a transparent substrate having an optically polished surface of a desired shape for supporting said wafer; 2) providing a high dielectric breakdown bulk transparent member; 3) thinning said member to form a membrane having a thickness of less than about 15 microns between first and second surfaces; 4) forming at least one electrically conductive film electrode on a the first surface of said membrane; 5) securing said membrane to said substrate with said electrode arranged between said substrate and said membrane; and 6) optically polishing the second surface of said membrane to make it substantially smooth and substantially parallel to said polished surface of said substrate.
Claim 26
Dependent Claim
124 words
A process for making a transparent chuck for supporting a semiconductor wafer during wafer fabrication comprising: 1) providing a transparent substrate having an optically polished surface of a desired shape for supporting said wafer; 2) providing a high dielectric breakdown bulk transparent member; 3) thinning said member to form a membrane having a thickness of less than about 15 microns between first and second surfaces; 4) forming at least one electrically conductive film electrode on a the first surface of said membrane; 5) securing said membrane to said substrate with said electrode arranged between said substrate and said membrane; and 6) optically polishing the second surface of said membrane to make it substantially smooth and substantially parallel to said polished surface of said substrate.
Claim 27
Dependent Claim
20 words
A process as in claim 22 wherein said thinning and polishing steps are carried out by plasma assisted chemical etching.
Claim 28
Dependent Claim
38 words
A process as in claim 22 wherein said at least one electrode is formed from a metal grid having grid openings of greater than about 400 microns and grid lines of from about 30 to about 50 microns.
Claim 29
Dependent Claim
28 words
A process as in claim 22 wherein said membrane is formed from a material selected from the group consisting of: boron nitride, fused silica, aluminum oxide and silicon.
References Cited (Backward Citations)
US4932781A
Cited
US5363171A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-05-07 | 1999-11-06 | 2000-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-05-07 | 2003-11-06 | 2004-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-05-07 | 2007-11-06 | 2008-05-07 | $7700.00 | Window Closed / Lapsed |