US5528451A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Erosion resistant electrostatic chuck
Assignee: Applied Materials Inc
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Filing: 1994-11-02
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Granted: 1996-06-18
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Expires: 2014-11-02
Abstract
Abstract An erosion resistant electrostatic chuck (20) comprises an electrostatic member (22) supported by a base (24), the base (24) having a peripheral edge (26). A cutaway segment (28) in the peripheral edge (26) of the base holds an insulated electrical connector (30) for electrically connecting the electrostatic member (22) on the chuck (20) to a voltage supply (62)in a process chamber (36). A removable plug (40) is in the cutaway (28), and covers a portion of the insulated electrical connector (30) for protecting the electrical connector from erosion in the process chamber (36). Preferably, the removable plug (40)is substantially L-shaped with the bottom leg of the "L" in the bottom of the cutaway (28), and the upstanding leg of the "L" abutting against the side of the cutaway (28).
Inventors
- 👤 Yuh-Jia Su
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 22:25
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/72; H10P72/722
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
113 words
An erosion resistant electrostatic chuck for use in a process chamber containing erosive gas, the process chamber having a voltage supply source suitable for charging the chuck, the chuck comprising: (a) an electrostatic member; (b) a base supporting the electrostatic member, the base having a peripheral edge; (c) a cutaway segment in the peripheral edge of the base; (d) an insulated electrical connector in the cutaway for electrically connecting the electrostatic member on the base to the voltage supply in the process chamber; and (e) a removable plug in the cutaway, the plug covering a portion of the insulated electrical connector for protecting the insulated electrical connector from erosion in the process chamber.
Claim 2
Dependent Claim
113 words
An erosion resistant electrostatic chuck for use in a process chamber containing erosive gas, the process chamber having a voltage supply source suitable for charging the chuck, the chuck comprising: (a) an electrostatic member; (b) a base supporting the electrostatic member, the base having a peripheral edge; (c) a cutaway segment in the peripheral edge of the base; (d) an insulated electrical connector in the cutaway for electrically connecting the electrostatic member on the base to the voltage supply in the process chamber; and (e) a removable plug in the cutaway, the plug covering a portion of the insulated electrical connector for protecting the insulated electrical connector from erosion in the process chamber.
Claim 3
Dependent Claim
51 words
The electrostatic chuck of claim 1, wherein the cutaway segment has a bottom and a side, and wherein the removable plug is substantially L-shaped with the bottom leg of the "L" in the bottom of the cutaway and the upstanding leg of the "L" abutting against the side of the cutaway.
Claim 4
Dependent Claim
26 words
The electrostatic chuck of claim 1, wherein the removable plug comprises a substantially erosion resistant material selected from the group consisting of metals, ceramics, and polymers.
Claim 5
Dependent Claim
23 words
The electrostatic chuck of claim 1, wherein the removable plug comprises a material selected from the group consisting of polyimide and anodized aluminum.
Claim 6
Dependent Claim
22 words
The electrostatic chuck of claim 1, further comprising an erosion resistant film disposed between the removable plug and the insulated electrical connector.
Claim 7
Dependent Claim
13 words
The electrostatic chuck of claim 5, wherein the erosion resistant film comprises polymer.
Claim 8
Dependent Claim
13 words
The electrostatic chuck of claim 6, wherein the erosion resistant film comprises polyimide.
Claim 9
Dependent Claim
17 words
The electrostatic chuck of claim 1, wherein the electrostatic member comprises an insulator with an electrode therein.
Claim 10
Dependent Claim
57 words
The electrostatic chuck of claim 1, wherein the base has a substrate support thereon, the substrate support being smaller than the base so that the base extends peripherally beyond the substrate support, and wherein the cutaway in the peripheral edge of the base extends into a portion of the substrate support that is adjacent to the cutaway.
Claim 11
Dependent Claim
145 words
An erosion resistant electrostatic chuck for use in a process chamber containing erosive gas, the process chamber having a voltage supply source suitable for charging the chuck, the chuck comprising: (a) an electrostatic member; (b) a base supporting the electrostatic member, the base having a peripheral edge; (c) a cutaway segment in the peripheral edge of the base, the cutaway segment having a bottom and a side; (d) an insulated electrical connector in the cutaway for electrically connecting the electrostatic member on the base to the voltage supply in the process chamber; and (e) a removable plug in the cutaway for protecting the insulated electrical connector from erosion in the process chamber, the removable plug being substantially L-shaped with the bottom leg of the "L" in the bottom of the cutaway and the upstanding leg of the "L" abutting against the side of the cutaway.
Claim 12
Dependent Claim
145 words
An erosion resistant electrostatic chuck for use in a process chamber containing erosive gas, the process chamber having a voltage supply source suitable for charging the chuck, the chuck comprising: (a) an electrostatic member; (b) a base supporting the electrostatic member, the base having a peripheral edge; (c) a cutaway segment in the peripheral edge of the base, the cutaway segment having a bottom and a side; (d) an insulated electrical connector in the cutaway for electrically connecting the electrostatic member on the base to the voltage supply in the process chamber; and (e) a removable plug in the cutaway for protecting the insulated electrical connector from erosion in the process chamber, the removable plug being substantially L-shaped with the bottom leg of the "L" in the bottom of the cutaway and the upstanding leg of the "L" abutting against the side of the cutaway.
Claim 13
Dependent Claim
25 words
The electrostatic chuck of claim 10, wherein the removable plug is made from a material selected from the group consisting of metals, ceramics, and polymers.
Claim 14
Dependent Claim
22 words
The electrostatic chuck of claim 10, further comprising an erosion resistant film disposed between the removable plug and the insulated electrical connector.
Claim 15
Independent Claim
137 words
A method of using an electrostatic chuck in a process chamber containing erosive gas, the process chamber having a voltage supply source suitable for charging the chuck, the method comprising the steps of: (a) placing an electrostatic chuck in the process chamber, the chuck comprising: (i) an electrostatic member; (ii) a base supporting the electrostatic member, the base having a peripheral edge; (iii) a cutaway segment in the peripheral edge of the base; (iv) an insulated electrical connector in the cutaway for electrically connecting the electrostatic member on the base to the voltage supply in the process chamber; and (b) placing a removable plug in the cutaway of the chuck so that the plug covers a portion of the insulated electrical connector in the cutaway for protecting the insulated electrical connector from erosion in the process chamber.
Claim 16
Independent Claim
137 words
A method of using an electrostatic chuck in a process chamber containing erosive gas, the process chamber having a voltage supply source suitable for charging the chuck, the method comprising the steps of: (a) placing an electrostatic chuck in the process chamber, the chuck comprising: (i) an electrostatic member; (ii) a base supporting the electrostatic member, the base having a peripheral edge; (iii) a cutaway segment in the peripheral edge of the base; (iv) an insulated electrical connector in the cutaway for electrically connecting the electrostatic member on the base to the voltage supply in the process chamber; and (b) placing a removable plug in the cutaway of the chuck so that the plug covers a portion of the insulated electrical connector in the cutaway for protecting the insulated electrical connector from erosion in the process chamber.
Claim 17
Dependent Claim
50 words
The method of claim 13, wherein the cutaway segment comprises a bottom and a side, and wherein the removable plug is substantially L-shaped with the bottom leg of the "L" in the bottom of the cutaway and the upstanding leg of the "L" abutting against the side of the cutaway.
Claim 18
Dependent Claim
21 words
The method of claim 14, wherein the removable plug comprises material selected from the group consisting of polyimide and anodized aluminum.
Claim 19
Dependent Claim
21 words
The method of claim 13, further comprising an erosion resistant film disposed between the removable plug and the insulated electrical connector.
Claim 20
Dependent Claim
22 words
The method of claim 16, wherein the removable plug comprises a material selected from the group consisting of polyimide and anodized aluminum.
References Cited (Backward Citations)
US4184188A
Cited
US4384918A
Cited
US4399016A
Cited
US4771730A
Cited
JPH01298721A
Cited
JPH0227748A
Cited
US5221403A
Cited
US5250137A
Cited
US5255153A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-18 | 1999-12-18 | 2000-06-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-18 | 2003-12-18 | 2004-06-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-18 | 2007-12-18 | 2008-06-18 | $7700.00 | Window Closed / Lapsed |