US5907470A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dielectric thin film capacitor element
Assignee: Sharp Corp
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Filing: 1997-06-06
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Granted: 1999-05-25
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Expires: 2017-06-06
Abstract
Abstract The present invention provides a dielectric thin film capacitor element in which leak current may be suppressed from increasing over time while energizing at high temperature and which has excellent insulating quality and reliability and a manufacturing method thereof. The dielectric thin film capacitor element is constructed by forming a lower electrode, a dielectric thin film and an upper electrode one after another on a substrate, wherein the dielectric thin film capacitor element is characterized in that the dielectric thin film is made of an oxide material composed of at least titanium and strontium and containing erbium.
Inventors
- 👤 Ryusuke Kita
- 👤 Yoshiyuki Masuda
- 👤 Yoshiyuki Matsu
- 👤 Noboru Ohtani
- 👤 Seiki Yano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 20:43
CPC Classifications
H; H01; H01G; H01G4/00; H01G4/33; H01G4/002; H01G4/018; H01G4/06; H01G4/08; H01G4/12; H01G4/1209; H01G4/1218; H01G4/1227; H10; H10D; H10D1/00; H10D1/60; H10D1/68
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
66 words
A dielectric thin film capacitor element comprising: a lower electrode; a dielectric thin film; and an upper electrode, the lower electrode, the dielectric thin film and the upper electrode being formed one after another on a substrate, wherein the dielectric thin film is made of an oxide material composed of at least titanium and strontium and contains from 0.01 mol % to 0.2 mol % erbium.
Claim 2
Dependent Claim
66 words
A dielectric thin film capacitor element comprising: a lower electrode; a dielectric thin film; and an upper electrode, the lower electrode, the dielectric thin film and the upper electrode being formed one after another on a substrate, wherein the dielectric thin film is made of an oxide material composed of at least titanium and strontium and contains from 0.01 mol % to 0.2 mol % erbium.
Claim 3
Dependent Claim
29 words
The dielectric thin film capacitor element of claim 1, wherein the dielectric thin film is made of strontium titanate containing from 0.01 mol % to 0.2 mol % erbium.
Claim 4
Dependent Claim
29 words
The dielectric thin film capacitor element of claim 2, wherein the dielectric thin film is made of strontium titanate containing from 0.01 mol % to 0.15 mol % erbium.
Claim 5
Dependent Claim
58 words
A dielectric thin film capacitor element comprising: a lower electrode; a dielectric thin film; and an upper electrode, the lower electrode, the dielectric thin film and the upper electrode being formed one after another on a substrate, wherein the dielectric thin film is made of barium strontium titanate containing from 0.01 mol % to 0.25 mol % erbium.
Claim 6
Dependent Claim
58 words
A dielectric thin film capacitor element comprising: a lower electrode; a dielectric thin film; and an upper electrode, the lower electrode, the dielectric thin film and the upper electrode being formed one after another on a substrate, wherein the dielectric thin film is made of barium strontium titanate containing from 0.01 mol % to 0.25 mol % erbium.
Claim 7
Dependent Claim
30 words
The dielectric thin film capacitor element of claim 4, wherein the dielectric thin film is made of barium strontium titanate containing from 0.01 mol % to 0.2 mol % erbium.
Claim 8
Dependent Claim
30 words
The dielectric thin film capacitor element of claim 5, wherein the dielectric thin film is made of barium strontium titanate containing from 0.02 mol % to 0.2 mol % erbium.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-05-24 | 2002-11-23 | 2003-05-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-05-24 | 2006-11-23 | 2007-05-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-05-24 | 2010-11-23 | 2011-05-25 | $7700.00 | Window Closed / Lapsed |