US5471364A
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US
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Electrode interface for high-dielectric-constant materials
Assignee: Texas Instruments Inc
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Filing: 1993-03-31
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Granted: 1995-11-28
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Expires: 2013-03-31
Abstract
Abstract A preferred embodiment of this invention comprises a first thin dielectric buffer layer of a first leakage-current-density material (e.g. strontium titanate 32) with a first moderate-dielectric-constant, a high-dielectric-constant layer of a second leakage-current-density material (e.g. barium strontium titanate 34) overlaying the first thin dielectric buffer layer, and a second thin dielectric buffer layer of a third leakage-current-density material (e.g. strontium titanate 36) with a second moderate-dielectric-constant overlaying the high-dielectric-constant layer, wherein the first and third leakage-current-density materials have substantially lower leakage-current-densities than the second leakage-current-density material. The first and second thin moderate-dielectric-constant buffer layers (e.g. strontium titanate 32, 36) substantially limit the leakage-current-density of the structure, with only modest degradation of the dielectric constant of the structure. The possibly lower dielectric constant of the structure is generally compensated for by the reduced leakage current of the structure. The additional layers generally require only minor modifications of existing processes, since the same processes that are used for the high-dielectric-constant oxide can generally be used for the low leakage-current-density dielectric. These structures may also be used for multilayer capacitors and other thin-film ferroelectric devices such as pyroelectric materials, non-volatile memories, thin-film piezoelectric and thin-film electro-optic oxides.
Inventors
- 👤 Scott R. Summerfelt
- 👤 Howard R. Beratan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 03:23
CPC Classifications
H; H01; H01G; H01G4/00; H01G4/30; H01G4/306; H01G7/00; H01G7/06; H10; H10B; H10B53/00; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/682; H10D1/684
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
153 words
A method of forming a microelectronic structure, said method comprising: (a) forming a first thin dielectric buffer layer of a first leakage-current-density material with a first dielectric-constant; (b) forming a high-dielectric-constant layer of a second leakage-current-density material on said first thin dielectric buffer layer; and (c) forming a second thin dielectric buffer layer of a third leakage-current-density material with a second dielectric-constant on said high-dielectric-constant layer, wherein said first and third leakage-current-density materials have substantially lower leakage-current-densities than said second leakage-current-density material, wherein said first and second thin dielectric buffer layers are selected from the group consisting of: perovskites, ferroelectrics, high-dielectric-constant oxides, acceptor doped perovskites, acceptor doped ferroelectrics, acceptor doped high-dielectric-constant oxides, donor doped perovskites, donor doped ferroelectrics, donor doped high-dielectric-constant oxides, and combinations thereof, and whereby said first and second thin dielectric buffer layers substantially limit the leakage-current-density of the structure, with only modest degradation of the dielectric constant of the structure.
Claim 2
Independent Claim
153 words
A method of forming a microelectronic structure, said method comprising: (a) forming a first thin dielectric buffer layer of a first leakage-current-density material with a first dielectric-constant; (b) forming a high-dielectric-constant layer of a second leakage-current-density material on said first thin dielectric buffer layer; and (c) forming a second thin dielectric buffer layer of a third leakage-current-density material with a second dielectric-constant on said high-dielectric-constant layer, wherein said first and third leakage-current-density materials have substantially lower leakage-current-densities than said second leakage-current-density material, wherein said first and second thin dielectric buffer layers are selected from the group consisting of: perovskites, ferroelectrics, high-dielectric-constant oxides, acceptor doped perovskites, acceptor doped ferroelectrics, acceptor doped high-dielectric-constant oxides, donor doped perovskites, donor doped ferroelectrics, donor doped high-dielectric-constant oxides, and combinations thereof, and whereby said first and second thin dielectric buffer layers substantially limit the leakage-current-density of the structure, with only modest degradation of the dielectric constant of the structure.
Claim 3
Dependent Claim
19 words
The method according to claim 1, wherein said first and second thin dielectric buffer layers have substantially similar compositions.
Claim 4
Dependent Claim
21 words
The method according to claim 1, wherein said first and second thin dielectric buffer layers completely surround said high-dielectric-constant material layer.
Claim 5
Dependent Claim
22 words
The method according to claim 1, said method further comprising forming said first thin dielectric buffer layer on an electrically conductive layer.
Claim 6
Dependent Claim
41 words
The method according to claim 4, wherein said electrically conductive layer is selected from the group consisting of: platinum, palladium, rhodium, gold, iridium, silver, titanium nitride, tin nitride, ruthenium nitride, zirconium nitride, ruthenium dioxide, tin oxide, titanium monoxide, and combinations thereof.
Claim 7
Dependent Claim
22 words
The method according to claim 1, said method further comprising forming an electrically conductive layer on said second thin dielectric buffer layer.
Claim 8
Dependent Claim
44 words
The method according to claim 6, wherein said electrically conductive layer is selected from the group consisting of: platinum, palladium, rhodium, gold, iridium, silver, titanium nitride, tin nitride, ruthenium nitride, zirconium nitride, ruthenium dioxide, tin oxide, titanium monoxide, titanium silicide, aluminum, and combinations thereof.
Claim 9
Dependent Claim
37 words
The method according to claim 1, wherein said first thin dielectric buffer layer is selected from the group consisting of: (Sr,Ca,Mg)(Ti,Zr,Hf)O 3 , (Na,Al,Mn,Ca) doped (Sr, Ca,Mg)(Ti,Zr,Hf)O 3 , (La,Nb,F) doped (Sr,Ca,Mg)(Ti,Zr,Hf)O 3 , and combinations thereof.
Claim 10
Dependent Claim
33 words
The method according to claim 1, wherein said first thin dielectric buffer layer is selected from the group consisting of: (K,Cr,Mn,Co,Ni,Cu,Zn,Li,Mg) doped (Sr,Ca,Mg)(Ti,Zr,Hf)O 3 , (Cl,V,Mo,Ce,Pr,Nd,Sm,Eu,Gd,Tb,Dy,Ho,Er,Ta,W) doped (Sr,Ca,Mg)(Ti,Zr,Hf)O 3 , and combinations thereof.
Claim 11
Dependent Claim
36 words
The method according to claim 1, wherein said second thin dielectric buffer layer is selected from the group consisting of: (Sr,Ca,Mg)(Ti,Zr,Hf)O 3 , (Na,Al,Mn,Ca) doped (Sr,Ca,Mg)(Ti,Zr,Hf)O 3 , (La,Nb,F) doped (Sr,Ca,Mg)(Ti,Zr,Hf)O 3 , and combinations thereof.
Claim 12
Dependent Claim
33 words
The method according to claim 1, wherein said second thin dielectric buffer layer is selected from the group consisting of: (K,Cr,Mn,Co,Ni,Cu,Zn,Li,Mg) doped (Sr,Ca,Mg)(Ti,Zr,Hf)O 3 , (Cl,V,Mo,Ce,Pr,Nd,Sm,Eu,Gd,Tb,Dy,Ho,Er,Ta,W) doped (Sr,Ca,Mg)(Ti,Zr,Hf)O 3 , and combinations thereof.
Claim 13
Dependent Claim
44 words
The method according to claim 1, wherein said high-dielectric-constant layer is selected from the group consisting of: perovskites, ferroelectrics, high-dielectric-constant oxides, acceptor doped perovskites, acceptor doped ferroelectrics, acceptor doped high-dielectric-constant oxides, donor doped perovskites, donor doped ferroelectrics, donor doped high-dielectric-constant oxides, and combinations thereof.
Claim 14
Dependent Claim
37 words
The method according to claim 1, wherein said high-dielectric-constant layer is selected from the group consisting of: (Ba,Sr,Pb,La)(Ti,Zr)O 3 , bismuth titanate, potassium tantalate, lead niobate, lead zinc niobate, potassium niobate, lead magnesium niobate, and combinations thereof.
Claim 15
Dependent Claim
55 words
The method according to claim 1, wherein said high-dielectric-constant layer is doped with a material selected from the group consisting of: Na, Al, Mn, Ca, La, Nb, F, K, Cr, Mn, Co, Ni, Cu, Zn, Li, Mg, Cl, V, Mo, Ce, Pr, Nd, Sin, Eu, Gd, Tb, Dy, Ho, Er, Ta, W, and combinations thereof.
Claim 16
Independent Claim
74 words
A method of forming a microelectronic capacitor, said method comprising: (a) forming a first electrically conductive electrode; (b) forming a first thin strontium titanate layer on said first electrically conductive electrode; (c) forming a barium strontium titanate layer on said first thin strontium titanate layer; (d) forming a second thin strontium titanate layer on said barium strontium titanate layer; and (e) forming a second electrically conductive electrode on said second thin strontium titanate layer.
Claim 17
Independent Claim
74 words
A method of forming a microelectronic capacitor, said method comprising: (a) forming a first electrically conductive electrode; (b) forming a first thin strontium titanate layer on said first electrically conductive electrode; (c) forming a barium strontium titanate layer on said first thin strontium titanate layer; (d) forming a second thin strontium titanate layer on said barium strontium titanate layer; and (e) forming a second electrically conductive electrode on said second thin strontium titanate layer.
Claim 18
Dependent Claim
141 words
A microelectronic structure comprising: a first thin dielectric buffer layer of a first leakage-current-density material with a first dielectric-constant; a high-dielectric-constant layer of a second leakage-current-density material overlaying said first thin dielectric buffer layer; and a second thin dielectric buffer layer of a third leakage-current-density material with a second dielectric-constant overlaying said high-dielectric-constant layer, wherein said first and third leakage-current-density materials have substantially lower leakage-current-densities than said second leakage-current-density material, wherein said first and second thin dielectric buffer layers are selected from the group consisting of: perovskites, ferroelectrics, high-dielectric-constant oxides, acceptor doped perovskites, acceptor doped ferroelectrics, acceptor doped high-dielectric-constant oxides, donor doped perovskites, donor doped ferroelectrics, donor doped high-dielectric-constant oxides, and combinations thereof, and whereby said first and second thin dielectric buffer layers substantially limit the leakage-current-density of the structure, with only modest degradation of the dielectric constant of the structure.
Claim 19
Dependent Claim
141 words
A microelectronic structure comprising: a first thin dielectric buffer layer of a first leakage-current-density material with a first dielectric-constant; a high-dielectric-constant layer of a second leakage-current-density material overlaying said first thin dielectric buffer layer; and a second thin dielectric buffer layer of a third leakage-current-density material with a second dielectric-constant overlaying said high-dielectric-constant layer, wherein said first and third leakage-current-density materials have substantially lower leakage-current-densities than said second leakage-current-density material, wherein said first and second thin dielectric buffer layers are selected from the group consisting of: perovskites, ferroelectrics, high-dielectric-constant oxides, acceptor doped perovskites, acceptor doped ferroelectrics, acceptor doped high-dielectric-constant oxides, donor doped perovskites, donor doped ferroelectrics, donor doped high-dielectric-constant oxides, and combinations thereof, and whereby said first and second thin dielectric buffer layers substantially limit the leakage-current-density of the structure, with only modest degradation of the dielectric constant of the structure.
Claim 20
Dependent Claim
18 words
The structure of claim 16, wherein said first and second thin dielectric buffer layers have substantially similar compositions.
Claim 21
Dependent Claim
20 words
The structure of claim 16, wherein said first and second thin dielectric buffer layers completely surround said high-dielectric-constant material layer.
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