US5900160A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Methods of etching articles via microcontact printing
Assignee: Harvard University
•
Filing: 1996-07-09
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Granted: 1999-05-04
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Expires: 2016-07-09
Abstract
Abstract Improved methods of forming a patterned self-assembled monolayer on a surface and derivative articles are provided. According to one method, an elastomeric stamp is deformed during and/or prior to using the stamp to print a self-assembled molecular monolayer on a surface. According to another method, during monolayer printing the surface is contacted with a liquid that is immiscible with the molecular monolayer-forming species to effect controlled reactive spreading of the monolayer on the surface. Methods of printing self-assembled molecular monolayers on nonplanar surfaces and derivative articles are provided, as are methods of etching surfaces patterned with self-assembled monolayers, including methods of etching silicon. Optical elements including flexible diffraction gratings, mirrors, and lenses are provided, as are methods for forming optical devices and other articles using lithographic molding. A method for controlling the shape of a liquid on the surface of an article is provided, involving applying the liquid to a self-assembled monolayer on the surface, and controlling the electrical potential of the surface.
Inventors
- 👤 George M. Whitesides
- 👤 Younan Xia
- 👤 James L. Wilbur
- 👤 Rebecca J. Jackman
- 👤 Enoch Kim
- 👤 Mara G. Prentiss
- 👤 Milan Mrksich
- 👤 Amit Kumar
- 👤 Christopher B. Gorman
- 👤 Hans Biebuyck
- 👤 Karl K. Berggren
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 04:21
CPC Classifications
B; B01; B01L; B01L3/00; B01L3/50; B01L3/508; B01L3/5085; B01L3/5088; B05; B05D; B05D1/00; B05D1/28; B05D1/283; B82; B82Y; B82Y10/00; B82Y30/00; B82Y40/00; G; G02; G02B; G02B5/00; G02B5/18; G02B5/1847; G02B5/1857; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/124; G02B6/13; G02B6/136; G03; G03F; G03F7/00; G03F7/0002; G03F7/16; G03F7/165; H; H10; H10W; H10W20/00; H10W20/01; H10W70/00; H10W70/01; H10W70/05; H10W70/098; B01J; B01J2219/00; B01J2219/00274; B01J2219/00277; B01J2219/00351; B01J2219/00382; B01J2219/00583; B01J2219/00603; B01J2219/00605; B01J2219/00612; B01J2219/00632; B01J2219/00637; B01J2219/00659; B01L2300/00; B01L2300/06; B01L2300/0627; B01L2300/0654; B01L2300/08; B01L2300/0809; B01L2300/0819; B01L2300/0848; B01L2300/0851; C; C40; C40B; C40B60/00; C40B60/14; G02B2006/12083; G02B2006/12102; G02B2006/12104; G02B2006/12107
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
86 words
A method of etching an article having a surface, comprising: contacting a first, nonplanar portion of the surface with a stamp to transfer to the first, nonplanar portion a self-assembled monolayer of a molecular species in a first pattern, the self-assembled monolayer being contiguous with an exposed portion of the surface in a second pattern; and contacting the article with an etchant that reacts chemically with the article thereby degrading a portion of the article in a pattern dictated by the pattern of the self-assembled monolayer.
Claim 2
Independent Claim
86 words
A method of etching an article having a surface, comprising: contacting a first, nonplanar portion of the surface with a stamp to transfer to the first, nonplanar portion a self-assembled monolayer of a molecular species in a first pattern, the self-assembled monolayer being contiguous with an exposed portion of the surface in a second pattern; and contacting the article with an etchant that reacts chemically with the article thereby degrading a portion of the article in a pattern dictated by the pattern of the self-assembled monolayer.
Claim 3
Dependent Claim
12 words
A method as in claim 1, wherein the article is a fiber.
Claim 4
Dependent Claim
11 words
A method as in claim 1, wherein the article is cylindrical.
Claim 5
Dependent Claim
25 words
A method as in claim 1 comprising, prior to the contacting step, coating a surface of the stamp with a self-assembled monolayer forming molecular species.
Claim 6
Dependent Claim
41 words
A method as in claim 4, wherein the surface of the stamp includes indentations and protrusions, the outward-facing surfaces of which define a stamping surface, the contacting step involving contacting the first, non-planar portion of the surface with the stamping surface.
Claim 7
Dependent Claim
40 words
A method as in claim 5, the contacting step comprising transferring the self-assembled monolayer to the nonplanar portion of the material by rolling the first, nonplanar portion of the surface of the article over the stamping surface of the stamp.
Claim 8
Dependent Claim
27 words
A method as in claim 1, wherein the article is selected from the group consisting of silicon, titanium, zirconium, germanium, aluminum, copper, oxides of these or glass.
Claim 9
Dependent Claim
32 words
A method as in claim 1, wherein the article is selected from the group consisting of gold, silver, nickel, cadmium, zinc, palladium, platinum, iron, chromium, alloys of these or alloys of copper.
Claim 10
Dependent Claim
13 words
A method as in claim 1, wherein the etchant is a first etchant.
Claim 11
Dependent Claim
15 words
A method as in claim 9, further comprising contacting the article with a second etchant.
Claim 12
Dependent Claim
14 words
A method as in claim 9, wherein the self-assembled monolayer resists the first etchant.
Claim 13
Dependent Claim
15 words
A method as in claim 1, comprising applying a protecting species to the self-assembled monolayer.
Claim 14
Dependent Claim
18 words
A method as in claim 12, wherein the protecting species is inert with respect to the first etchant.
Claim 15
Independent Claim
93 words
A method comprising: providing a nonplanar article with a layer of a material on a surface thereof; forming, on a first portion of a surface of the material, a self-assembled monolayer of a molecular species in a first pattern, the self-assembled monolayer being contiguous with an exposed portion of the surface in a second pattern; and contacting a portion of the surface of the material with a first etchant that reacts chemically with the material thereby degrading a portion of the material in a pattern dictated by the pattern of the self-assembled monolayer.
Claim 16
Independent Claim
93 words
A method comprising: providing a nonplanar article with a layer of a material on a surface thereof; forming, on a first portion of a surface of the material, a self-assembled monolayer of a molecular species in a first pattern, the self-assembled monolayer being contiguous with an exposed portion of the surface in a second pattern; and contacting a portion of the surface of the material with a first etchant that reacts chemically with the material thereby degrading a portion of the material in a pattern dictated by the pattern of the self-assembled monolayer.
Claim 17
Dependent Claim
15 words
A method as in claim 14, further comprising contacting the article with a second etchant.
Claim 18
Dependent Claim
23 words
A method as in claim 15, wherein the second etchant reacts chemically with the article and is inert with respect to the material.
Claim 19
Dependent Claim
11 words
A method as in claim 14, wherein the article is cylindrical.
Claim 20
Dependent Claim
17 words
A method as in claim 14, comprising applying the self-assembled monolayer to the material with a stamp.
Claim 21
Dependent Claim
33 words
A method as in claim 18, comprising coating a stamping surface of the stamp with a self-assembled monolayer forming molecular species prior to applying the self-assembled monolayer to the material with the stamp.
Claim 22
Dependent Claim
25 words
A method as in claim 19, wherein the surface of the stamp includes indentations and protrusions, the outward-facing surfaces of which define the stamping surface.
Claim 23
Dependent Claim
40 words
A method as in claim 20, comprising transferring the self-assembled monolayer to the first portion of the surface of the material by rolling the first, nonplanar portion of the surface of the material over the stamping surface of the stamp.
Claim 24
Dependent Claim
27 words
A method as in claim 14, wherein the article is selected from the group consisting of silicon, titanium, zirconium, germanium, aluminum, copper, oxides of these or glass.
Claim 25
Dependent Claim
30 words
A method as in claim 14, wherein the material is selected from the group consisting of gold, silver, copper, nickel, cadmium, zinc, palladium, platinum, iron, chromium, or alloys of these.
Claim 26
Dependent Claim
14 words
A method as in claim 14, wherein the self-assembled monolayer resists the first etchant.
Claim 27
Dependent Claim
16 words
A method as in claim 14, wherein the self-assembled monolayer does not resist the first etchant.
Claim 28
Dependent Claim
24 words
A method as in claim 14, comprising applying a protecting species that is inert with respect to the first etchant to the self-assembled monolayer.
Claim 29
Dependent Claim
69 words
A method as in claim 14 further comprising, subsequent to the forming step and prior to the contacting step, applying a protecting species that is inert with respect to the first etchant a portion of the surface of the material complementary to the first portion of the surface of the material, the contacting step comprising degrading the self-assembled monolayer and the first portion of the surface of the material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-05-03 | 2002-11-02 | 2003-05-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-05-03 | 2006-11-02 | 2007-05-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-05-03 | 2010-11-02 | 2011-05-04 | $7700.00 | Window Closed / Lapsed |