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US5892273A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor package integral with semiconductor chip

Assignee: Toshiba Corp
•
Filing: 1995-10-02
•
Granted: 1999-04-06
•
Expires: 2015-10-02
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Abstract

Abstract A semiconductor chip having a semiconductor substrate, a plurality of pads formed above the semiconductor substrate a first passivating film formed over an entire surface of the semiconductor substrate, and having openings above the pads the surface of the first passivating film being flat, a plurality of interconnection lines formed on the surface of the first passivating film, a second passivating film formed over the entire surface of the first passivating film and having through holes, the through holes being arranged in the form of an array, the surface of the second passivating film being flat, a plurality of contacts for connection to external leads each of the contacts being formed within and above a respective one of the through holes, the contacts being arranged in the form of an array.

Inventors

  • 👤 Hiroshi Iwasaki
  • 👤 Hideo Aoki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 01:42
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/90; H10W74/00; H10W74/10; H10W74/131; H10W74/137; H10D; H10D62/00; H10D62/10; H10D62/117; H10W20/00; H10W20/40; H10W20/41; H10W20/435; H10W20/49; H10W72/071; H10W72/072; H10W70/00; H10W70/60; H10W70/62; H10W70/65; H10W70/654; H10W70/656; H10W72/01; H10W72/012; H10W72/01251; H10W72/01255; H10W72/019; H10W72/0198; H10W72/07231; H10W72/07236; H10W72/20; H10W72/221; H10W72/241; H10W72/242; H10W72/247; H10W72/248; H10W72/251; H10W72/29; H10W72/921; H10W72/923; H10W72/931; H10W72/932; H10W72/934; H10W72/941; H10W72/9413; H10W72/9415; H10W72/944; H10W72/9445; H10W72/951; H10W72/952

Claims Analysis

Total Claims: 67
Claim 1
Independent Claim 187 words
A semiconductor package comprising: a semiconductor chip having a semiconductor substrate, a plurality of pads formed above said semiconductor substrate, and a first passivating film formed over an entire surface of said semiconductor substrate and having openings above said pads, and the surface of said first passivating film being flat; a plurality of interconnection lines formed on the surface of said first passivating film, each of said interconnection lines being connected to a respective one of said pads; a second passivating film formed over the entire surface of said first passivating film, wherein the edges of said second passivating film are rounded off, and having through holes each located only above a respective one of said interconnection lines, said through holes being arranged in the form of an array and the surface of said second passivating film being flat; and a plurality of contacts for connection to external leads, each of said contacts being formed within and above a respective one of said through holes and said contacts being arranged in the form of an array, wherein said external leads are directly connected to a printed-circuit board.
Claim 2
Dependent Claim 187 words
A semiconductor package comprising: a semiconductor chip having a semiconductor substrate, a plurality of pads formed above said semiconductor substrate, and a first passivating film formed over an entire surface of said semiconductor substrate and having openings above said pads, and the surface of said first passivating film being flat; a plurality of interconnection lines formed on the surface of said first passivating film, each of said interconnection lines being connected to a respective one of said pads; a second passivating film formed over the entire surface of said first passivating film, wherein the edges of said second passivating film are rounded off, and having through holes each located only above a respective one of said interconnection lines, said through holes being arranged in the form of an array and the surface of said second passivating film being flat; and a plurality of contacts for connection to external leads, each of said contacts being formed within and above a respective one of said through holes and said contacts being arranged in the form of an array, wherein said external leads are directly connected to a printed-circuit board.
Claim 3
Dependent Claim 21 words
The semiconductor package according to claim 1, wherein said plurality of pads is placed along the edges of said semiconductor substrate.
Claim 4
Dependent Claim 23 words
The semiconductor package according to claim 1, wherein said plurality of pads is placed evenly over the entire surface of said semiconductor substrate.
Claim 5
Dependent Claim 23 words
The semiconductor package according to claim 1, wherein the edges of said semiconductor substrate coincide with the edges of said first passivating film.
Claim 6
Dependent Claim 23 words
The semiconductor package according to claim 1, wherein each of said interconnection lines is made of one of conductors including aluminum and copper.
Claim 7
Dependent Claim 28 words
The semiconductor package according to claim 1, wherein said second passivating film functions as a package and has a thickness in the range of 0.05 to 0.2 mm.
Claim 8
Dependent Claim 29 words
The semiconductor package according to claim 1, wherein each of said first and second passivating films is made of one of insulating materials including silicon oxide and silicon nitride.
Claim 9
Dependent Claim 31 words
The semiconductor package according to claim 1, wherein, when viewed from above said semiconductor substrate, said contacts are placed symmetrically with respect to the central point of said second passivating film.
Claim 10
Dependent Claim 22 words
The semiconductor package according to claim 1, wherein said contacts are placed evenly over the entire surface of said second passivating film.
Claim 11
Dependent Claim 20 words
The semiconductor package according to claim 1, wherein said contacts are placed along the edges of said second passivating film.
Claim 12
Dependent Claim 23 words
The semiconductor package according to claim 1, wherein, when viewed from above said semiconductor substrate, each of said contacts has a circular shape.
Claim 13
Dependent Claim 52 words
The semiconductor package according to claim 1, wherein, when viewed from above said semiconductor substrate, said semiconductor substrate has a square shape and measures 13.5 mm on a side, each of said contacts has a circular shape with a diameter of 0.5 mm, and the pitch of said contacts is 1 mm.
Claim 14
Dependent Claim 30 words
The semiconductor package according to claim 1, wherein each of said contacts is made of one of conductors including copper, gold, nickel, and a two-layered structure of nickel and gold.
Claim 15
Dependent Claim 20 words
The semiconductor package according to claim 1, further comprising solder balls each formed on a respective one of said contacts.
Claim 16
Dependent Claim 23 words
The semiconductor package according to claim 1, wherein a bottom surface of the semiconductor package comprises a bottom surface of the semiconductor substrate.
Claim 17
Dependent Claim 206 words
A semiconductor package comprising: a semiconductor chip having a semiconductor substrate, a plurality of pads formed above said semiconductor substrate, and a first passivating film formed over an entire surface of said semiconductor substrate and having openings above said pads, the surface of said first passivating film being flat, and when viewed from above said semiconductor substrate, the edges of said first passivating film being inside the edges of said semiconductor substrate; a plurality of interconnection lines formed on the surface of said first passivating film, each of said interconnection lines being connected to a respective one of said pads; a second passivating film overlying the edges of said semiconductor substrate and the entire surface and sides of said first passivating film and having through holes each located only above a respective one of said interconnection lines, said through holes being arranged in the form of an array and the surface of said second passivating film being flat; and a plurality of contacts for connection to external leads, each of said contacts being formed within and above a respective one of said through holes and said contacts being arranged in the form of an array, wherein said external leads are directly connected to a printed-circuit board.
Claim 18
Dependent Claim 206 words
A semiconductor package comprising: a semiconductor chip having a semiconductor substrate, a plurality of pads formed above said semiconductor substrate, and a first passivating film formed over an entire surface of said semiconductor substrate and having openings above said pads, the surface of said first passivating film being flat, and when viewed from above said semiconductor substrate, the edges of said first passivating film being inside the edges of said semiconductor substrate; a plurality of interconnection lines formed on the surface of said first passivating film, each of said interconnection lines being connected to a respective one of said pads; a second passivating film overlying the edges of said semiconductor substrate and the entire surface and sides of said first passivating film and having through holes each located only above a respective one of said interconnection lines, said through holes being arranged in the form of an array and the surface of said second passivating film being flat; and a plurality of contacts for connection to external leads, each of said contacts being formed within and above a respective one of said through holes and said contacts being arranged in the form of an array, wherein said external leads are directly connected to a printed-circuit board.
Claim 19
Dependent Claim 21 words
The semiconductor package according to claim 16, wherein said plurality of pads is placed along the edges of said semiconductor substrate.
Claim 20
Dependent Claim 23 words
The semiconductor package according to claim 16, wherein said plurality of pads is placed evenly over the entire surface of said semiconductor substrate.
Claim 21
Dependent Claim 23 words
The semiconductor package according to claim 16, wherein the edges of said semiconductor substrate coincide with the edges of said second passivating film.
Claim 22
Dependent Claim 23 words
The semiconductor package according to claim 16, wherein each of said interconnection lines is made of one of conductors including aluminum and copper.
Claim 23
Dependent Claim 28 words
The semiconductor package according to claim 16, wherein said second passivating film functions as a package and has a thickness in the range of 0.05 to 0.2 mm.
Claim 24
Dependent Claim 18 words
The semiconductor package according to claim 16, wherein the edges of said second passivating film are rounded off.
Claim 25
Dependent Claim 29 words
The semiconductor package according to claim 16, wherein each of said first and second passivating films is made of one of insulating materials including silicon oxide and silicon nitride.
Claim 26
Dependent Claim 31 words
The semiconductor package according to claim 16, wherein, when viewed from above said semiconductor substrate, said contacts are placed symmetrically with respect to the central point of said second passivating film.
Claim 27
Dependent Claim 22 words
The semiconductor package according to claim 16, wherein said contacts are placed evenly over the entire surface of said second passivating film.
Claim 28
Dependent Claim 20 words
The semiconductor package according to claim 16, wherein said contacts are placed along the edges of said second passivating film.
Claim 29
Dependent Claim 23 words
The semiconductor package according to claim 16, wherein, when viewed from above said semiconductor substrate, each of said contacts has a circular shape.
Claim 30
Dependent Claim 52 words
The semiconductor package according to claim 16, wherein, when viewed from above said semiconductor substrate, said semiconductor substrate has a square shape and measures 13.5 mm on a side, each of said contacts has a circular shape with a diameter of 0.5 mm, and the pitch of said contacts is 1 mm.
Claim 31
Dependent Claim 30 words
The semiconductor package according to claim 16, wherein each of said contacts is made of one of conductors including copper, gold, nickel, and a two-layered structure of nickel and gold.
Claim 32
Dependent Claim 20 words
The semiconductor package according to claim 16, further comprising solder balls each formed on a respective one of said contacts.
Claim 33
Dependent Claim 23 words
The semiconductor package according to claim 16, wherein a bottom surface of the semiconductor package comprises a bottom surface of the semiconductor substrate.
Claim 34
Dependent Claim 235 words
A semiconductor package comprising: a semiconductor chip having a semiconductor substrate, a plurality of pads formed above said semiconductor substrate, and a first passivating film formed over an entire surface of said semiconductor substrate and having openings above said pads, the surface of said first passivating film being flat, the edges of said first passivating film being inside the edges of said semiconductor substrate when viewed from above said semiconductor substrate, and a groove being formed in portions of said semiconductor substrate which are located between the edges of said first passivating film and the edges of said semiconductor substrate; a plurality of interconnection lines formed on the surface of said first passivating film, each of said interconnection lines being connected to a respective one of said pads; a second passivating film overlying the edges of said semiconductor substrate and the entire surface and sides of said first passivating film and having through holes each located only above said a respective one of said interconnection lines, said through holes being arranged in the form of an array and the surface of said second passivating film being flat; and a plurality of contacts for connection to external leads, each of said contacts being formed within and above a respective one of said through holes and said contacts being arranged in the form of an array, wherein said external leads are directly connected to a printed-circuit board.
Claim 35
Dependent Claim 235 words
A semiconductor package comprising: a semiconductor chip having a semiconductor substrate, a plurality of pads formed above said semiconductor substrate, and a first passivating film formed over an entire surface of said semiconductor substrate and having openings above said pads, the surface of said first passivating film being flat, the edges of said first passivating film being inside the edges of said semiconductor substrate when viewed from above said semiconductor substrate, and a groove being formed in portions of said semiconductor substrate which are located between the edges of said first passivating film and the edges of said semiconductor substrate; a plurality of interconnection lines formed on the surface of said first passivating film, each of said interconnection lines being connected to a respective one of said pads; a second passivating film overlying the edges of said semiconductor substrate and the entire surface and sides of said first passivating film and having through holes each located only above said a respective one of said interconnection lines, said through holes being arranged in the form of an array and the surface of said second passivating film being flat; and a plurality of contacts for connection to external leads, each of said contacts being formed within and above a respective one of said through holes and said contacts being arranged in the form of an array, wherein said external leads are directly connected to a printed-circuit board.
Claim 36
Dependent Claim 21 words
The semiconductor package according to claim 32, wherein said plurality of pads is placed along the edges of said semiconductor substrate.
Claim 37
Dependent Claim 23 words
The semiconductor package according to claim 32, wherein said plurality of pads is placed evenly over the entire surface of said semiconductor substrate.
Claim 38
Dependent Claim 23 words
The semiconductor package according to claim 32, wherein the edges of said semiconductor substrate coincide with the edges of said second passivating film.
Claim 39
Dependent Claim 23 words
The semiconductor package according to claim 32, wherein each of said interconnection lines is made of one of conductors including aluminum and copper.
Claim 40
Dependent Claim 28 words
The semiconductor package according to claim 32, wherein said second passivating film functions as a package and has a thickness in the range of 0.05 to 0.2 mm.
Claim 41
Dependent Claim 18 words
The semiconductor package according to claim 32, wherein the edges of said second passivating film are rounded off.
Claim 42
Dependent Claim 29 words
The semiconductor package according to claim 32, wherein each of said first and second passivating films is made of one of insulating materials including silicon oxide and silicon nitride.
Claim 43
Dependent Claim 31 words
The semiconductor package according to claim 32, wherein, when viewed from above said semiconductor substrate, said contacts are placed symmetrically with respect to the central point of said second passivating film.
Claim 44
Dependent Claim 22 words
The semiconductor package according to claim 32, wherein said contacts are placed evenly over the entire surface of said second passivating film.
Claim 45
Dependent Claim 20 words
The semiconductor package according to claim 32, wherein said contacts are placed along the edges of said second passivating film.
Claim 46
Dependent Claim 23 words
The semiconductor package according to claim 32, wherein, when viewed from above said semiconductor substrate, each of said contacts has a circular shape.
Claim 47
Dependent Claim 52 words
The semiconductor package according to claim 32, wherein, when viewed from above said semiconductor substrate, said semiconductor substrate has a square shape and measures 13.5 mm on a side, each of said contacts has a circular shape with a diameter of 0.5 mm, and the pitch of said contacts is 1 mm.
Claim 48
Dependent Claim 30 words
The semiconductor package according to claim 32, wherein each of said contacts is made of one of conductors including copper, gold, nickel, and a two-layered structure of nickel and gold.
Claim 49
Dependent Claim 20 words
The semiconductor package according to claim 32, further comprising solder balls each formed on a respective one of said contacts.
Claim 50
Dependent Claim 23 words
The semiconductor package according to claim 32, wherein a bottom surface of the semiconductor package comprises a bottom surface of the semiconductor substrate.
Claim 51
Dependent Claim 198 words
A semiconductor package comprising: a semiconductor chip having a semiconductor substrate, a plurality of pads formed above said semiconductor substrate, and a first passivating film formed over an entire surface of said semiconductor substrate and having openings above said pads, and the surface of said first passivating film being flat; a plurality of interconnection lines formed on the surface of said first passivating film, each of said interconnection lines being connected to a respective one of said pads; a second passivating film formed over the entire surface of said first passivating film, wherein the edges of said second passivating film are rounded off, and having through holes each located only above a respective one of said interconnection lines, said through holes being arranged in the form of an array and the surface of said second passivating film being flat; a metal layer formed on the bottom and sides of each of said through holes; and a plated layer formed within and above each of said through holes, said plated layer forming each of contacts for connection to external leads above a respective one of said through holes, wherein said external leads are directly connected to a printed-circuit board.
Claim 52
Dependent Claim 198 words
A semiconductor package comprising: a semiconductor chip having a semiconductor substrate, a plurality of pads formed above said semiconductor substrate, and a first passivating film formed over an entire surface of said semiconductor substrate and having openings above said pads, and the surface of said first passivating film being flat; a plurality of interconnection lines formed on the surface of said first passivating film, each of said interconnection lines being connected to a respective one of said pads; a second passivating film formed over the entire surface of said first passivating film, wherein the edges of said second passivating film are rounded off, and having through holes each located only above a respective one of said interconnection lines, said through holes being arranged in the form of an array and the surface of said second passivating film being flat; a metal layer formed on the bottom and sides of each of said through holes; and a plated layer formed within and above each of said through holes, said plated layer forming each of contacts for connection to external leads above a respective one of said through holes, wherein said external leads are directly connected to a printed-circuit board.
Claim 53
Dependent Claim 21 words
The semiconductor package according to claim 46, wherein said plurality of pads is placed along the edges of said semiconductor substrate.
Claim 54
Dependent Claim 23 words
The semiconductor package according to claim 46, wherein said plurality of pads is placed evenly over the entire surface of said semiconductor substrate.
Claim 55
Dependent Claim 23 words
The semiconductor package according to claim 46, wherein the edges of said semiconductor substrate are inside the edges of said second passivating film.
Claim 56
Dependent Claim 23 words
The semiconductor package according to claim 46, wherein each of said interconnection lines is made of one of conductors including aluminum and copper.
Claim 57
Dependent Claim 28 words
The semiconductor package according to claim 46, wherein said second passivating film functions as a package and has a thickness in the range of 0.05 to 0.2 mm.
Claim 58
Dependent Claim 29 words
The semiconductor package according to claim 46, wherein each of said first and second passivating films is made of one of insulating materials including silicon oxide and silicon nitride.
Claim 59
Dependent Claim 31 words
The semiconductor package according to claim 46, wherein, when viewed from above said semiconductor substrate, said contacts are placed symmetrically with respect to the central point of said second passivating film.
Claim 60
Dependent Claim 22 words
The semiconductor package according to claim 46, wherein said contacts are placed evenly over the entire surface of said second passivating film.
Claim 61
Dependent Claim 20 words
The semiconductor package according to claim 46, wherein said contacts are placed along the edges of said second passivating film.
Claim 62
Dependent Claim 23 words
The semiconductor package according to claim 46, wherein, when viewed from above said semiconductor substrate, each of said contacts has a circular shape.
Claim 63
Dependent Claim 52 words
The semiconductor package according to claim 46, wherein, when viewed from above said semiconductor substrate, said semiconductor substrate has a square shape and measures 13.5 mm on a side, each of said contacts has a circular shape with a diameter of 0.5 mm, and the pitch of said contacts is 1 mm.
Claim 64
Dependent Claim 24 words
The semiconductor package according to claim 46, wherein said metal layer is made of at least one of metals including titanium, nickel, and palladium.
Claim 65
Dependent Claim 30 words
The semiconductor package according to claim 46, wherein each of said contacts is made of one of conductors including copper, gold, nickel, and a two-layered structure of nickel and gold.
Claim 66
Dependent Claim 20 words
The semiconductor package according to claim 46, further comprising solder balls each formed on a respective one of said contacts.
Claim 67
Dependent Claim 23 words
The semiconductor package according to claim 48, wherein a bottom surface of the semiconductor package comprises a bottom surface of the semiconductor substrate.

References Cited (Backward Citations)

US4107726A Cited
US4948754A Cited
US5220199A Cited
US5309024A Cited
US5360988A Cited
US5457345A Cited
US5581122A Cited

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