Patent US5884378A successfully refreshed from Google Patents.
US5884378A
Expired / Lapsed
US
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Method of making an enhanced quality factor resonator
Assignee: CTS Corp
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Filing: 1996-07-22
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Granted: 1999-03-23
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Expires: 2016-07-22
Abstract
Abstract A high quality factor resonator (15) including a substrate (110) and a resonator layer (150). The resonator layer includes a first electrode (157). The resonator layer (150) is disposed on a surface of the substrate (110). The first electrode (157) is disposed on a distal surface of the resonator layer (150). A cavity (120) is disposed between the substrate (110) and the resonator layer (150) and a second electrode (159) is disposed on the substrate (110) and on a surface of the cavity (120) remote from the resonator layer (150) and is separated from the resonator layer (150) by a thin gap.
Inventors
- 👤 Michael Dydyk
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:36
CPC Classifications
H; H03; H03H; H03H3/00; H03H3/007; H03H3/02; H03H3/04; H03H9/00; H03H9/02; H03H9/02007; H03H9/02086; H03H9/02102; H03H9/15; H03H9/17; H03H9/171; H03H9/172; H03H9/173; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
118 words
A method for manufacturing a high quality factor resonator, said method comprising steps of: providing a substrate; providing a resonator layer having substantially parallel first and second surfaces first and second electrodes associated with said first and second surfaces, respectively; and coupling said resonator layer to said substrate such that said resonator layer is disposed atop said substrate and including a cavity disposed between said second surface of said resonator layer and said substrate, said coupling step including a step of providing said second electrode contained with said cavity, said second electrode disposed parallel to said second surface and separated therefrom by a gap having a width in a range of from 0.05 micrometers to about one micrometer.
Claim 2
Independent Claim
118 words
A method for manufacturing a high quality factor resonator, said method comprising steps of: providing a substrate; providing a resonator layer having substantially parallel first and second surfaces first and second electrodes associated with said first and second surfaces, respectively; and coupling said resonator layer to said substrate such that said resonator layer is disposed atop said substrate and including a cavity disposed between said second surface of said resonator layer and said substrate, said coupling step including a step of providing said second electrode contained with said cavity, said second electrode disposed parallel to said second surface and separated therefrom by a gap having a width in a range of from 0.05 micrometers to about one micrometer.
Claim 3
Dependent Claim
56 words
A method as claimed in claim 1, further comprising a step of disposing said first electrode having a periphery on said first surface of said resonator layer, wherein said periphery is disposed over said cavity and within a periphery of said cavity and said first surface is more remote from said substrate than said second surface.
Claim 4
Dependent Claim
25 words
A method as claimed in claim 1, wherein said step of providing a substrate includes a step of providing a semiconductor substrate including integrated circuitry.
Claim 5
Dependent Claim
26 words
A method as claimed in claim 1, wherein said step of providing a resonator layer includes a step of providing a resonator layer comprising single-crystal material.
Claim 6
Dependent Claim
38 words
A method as claimed in claim 4, wherein said step of providing a resonator layer includes a step of providing a resonator layer comprising material chosen from the group consisting of lithium niobate, lithium tantalate and lithium tetraborate.
Claim 7
Dependent Claim
63 words
A method as claimed in claim 1, wherein said step of coupling includes steps of: disposing metal on a portion of said second surface of said resonator layer; disposing metal on a portion of said substrate; aligning said metal on said portion of said second surface with said metal on said portion of said substrate; and welding said resonator layer to said substrate.
Claim 8
Dependent Claim
38 words
A method as claimed in claim 6, wherein said welding step includes a step of welding by resistive heating of said metal on said portion of said second surface and said metal on said portion of said substrate.
Claim 9
Dependent Claim
39 words
A method as claimed in claim 1, further including a step of thinning said resonator layer following said coupling step, wherein said thinning step includes a process chosen from the group consisting of mechanical lapping, sputtering and ion milling.
Claim 10
Independent Claim
153 words
A method for manufacturing a high quality factor resonator, and a high quality factor resonator manufactured by said method, said method comprising steps of: providing a substrate; providing a resonator layer having substantially parallel first and second surfaces; coupling said resonator layer to said substrate such that said resonator layer is disposed atop said substrate and including a cavity disposed between said second surface of said resonator layer and said substrate; disposing a first electrode having a periphery on said first surface of said resonator layer, wherein said periphery is disposed over said cavity and within a periphery of said cavity and said first surface is more remote from said substrate than said second surface; and providing a second electrode contained within said cavity, said second electrode disposed parallel to said second surface and separated therefrom by a gap having a width in a range of from 0.05 micrometers to about one micrometer.
Claim 11
Independent Claim
153 words
A method for manufacturing a high quality factor resonator, and a high quality factor resonator manufactured by said method, said method comprising steps of: providing a substrate; providing a resonator layer having substantially parallel first and second surfaces; coupling said resonator layer to said substrate such that said resonator layer is disposed atop said substrate and including a cavity disposed between said second surface of said resonator layer and said substrate; disposing a first electrode having a periphery on said first surface of said resonator layer, wherein said periphery is disposed over said cavity and within a periphery of said cavity and said first surface is more remote from said substrate than said second surface; and providing a second electrode contained within said cavity, said second electrode disposed parallel to said second surface and separated therefrom by a gap having a width in a range of from 0.05 micrometers to about one micrometer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-22 | 2002-09-21 | 2003-03-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-22 | 2006-09-21 | 2007-03-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-22 | 2010-09-21 | 2011-03-23 | $7700.00 | Window Closed / Lapsed |