US5884378A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making an enhanced quality factor resonator
Assignee: CTS Corp
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Filing: 1996-07-22
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Granted: 1999-03-23
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Expires: 2016-07-22
Abstract
Abstract A high quality factor resonator (15) including a substrate (110) and a resonator layer (150). The resonator layer includes a first electrode (157). The resonator layer (150) is disposed on a surface of the substrate (110). The first electrode (157) is disposed on a distal surface of the resonator layer (150). A cavity (120) is disposed between the substrate (110) and the resonator layer (150) and a second electrode (159) is disposed on the substrate (110) and on a surface of the cavity (120) remote from the resonator layer (150) and is separated from the resonator layer (150) by a thin gap.
Inventors
- 👤 Michael Dydyk
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:31
CPC Classifications
H; H03; H03H; H03H3/00; H03H3/007; H03H3/02; H03H3/04; H03H9/00; H03H9/02; H03H9/02007; H03H9/02086; H03H9/02102; H03H9/15; H03H9/17; H03H9/171; H03H9/172; H03H9/173; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
118 words
A method for manufacturing a high quality factor resonator, said method comprising steps of: providing a substrate; providing a resonator layer having substantially parallel first and second surfaces first and second electrodes associated with said first and second surfaces, respectively; and coupling said resonator layer to said substrate such that said resonator layer is disposed atop said substrate and including a cavity disposed between said second surface of said resonator layer and said substrate, said coupling step including a step of providing said second electrode contained with said cavity, said second electrode disposed parallel to said second surface and separated therefrom by a gap having a width in a range of from 0.05 micrometers to about one micrometer.
Claim 2
Independent Claim
118 words
A method for manufacturing a high quality factor resonator, said method comprising steps of: providing a substrate; providing a resonator layer having substantially parallel first and second surfaces first and second electrodes associated with said first and second surfaces, respectively; and coupling said resonator layer to said substrate such that said resonator layer is disposed atop said substrate and including a cavity disposed between said second surface of said resonator layer and said substrate, said coupling step including a step of providing said second electrode contained with said cavity, said second electrode disposed parallel to said second surface and separated therefrom by a gap having a width in a range of from 0.05 micrometers to about one micrometer.
Claim 3
Dependent Claim
56 words
A method as claimed in claim 1, further comprising a step of disposing said first electrode having a periphery on said first surface of said resonator layer, wherein said periphery is disposed over said cavity and within a periphery of said cavity and said first surface is more remote from said substrate than said second surface.
Claim 4
Dependent Claim
25 words
A method as claimed in claim 1, wherein said step of providing a substrate includes a step of providing a semiconductor substrate including integrated circuitry.
Claim 5
Dependent Claim
26 words
A method as claimed in claim 1, wherein said step of providing a resonator layer includes a step of providing a resonator layer comprising single-crystal material.
Claim 6
Dependent Claim
38 words
A method as claimed in claim 4, wherein said step of providing a resonator layer includes a step of providing a resonator layer comprising material chosen from the group consisting of lithium niobate, lithium tantalate and lithium tetraborate.
Claim 7
Dependent Claim
63 words
A method as claimed in claim 1, wherein said step of coupling includes steps of: disposing metal on a portion of said second surface of said resonator layer; disposing metal on a portion of said substrate; aligning said metal on said portion of said second surface with said metal on said portion of said substrate; and welding said resonator layer to said substrate.
Claim 8
Dependent Claim
38 words
A method as claimed in claim 6, wherein said welding step includes a step of welding by resistive heating of said metal on said portion of said second surface and said metal on said portion of said substrate.
Claim 9
Dependent Claim
39 words
A method as claimed in claim 1, further including a step of thinning said resonator layer following said coupling step, wherein said thinning step includes a process chosen from the group consisting of mechanical lapping, sputtering and ion milling.
Claim 10
Independent Claim
153 words
A method for manufacturing a high quality factor resonator, and a high quality factor resonator manufactured by said method, said method comprising steps of: providing a substrate; providing a resonator layer having substantially parallel first and second surfaces; coupling said resonator layer to said substrate such that said resonator layer is disposed atop said substrate and including a cavity disposed between said second surface of said resonator layer and said substrate; disposing a first electrode having a periphery on said first surface of said resonator layer, wherein said periphery is disposed over said cavity and within a periphery of said cavity and said first surface is more remote from said substrate than said second surface; and providing a second electrode contained within said cavity, said second electrode disposed parallel to said second surface and separated therefrom by a gap having a width in a range of from 0.05 micrometers to about one micrometer.
Claim 11
Independent Claim
153 words
A method for manufacturing a high quality factor resonator, and a high quality factor resonator manufactured by said method, said method comprising steps of: providing a substrate; providing a resonator layer having substantially parallel first and second surfaces; coupling said resonator layer to said substrate such that said resonator layer is disposed atop said substrate and including a cavity disposed between said second surface of said resonator layer and said substrate; disposing a first electrode having a periphery on said first surface of said resonator layer, wherein said periphery is disposed over said cavity and within a periphery of said cavity and said first surface is more remote from said substrate than said second surface; and providing a second electrode contained within said cavity, said second electrode disposed parallel to said second surface and separated therefrom by a gap having a width in a range of from 0.05 micrometers to about one micrometer.
References Cited (Backward Citations)
US2266070A
Cited
US2807731A
Cited
US3414832A
Cited
US3313959A
Cited
US4166967A
Cited
US4456850A
Cited
JPS6072277A
Cited
US4502932A
Cited
US4556812A
Cited
US4640756A
Cited
US4616152A
Cited
US4642508A
Cited
JPS6141215A
Cited
US4672591A
Cited
US4719383A
Cited
US4749900A
Cited
US5011568A
Cited
US5075641A
Cited
US5162691A
Cited
US5198716A
Cited
US5373268A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-22 | 2002-09-21 | 2003-03-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-22 | 2006-09-21 | 2007-03-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-22 | 2010-09-21 | 2011-03-23 | $7700.00 | Window Closed / Lapsed |