US5882992A
Expired / Lapsed
US
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Method for fabricating Tungsten local interconnections in high density CMOS circuits
Assignee: International Business Machines Corp
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Filing: 1996-11-18
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Granted: 1999-03-16
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Expires: 2016-11-18
Abstract
Abstract The present invention provides a method for fabricating tungsten local interconnections in high density CMOS circuits, and also provides high density CMOS circuits having local interconnections formed of tungsten. Pursuant to the method, an etch stop layer of chromium is initially deposited on the circuit elements of the CMOS silicon substrate. Next, a conductive layer of tungsten is non-selectively deposited on the chromium layer. A photoresist mask is then lithographically patterned over the tungsten layer. The tungsten layer is then etched down to, and stopping at, the chromium layer, after which the photoresist mask is stripped. The stripping preferably uses a low temperature plasma etch in O2 at a temperature of less than 100 DEG C. Finally, a directional O2 reactive ion etch is used to remove the chromium layer selectively to the silicon substrate. Borderless contacts are formed with the aid of the chromium etch stop layer beneath the tungsten local interconnection layer. The method of integration of this approach results in anisotropic metal lines patterned over topography using a standard photoresist mask. This approach also allows partial overlap of contacts to reduce device dimensions, and thereby results in improved density and performance.
Inventors
- 👤 Edward Kobeda
- 👤 Jeffrey Peter Gambino
- 👤 George Gordon Gifford
- 👤 Nickolas Joseph Mazzeo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 00:31
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/0698
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
198 words
A high density CMOS circuit comprising at least one tungsten/chromium local interconnection on top of a silicon substrate having circuit elements formed thereon, wherein said tungsten/chromium local interconnection is useful for connecting gate regions of said silicon substrate to diffusion regions of said silicon substrate, said circuit being manufactured by the steps of: (a) providing a silicon substrate having circuit elements formed thereon, said circuit elements comprising at least one diffusion region, at least one isolation region and at least one gate region; (b) depositing a layer of chromium on top of said circuit elements; (c) depositing a layer of tungsten on top of said chromium layer provided in step (b); (d) providing at least one photoresist mask to the tungsten layer such that some of the areas of the tungsten layer is protected by the photoresist mask while other areas of the tungsten layer area are unprotected; (e) selectively etching said unprotected areas of said chromium layer to said substrate, wherein said selectively etching is conducted by O 2 reactive ion etching; and (f) removing the photoresist mask provided in step (d) to provide at least one tungsten/chromium interconnect connecting said gate regions to said diffusion regions.
Claim 2
Dependent Claim
198 words
A high density CMOS circuit comprising at least one tungsten/chromium local interconnection on top of a silicon substrate having circuit elements formed thereon, wherein said tungsten/chromium local interconnection is useful for connecting gate regions of said silicon substrate to diffusion regions of said silicon substrate, said circuit being manufactured by the steps of: (a) providing a silicon substrate having circuit elements formed thereon, said circuit elements comprising at least one diffusion region, at least one isolation region and at least one gate region; (b) depositing a layer of chromium on top of said circuit elements; (c) depositing a layer of tungsten on top of said chromium layer provided in step (b); (d) providing at least one photoresist mask to the tungsten layer such that some of the areas of the tungsten layer is protected by the photoresist mask while other areas of the tungsten layer area are unprotected; (e) selectively etching said unprotected areas of said chromium layer to said substrate, wherein said selectively etching is conducted by O 2 reactive ion etching; and (f) removing the photoresist mask provided in step (d) to provide at least one tungsten/chromium interconnect connecting said gate regions to said diffusion regions.
Claim 3
Dependent Claim
44 words
A high density CMOS circuit with at least one tungsten local interconnection as in claim 1, wherein the silicon substrate has silicided gates and silicided diffusions formed thereon, and the etch stop layer of chromium is deposited over said silicided gates and silicided diffusions.
Claim 4
Dependent Claim
27 words
A high density CMOS circuit with at least one tungsten local interconnection as in claim 1, wherein said deposited chromium has been deposited by evaporation or sputtering.
Claim 5
Dependent Claim
30 words
A high density CMOS circuit with at least one tungsten local interconnection as in claim 3, wherein the thickness of said chromium layer is in the range of 20-200 nm.
Claim 6
Dependent Claim
27 words
A high density CMOS circuit with at least one tungsten local interconnection as in claim 4, wherein the thickness of said chromium layer is about 50 nm.
Claim 7
Dependent Claim
25 words
A high density CMOS circuit with at least one tungsten local interconnection as in claim 1, wherein said deposited tungsten has been deposited by sputtering.
Claim 8
Dependent Claim
30 words
A high density CMOS circuit with at least one tungsten local interconnection as in claim 6, wherein the thickness of said tungsten layer is in the range of 50-300 nm.
Claim 9
Dependent Claim
27 words
A high density CMOS circuit with at least one tungsten local interconnection as in claim 7, wherein the thickness of said tungsten layer is about 100 nm.
Claim 10
Independent Claim
137 words
A method for fabricating tungsten local interconnects in high density CMOS circuits, comprising: (a) depositing a layer of chromium over circuit elements of a CMOS silicon substrate; (b) depositing a conductive layer of tungsten over the chromium layer; (c) lithographically patterning a photoresist mask over the tungsten layer; (d) etching the tungsten layer down to, and stopping at, the chromium layer, wherein areas not protected by the photoresist mask are etched to the chromium layer, and areas protected by the photoresist mask etched and a layer of tungsten remains over a layer of chromium; and (e) selectively etching by O 2 reactive ion etching the chromium layer to the substrate in areas where the chromium layer is not covered by the tungsten layer, and areas wherein the chromium layer is covered by the tungsten layer remain unetched.
Claim 11
Independent Claim
137 words
A method for fabricating tungsten local interconnects in high density CMOS circuits, comprising: (a) depositing a layer of chromium over circuit elements of a CMOS silicon substrate; (b) depositing a conductive layer of tungsten over the chromium layer; (c) lithographically patterning a photoresist mask over the tungsten layer; (d) etching the tungsten layer down to, and stopping at, the chromium layer, wherein areas not protected by the photoresist mask are etched to the chromium layer, and areas protected by the photoresist mask etched and a layer of tungsten remains over a layer of chromium; and (e) selectively etching by O 2 reactive ion etching the chromium layer to the substrate in areas where the chromium layer is not covered by the tungsten layer, and areas wherein the chromium layer is covered by the tungsten layer remain unetched.
Claim 12
Dependent Claim
30 words
A method as claimed in claim 9, wherein the tungsten layer is etched using a low temperature plasma etch in O 2 at a temperature of less than 100° C.
Claim 13
Dependent Claim
27 words
A method as claimed in claim 9, wherein borderless contacts are formed by the use of the chromium etch stop layer beneath the tungsten local interconnection layer.
Claim 14
Dependent Claim
16 words
A method as claimed in claim 9, wherein the chromium is depositing by evaporation or sputtering.
Claim 15
Dependent Claim
22 words
A method as claimed in claim 9, wherein the chromium layer is deposited with a thickness in the range of 20-200 nm.
Claim 16
Dependent Claim
20 words
A method as claimed in claim 13, wherein the chromium layer is depositing with a thickness of about 50 nm.
Claim 17
Dependent Claim
14 words
A method as claimed in claim 9, wherein the tungsten is deposited by sputtering.
Claim 18
Dependent Claim
21 words
A method as claimed in claim 9, wherein the tungsten is deposited with a thickness in the range of 50-300 nm.
Claim 19
Dependent Claim
20 words
A method as claimed in claim 16, wherein the tungsten layer is deposited with a thickness of about 100 nm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-15 | 2002-09-14 | 2003-03-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-15 | 2006-09-14 | 2007-03-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-15 | 2010-09-14 | 2011-03-16 | $7700.00 | Window Closed / Lapsed |