US5874351A
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US
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Sputtered metal silicide film stress control by grain boundary stuffing
Assignee: Micron Technology Inc
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Filing: 1996-06-13
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Granted: 1999-02-23
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Expires: 2016-06-13
Abstract
Abstract A method of controlling stresses in thin films that are deposited over semiconductor device substrates. During anneal process steps, grain growth of the film creates stresses in that can damage or destroy it. The stresses lead to warping and bowing and ultimately to film cracking which undermines desired low resistivity. The present invention imparts thermal stability to thin films by grain boundary stuffing (GBS) of preselected elements that resist film grain changes that cause the stresses. GBS implants the elements into the thin film at desired depths, but above the film-substrate interface, sufficient to prevent or lessen destructive grain growth. GBS provides for structural film stability required during severe thermal cycles that occur during subsequent processing of semiconductor devices.
Inventors
- 👤 Yong-Jun Hu
- 👤 Pai Hung Pan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:05
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/58; C23C14/5826; C23C14/5833; C23C14/06; C23C14/0682; H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0112; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01306; H10D64/01308; H10D64/01312; H10D64/01318; H10D64/0132; H10P; H10P14/00; H10P14/40; H10P14/412; H10P14/414; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/047; H10W20/051; H10W20/052; H10W20/0526
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
122 words
A method for forming a low stress film on a substrate comprising forming an implant layer on a substrate situated on a semiconductor wafer, said implant layer having a plurality of grains therein; bombarding said implant layer with a source of ions to implant said implant layer with said ions, said ions being implanted to form a first grain boundary stuffing matrix within said implant layer to a first depth, said first grain boundary stuffing matrix being a combination of implanted ions among said plurality of grains within said implant layer; and rapid thermal processing said semiconductor wafer at a temperature and for a time sufficient to increase grain size of the grains in said plurality of grains in said implant layer.
Claim 2
Independent Claim
122 words
A method for forming a low stress film on a substrate comprising forming an implant layer on a substrate situated on a semiconductor wafer, said implant layer having a plurality of grains therein; bombarding said implant layer with a source of ions to implant said implant layer with said ions, said ions being implanted to form a first grain boundary stuffing matrix within said implant layer to a first depth, said first grain boundary stuffing matrix being a combination of implanted ions among said plurality of grains within said implant layer; and rapid thermal processing said semiconductor wafer at a temperature and for a time sufficient to increase grain size of the grains in said plurality of grains in said implant layer.
Claim 3
Dependent Claim
80 words
The method of claim 1, further comprising bombarding said implant layer with said source of ions to implant said implant layer with said ions, said ions being implanted to form a second grain boundary stuffing matrix within said implant layer at a second depth, said second grain boundary stuffing matrix being a combination of implanted ions among said plurality of grains within said implant layer, whereby said implant layer includes multiple implants of said ions at a plurality of depths.
Claim 4
Dependent Claim
27 words
The method of claim 1, wherein said ions of said ion source are selected from the group consisting of nitrogen, phosphorus, molybdenum, tungsten, cobalt, and combinations thereof.
Claim 5
Dependent Claim
34 words
The method of claim 1, wherein said implant layer is selected from the group consisting of refractory metal suicides, alumina, zirconia, ceria silica, Si 3 N 4 , and metal nitrides and combinations thereof.
Claim 6
Dependent Claim
23 words
The method of claim 1, wherein said substrate is selected from the group consisting of SiO 2 , monocrystalline silicon, polysilicon, and a-Si.
Claim 7
Dependent Claim
22 words
The method of claim 1, wherein rapid thermal processing said semiconductor wafer comprises multiple rapid thermal processing heat cycles, and/or furnace anneal.
Claim 8
Dependent Claim
23 words
The method of claim 6, wherein said multiple heat cycles are conducted in an atmosphere substantially consisting of at least one inert gas.
Claim 9
Dependent Claim
14 words
The method of claim 1, wherein said implant layer comprises TiSi x where x≧2.
Claim 10
Dependent Claim
27 words
The method of claim 8, wherein said TiSi x is sputtered at about 300° C. on said substrate which is composed of SiO 2 , and/or polysilicon.
Claim 11
Dependent Claim
18 words
The method of claim 9, wherein said layer of TiSi x has a thickness of about ≧500 Å.
Claim 12
Independent Claim
171 words
A method for fabricating a semiconductor device, comprising forming a gate stack isolated by field oxide regions in a silicon substrate, said gate stack having an electrical insulator layer on said silicon substrate, a gate layer deposited on said electrical insulator layer, an implant layer deposited on said gate layer, and an electrically insulating spacer layer surrounding said gate layer and said implant layer, said implant layer being composed of a material having a plurality of grains therein; bombarding said implant layer with a source of ions to implant said implant layer with said ions, said ions being implanted to form a first grain boundary stuffing matrix within said implant layer to a first depth, said first grain boundary stuffing matrix being a combination of implanted ions among said plurality of grains within said material of said implant layer; and rapid thermal processing said semiconductor wafer at a selected temperature for a selected time sufficient to increase grain size of the grains in said plurality of grains in said implant layer.
Claim 13
Independent Claim
171 words
A method for fabricating a semiconductor device, comprising forming a gate stack isolated by field oxide regions in a silicon substrate, said gate stack having an electrical insulator layer on said silicon substrate, a gate layer deposited on said electrical insulator layer, an implant layer deposited on said gate layer, and an electrically insulating spacer layer surrounding said gate layer and said implant layer, said implant layer being composed of a material having a plurality of grains therein; bombarding said implant layer with a source of ions to implant said implant layer with said ions, said ions being implanted to form a first grain boundary stuffing matrix within said implant layer to a first depth, said first grain boundary stuffing matrix being a combination of implanted ions among said plurality of grains within said material of said implant layer; and rapid thermal processing said semiconductor wafer at a selected temperature for a selected time sufficient to increase grain size of the grains in said plurality of grains in said implant layer.
Claim 14
Dependent Claim
34 words
The method of claim 11, wherein said implant layer is selected from the group consisting of refractory metal silicides, alumina, zirconia, ceria, silica Si 3 N 4 , and metal nitrides and combinations thereof.
Claim 15
Dependent Claim
26 words
The method of claim 11, wherein said ions of said ion source are selected from the group consisting of nitrogen, phosphorus, tungsten, cobalt, and combinations thereof.
Claim 16
Dependent Claim
80 words
The method of claim 11, further comprising bombarding said implant layer with said source of ions to implant said implant layer with said ions, said ions being implanted to form a second grain boundary stuffing matrix within said implant layer at a second depth, said second grain boundary stuffing matrix being a combination of implanted ions among said plurality of grains within said implant layer, whereby said implant layer includes multiple implants of said ions at a plurality of depths.
Claim 17
Dependent Claim
23 words
The method of claim 11, wherein said substrate is selected from the group consisting of SiO 2 , monocrystalline silicon, polysilicon, and a-Si.
Claim 18
Dependent Claim
19 words
The method of claim 11, wherein rapid thermal processing said semiconductor wafer comprises multiple heat cycles and/or furnace anneal.
Claim 19
Dependent Claim
23 words
The method of claim 16, wherein said multiple heat cycles are conducted in an atmosphere substantially consisting of at least one inert gas.
Claim 20
Dependent Claim
14 words
The method of claim 11, wherein said implant layer comprises TiSi x where x≧2.
Claim 21
Dependent Claim
26 words
The method of claim 18, wherein said TiSi x is sputtered at about 300° C. on said substrate which is composed of SiO 2 and/or polysilicon.
Claim 22
Dependent Claim
18 words
The method of claim 19, wherein said layer of TiSi x has a thickness of about ≧500 Å.
Claim 23
Dependent Claim
43 words
The method of claim 11, further wherein said implant layer comprises TiSi x , x is in a range of about 2.0 to about 3.0, and the implant layer has a thickness in a range of about 200 Angstroms to about 3500 Angstroms.
Claim 24
Dependent Claim
29 words
The method of claim 11, further wherein said implant layer comprises TiSi x , x is about 2.2, and the implant layer has a thickness of about 1500 Angstroms.
Claim 25
Dependent Claim
63 words
The method of claim 11, wherein the electrical insulator layer on said silicon substrate comprises SiO 2 , the gate layer comprises polysilicon, the implant layer comprises TiSi x , and the electrically insulting spacer layer surrounding said gate layer and said implant layer comprises refractory metal silicides, alumina, zirconia, ceria silica, Si 3 N 4 , and metal nitrides and combinations thereof.
Claim 26
Dependent Claim
69 words
The method of claim 11, wherein the implant layer is formed by the steps of: depositing a refractory metal upon said gate layer, said gate layer comprising polysilicon; heating the semiconductor wafer to react the deposited refractory metal with the gate layer of polysilicon to form a refractory metal silicide; and removing substantially all of said deposited refractory metal that is unreacted with said polysilicon of said gate layer.
Claim 27
Independent Claim
212 words
A method for forming a low stress film on a substrate comprising: forming an implant layer on a substrate situated on a semiconductor wafer, said implant having a plurality of grains therein, wherein said implant layer comprises TiSi x where x≧2, wherein said TiSi x is sputtered at about 300° C. on said substrate which is composed of SiO 2 , and/or polysilicon, and wherein said layer of TiSi x has a thickness of about ≧500 Å; bombarding said implant layer with a source of ions to implant said implant layer with said ions by implanting about 2×10 13 cm -2 ions of phosphorous at an energy of about 20 KeV, said ions being implanted to form a first grain boundary stuffing matrix within said implant layer to a first depth, said first grain boundary stuffing matrix being a combination of implanted ions among said plurality of grains within said implant layer; and heating said semiconductor wafer at a temperature and for a time sufficient to increase grain size of the grains in said plurality of grains in said implant layer, whereby heating comprises a plurality of rapid thermal processing anneal steps at 1000° for a period of about 20 seconds, wherein sheet resistivity of said implant layer is about 1.125 ohm/sq.
Claim 28
Independent Claim
212 words
A method for forming a low stress film on a substrate comprising: forming an implant layer on a substrate situated on a semiconductor wafer, said implant having a plurality of grains therein, wherein said implant layer comprises TiSi x where x≧2, wherein said TiSi x is sputtered at about 300° C. on said substrate which is composed of SiO 2 , and/or polysilicon, and wherein said layer of TiSi x has a thickness of about ≧500 Å; bombarding said implant layer with a source of ions to implant said implant layer with said ions by implanting about 2×10 13 cm -2 ions of phosphorous at an energy of about 20 KeV, said ions being implanted to form a first grain boundary stuffing matrix within said implant layer to a first depth, said first grain boundary stuffing matrix being a combination of implanted ions among said plurality of grains within said implant layer; and heating said semiconductor wafer at a temperature and for a time sufficient to increase grain size of the grains in said plurality of grains in said implant layer, whereby heating comprises a plurality of rapid thermal processing anneal steps at 1000° for a period of about 20 seconds, wherein sheet resistivity of said implant layer is about 1.125 ohm/sq.
Claim 29
Independent Claim
252 words
A method for fabricating a semiconductor device comprising: forming a gate stack isolated by field oxide regions in a silicon substrate, said gate stack having an electrical insulator layer on said silicon substrate, a gate layer disposed on said electrical insulator layer, an implant layer disposed on said gate layer, and an electrically insulating spacer layer surrounding said gate layer and said implant layer, said implant layer being composed of TiSi x where x≧2, having a plurality of grains therein, wherein said TiSi x is sputtered at about 300° C. on said substrate which is composed of SiO 2 and/or polysilicon, and wherein said layer of TiSi x has a thickness of about ≧500 Å; bombarding said implant layer with a source of ions to implant said implant layer with said ions by implanting about 2×10 3 cm -2 ions of phosphorous at an energy of about 20 KeV, said ions being implanted to form a first grain boundary stuffing matrix within said implant layer to a first depth said first grain boundary stuffing matrix being a combination of implanted ions among said plurality of grains within said material of said implant layer; and heating said semiconductor wafer at a temperature for a time sufficient to increase grain size of the grains in said plurality of grains in said implant layer, wherein heating comprises a plurality of rapid thermal processing anneals at 1000° C. for a period of about 20 seconds, whereby sheet resistivity of said implant layer is about 1.125 ohm/sq.
Claim 30
Independent Claim
252 words
A method for fabricating a semiconductor device comprising: forming a gate stack isolated by field oxide regions in a silicon substrate, said gate stack having an electrical insulator layer on said silicon substrate, a gate layer disposed on said electrical insulator layer, an implant layer disposed on said gate layer, and an electrically insulating spacer layer surrounding said gate layer and said implant layer, said implant layer being composed of TiSi x where x≧2, having a plurality of grains therein, wherein said TiSi x is sputtered at about 300° C. on said substrate which is composed of SiO 2 and/or polysilicon, and wherein said layer of TiSi x has a thickness of about ≧500 Å; bombarding said implant layer with a source of ions to implant said implant layer with said ions by implanting about 2×10 3 cm -2 ions of phosphorous at an energy of about 20 KeV, said ions being implanted to form a first grain boundary stuffing matrix within said implant layer to a first depth said first grain boundary stuffing matrix being a combination of implanted ions among said plurality of grains within said material of said implant layer; and heating said semiconductor wafer at a temperature for a time sufficient to increase grain size of the grains in said plurality of grains in said implant layer, wherein heating comprises a plurality of rapid thermal processing anneals at 1000° C. for a period of about 20 seconds, whereby sheet resistivity of said implant layer is about 1.125 ohm/sq.
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