US5871626A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Flexible continuous cathode contact circuit for electrolytic plating of C4, TAB microbumps, and ultra large scale interconnects
Assignee: Intel Corp
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Filing: 1997-10-17
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Granted: 1999-02-16
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Expires: 2017-10-17
Abstract
Abstract A cathode contact device is provided for providing particle deposition from an anode source onto a target surface of a working piece. The working piece has a first electrically conductive continuous contact surrounding the target surface. The cathode contact device includes a second electrically conductive continuous contact adapted for frictionally contacting the first contact along a continuous path located on the first contact. The second contact further has an inner periphery defining an aperture for passing therethrough the particles onto the target surface. Additionally, the cathode contact device includes a circuit for electrically coupling the second contact to an electrical current supply.
Inventors
- 👤 Douglas E. Crafts
- 👤 Steven M. Swain
- 👤 Kenji Takahashi
- 👤 Hirofumi Ishida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:50
CPC Classifications
C; C25; C25D; C25D5/00; C25D5/02; C25D5/022; C25D17/00; C25D17/005; C25D7/00; C25D7/12; C25D17/001
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
69 words
A cathode device to contact a working piece, said cathode device comprising: a first electrically conductive continuous contact to frictionally contact a second electrically conductive continuous contact, of said working piece, along a continuous path located on said second contact, said first contact further having an inner periphery defining an aperture; and at least one electrically conductive arm integral with said first contact and extending from said first contact.
Claim 2
Dependent Claim
69 words
A cathode device to contact a working piece, said cathode device comprising: a first electrically conductive continuous contact to frictionally contact a second electrically conductive continuous contact, of said working piece, along a continuous path located on said second contact, said first contact further having an inner periphery defining an aperture; and at least one electrically conductive arm integral with said first contact and extending from said first contact.
Claim 3
Dependent Claim
13 words
The device of claim 1 wherein said first continuous contact is substantially annular.
Claim 4
Dependent Claim
15 words
The device of claim 1 wherein said first and second contacts have substantially identical shapes.
Claim 5
Dependent Claim
15 words
The device of claim 1 wherein said first and second contacts have substantially identical sizes.
Claim 6
Dependent Claim
96 words
A cathode contact device to contact a working piece, said cathode device comprising: a first flexible clad laminate having a first electrically conductive continuous contact to frictionally contact a second electrically conductive continuous contact, of said working piece, along a continuous path located on said second contact, said first flexible clad laminate further having an inner periphery defining an aperture said first flexible clad laminate having an insulating flexible layer bonded to said first electrically conductive continuous contact; and at least one electrically conductive arm integral with said first contact and extending from said first contact.
Claim 7
Dependent Claim
96 words
A cathode contact device to contact a working piece, said cathode device comprising: a first flexible clad laminate having a first electrically conductive continuous contact to frictionally contact a second electrically conductive continuous contact, of said working piece, along a continuous path located on said second contact, said first flexible clad laminate further having an inner periphery defining an aperture said first flexible clad laminate having an insulating flexible layer bonded to said first electrically conductive continuous contact; and at least one electrically conductive arm integral with said first contact and extending from said first contact.
Claim 8
Dependent Claim
12 words
The device recited in claim 5 wherein said insulating layer comprises polyamide.
Claim 9
Dependent Claim
13 words
The device of claim 5 wherein said first continuous contact is substantially annular.
Claim 10
Dependent Claim
15 words
The device of claim 5 wherein said first and second contacts have substantially identical shapes.
Claim 11
Dependent Claim
15 words
The device of claim 5 wherein said first and second contacts have substantially identical sizes.
Claim 12
Dependent Claim
13 words
The device recited in claim 5 wherein said insulating layer is substantially annular.
Claim 13
Dependent Claim
25 words
The device recited in claim 5 wherein said insulating flexible layer has a substantially annular resilient sealing surface extending radially inwardly from said first contact.
Claim 14
Dependent Claim
26 words
The device recited in claim 5 wherein a combined thickness of said first electrically conductive continuous contact and said insulating flexible layer is approximately 0.12 mm.
Claim 15
Dependent Claim
100 words
A cathode contact device to contact a working piece, said cathode contact device comprising: at least one electrically conductive tab having a first portion, with a first end to couple to an electrical current supply, and a second portion, integral with said first portion, said second portion having a second end, opposite from said first end, to frictionally contact said electrical conductive contact of the target surface, said first and second portions have respectively, first and second widths, said first width being greater than the second width, a shoulder is formed at the junction of said first and second portions.
Claim 16
Dependent Claim
100 words
A cathode contact device to contact a working piece, said cathode contact device comprising: at least one electrically conductive tab having a first portion, with a first end to couple to an electrical current supply, and a second portion, integral with said first portion, said second portion having a second end, opposite from said first end, to frictionally contact said electrical conductive contact of the target surface, said first and second portions have respectively, first and second widths, said first width being greater than the second width, a shoulder is formed at the junction of said first and second portions.
Claim 17
Dependent Claim
49 words
The device of claim 13 wherein said shoulder is adapted to engage with a cup supporting said tab, whereby upon frictional engagement between said shoulder and a side of said cup, said second end of the tab is substantially aligned with said electrically conductive contact of said target surface.
Claim 18
Dependent Claim
49 words
The device of claim 13 wherein said circuit for coupling said flexible electrically conductive continuous contact to said electric current supply includes a second flexible clad laminate having a flexible electrically conductive layer integral with said contact and sealably bonded between a first and a second flexible insulating layers.
Claim 19
Dependent Claim
70 words
A cathode device to contact a working piece, said cathode device comprising; a substantially annular first electrically conductive continuous contact to frictionally contact a second electrically continuous contact, of said working piece, along a continuous path located on said second contact, said first contact further having an inner periphery defining an aperture; and at least one electrically conductive arm integral with said first contact and extending from said first contact.
Claim 20
Dependent Claim
70 words
A cathode device to contact a working piece, said cathode device comprising; a substantially annular first electrically conductive continuous contact to frictionally contact a second electrically continuous contact, of said working piece, along a continuous path located on said second contact, said first contact further having an inner periphery defining an aperture; and at least one electrically conductive arm integral with said first contact and extending from said first contact.
Claim 21
Dependent Claim
94 words
A cathode contact device to contact a working piece, said cathode device comprising; a substantially annular first clad laminate having a first electrically conductive continuous contact to frictionally contact a second electrically conductive continuous contact, of said working piece, along a continuous path located on said second contact, said first clad laminate further having an inner periphery defining an aperture said first clad laminate having an insulating layer bonded to said first electrically conductive continuous contact; and at least one electrically conductive arm integral with said first contact and extending from said first contact.
Claim 22
Dependent Claim
94 words
A cathode contact device to contact a working piece, said cathode device comprising; a substantially annular first clad laminate having a first electrically conductive continuous contact to frictionally contact a second electrically conductive continuous contact, of said working piece, along a continuous path located on said second contact, said first clad laminate further having an inner periphery defining an aperture said first clad laminate having an insulating layer bonded to said first electrically conductive continuous contact; and at least one electrically conductive arm integral with said first contact and extending from said first contact.
Claim 23
Dependent Claim
98 words
A cathode contact device to contact a working piece, said cathode device comprising: a first clad laminate having a first electrically conductive continuous contact to frictionally contact a second electrically conductive continuous contact, of said working piece, along a continuous path located on said second contact, said first clad laminate further having an inner periphery defining an aperture, said first clad laminate having an insulating layer, bonded to said first electrically conductive continuous contact, said insulating layer having a resilient sealing surface extending radially inwardly from said first contact configured to sealably contact a portion of said wafer.
Claim 24
Dependent Claim
98 words
A cathode contact device to contact a working piece, said cathode device comprising: a first clad laminate having a first electrically conductive continuous contact to frictionally contact a second electrically conductive continuous contact, of said working piece, along a continuous path located on said second contact, said first clad laminate further having an inner periphery defining an aperture, said first clad laminate having an insulating layer, bonded to said first electrically conductive continuous contact, said insulating layer having a resilient sealing surface extending radially inwardly from said first contact configured to sealably contact a portion of said wafer.
Claim 25
Dependent Claim
14 words
The device recited in claim 18 wherein said resilient sealing surface is substantially annular.
Claim 26
Dependent Claim
15 words
The device of claim 18 wherein said portion of said wafer includes a dielectric material.
Claim 27
Dependent Claim
11 words
The device of claim 18 wherein said dielectric material includes photoresist.
References Cited (Backward Citations)
US4500394A
Cited
US5516416A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-02-15 | 2002-08-17 | 2003-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-02-15 | 2006-08-17 | 2007-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-02-15 | 2010-08-17 | 2011-02-16 | $7700.00 | Window Closed / Lapsed |