Patent US5869395A successfully refreshed from Google Patents.
US5869395A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Simplified hole interconnect process
Assignee: Bell Semiconductor LLC
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Filing: 1997-01-22
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Granted: 1999-02-09
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Expires: 2017-01-22
Abstract
Abstract The subject invention is directed to a method for producing semiconductor wafers using a simplified hole interconnect process. These wafers include at least one interconnect layer located on a contact or via layer. As contrasted with the semiconductor wafers produced according to the prior art method described above, the contact or via layer of this invention includes a plurality of patterned openings formed therein which are in substantial alignment without offset with each other.
Inventors
- 👤 Randy M. Yim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 16:02
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/73; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/084; H10W20/088; H10W20/0882; H10W20/40; H10W20/41; H10W20/425; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
324 words
A method for producing semiconductor wafers including having at least one interconnect layer located on a contact or via layer, the contact or layer having a plurality of patterned openings formed which are in substantial alignment without offset with each other, comprising the steps of: (a) providing a silicon wafer substrate, a light source for transmitting a specific amount and wavelength of U.V. light in a selected pattern onto a resist material, and a work space within which said silicon wafer substrate is located during said selected light patterning step; (b) forming said contact or via layer on said silicon wafer substrate; (c) introducing said silicon wafer substrate having said contact or via layer and said contact layer formed thereon into said workspace; (d) forming a masking layer consisting essentially of a single layer of a multi-functional masking material on an outer surface of said contact or via layer, said masking material having a plurality of develop rates each of which is directly dependent upon the amount and wavelength of patterned light being transmitted to the resist material by the U.V. light source; (e) forming within said work space, without removing said semiconductor wafer therefrom, a set of openings in selected masking patterns at a plurality of resist thicknesses at selected locations in said masking layer by transmitting amounts of light in selected light wavelengths from light source in said selected light pattern to said selected locations which develops said resist in selected resist patterns at various develop rates; (f) etching said contact or via layer in said selected resist patterns at the set of said selected opening locations to form a plurality of patterned openings at a plurality of resist thicknesses which are in substantial alignment without offset with each other; (g) removing said masking layer; and (h) forming said interconnect layer on said contact or via layers within said selected opening locations which are in substantial alignment without offset with each other.
Claim 2
Independent Claim
324 words
A method for producing semiconductor wafers including having at least one interconnect layer located on a contact or via layer, the contact or layer having a plurality of patterned openings formed which are in substantial alignment without offset with each other, comprising the steps of: (a) providing a silicon wafer substrate, a light source for transmitting a specific amount and wavelength of U.V. light in a selected pattern onto a resist material, and a work space within which said silicon wafer substrate is located during said selected light patterning step; (b) forming said contact or via layer on said silicon wafer substrate; (c) introducing said silicon wafer substrate having said contact or via layer and said contact layer formed thereon into said workspace; (d) forming a masking layer consisting essentially of a single layer of a multi-functional masking material on an outer surface of said contact or via layer, said masking material having a plurality of develop rates each of which is directly dependent upon the amount and wavelength of patterned light being transmitted to the resist material by the U.V. light source; (e) forming within said work space, without removing said semiconductor wafer therefrom, a set of openings in selected masking patterns at a plurality of resist thicknesses at selected locations in said masking layer by transmitting amounts of light in selected light wavelengths from light source in said selected light pattern to said selected locations which develops said resist in selected resist patterns at various develop rates; (f) etching said contact or via layer in said selected resist patterns at the set of said selected opening locations to form a plurality of patterned openings at a plurality of resist thicknesses which are in substantial alignment without offset with each other; (g) removing said masking layer; and (h) forming said interconnect layer on said contact or via layers within said selected opening locations which are in substantial alignment without offset with each other.
Claim 3
Dependent Claim
15 words
The method of claim 1, wherein the multi-functional masking material comprises a DUV photoresist material.
Claim 4
Dependent Claim
19 words
The method of claim 2, wherein the DUV photoresist material comprises a positive or negative tone DUV photoresist material.
Claim 5
Dependent Claim
28 words
The method of claim 1, wherein the contact or via layer comprises a insulating or dielectric layer and said interconnect layer comprises a metallic or metallic composite layer.
Claim 6
Dependent Claim
80 words
The method of claim 1, wherein the step of forming a plurality of openings in selected masking patterns at selected locations in said masking material in said work space comprises the steps of exposing said masking layer to a first masking pattern for forming openings in said contact or via layer in the masking layer, and then exposing said masking layer to a second masking pattern for forming said openings in said contact or via layer in the masking layer.
Claim 7
Dependent Claim
34 words
The method of claim 5, wherein the second masking pattern is designed for forming openings in said contact or via layer which are at a depth less than the thickness of said masking layer.
Claim 8
Dependent Claim
68 words
The method of claim 1, wherein said selected masking pattern comprises completely open contacts or vias in said photoresist layer at a depth less than the thickness of the resist thickness over the area where interconnect lines will be subsequently formed and at a depth over the area where no interconnect lines will be subsequently formed which is more than the depth of the open contacts or vias.
Claim 9
Dependent Claim
47 words
The method of claim 1, which further includes the step of varying the % transmission of the transmission chrome of the photomask which varies the U.V. light being transmitted through said photomask and thereby directly varies the depth of the photoresist pattern created in said photoresist layer.
Claim 10
Dependent Claim
21 words
The method of claim 1, wherein said work space is located within a stepper or scanner or a step-and-repeat projection system.
Claim 11
Dependent Claim
95 words
The method of claim 8, wherein the step of forming said set of openings in selected masking patterns at selected locations in said masking layer comprises transmitting a first amount of light in a selected light wavelength from a light source through a first reticle in a first selected light pattern to said selected location site, then, without removing said semiconductor wafer from said work space, transmitting a second amount of light in a selected light wavelength from said light source through a second reticle in a second selected light pattern to selected location sites.
Claim 12
Independent Claim
341 words
A method for using an image projection system for photomask formation for producing semiconductor wafers including having at least one interconnect layer located on a contact or via layer, said contact or layer having a plurality of patterned openings formed which are in substantial alignment without offset with each other, comprising the steps of: (a) providing a silicon wafer substrate, a light source for transmitting a specific amount and wavelength of U.V. light in a selected pattern onto a resist material, and said image projection system for photomask formation defining a work space within which said silicon wafer substrate is located during said selected light patterning step; (b) forming said contact or via layer on said silicon wafer substrate; (c) introducing said silicon wafer substrate having said contact or via layer and said contact layer formed thereon into said workspace; (d) forming a masking layer consisting essentially of a single layer of a multi-functional masking material on an outer surface of said contact or via layer, said masking material having a plurality of develop rates each of which is directly dependent upon the amount and wavelength of patterned light being transmitted to the resist material by the U.V. light source; (e) forming within said work space, without removing said semiconductor wafer therefrom, a set of openings in selected masking patterns at a plurality of resist thicknesses at selected locations in said masking layer by transmitting amounts of light in selected light wavelengths from light source in said selected light pattern to said selected locations which develops said resist in selected resist patterns at various develop rates; (f) etching said contact or via layer in said selected resist patterns at the set of said selected opening locations to form a plurality of patterned openings at a plurality of resist thicknesses which are in substantial alignment without offset with each other; (g) removing said masking layer; and (h) forming said interconnect layer on said contact or via layers within said selected opening locations which are in substantial alignment without offset with each other.
Claim 13
Independent Claim
341 words
A method for using an image projection system for photomask formation for producing semiconductor wafers including having at least one interconnect layer located on a contact or via layer, said contact or layer having a plurality of patterned openings formed which are in substantial alignment without offset with each other, comprising the steps of: (a) providing a silicon wafer substrate, a light source for transmitting a specific amount and wavelength of U.V. light in a selected pattern onto a resist material, and said image projection system for photomask formation defining a work space within which said silicon wafer substrate is located during said selected light patterning step; (b) forming said contact or via layer on said silicon wafer substrate; (c) introducing said silicon wafer substrate having said contact or via layer and said contact layer formed thereon into said workspace; (d) forming a masking layer consisting essentially of a single layer of a multi-functional masking material on an outer surface of said contact or via layer, said masking material having a plurality of develop rates each of which is directly dependent upon the amount and wavelength of patterned light being transmitted to the resist material by the U.V. light source; (e) forming within said work space, without removing said semiconductor wafer therefrom, a set of openings in selected masking patterns at a plurality of resist thicknesses at selected locations in said masking layer by transmitting amounts of light in selected light wavelengths from light source in said selected light pattern to said selected locations which develops said resist in selected resist patterns at various develop rates; (f) etching said contact or via layer in said selected resist patterns at the set of said selected opening locations to form a plurality of patterned openings at a plurality of resist thicknesses which are in substantial alignment without offset with each other; (g) removing said masking layer; and (h) forming said interconnect layer on said contact or via layers within said selected opening locations which are in substantial alignment without offset with each other.
Claim 14
Dependent Claim
15 words
The method of claim 11, wherein the multi-functional masking material comprises a DUV photoresist material.
Claim 15
Dependent Claim
19 words
The method of claim 12, wherein the DUV photoresist material comprises a positive or negative tone DUV photoresist material.
Claim 16
Dependent Claim
28 words
The method of claim 11, wherein the contact or via layer comprises a insulating or dielectric layer and said interconnect layer comprises a metallic or metallic composite layer.
Claim 17
Dependent Claim
80 words
The method of claim 11, wherein the step of forming a plurality of openings in selected masking patterns at selected locations in said masking material in said work space comprises the steps of exposing said masking layer to a first masking pattern for forming openings in said contact or via layer in the masking layer, and then exposing said masking layer to a second masking pattern for forming said openings in said contact or via layer in the masking layer.
Claim 18
Dependent Claim
34 words
The method of claim 15, wherein the second masking pattern is designed for forming openings in said contact or via layer which are at a depth less than the thickness of said masking layer.
Claim 19
Dependent Claim
68 words
The method of claim 11, wherein said selected masking pattern comprises completely open contacts or vias in said photoresist layer at a depth less than the thickness of the resist thickness over the area where interconnect lines will be subsequently formed and at a depth over the area where no interconnect lines will be subsequently formed which is more than the depth of the open contacts or vias.
Claim 20
Dependent Claim
47 words
The method of claim 11, which further includes the step of varying the % transmission of the transmission chrome of the photomask which varies the U.V. light being transmitted through said photomask and thereby directly varies the depth of the photoresist pattern created in said photoresist layer.
Claim 21
Dependent Claim
21 words
The method of claim 11, wherein said work space is located within a stepper or scanner or a step-and-repeat projection system.
Claim 22
Dependent Claim
95 words
The method of claim 18, wherein the step of forming said set of openings in selected masking patterns at selected locations in said masking layer comprises transmitting a first amount of light in a selected light wavelength from a light source through a first reticle in a first selected light pattern to said selected location site, then, without removing said semiconductor wafer from said work space, transmitting a second amount of light in a selected light wavelength from said light source through a second reticle in a second selected light pattern to selected location sites.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-02-08 | 2002-08-10 | 2003-02-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-02-08 | 2006-08-10 | 2007-02-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-02-08 | 2010-08-10 | 2011-02-09 | $7700.00 | Window Closed / Lapsed |